CN218350119U

CN218350119U - Device for detecting edge condition of silicon wafer

Info

Publication number: CN218350119U
Application number: CN202221770131.4U
Authority: CN
Inventors: 周峰; 梁兴勃; 潘建平; 张海英; 沈海潮
Original assignee: ZHEJIANG JINRUIHONG TECHNOLOGY CO LTD
Current assignee: ZHEJIANG JINRUIHONG TECHNOLOGY CO LTD
Priority date: 2022-07-11
Filing date: 2022-07-11
Publication date: 2023-01-20
Anticipated expiration: 2032-07-11

Abstract

The utility model relates to a detect device of silicon chip edge situation, which comprises a platform, the both sides of platform upper end rotate respectively and install hand wheel and vacuum chuck, hand wheel and vacuum chuck between the transmission be connected, vacuum chuck rotate along with the rotation of hand wheel, the platform upper end be located the place ahead of vacuum chuck and vertically install a lift cylinder, install the centering piece on the piston rod of this lift cylinder, the rear end to the centering piece be equipped with the ring board, this ring board cover is outside vacuum chuck, the rear end of ring board seted up the breach, ring board top be provided with the electron magnifying glass. The utility model solves the problems of easy fatigue of eye examination, low efficiency and the like, can more conveniently and quickly display the condition of the edge of the silicon wafer, and provides an all-round visual effect; the silicon chip can be well displayed and photo storage is provided.

Description

Device for detecting edge condition of silicon wafer

Technical Field

The utility model relates to a silicon chip detects technical field, especially relates to a detect device of silicon chip edge situation.

Background

At present, most of the detection of the silicon chip utilizes visual inspection or a hand-held 10-time magnifier to detect the edge condition of the silicon chip, and the defects are insufficient magnification, poor definition and easy visual fatigue; not applicable to the detection of a large number of silicon wafers and not beneficial to preservation.

Disclosure of Invention

The technical problem to be solved by the utility model is to provide a device for detecting the edge condition of a silicon wafer, which solves the problems of easy fatigue of human eye examination, low efficiency and the like, can more conveniently and quickly display the condition of the edge of the silicon wafer, and provides an all-round visual effect; the silicon chip can be well displayed and photo storage is provided.

The utility model provides a technical scheme that its technical problem adopted is: the utility model provides a detect device of silicon chip border situation, includes the platform, the both sides of platform upper end rotate respectively and install hand wheel and vacuum chuck, hand wheel and vacuum chuck between the transmission be connected, vacuum chuck rotate along with the rotation of hand wheel, platform upper end be located the vertical lift cylinder of installing in the place ahead of vacuum chuck, install the centering piece on the piston rod of this lift cylinder, the rear end to the centering piece be equipped with the ring board, this ring board cover is outside vacuum chuck, the rear end of ring board seted up the breach, ring board top be provided with the electron magnifying glass.

As right technical scheme a supplementary, the both sides of platform upper end respectively install a rotation support, every rotation support upper end all rotates and installs a belt pulley, the hand wheel is installed to one of them belt pulley upper end, vacuum chuck is installed to another belt pulley upper end, installs the hold-in range between two belt pulleys.

As right technical scheme a supplement, the hand wheel be discoid, the lateral wall of this hand wheel has arranged the friction line.

As right technical scheme a supplement, the piston rod upper end of lift cylinder install the fixed plate, the centering block install on the fixed plate and fixed through the fastener.

As right technical scheme a supplement, the platform upper end vertically install a stand, this stand upper portion is fixed with the vertical electron magnifying glass who arranges.

As right the technical scheme of the utility model a supplement, still include the computer, the electron magnifying glass pass through the electric wire and link to each other with the computer.

As a supplement to the technical solution of the present invention, the ring plate is provided with at least one silicon wafer outline mark.

Has the beneficial effects that: the utility model relates to a detect device of silicon chip edge situation, through centering block location silicon chip, hold the silicon chip with vacuum chuck, then rotate the hand wheel and make the silicon chip rotatory, convey computer screen with silicon chip edge image through the electron magnifying glass to reach and browse effects such as files of shooing. The utility model solves the problems of easy fatigue of eye examination, low efficiency and the like, can more conveniently and rapidly display the condition of the edge of the silicon wafer, and provides an all-round visual effect; the silicon chip can be well displayed and photo storage is provided.

Drawings

Fig. 1 is a schematic structural diagram of the present invention;

fig. 2 is a schematic structural view of the lifting cylinder and the centering block of the present invention.

The figure is as follows: 1. the device comprises a platform, 2, a centering block, 3, a rotating support, 4, a lifting cylinder, 5, a synchronous belt, 6, a belt pulley, 7, a hand wheel, 8, an electronic magnifier, 9, a vacuum chuck, 10, a silicon wafer, 11, an electric wire, 12, a stand column, 13, friction lines, 14, a fixing plate, 15, a circular ring plate, 16, silicon wafer contour marks, 17, notches, 18 and fasteners.

Detailed Description

The present invention will be further described with reference to the following specific examples. It should be understood that these examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Furthermore, it should be understood that various changes and modifications of the present invention may be made by those skilled in the art after reading the teachings of the present invention, and these equivalents also fall within the scope of the appended claims.

The embodiment of the utility model relates to a device for detecting silicon wafer edge condition, as shown in figure 1-2, including platform 1, both sides of the upper end of platform 1 rotate respectively and install hand wheel 7 and vacuum chuck 9, hand wheel 7 and vacuum chuck 9 between the transmission be connected, vacuum chuck 9 rotate along with the rotation of hand wheel 7, platform 1 upper end be located the vertical lift cylinder 4 of installing in the place ahead of vacuum chuck 9, install centering block 2 on the piston rod of this lift cylinder 4, the rear end of centering block 2 be equipped with ring board 15, this ring board 15 cover outside vacuum chuck 9, the rear end of ring board 15 seted up breach 17, ring board 15 top be provided with electron magnifying glass 8; the platform 1 is also provided with an operating button, and the operating button is used for the lifting cylinder 4 to act.

Two sides of the upper end of the platform 1 are respectively provided with a rotating support 3, the upper end of each rotating support 3 is rotatably provided with a belt pulley 6, the upper end of one belt pulley 6 is provided with a hand wheel 7, the upper end of the other belt pulley 6 is provided with a vacuum chuck 9, and a synchronous belt 5 is arranged between the two belt pulleys 6; the transmission connection between the hand wheel 7 and the vacuum sucker 9 is realized through the matching of the belt pulley 6 and the synchronous belt 5.

The hand wheel 7 is disc-shaped, and the outer side wall of the hand wheel 7 is provided with friction grains 13; friction lines 13 are arranged to avoid slipping when the hand wheel 7 rotates.

The upper end of a piston rod of the lifting cylinder 4 is provided with a fixed plate 14, and the centering block 2 is arranged on the fixed plate 14 and fixed through a fastener 18; the fasteners 18 are bolts.

An upright post 12 is vertically arranged at the upper end of the platform 1, and an electronic magnifier 8 which is vertically arranged is fixed at the upper part of the upright post 12.

The electronic magnifier 8 is connected with the computer through a wire 11, the computer is connected with an external power supply, and the external power supply respectively supplies power to the computer and the electronic magnifier 8.

At least one silicon wafer outline mark 16 is arranged on the circular ring plate 15, and the number of the silicon wafer outline marks 16 can be increased according to the requirement.

The device is suitable for detecting silicon wafers with various specifications, and the electronic magnifier 8 is connected with a computer through an electric wire 11 to display graphs.

Power demand: the external power supply adopts a 24V power supply, the CDA is used for driving the external power supply, and the VAC is used for absorbing products by the vacuum chuck 9.

The specific operation process is as follows:

1. placing the silicon wafers 10 to be tested on the circular ring plate 15 of the centering block 2, wherein the silicon wafers 10 are two, one is 5 inches, the other is 6 inches, the 6 inches silicon wafer 10 is aligned with the outer contour of the circular ring plate 15, the 6 inches silicon wafer 10 is in place, the 5 inches silicon wafer 10 is aligned with the silicon wafer contour mark 16, the 5 inches silicon wafer 10 is in place, and if the silicon wafers with other sizes need to be detected, the centering block 2 is replaced;

2. after the silicon wafer 10 is positioned, an operating button is pressed, the lifting cylinder 4 controls the centering block 2 to descend, the silicon wafer 10 is in contact with the vacuum chuck 9, and the vacuum chuck 9 is vacuumized, so that the silicon wafer 10 is sucked by the vacuum chuck 9;

3. opening computer software, adjusting the focal length of the electronic magnifier 8, and clearly displaying the graph at the edge of the silicon wafer 10 on a computer screen;

4. the hand wheel 7 is manually rotated to enable the silicon chip 10 to rotate slowly to browse the screen picture of the computer, the electronic magnifier 8 measures and records the silicon chip 10, and the switch can be pressed to store the image when the image of a certain part is captured as required.

5. The operating button is released, the vacuum chuck 9 is closed, and the centering block 2 rises to catch the silicon wafer 10.

In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the orientation words such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" etc. are usually based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of description, and in the case of not making a contrary explanation, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore, should not be interpreted as limiting the scope of the present invention; the terms "inner and outer" refer to the inner and outer relative to the profile of the respective component itself.

For ease of description, spatially relative terms such as "over 8230 \ 8230;,"' over 8230;, \8230; upper surface "," above ", etc. may be used herein to describe the spatial relationship of one device or feature to another device or feature as shown in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary terms "at 8230; \8230; 'above" may include both orientations "at 8230; \8230;' above 8230; 'at 8230;' below 8230;" above ". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

It should be noted that the terms "first", "second", and the like are used to define the components, and are only used for convenience of distinguishing the corresponding components, and if not stated otherwise, the terms have no special meaning, and therefore, the scope of the present invention should not be construed as being limited.

The above detailed description is provided for the apparatus for detecting edge condition of silicon wafer provided in the present application, and specific examples are applied herein to explain the principles and embodiments of the present application, and the above description of the embodiments is only used to help understanding the method and the core idea of the present application; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

Claims

1. An apparatus for detecting the edge condition of a silicon wafer, comprising a platform (1), characterized in that: platform (1) upper end both sides rotate respectively and install hand wheel (7) and vacuum chuck (9), hand wheel (7) and vacuum chuck (9) between the transmission be connected, vacuum chuck (9) rotate along with the rotation of hand wheel (7), platform (1) upper end be located the place ahead vertical installation of vacuum chuck (9) and install a lift cylinder (4), install centering block (2) on the piston rod of this lift cylinder (4), the rear end of centering block (2) be equipped with ring board (15), this ring board (15) cover is outside vacuum chuck (9), the rear end of ring board (15) seted up breach (17), ring board (15) top be provided with electron magnifying glass (8).

2. The apparatus of claim 1, wherein: platform (1) both sides of upper end respectively install one and rotate support (3), every rotates support (3) upper end and all rotates and install a belt pulley (6), hand wheel (7) are installed to one of them belt pulley (6) upper end, vacuum chuck (9) are installed to another belt pulley (6) upper end, install hold-in range (5) between two belt pulleys (6).

3. The apparatus of claim 2, wherein: the hand wheel (7) is disc-shaped, and friction grains (13) are arranged on the outer side wall of the hand wheel (7).

4. The apparatus of claim 1, wherein: the upper end of a piston rod of the lifting cylinder (4) is provided with a fixing plate (14), and the centering block (2) is arranged on the fixing plate (14) and fixed through a fastening piece (18).

5. The apparatus of claim 1, wherein: an upright post (12) is vertically installed at the upper end of the platform (1), and a vertically arranged electronic magnifier (8) is fixed at the upper part of the upright post (12).

6. The apparatus of claim 1, wherein: the electronic magnifier further comprises a computer, and the electronic magnifier (8) is connected with the computer through a wire (11).

7. The apparatus of claim 1, wherein: and at least one silicon wafer outline mark (16) is arranged on the circular ring plate (15).