CN218319775U - Film cutting device for semiconductor wafer film - Google Patents

Film cutting device for semiconductor wafer film Download PDF

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Publication number
CN218319775U
CN218319775U CN202221006721.XU CN202221006721U CN218319775U CN 218319775 U CN218319775 U CN 218319775U CN 202221006721 U CN202221006721 U CN 202221006721U CN 218319775 U CN218319775 U CN 218319775U
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China
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roller
film cutting
pressure
film
pressure feed
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CN202221006721.XU
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Chinese (zh)
Inventor
赵裕兴
王乾宝
高峰
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Suzhou Delphi Laser Co Ltd
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Suzhou Delphi Laser Co Ltd
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Abstract

The utility model relates to a film cutting device for semiconductor wafer tectorial membrane, including film cutting mechanism support, pressure feed principal and subordinate roller subassembly, first turn to roller subassembly, film cutting from roller subassembly, film cutting main roller subassembly, second turn to roller subassembly, unsteady roller subassembly, blowing roller subassembly, third turn to roller subassembly, fourth turn to roller subassembly, pressure feed main roller subassembly and pressure feed from roller subassembly. The utility model discloses a set up multistage multichannel membrane roller assembly, transmit the wafer membrane, can effectively guarantee the stability of membrane transmission.

Description

Film cutting device for semiconductor wafer film
Technical Field
The utility model relates to a semiconductor wafer processing correlation technique field especially relates to a cut membrane device for semiconductor wafer tectorial membrane.
Background
The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. Various circuit element structures can be manufactured on the wafer, and the circuit surface of the wafer, i.e. the surface which completes the chip function, is generally called as the front surface, and the other surface is the back surface. In a wafer processing process, a dicing process is usually performed, and before dicing the wafer, a thin film, i.e., a dicing film, is usually attached to the back surface of the wafer in order to protect the wafer during dicing. In the traditional cutting process, a roll of film material needs to be manually spread out, and the film is cut by holding a blade by hands or utilizing a mechanical arm.
However, in the above-mentioned film cutting process, the operator often cuts the film improperly due to the difference of the force applied by the operator. And the manual membrane cutting efficiency is very low, and the automation can not be realized.
In view of the above-mentioned drawbacks, the present inventors have made active research and innovation to create a film cutting device for semiconductor wafer film coating, which has industrial application value.
SUMMERY OF THE UTILITY MODEL
In order to solve the above technical problem, an object of the present invention is to provide a film cutting device for semiconductor wafer film coating.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
the film cutting device for the film covering of the semiconductor wafer comprises a film cutting mechanism bracket, a pressure feeding main-slave roller assembly, a first turning roller assembly, a film cutting slave roller assembly, a film cutting main roller assembly, a second turning roller assembly, a floating roller assembly, a discharging roller assembly, a third turning roller assembly, a fourth turning roller assembly, a pressure feeding main roller assembly and a pressure feeding slave roller assembly;
the film cutting mechanism support comprises a film cutting support bottom plate, a film cutting support side plate, a rack, a film cutting support motor side plate and an aluminum profile rack, the aluminum profile rack is mounted on the rack, the film cutting support side plate and the film cutting support motor side plate are connected together through a film cutting support connecting rod and then mounted on the film cutting support bottom plate through a film cutting support fixing block, and the film cutting support bottom plate is mounted on the rack on the inner side of the aluminum profile rack;
the bottom of one side of the aluminum profile frame along the X-axis negative direction is provided with a third turning roller assembly, the middle position of the aluminum profile frame right above the third turning roller assembly, which is close to the third turning roller assembly, is provided with a fourth turning roller assembly, the side plate of the film cutting bracket motor, which is one side of the fourth turning roller assembly along the X-axis positive direction, is provided with a discharging roller assembly, a floating roller assembly is arranged between the side plate of the film cutting bracket motor and the side plate of the film cutting bracket along the X-axis positive direction, which is close to the bottom position, and two groups of second turning roller assemblies are arranged between the side plate of the film cutting bracket and the side plate of the film cutting bracket motor, which are above the floating roller assembly, a pressure feed main roller assembly and a pressure feed slave roller assembly are arranged between the film cutting bracket side plate and the film cutting bracket motor side plate on one side of the second turning roller assembly along the negative direction of the X axis, a film cutting slave roller assembly and a film cutting main roller assembly are arranged between the film cutting bracket side plate and the film cutting bracket motor side plate above the pressure feed main roller assembly and the pressure feed slave roller assembly, a single amplifier is arranged on the film cutting bracket side plate below the film cutting slave roller assembly, a pressure feed master-slave roller assembly is arranged between the film cutting bracket side plate and the film cutting bracket motor side plate above the film cutting slave roller assembly and the film cutting main roller assembly, and a first turning roller assembly is arranged on one side of the pressure feed master-slave roller assembly along the positive direction of the X axis.
As a further improvement of the present invention, the pressure feed master-slave roller assembly comprises a first pressure feed master roller servo motor, a first pressure feed master roller speed reducer, a second pressure feed roller sliding plate, a first pressure feed master roller rubber covered roller, a pressure feed slave roller cylinder, a first pressure feed roller sliding plate, a pressure feed roller cylinder and a first pressure feed slave roller shaft; the top of the inner sides of a film cutting support side plate and a film cutting support motor side plate are respectively provided with a pressure roller guide rail along the X-axis direction, a second pressure roller sliding plate and a first pressure roller sliding plate are respectively connected with the pressure roller guide rail through pressure roller sliding blocks, a first pressure feed main roller rubber covered roll is positioned on one side of a pressure feed slave roll roller along the X-axis positive direction, a first pressure feed main roller servo motor and a first pressure feed main roller speed reducer are connected with the first pressure feed main roller rubber covered roll through a pressure feed main roller motor supporting plate and a pressure feed main roller motor supporting rod, the first pressure feed main roller servo motor and the first pressure feed main roller speed reducer are connected with the first pressure feed main roller rubber covered roll through a pressure feed main roller coupler, the pressure feed slave roll roller is connected with a second pressure roller sliding plate on one side of the X-axis negative direction and the inner side of the first pressure roller sliding plate along the X-axis direction, the driving end of the pressure roller cylinder is connected with a pressure feed roller transfer block along the X-axis direction, the first pressure feed main roller connecting rod is connected with the pressure feed roller through a pressure feed roller connecting rod, and a pressure feed roller connecting rod is arranged between the pressure feed roller and the pressure feed roller; and the top parts of the second pressure roller sliding plate and the first pressure roller sliding plate along the negative direction of the X axis are both provided with pressure roller fixing blocks, the pressure roller fixing blocks are provided with plunger knobs, and the film cutting support side plate and the film cutting support motor side plate below the plunger knobs are both provided with pressure roller chocks matched with the plunger knobs.
As a further improvement of the present invention, the first turning roll assembly or the second turning roll assembly comprises a first turning roll shaft and a first turning roll cylinder, the first turning roll cylinder is connected with the first turning roll shaft inside through a first turning roll bearing, the first turning roll shaft outside the first turning roll bearing is provided with a first turning roll fixing ring, both sides of the first turning roll shaft of the first turning roll assembly along the Y-axis direction are respectively connected with a second pressure roll sliding plate and a first pressure roll sliding plate through a first turning roll flange, both sides of the first turning roll shaft of the second turning roll assembly along the Y-axis direction are respectively connected with a film cutting support side plate and a film cutting support motor side plate through a first turning roll flange; and the first steering roll roller is provided with film limiting assemblies along the two sides of the Y-axis direction.
As a further improvement of the utility model, the film cutting slave roller component and the film cutting master roller component are sequentially arranged along the positive direction of the X axis, and the film cutting master roller component and the film cutting slave roller component are arranged in a driving connection way;
the film cutting main roller assembly comprises a film cutting main roller servo motor, a film cutting main roller reducer and a film cutting main roller shaft, the film cutting main roller servo motor and the film cutting main roller reducer are installed on a film cutting support motor side plate through a film cutting main roller first motor plate and a film cutting main roller second motor plate, a film cutting main roller motor cover plate is further arranged between the film cutting main roller first motor plate and the film cutting main roller second motor plate, the film cutting main roller servo motor and the film cutting main roller reducer are connected with the film cutting main roller shaft through a film cutting main roller coupler, a film cutting main roller straight gear is arranged on one side of the film cutting main roller coupler along the positive direction of the Y axis, one side of the film cutting main roller coupler along the positive direction of the Y axis is installed on a film cutting side plate through a film cutting main roller second flange and a film cutting main roller flange cover, the film cutting main roller coupler is also installed on one side of the film cutting support motor side plate along the positive direction of the Y axis through a film cutting main roller first flange and a film cutting main roller flange cover, and a main roller locking hand wheel is arranged on one side of the film cutting main roller coupler along the direction of the Y axis, and a main roller locking hand wheel is connected with a film cutting main roller locking washer; a film cutting main roller spacing ring is arranged on a film cutting main roller shaft between the film cutting main roller coupling and the film cutting main roller spur gear, a film cutting main roller fourth bearing and a film cutting main roller bearing sealing ring are arranged between one side of the film cutting main roller coupling along the positive direction of the Y axis and the film cutting main roller flange cover, and a film cutting main roller second bearing, a film cutting main roller third bearing and a film cutting main roller first bearing are arranged between one side of the film cutting main roller coupling along the negative direction of the Y axis and the film cutting main roller flange cover;
the film cutting slave roller assembly comprises a film cutting slave roller spur gear, a film cutting slave roller first bearing seat, a film cutting slave roller second bearing seat, a magnetic film cutting roller and a film cutting blade, the film cutting slave roller spur gear is meshed with the film cutting master roller spur gear, a first head of the film cutting roller and a second head of the film cutting roller are respectively arranged on two sides of the magnetic film cutting roller along the Y-axis direction, the film cutting blade is adsorbed on the outer side of the magnetic film cutting roller, the first head of the film cutting roller is connected with a first bearing seat of the film cutting slave roller through a first bearing of the film cutting slave roller, the first head of the film cutting roller is connected with a spur gear of the film cutting slave roller through a film cutting slave roller key and a film cutting slave roller retainer ring, the second head of the film cutting roller is connected with a second bearing of the film cutting slave roller through a second bearing, the first bearing seat of the film cutting roller and the second bearing seat of the film cutting slave roller are respectively arranged on a motor side plate and a film cutting bracket side plate, the film cutting slave roller straight gear and the film cutting slave roller first head between the roller first bearing seats are provided with a film cutting slave roller sealing ring, the film cutting slave roller shading sheet is further arranged on the film cutting roller second head outside the roller second bearing seats through a shading sheet bearing, the film cutting slave roller shading sheet is further arranged on the film cutting roller second head between the film cutting slave roller shading sheet and the film slave roller bearing seats and is provided with a film cutting slave roller locking nut and a film cutting slave roller tooth locking washer, a film cutting sensor is arranged below the film cutting slave roller shading sheet and is mounted on a film cutting support side plate through a film cutting sensor support, the film cutting slave roller shading sheet is matched with the film cutting sensor, and the film cutting slave roller first bearing seats and the film cutting slave roller bearing seats are further provided with a rectangular spring and a film cutting slave roller oil nozzle.
As a further improvement, the utility model discloses a floating roller subassembly includes the optic fibre mount pad, floating roller guide rail and floating roller, the optic fibre mount pad is installed on surely membrane support curb plate along Z axle direction, top and bottom on the optic fibre mount pad all are provided with photoelectric sensor, all be provided with the floating roller guide rail along the Z axle direction on the inboard surely membrane support curb plate of optic fibre mount pad and the surely membrane support motor curb plate, the floating roller section of thick bamboo is connected with inboard floating roller through floating roller bearing, the floating roller section of thick bamboo passes through the floating roller gag lever post and installs on the response piece mount pad, the response piece mount pad is connected with the floating roller guide rail through the floating roller slider, be close to installing the response piece mount pad of optic fibre mount pad one side and respond to the piece with photoelectric sensor matched with floating roller, be provided with the solid fixed ring of floating roller on the floating roller shaft in the floating roller bearing outside, and still be provided with the spacing subassembly of membrane on the floating roller section of thick bamboo.
As a further improvement of the utility model, it cuts the roller adjusting part still to be provided with the membrane from the roller subassembly along the membrane support curb plate of cutting of X axle negative direction one side and cut between the membrane support motor curb plate to cut the membrane, the membrane is cut roller adjusting part and is included membrane in proper order along X axle positive direction and cut roller roof and membrane cut roller push pedal, the membrane is cut roller roof and is installed on cutting membrane support curb plate and cutting membrane support motor curb plate, membrane is cut roller roof and is provided with the first knob of membrane cutting roller along one side of X axle negative direction, membrane is cut roller second knob and is connected with membrane cutting roller push pedal through membrane cutting roller double-screw bolt behind the first knob of membrane cutting roller through membrane cutting roller, be provided with membrane cutting roller clamp ring on the membrane cutting roller double-screw bolt between membrane cutting roller roof and the membrane cutting roller push pedal, membrane cutting roller push pedal is provided with by membrane cutting roller second bearing extension board along one side of X axle positive direction, the roller mount pad that membrane cutting roller third bearing extension board and membrane cutting roller bearing extension board are constituteed is cut to the membrane, the roller guider passes through membrane cutting roller bearing oil blanket and is installed on the roller mount pad, still install the roller bearing roller.
As a further improvement of the utility model, a discharging roller motor cover component is arranged on a film cutting bracket motor side plate outside the discharging roller component, and the discharging roller component comprises a discharging roller shaft, a first discharging roller synchronous pulley, a discharging roller speed reducer, a discharging roller synchronous belt, a second discharging roller synchronous pulley, a discharging roller drum and a discharging roller servo motor;
the discharging roller servo motor and the discharging roller speed reducer are connected with a discharging roller shaft through a second discharging roller synchronous belt pulley, a discharging roller synchronous belt and a first discharging roller synchronous belt pulley in sequence, a discharging roller is arranged on one side of the discharging roller shaft along the Y-axis negative direction, a discharging roller bearing sleeve is arranged on the discharging roller shaft between the discharging roller and the first discharging roller synchronous belt pulley and connected with the discharging roller shaft through a discharging roller bearing, a discharging roller diaphragm second check ring, a discharging roller first check ring and a discharging roller third check ring are arranged on the discharging roller shaft between the discharging roller bearing sleeve and the discharging roller, a discharging roller first pipe joint is arranged on one side of the discharging roller shaft along the Y-axis positive direction, a discharging roller adapter and a discharging roller clamping cylinder are sequentially arranged in a discharging roller groove along the Y-axis negative direction, a discharging roller second pipe joint is arranged on the discharging roller adapter, a discharging roller miniature pipe joint is arranged on one side of the Y-axis roller shaft along the discharging roller, and a discharging roller shaft collar is fixed on the discharging roller; the feeding roller assembly is provided with optical fiber sensors on the side plates of the film cutting support motor close to the upper side and the lower side, and the optical fiber sensors are installed on the side plates of the film cutting support motor through optical fiber sensor fixing plates.
As a further improvement of the present invention, the third turning roll assembly comprises a third turning roll shaft, a third turning roll roller barrel, a third turning roll support, a third turning roll first support plate, a third turning roll second support plate, the third turning roll first support plate is mounted on the aluminum frame through the third turning roll second support plate, the inner side of the third turning roll roller barrel is connected with the third turning roll shaft through a third turning roll bearing, both sides of the third turning roll shaft along the Y-axis direction are respectively connected with the third turning roll support on the third turning roll first support plate, a third turning roll fixing ring is arranged on the third turning roll shaft outside the third turning roll bearing, and a film spacing assembly is further arranged on the third turning roll roller barrel;
the fourth turns to roller set spare and includes the fourth roll axle that turns to, the fourth turns to the roller support, the fourth turns to the roller, fourth turn to roller bottom sprag board and fourth turn to roller support riser, the fourth turns to roller support riser and passes through the fourth roll bottom sprag board and install on the aluminium alloy frame, the inboard of fourth turn to roller is connected with the fourth roll axle through the fourth roll bearing that turns to, the fourth roll axle is connected with the fourth roll support that turns to on the roller support riser respectively along the ascending both sides of Y axle direction, be provided with the fixed ring of fourth roll on the fourth roll axle in the fourth roll bearing outside, and still be provided with the spacing subassembly of membrane on the fourth roll roller that turns to.
As a further improvement of the utility model, the pressure feed main roller assembly and the pressure feed auxiliary roller assembly are sequentially arranged along the negative direction of an X shaft, the pressure feed main roller assembly comprises a second pressure feed main roller servo motor, a second pressure feed main roller speed reducer and a second pressure feed main roller rubber coating roller, the second pressure feed main roller servo motor and the second pressure feed main roller speed reducer are arranged on a film cutting bracket motor side plate through a pressure feed main roller supporting upright post and a pressure feed main roller motor plate, the second pressure feed main roller servo motor and the second pressure feed main roller speed reducer are arranged on the film cutting bracket motor side plate through a second pressure feed main roller coupler, the second pressure feed main roller rubber coating roller is arranged on the film cutting bracket motor side plate through a pressure feed main roller first flange and a pressure feed main roller bearing along one side of the positive direction of the Y shaft, and the second pressure feed main roller rubber coating roller is arranged on the film cutting bracket through a pressure feed main roller second flange and a pressure feed main roller bearing along one side of the positive direction of the Y shaft;
the pressure-feed driven roller assembly comprises a pressure-feed driven roller cylinder, a second pressure-feed driven roller shaft and a pressure-feed driven roller cylinder, the pressure-feed driven roller cylinder is arranged on the inner sides of a film cutting bracket side plate and a film cutting bracket motor side plate through a driven roller cylinder fixing block, the driving end of the pressure-feed driven roller cylinder is in driving connection with a pressure-feed driven roller switching block on one side along the X-axis negative direction, the second pressure-feed driven roller shaft is arranged on the inner side of the pressure-feed driven roller cylinder, the two sides of the second pressure-feed driven roller shaft along the Y-axis direction are respectively connected with the pressure-feed driven roller switching block, a pressure-feed driven roller connecting rod is connected between the two pressure-feed driven roller switching blocks, and a pressure-feed driven roller fixing ring is arranged between the two sides of the pressure-feed driven roller cylinder along the Y-axis direction and the second pressure-feed driven roller shaft.
As a further improvement, the membrane limiting component comprises a membrane limiting block upper part and a membrane limiting block lower part, the membrane limiting block upper part and the membrane limiting block lower part are connected together through a limiting bolt, and a limiting jackscrew and a limiting nut for positioning are arranged on the membrane limiting block upper part and the membrane limiting block lower part.
Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:
1. the multi-stage multi-channel film roller assembly is arranged to convey the wafer film, so that the stability of film conveying can be effectively ensured;
2. the movable floating roller is arranged to enable the film to be always kept in a tensioned state;
3. the film cutting main roller and the film cutting auxiliary roller can effectively cut the whole rolled film material into a round shape, so that the film material can be conveniently pasted;
4. the film conveying device comprises a conveying roller, a motor-driven main roller and a driven roller without the motor drive, wherein the main roller can provide power to ensure the conveying of the film, and the driven roller provides direction to ensure the conveying of the film according to a preset route;
5. the film cutting adjusting structure can effectively adjust the gap between the film cutting slave roller assembly and the film cutting main roller assembly, so that the cutting depth of the film on the film is adjusted, the main film can be cut off by the blade, the auxiliary film can not be cut, and the film cutting action is finished;
6. a film monitoring sensor is arranged above the discharging roller assembly and can monitor whether the film material on the discharging roller exists or not;
7. the air cylinders are arranged on the pressure-feeding driven roller assembly, the air cylinders are also arranged on the pressure-feeding driven rollers in the pressure-feeding main-driven roller assembly, the air cylinders can adjust the rollers on the pressure-feeding driven roller assembly, can compress the membrane material, effectively conveys the force of the main roller, and can adjust the membrane material after being loosened;
8. through the gear drive that sets up on surely membrane home roll and surely membrane follow roller, can effectively guarantee to cut the membrane home roll and surely membrane from the roller drive synchronous, guarantee that the position that the membrane was cut is unique, does not appear blocking, dislocation scheduling problem.
The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic view of the first side of the present invention;
FIG. 2 is a schematic structural view of a second side of the present invention;
fig. 3 is a schematic structural diagram of a third side of the present invention;
FIG. 4 is a schematic structural view of a bracket of the film cutting mechanism in FIG. 1;
FIG. 5 is a schematic diagram of the construction of the press master-slave roller assembly of FIG. 1;
FIG. 6 is a top view of FIG. 5;
FIG. 7 isbase:Sub>A cross-sectional view of FIG. 6 taken about section A-A;
FIG. 8 is a cross-sectional view of FIG. 6 taken about section B-B;
FIG. 9 is a schematic structural view of the first or second turn-around roller assembly of FIG. 1;
FIG. 10 is a schematic diagram of the construction of the slit film exit roller assembly of FIG. 1;
FIG. 11 is a schematic view of the interior of FIG. 10;
FIG. 12 is a schematic structural view of the main roll assembly for slitting the film of FIG. 1;
FIG. 13 is a schematic view of the interior of FIG. 12;
FIG. 14 is a schematic structural view of the dancer assembly 7 of FIG. 1;
FIG. 15 is a schematic view of the film cutting roll adjustment assembly of FIG. 1;
FIG. 16 is a bottom view of FIG. 15;
FIG. 17 is a rear view of FIG. 15;
FIG. 18 is a schematic structural view of the discharge roller assembly of FIG. 1;
FIG. 19 is a schematic view of the interior of FIG. 18;
FIG. 20 is a schematic structural view of the third turn roll assembly of FIG. 1;
FIG. 21 is a schematic structural view of the fourth diverting roller assembly of FIG. 1;
FIG. 22 is a schematic structural view of the press main roller assembly of FIG. 1;
FIG. 23 is a schematic view of the construction of the nip slave roll assembly of FIG. 1;
FIG. 24 is a schematic view of the structure of the membrane spacing assembly of FIG. 1;
fig. 25 is a transmission route diagram of the film of the present invention.
In the drawings, the meanings of the reference numerals are as follows.
The device comprises a film cutting mechanism bracket 1, a pressure feed main-driven roller component 2, a first turning roller component 3, a film cutting auxiliary roller component 4, a film cutting main roller component 5, a second turning roller component 6, a floating roller component 7, a single amplifier 8, a film cutting roller adjusting component 9, a discharging roller component 10, a third turning roller component 11, a fourth turning roller component 12, a discharging roller motor housing component 13, a pressure feed main roller component 14, a pressure feed auxiliary roller component 15, a film limiting component 16, an optical fiber sensor 17 and an optical fiber sensor fixing plate 18;
film cutting mechanism support 1: a film cutting bracket bottom plate 101, a film cutting bracket fixing block 102, a film cutting bracket side plate 103, a film cutting sensor 104, a film cutting sensor bracket 105, a frame 106, a film cutting bracket motor side plate 107, a film cutting bracket connecting rod 108, an aluminum profile frame 109 and a pressure roller chock block 110;
pressure feed master-slave roller assembly 2: a first pressure feed main roller servo motor 201, a first pressure feed main roller reducer 202, a pressure feed main roller motor support plate 203, a pressure feed main roller motor support rod 204, a second pressure feed roller sliding plate 205, a pressure feed roller transfer block 206, a first pressure feed main roller rubber covered roller 207, a pressure feed slave roller cylinder 208, a first pressure feed roller sliding plate 209, a pressure feed main roller flange 210, a pressure feed roller guide rail 211, a pressure feed roller sliding block 212, a pressure feed roller fixing block 213, a plunger knob 214, a pressure feed roller connecting plate 215, a pressure feed roller connecting rod 216, a pressure feed roller cylinder 217, a first pressure feed main roller coupling 218, a pressure feed roller bearing 219 and a first pressure feed slave roller shaft 220;
first diverting roller assembly 3 or second diverting roller assembly 6: a first steering roller end cover 301, a first steering roller shaft 302, a first steering roller fixing ring 303, a first steering roller drum 304, a first steering roller bearing 305 and a first steering roller flange 306;
film cutting slave roller assembly 4: a film cutting slave roll spur gear 401, a film cutting slave roll first bearing housing 402, a film cutting slave roll bearing retainer 403, a film cutting roll first head 404, a magnetic film cutting roll 405, a film cutting roll second head 406, a rectangular spring 407, a light shield bearing 408, a film cutting slave roll second bearing housing 409, a film cutting slave roll light shield 410, a film cutting slave roll lock nut 411, a film cutting slave roll tooth lock washer 412, a film cutting slave roll key 413, a film cutting slave roll shaft seal 414, a film cutting slave roll first bearing 415, a film cutting slave roll second bearing 416, a film cutting slave roll oil nozzle 417, a film cutting slave roll retainer 418, and a film cutting blade 419;
film cutting main roller assembly 5: a film cutting main roller servo motor 501, a film cutting main roller speed reducer 502, a film cutting main roller first motor plate 503, a film cutting main roller spacing ring 504, a film cutting main roller coupling 505, a film cutting main roller spur gear 506, a film cutting main roller second motor plate 507, a film cutting main roller second flange 508, a film cutting main roller motor cover plate 509, a film cutting main roller flange cover 510, a film cutting main roller speed reducer, a film cutting main roller first motor plate 503, a film cutting main roller spacing ring 504, a film cutting main roller coupling, a film cutting main roller straight gear 506, a film cutting main roller second motor plate 507, a film cutting main roller flange cover plate 509, a film cutting main roller cover 510, a film cutting main roller cover plate a first film cutting main roller bearing 511, a film cutting main roller shaft 512, a film cutting main roller locking nut 513, a film cutting main roller tooth locking washer 514, a first film cutting main roller flange 515, a film cutting main roller hand wheel 516, a second film cutting main roller bearing 517, a third film cutting main roller bearing 518, a fourth film cutting main roller bearing 519 and a sealing ring 520 of the film cutting main roller bearing;
the floating roller assembly 7: the device comprises an optical fiber mounting seat 701, a floating roller sensing sheet 702, a floating roller 703, a floating roller sliding block 704, a floating roller guide rail 705, a floating roller limiting rod 706, a sensing sheet mounting seat 707, a floating roller fixing ring 708, a floating roller bearing 709, a photoelectric sensor 710 and a floating roller shaft 711;
film cutting roller adjusting assembly 9: a film cutting roller second bearing support plate 901, a film cutting roller first knob 902, a roller guide 903, a film cutting roller bearing oil plate 904, a film cutting roller third bearing support plate 905, a film cutting roller oil nozzle 906, a film cutting roller stud 907, a film cutting roller second knob 908, a film cutting roller first bearing support plate 909, a film cutting roller top plate 910, a film cutting roller push plate 911, a film cutting roller felt 912, a film cutting roller pressing ring 913 and a film cutting roller retainer ring 914;
the discharge roller assembly 10: a third retaining ring 1001 of the discharging roller, a mini pipe joint 1002 of the discharging roller, a switching joint 1003 of the discharging roller, a bearing 1004 of the discharging roller, a first pipe joint 1005 of the discharging roller, a shaft 1006 of the discharging roller, a fixing collar 1007 of the discharging roller, a synchronous pulley 1008 of the first discharging roller, a reducer 1009 of the discharging roller, a synchronous belt 1010 of the discharging roller, a synchronous pulley 1011 of the second discharging roller, a bearing sleeve 1012 of the discharging roller, a second pipe joint 1013 of the discharging roller, a diaphragm type clamping cylinder 1014, a roller 1015 of the discharging roller, a first retaining ring 1016 of the discharging roller, a second retaining ring 1017 of the discharging roller and a servo motor 1018 of the discharging roller;
third diverting roller assembly 11: a third steering roller bearing 1101, a third steering roller fixing ring 1102, a third steering roller shaft 1103, a third steering roller drum 1104, a third steering roller support 1105, a third steering roller first support plate 1106 and a third steering roller second support plate 1107;
fourth diverting roller assembly 12: a fourth steering roller shaft 1201, a fourth steering roller support 1202, a fourth steering roller fixing ring 1203, a fourth steering roller drum 1204, a fourth steering roller bottom support plate 1205, a fourth steering roller support vertical plate 1206 and a fourth steering roller bearing 1207;
nip main roller assembly 14: a second pressure feed main roller servo motor 1401, a second pressure feed main roller reducer 1402, a pressure feed main roller support column 1403, a second pressure feed main roller coupling 1404, a pressure feed main roller first flange 1405, a pressure feed main roller bearing 1406, a pressure feed main roller motor plate 1407, a second pressure feed main roller rubber coating roller 1408 and a pressure feed main roller second flange 1409;
pressure-feed driven roller assembly 15: a pressure-feed driven roller transfer block 1501, a driven roller cylinder fixing block 1502, a pressure-feed driven roller connecting rod 1503, a pressure-feed driven roller cylinder 1504, a pressure-feed driven roller fixing ring 1505, a second pressure-feed driven roller shaft 1506 and a pressure-feed driven roller cylinder 1507;
membrane limiting assembly 16: limiting top thread 1601, limiting nut 1602, membrane limiting block upper portion 1603, membrane limiting block lower portion 1604, limiting bolt 1605.
Detailed Description
The following detailed description of the embodiments of the present invention is made with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.
Examples
As shown in figures 1 to 25 of the drawings,
the film cutting mechanism support 1 is used for supporting and installing components of all parts of the whole semiconductor wafer film covering and film cutting device, wherein a film cutting support connecting rod 108 is used for connecting a film cutting support side plate 103 and a film cutting support motor side plate 107 to ensure the installation space of films, a pressure roller 10 plug block 110 is also arranged above the film cutting support side plate 103 and the film cutting support motor side plate 107 and used for adjusting the positions of a pressure feeding main roller component 14 and a pressure feeding slave roller component 15 in the film cutting mechanism support 1, a film cutting sensor support 105 is arranged on one side of the film cutting support side plate 103, and a sensor 104 is arranged on the film cutting sensor support 1 and used for detecting the rotation degree of the film cutting slave roller component 4, so that the film prevention can be more accurate, and the films are ensured to be in a tensioned state all the time.
A first pressure feed main roller servo motor 201 and a first pressure feed main roller speed reducer 202 in the pressure feed main-driven roller assembly 2 are connected to a first pressure feed auxiliary roller shaft 220 through a first pressure feed main roller coupling 218 to drive the first pressure feed auxiliary roller shaft 220 to rotate, a first pressure feed main roller rubber wrapping roller 207 is wrapped on the first pressure feed auxiliary roller shaft 220, the first pressure feed main roller rubber wrapping roller 207 drives a membrane to move and provides power for membrane operation, a pressure feed roller connecting plate 215 and a pressure feed roller connecting rod 216 are arranged between a second pressure feed roller sliding plate 205 and a first pressure feed roller sliding plate 209 to ensure the integral framework structure of the whole pressure feed main-driven roller assembly 2, pressure feed roller cylinders 217 are respectively arranged on the second pressure feed roller sliding plate 205 and the first pressure feed roller sliding plate 209, a pressure feed roller connecting rod 216 is arranged at the movable end of the pressure feed roller cylinder 217, a pressure feed auxiliary roller cylinder 208 is wrapped outside the pressure feed roller connecting rod 216, and the pressure feed roller connecting rod is driven to move through the expansion of the cylinders to clamp and release membrane materials and realize the transport and adjustment of the membrane. The second nip roller slide plate 205 and the first nip roller slide plate 209 are respectively provided with a nip roller fixing block 213, the plunger knob 214 is arranged on the nip roller fixing block 213, and the position of the plunger knob 214 and the nip roller block 110 in the film cutting mechanism frame 1 is adjusted, so that the whole pressure feed main-slave roller assembly 2 can be adjusted, and the installation position of the pressure feed main-slave roller assembly 2 is ensured to be accurate and fixed.
The structure composition of the first turning roll assembly 3 or the second turning roll assembly 6 is the same, first turning roll flanges 306 are installed at two ends of a first turning roll shaft 302, the first turning roll flanges 306 are fixed by a first turning roll end cover 301, the first turning roll flanges 306 are installed on a film cutting mechanism support 1, first turning roll bearings 305 are also installed at two ends of the first turning roll shaft 302, a first turning roll cylinder 304 is wrapped on the outer surface of the first turning roll shaft 302, the first turning roll cylinder 304 is installed on the first turning roll bearings 305, the roll shafts can be prevented from being clamped when a film is conveyed, film limiting assemblies 16 are installed at two ends of the first turning roll cylinder 304, the film limiting assemblies can limit a film, the film is prevented from deviating, and further the regular conveying of the cut film is ensured.
A film cutting slave roller spur gear 401 is installed at one end of the film cutting slave roller assembly 4 and is in meshing transmission with a film cutting master roller spur gear 506 in the film cutting master roller assembly 5 to drive the film cutting slave roller spur gear 401 to rotate, a film cutting roller first head part 404 and a film cutting roller second head part 406 are fixed at two ends of a magnetic film cutting roller 405 through screws, a film cutting blade 419 is adsorbed outside the magnetic film cutting roller 405, the film cutting blade is driven to rotate by the rotation of the magnetic film cutting roller to cut a passing film, a film cutting slave roller first bearing 415 and a film cutting slave roller second bearing 416 are respectively installed inside the film cutting roller first head part 404 and the film cutting roller second head part 406, a locking nut is installed at one side of the film cutting roller second head part 406, and the film cutting roller second head part 406 can be fixed to prevent movement; a film cutting slave roller shading sheet 410 is also arranged at the front part of the film cutting roller second head part 406 and is matched with the film cutting sensor 104 on the film cutting mechanism bracket 1, so that the monitoring of the cutting position can be realized, and the closed-loop control can be realized.
The film cutting main roller component 5 is provided with a film cutting power by a film cutting main roller servo motor 501, the front end of the film cutting main roller servo motor 501 is provided with a film cutting main roller speed reducer 502, the film cutting main roller speed reducer 502 is connected with a film cutting main roller shaft 512 through a film cutting main roller coupling 505 to drive the film cutting main roller shaft 512 to rotate, one end of the film cutting main roller shaft 512 is provided with a film cutting main roller spur gear 506, the film cutting main roller spur gear is meshed with a film cutting auxiliary roller spur gear 401 in the film cutting auxiliary roller component 4, two ends of the film cutting main roller shaft 512 are provided with a film cutting main roller flange cover 510, two ends of the film cutting main roller shaft 512 are also provided with a film cutting main roller second flange 508 and a film cutting main roller first flange 515, the whole film cutting main roller component 5 is arranged on a film cutting mechanism support, one end of the film cutting main roller shaft 512 is also provided with a film cutting main roller hand wheel 516, and the film cutting main roller shaft 516 can adjust the film cutting main roller shaft 512 through the film cutting main roller hand wheel 516 to manually convey a film.
The first turning roll shaft 302 in the second turning roll assembly 6 is in contact with the film material, and drives the film material to be conveyed according to a preset mode.
The floating roller assembly comprises a floating roller assembly 7, floating roller guide rails 705 are arranged at two ends of the floating roller assembly 7, a floating roller sliding block 704 is arranged on the floating roller guide rails 705, a floating roller shaft 711 is fixed on the sliding block through a sensing piece mounting seat 707, a floating roller cylinder 703 is wrapped outside the floating roller shaft 711, the position of the sliding block in the guide rails can be automatically adjusted according to the tensioning requirement of a film material in the transmission process, the film material can be ensured to be in a tensioned state all the time, meanwhile, a film limiting assembly 16 is also arranged at two ends of the floating roller cylinder 703, the film material can be limited left and right, the film material is prevented from deviating, an optical fiber mounting seat 701 is also arranged on one side of the guide rails, a floating roller sensing piece 702 is arranged on the sensing piece mounting seat 707, a photoelectric sensor 710 is arranged on the optical fiber mounting seat, the floating roller moves between the upper portion and the lower portion of the photoelectric sensor, and the floating roller can be prevented from slipping out of the guide rails.
The film cutting roller adjusting assembly 9 is installed on a film cutting mechanism support through a film cutting roller top plate 910, a film cutting roller first knob 902 is installed on the front surface of the film cutting roller top plate 910, a film cutting roller second knob 908 is installed on a film cutting roller push plate 911 through a film cutting roller stud 907 and the film cutting roller first knob 902, the film cutting roller push plate 911 can be pushed to move forwards or backwards through the film cutting roller first knob and the film cutting roller second knob, the film cutting roller first bearing plate 909 is installed on the front surface of the film cutting roller push plate 911, film cutting roller third bearing plates 905 are installed on two sides of the film cutting roller first bearing plate 909, a roller guide 903 is fixed on the film cutting roller bearing oil plate 904, and the roller guide is in contact with a film cutting roller first head 404 and a film cutting roller second head 406 of a film cutting roller assembly 4, so that the film cutting roller assembly 4 can be adjusted.
Blowing roller subassembly 10, blowing roller reduction gear 1009 is installed to one end at blowing roller servo motor 1018, second blowing roller synchronous pulley 1011 is installed to one end at the reduction gear, it is connected with the first blowing roller synchronous pulley 1008 of key-free through blowing roller synchronous belt 1010, the rotation of blowing roller shaft 1006 is driven by servo motor's rotation, realize the blowing of membrane material, blowing roller 1015 is installed in the outside of blowing roller shaft 1006, the membrane material is installed on blowing roller 1015, blowing roller second gear 1017 is installed to the one end of blowing roller shaft 1006, it can carry out spacingly to the installation of membrane material, also install diaphragm formula die clamping cylinder 1014 inside blowing roller 1015 simultaneously, can press from both sides tightly the membrane material, prevent the drunkenness.
The third turning roll assembly 11 is provided with a third turning roll second supporting plate 1107 which is installed on the aluminum profile frame 109 in the film cutting mechanism bracket 1, and third turning roll supports 1105 which are used for supporting the third turning roll shaft 1103 are installed at both sides of the third turning roll second supporting plate 1107 so that the film is turned and conveyed on the third turning roll roller 1104.
The fourth turning roll assembly 12 is provided with a fourth turning roll bottom support plate 1205 which is installed on the aluminum profile frame 109 in the film cutting mechanism bracket 1, and fourth turning roll support vertical plates 1206 which are used for supporting the fourth turning roll shaft 1201 are installed on two sides of the fourth turning roll bottom support plate 1205, so that the film is turned and conveyed on the fourth turning roll drum 1204.
The pressure feed main roller assembly 14 is powered by a second pressure feed main roller servo motor 1401, one end of a second pressure feed main roller speed reducer 1402 is connected with the servo motor, and the other end of the second pressure feed main roller speed reducer is connected to a second pressure feed main roller rubber coating roller 1408 through a second pressure feed main roller coupling 1404 to drive the second pressure feed main roller rubber coating roller 1408 to rotate, so that the cut membrane material is conveyed.
The pressure-feed driven roller assembly 15 is provided with a pressure-feed driven roller connecting rod 1503, pressure-feed driven roller switching blocks 1501 are arranged on two sides of the pressure-feed driven roller connecting rod 1503, a pressure-feed driven roller cylinder 1507 is arranged on a driven roller cylinder fixing block 1502, the driven roller cylinder fixing block 1502 is arranged on the film cutting mechanism support 1, the whole assembly is fixed, and the pressure-feed driven roller blocks the other surface of the film material, so that the film material is stably conveyed.
The membrane stopper upper portion 1603 and the membrane stopper lower part 1604 card of the membrane stopper subassembly are locked on each roller shaft that needs to carry out the limit to the membrane, use limit bolt 1605 to lock, use limit jackscrew 1601 and stop nut 1602 to fix a position.
Fig. 25 is a film driving route diagram, and the film is driven sequentially through the discharging roller assembly 10, the third turning roller assembly 11, the fourth turning roller assembly 12, the second turning roller assembly 6, the floating roller assembly 7, the second turning roller assembly 6, the pressure feed main roller assembly 14, the film cutting auxiliary roller assembly 4, the film cutting main roller assembly 5, the first turning roller assembly 3 and the pressure feed main-auxiliary roller assembly 2.
The technical characteristics of the utility model:
1. the multi-stage multi-channel film roller assembly is arranged to convey the wafer film, so that the stability of film conveying can be effectively ensured;
2. the movable floating roller is arranged to enable the membrane to be always kept in a tensioning state;
3. the film cutting main roller and the film cutting auxiliary roller are arranged, so that the whole rolled film material can be effectively cut into a round shape, and the subsequent film sticking is facilitated;
4. the film conveying device comprises a conveying roller, a motor-driven main roller and a driven roller without the motor drive, wherein the main roller can provide power to ensure the conveying of the film, and the driven roller provides direction to ensure the conveying of the film according to a preset route;
5. the film cutting adjusting structure can effectively adjust the gap between the film cutting slave roller assembly and the film cutting main roller assembly, so that the cutting depth of the film on the film is adjusted, the main film can be cut off by the blade, the auxiliary film can not be cut, and the film cutting action is finished;
6. a film monitoring sensor is arranged above the discharging roller assembly and can monitor whether the film material on the discharging roller exists or not;
7. the air cylinders are arranged on the pressure-feed slave roller assembly, and the air cylinders are also arranged on the pressure-feed slave rollers in the pressure-feed master-slave roller assembly, can adjust the rollers on the pressure-feed slave roller assembly, can compress the membrane material, effectively conveys the force of the master roller, and can adjust the membrane material after being loosened;
8. through the gear drive who sets up on surely membrane home roll and surely membrane follow roller, can effectively guarantee to cut the membrane home roll and surely membrane follow roller drive synchronous, guarantee that the position that the membrane was cut is unique, the card does not appear, dislocation scheduling problem.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, are not to be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected: either mechanically or electrically: the terms may be directly connected or indirectly connected through an intermediate member, or may be a communication between two elements.
The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and variations can be made without departing from the technical principle of the present invention, and these modifications and variations should also be regarded as the protection scope of the present invention.

Claims (10)

1. The film cutting device for the film covering of the semiconductor wafer is characterized by comprising a film cutting mechanism bracket (1), a pressure feeding main-driven roller assembly (2), a first turning roller assembly (3), a film cutting auxiliary roller assembly (4), a film cutting main roller assembly (5), a second turning roller assembly (6), a floating roller assembly (7), a discharging roller assembly (10), a third turning roller assembly (11), a fourth turning roller assembly (12), a pressure feeding main roller assembly (14) and a pressure feeding auxiliary roller assembly (15);
the film cutting mechanism support (1) comprises a film cutting support bottom plate (101), a film cutting support side plate (103), a rack (106), a film cutting support motor side plate (107) and an aluminum profile frame (109), wherein the aluminum profile frame (109) is installed on the rack (106), the film cutting support side plate (103) and the film cutting support motor side plate (107) are connected together through a film cutting support connecting rod (108) and then installed on the film cutting support bottom plate (101) through a film cutting support fixing block (102), and the film cutting support bottom plate (101) is installed on the rack (106) on the inner side of the aluminum profile frame (109);
a third turning roller assembly (11) is arranged at the bottom of the aluminum profile frame (109) on one side along the X-axis negative direction, a fourth turning roller assembly (12) is arranged at the middle position, close to the aluminum profile frame (109), above the third turning roller assembly (11), a discharging roller assembly (10) is arranged on a film cutting bracket motor side plate (107) on one side along the X-axis positive direction of the fourth turning roller assembly (12), a floating roller assembly (7) is arranged between the film cutting bracket side plate (103) and the film cutting bracket motor side plate (107) on one side along the X-axis positive direction, two groups of second turning roller assemblies (6) are arranged between the film cutting bracket side plate (103) and the film cutting bracket motor side plate (107) above the floating roller assembly (7), a pressure feed main roller assembly (14) and a pressure feed auxiliary roller assembly (15) are arranged between the film cutting bracket side plate (103) and the film cutting bracket motor side plate (107) on one side along the X-axis roller assembly negative direction of the second turning roller assembly (6), a pressure feed auxiliary roller assembly (14) and a pressure feed auxiliary pressure feed roller assembly (107) are arranged between the film cutting bracket side plate (103) and the film cutting bracket side plate (107), a pressure feed auxiliary roller assembly (4) and a film cutting bracket side plate (8) are arranged between the film cutting bracket side plate (103) below the film cutting bracket side plate (103), a pressure feed main-driven roller assembly (2) is arranged between a film cutting bracket side plate (103) and a film cutting bracket motor side plate (107) above the film cutting auxiliary roller assembly (4) and the film cutting main roller assembly (5), and a first turning roller assembly (3) is arranged on one side of the pressure feed main-driven roller assembly (2) along the positive direction of the X axis.
2. The film cutting device for semiconductor wafer coating film according to claim 1, wherein the pressure feed master-slave roller assembly (2) comprises a first pressure feed master roller servo motor (201), a first pressure feed master roller reducer (202), a second pressure feed roller sliding plate (205), a first pressure feed master roller coating roller (207), a pressure feed slave roller cylinder (208), a first pressure feed roller sliding plate (209), a pressure feed roller cylinder (217) and a first pressure feed slave roller shaft (220); the film cutting bracket side plate (103) and the film cutting bracket motor side plate (107) are respectively provided with a pressure roller guide rail (211) at the top of the inner sides along the X-axis direction, the second pressure roller sliding plate (205) and the first pressure roller sliding plate (209) are respectively connected with the pressure roller guide rail (211) through a pressure roller sliding block (212), the first pressure feeding main roller rubber wrapping roller (207) is positioned at one side of the pressure feeding slave roller cylinder (208) along the X-axis positive direction, the first pressure feeding main roller servo motor (201) and the first pressure feeding main roller reducer (202) are arranged on the second pressure roller sliding plate (205) through a pressure feeding main roller support plate (203) and a pressure feeding main roller motor support rod (204), the first pressure feeding main roller servo motor (201) and the first pressure feeding main roller reducer (202) are connected with the first pressure feeding main roller rubber wrapping roller (207) through a pressure feeding main roller coupling (218), the pressure feeding slave roller secondary roller (208) is arranged along the second pressure roller sliding plate (X-axis direction, the first pressure roller sliding plate (205) and the first pressure roller motor reducer (209) are respectively connected with the pressure roller rubber wrapping roller (220) along the pressure roller cylinder (220) of the pressure feeding main roller, the pressure roller sliding block (217) and the pressure roller driving roller cylinder (220) are arranged at the inner side, the pressure roller secondary roller cylinder (217) and the pressure roller cylinder (220) are arranged along the pressure roller cylinder (220), the pressure roller cylinder (217) and the pressure roller cylinder (220), the pressure roller driven roller (217) of the pressure roller, the pressure roller secondary roller cylinder (208), the pressure roller cylinder (220) and the pressure roller, the pressure roller secondary roller cylinder (220) are arranged at the pressure roller driven roller (217) and the pressure roller, the pressure roller cylinder (220) and the pressure roller driven roller (220) and the pressure roller (220) are arranged at the inner side of the pressure roller cylinder (217) of the pressure roller cylinder (220) and the pressure roller, the pressure roller cylinder (220) of the pressure roller cylinder (220) and the pressure roller cylinder (217) and the pressure roller cylinder (220) are arranged at the pressure roller, the pressure roller cylinder, and the pressure roller cylinder, the pressure roller cylinder ) One side of the first pressure feed main roller rubber coating roller (207) along the negative direction of the Y axis is installed on a first pressure feed roller sliding plate (209) through a pressure feed main roller flange (210), and a pressure feed roller connecting plate (215) and a pressure feed roller connecting rod (216) are further connected and arranged between the second pressure feed roller sliding plate (205) and the first pressure feed roller sliding plate (209); and the top parts of the second pressure roller sliding plate (205) and the first pressure roller sliding plate (209) along the negative direction of the X axis are respectively provided with a pressure roller fixing block (213), the pressure roller fixing block (213) is provided with a plunger knob (214), and a pressure roller plug block (110) matched with the plunger knob (214) is respectively arranged on a membrane cutting bracket side plate (103) and a membrane cutting bracket motor side plate (107) below the plunger knob (214).
3. The film cutting device for semiconductor wafer coating film according to claim 1, wherein the first turning roll assembly (3) or the second turning roll assembly (6) comprises a first turning roll shaft (302) and a first turning roll roller barrel (304), the first turning roll roller barrel (304) is connected with the inner first turning roll shaft (302) through a first turning roll bearing (305), a first turning roll fixing ring (303) is arranged on the first turning roll shaft (302) outside the first turning roll bearing (305), two sides of the first turning roll shaft (302) of the first turning roll assembly (3) along the Y-axis direction are respectively connected with a second pinch roll sliding plate (205) and a first pinch roll sliding plate (209) through a first turning roll flange (306), and two sides of the first turning roll shaft (302) of the second turning roll assembly (6) along the Y-axis direction are respectively connected with a film cutting bracket side plate (103) and a film cutting bracket side plate (107) through a first turning roll flange (306); and the two sides of the first steering roller drum (304) along the Y-axis direction are both provided with a membrane limiting component (16).
4. The film cutting device for the film covering of the semiconductor wafer as claimed in claim 1, wherein the film cutting slave roller assembly (4) and the film cutting master roller assembly (5) are sequentially arranged along the positive direction of the X axis, and the film cutting master roller assembly (5) is arranged in driving connection with the film cutting slave roller assembly (4);
the film cutting main roller component (5) comprises a film cutting main roller servo motor (501), a film cutting main roller speed reducer (502) and a film cutting main roller shaft (512), the film cutting main roller servo motor (501) and the film cutting main roller speed reducer (502) are installed on a film cutting support motor side plate (107) through a film cutting main roller first motor plate (503) and a film cutting main roller second motor plate (507), the film cutting main roller servo motor (501) and the film cutting main roller speed reducer (502) are connected with a film cutting main roller shaft (512) through a film cutting main roller shaft coupling (505), the film cutting main roller shaft coupling (505) is provided with a film cutting main roller straight gear (506) along one side of a Y shaft, the film cutting main roller shaft coupling (505) is installed on one side of the film cutting support motor side plate (107) through a film cutting main roller positive direction flange (508) and a film cutting main roller shaft flange (510) along one side of the Y shaft coupling (505), and the film cutting main roller shaft coupling (510) is installed on one side of the film cutting main roller shaft coupling (505) through a film cutting main roller shaft coupling (510) and a film cutting main roller shaft flange cover (510) and a main roller shaft (510), the film cutting main roller hand wheel (516) is connected with the film cutting main roller coupler (505) through a film cutting main roller locking nut (513) and a film cutting main roller tooth locking washer (514); a film cutting main roller spacing ring (504) is arranged on a film cutting main roller shaft (512) between the film cutting main roller coupling (505) and the film cutting main roller spur gear (506), a film cutting main roller fourth bearing (519) and a film cutting main roller bearing sealing ring (520) are arranged between one side of the film cutting main roller coupling (505) along the positive direction of the Y axis and the film cutting main roller flange cover (510), and a film cutting main roller second bearing (517), a film cutting main roller third bearing (518) and a film cutting main roller first bearing (511) are arranged between one side of the film cutting main roller coupling (505) along the negative direction of the Y axis and the film cutting main roller flange cover (510);
the film cutting slave roll assembly (4) comprises a film cutting slave roll spur gear (401), a film cutting slave roll first bearing seat (402), a film cutting slave roll second bearing seat (409), a magnetic film cutting roll (405) and a film cutting blade (419), the film cutting slave roll spur gear (401) is meshed with a film cutting master roll spur gear (506), the magnetic film cutting roll (405) is respectively provided with a film cutting roll first head part (404) and a film cutting roll second head part (406) along two sides of a Y-axis direction, the film cutting blade (419) is adsorbed on the outer side of the magnetic film cutting roll (405), the film cutting roll first head part (404) is connected with the film cutting slave roll first bearing seat (402) through a film cutting slave roll first bearing seat (415), the film cutting roll first head part (404) is connected with the film cutting slave roll first bearing seat (401) through a film cutting roll slave roll key (413) and a film cutting slave roll retainer ring (418), the film cutting roll second head part (406) is installed between the film cutting roll bearing seat (416) and the film cutting roll bearing seat (416), and the film cutting roll side plate (107) is respectively arranged on the film cutting roll slave roll bearing seat (409), and the film cutting roll side plate (404) is connected with a film cutting roll slave roll bearing seat (107), the film cutting device is characterized in that a film cutting slave roller lightproof sheet (410) is further arranged on a film cutting roller second head portion (406) on the outer side of the film cutting roller second bearing seat (409) through a lightproof sheet bearing (408), a film cutting slave roller locking nut (411) and a film cutting slave roller locking washer (412) are further arranged on the film cutting roller second head portion (406) between the film cutting slave roller lightproof sheet (410) and the film cutting roller second bearing seat (409), a film cutting sensor (104) is arranged below the film cutting slave roller lightproof sheet (410), the film cutting sensor (104) is mounted on a film cutting support side plate (103) through a film cutting sensor support (105), the film cutting slave roller lightproof sheet (410) is matched with the film cutting sensor (104), and a rectangular spring (407) and a film cutting slave roller oil nozzle (417) are further arranged on the film cutting slave roller first bearing seat (402) and the film cutting slave roller second bearing seat (409).
5. The film cutting device for semiconductor wafer covering film according to claim 1, the floating roller component (7) comprises an optical fiber mounting seat (701), a floating roller guide rail (705) and a floating roller shaft (711), the optical fiber mounting seat (701) is arranged on the side plate (103) of the film cutting bracket along the Z-axis direction, photoelectric sensors (710) are arranged at the top and the bottom of the optical fiber mounting seat (701), a film cutting support side plate (103) at the inner side of the optical fiber mounting seat (701) and a film cutting support motor side plate (107) are both provided with a floating roller guide rail (705) along the Z-axis direction, a floating roller cylinder (703) is connected with a floating roller shaft (711) at the inner side through a floating roller bearing (709), the floating roll shaft (711) is arranged on the induction sheet mounting seat (707) through a floating roll limiting rod (706), the induction sheet mounting seat (707) is connected with a floating roller guide rail (705) through a floating roller sliding block (704), a floating roller induction sheet (702) matched with the photoelectric sensor (710) is arranged on the induction sheet mounting seat (707) close to one side of the optical fiber mounting seat (701), a floating roller fixing ring (708) is arranged on a floating roller shaft (711) at the outer side of the floating roller bearing (709), and a film limiting component (16) is also arranged on the floating roller drum (703).
6. The film cutting device for laminating the semiconductor wafer as claimed in claim 1, wherein a film cutting roller adjusting assembly (9) is further arranged between the film cutting support side plate (103) and the film cutting support motor side plate (107) on one side of the film cutting support from the roller assembly (4) along the X-axis negative direction, the film cutting roller adjusting assembly (9) sequentially comprises a film cutting roller top plate (910) and a film cutting roller push plate (911) along the X-axis positive direction, the film cutting roller top plate (910) is arranged on the film cutting support side plate (103) and the film cutting support motor side plate (107), the film cutting roller top plate (910) is provided with a film cutting roller first knob (902) on one side of the X-axis negative direction, a film cutting roller second knob (908) is connected with the film cutting roller push plate (911) after passing through the film cutting roller first knob (902) through the film cutting roller stud (907), the film cutting roller top plate (910) and the film cutting roller push plate (911) are arranged on one side of the film cutting roller support plate, the film cutting roller mounting roller (904) and the film cutting roller bearing plate (911) are arranged on one side of the film cutting roller bearing plate (904), the film cutting roller bearing plate (904) and the film cutting roller bearing plate (904) are arranged on one side of the film cutting roller bearing plate (904) through the film cutting roller bearing plate (904), and a membrane cutting roller felt (912) is also arranged in the roller mounting seat.
7. The film cutting device for the film covering of the semiconductor wafer as claimed in claim 1, wherein a discharging roller motor housing assembly (13) is arranged on a film cutting support motor side plate (107) outside the discharging roller assembly (10), and the discharging roller assembly (10) comprises a discharging roller shaft (1006), a first discharging roller synchronous pulley (1008), a discharging roller reducer (1009), a discharging roller synchronous belt (1010), a second discharging roller synchronous pulley (1011), a discharging roller barrel (1015) and a discharging roller servo motor (1018);
the discharging roller servo motor (1018) and the discharging roller speed reducer (1009) are connected with a discharging roller shaft (1006) sequentially through a second discharging roller synchronous pulley (1011), a discharging roller synchronous belt (1010) and a first discharging roller synchronous pulley (1008), the discharging roller shaft (1006) is provided with a discharging roller cylinder (1015) along one side of the Y-axis negative direction, a discharging roller bearing sleeve (1012) is arranged on the discharging roller shaft (1006) between the discharging roller cylinder (1015) and the first discharging roller synchronous pulley (1008), the discharging roller bearing sleeve (1012) is connected with the discharging roller shaft (1006) through a discharging roller bearing (1004), a discharging roller second retaining ring (1017), a discharging roller first retaining ring (1016) and a discharging roller third retaining ring (1001) are arranged on the discharging roller shaft (1006) between the discharging roller bearing sleeve (1012) and the discharging roller cylinder (1015), a discharging roller pipe joint (1003) is arranged on one side of the discharging roller shaft (1015) along the Y-axis positive direction, a first discharging roller clamping cylinder (1006) is arranged on one side of the discharging roller shaft (1003), a discharging roller adapter (1002) is provided with a second discharging roller adapter (1014) along the Y-axis positive direction, and a Y-axis adapter (1002) of a discharging roller (1002), a discharging roller fixing shaft collar (1007) is arranged on a discharging roller shaft (1006) between the discharging roller bearing sleeve (1012) and the first discharging roller synchronous pulley (1008); the film cutting support motor side plates (107) of the discharging roller assembly (10) close to the upper side and the lower side are respectively provided with an optical fiber sensor (17), and the optical fiber sensors (17) are installed on the film cutting support motor side plates (107) through optical fiber sensor fixing plates (18).
8. The film cutting device for the film covering of the semiconductor wafer as claimed in claim 1, wherein the third turning roll assembly (11) comprises a third turning roll shaft (1103), a third turning roll roller cylinder (1104), a third turning roll support (1105), a third turning roll first support plate (1106) and a third turning roll second support plate (1107), the third turning roll first support plate (1106) is mounted on the aluminum profile frame (109) through the third turning roll second support plate (1107), the inner side of the third turning roll roller (1104) is connected with the third turning roll shaft (1103) through a third turning roll bearing (1101), two sides of the third turning roll shaft (1103) along the Y-axis direction are respectively connected with the third turning roll support plate (1105) on the third turning roll first support plate (1106), a third turning roll fixing ring (1102) is arranged on the third turning roll shaft (roller shaft) outside the third turning roll bearing (1101), and a limiting film assembly (16) is further arranged on the third turning roll roller cylinder (1104);
the fourth steering roller assembly (12) comprises a fourth steering roller shaft (1201), a fourth steering roller support seat (1202), a fourth steering roller drum (1204), a fourth steering roller bottom support plate (1205) and a fourth steering roller support vertical plate (1206), the fourth steering roller support vertical plate (1206) is installed on an aluminum profile frame (109) through the fourth steering roller bottom support plate (1205), the inner side of the fourth steering roller drum (1204) is connected with the fourth steering roller shaft (1201) through a fourth steering roller bearing (1207), the fourth steering roller shaft (1201) is connected with the fourth steering roller support seat (1202) on the fourth steering roller support vertical plate (1206) along the two sides in the Y-axis direction respectively, a fourth steering roller fixing ring (1203) is arranged on the fourth steering roller shaft (1201) outside the fourth steering roller bearing (1207), and a film limiting assembly (16) is further arranged on the fourth steering roller drum (1204).
9. The film cutting device for laminating the semiconductor wafer as claimed in claim 1, wherein the pressure feed main roller assembly (14) and the pressure feed slave roller assembly (15) are sequentially arranged along the negative direction of the X axis, the pressure feed main roller assembly (14) comprises a second pressure feed main roller servo motor (1401), a second pressure feed main roller reducer (1402) and a second pressure feed main roller wrapping roller (1408), the second pressure feed main roller servo motor (1401) and the second pressure feed main roller reducer (1402) are arranged on the film cutting bracket motor side plate (107) through a pressure feed main roller support upright (1403) and a pressure feed main roller motor plate (1407), the second pressure feed main roller servo motor (1401) and the pressure feed main roller reducer (1402) are connected with the second pressure feed main roller wrapping roller (1408) through a second pressure feed main roller coupling (1404), the second pressure feed main roller wrapping roller (1408) is arranged on the film cutting bracket motor side (107) along the positive direction of the Y axis through a first pressure feed main roller coupling (1406) and a second pressure feed main roller support roller (1405), and the pressure feed main roller wrapping roller is arranged on the film cutting bracket side plate (107) through a second pressure feed main roller flange (1406) and a pressure feed main roller support side plate (1408;
the pressure feed slave roller assembly (15) comprises a pressure feed slave roller cylinder (1504), a second pressure feed slave roller shaft (1506) and a pressure feed slave roller cylinder (1507), the pressure feed slave roller cylinder (1507) is arranged on the inner sides of the film cutting bracket side plate (103) and the film cutting bracket motor side plate (107) through a slave roller cylinder fixing block (1502), the driving end of the pressure feed slave roller cylinder (1507) is in driving connection with the pressure feed slave roller transfer block (1501) on one side in the X-axis negative direction, the inner side of the pressure feed slave roller cylinder (1504) is provided with the second pressure feed slave roller shaft (1506), the two sides of the pressure feed slave roller transfer block (1506) in the Y-axis direction are respectively connected with the pressure feed slave roller transfer block (1501), a pressure feed slave roller connecting rod (1503) is connected between the two pressure feed slave roller transfer blocks (1501), and the pressure feed slave roller cylinder (1506) is provided with the pressure feed slave fixing ring (1505) between the two sides of the pressure feed slave roller cylinder (1504) in the Y-axis direction and the second pressure feed slave roller shaft (1505).
10. The film cutting device for semiconductor wafer film covering according to any one of claims 3, 5 and 8, wherein the film limiting assembly (16) comprises an upper film limiting block part (1603) and a lower film limiting block part (1604), the upper film limiting block part (1603) and the lower film limiting block part (1604) are connected together through a limiting bolt (1605), and a limiting top thread (1601) and a limiting nut (1602) for positioning are arranged on each of the upper film limiting block part (1603) and the lower film limiting block part (1604).
CN202221006721.XU 2022-04-24 2022-04-24 Film cutting device for semiconductor wafer film Active CN218319775U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221006721.XU CN218319775U (en) 2022-04-24 2022-04-24 Film cutting device for semiconductor wafer film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221006721.XU CN218319775U (en) 2022-04-24 2022-04-24 Film cutting device for semiconductor wafer film

Publications (1)

Publication Number Publication Date
CN218319775U true CN218319775U (en) 2023-01-17

Family

ID=84831965

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221006721.XU Active CN218319775U (en) 2022-04-24 2022-04-24 Film cutting device for semiconductor wafer film

Country Status (1)

Country Link
CN (1) CN218319775U (en)

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