CN218594681U - Film pasting device for semiconductor wafer film covering - Google Patents

Abstract

The utility model relates to a pad pasting device for semiconductor wafer tectorial membrane, turn to subassembly, third including membrane device support, first pinch roll unit, second pinch roll unit, first direction of rotation subassembly, second and turn to subassembly, fourth and turn to subassembly, a floating roll subassembly, blowing roller subassembly, floating roll two subassemblies, pad pasting base support one, pad pasting base support two, receive material roller subassembly, pad pasting detection module, get membrane roller subassembly and get membrane auxiliary knife tackle spare. The utility model provides a pad pasting device for semiconductor wafer tectorial membrane to solve among the prior art to the problem that the bubble appears easily that the wafer pad pasting in-process exists, the subsequent handling of being convenient for goes on, can realize automatic pad pasting simultaneously, labour saving and time saving can improve production efficiency.

Description

Film pasting device for semiconductor wafer film covering

Technical Field

The utility model relates to a chip processing technology field especially relates to a pad pasting device for semiconductor wafer tectorial membrane.

Background

The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. Various circuit element structures can be manufactured on the wafer, and the circuit surface of the wafer, i.e. the surface which completes the chip function, is generally called as the front surface, and the other surface is the back surface. In a wafer processing process, a dicing process is usually performed, and before a wafer is diced, a thin film, i.e., a dicing film, is usually attached to the back surface of the wafer in order to protect the wafer during dicing. According to the traditional film pasting process, a film is coiled, the film is continuously discharged after the film coil rotates, and the area of the film is larger than that of a wafer. After the film is attached to the surface of the wafer, the film is cut along the edge of the wafer by holding the blade with hands or a mechanical arm, and redundant film exceeding the wafer is cut off, so that the process of attaching the film on the surface of the wafer is completed.

In the prior art, the wafer is still realized by adopting a manual film pasting mode, the film pasting mode wastes time and labor, the production efficiency is seriously influenced, the deviation is easily pasted, the film pasting waste is easily caused, and the direction error is easily caused when scribing and mounting are carried out.

However, in the above-mentioned film-attaching process, bubbles often exist between the wafer and the film due to the difference in the magnitude of the force applied by the film-attaching operator. When bubbles appear on the surface of the wafer, the attached film needs to be removed, and then the film is attached for the second time, so that raw materials are wasted, and the film attaching efficiency is reduced.

In view of the above-mentioned drawbacks, the present inventors have made active research and innovation to create a film-attaching device for semiconductor wafer film so as to have industrial application value.

SUMMERY OF THE UTILITY MODEL

In order to solve the above technical problem, an object of the present invention is to provide a film pasting device for semiconductor wafer film pasting.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

a film sticking device for semiconductor wafer film coating comprises a film device support, a first pressure roller unit, a second pressure roller unit, a first steering assembly, a second steering assembly, a third steering assembly, a fourth steering assembly, a first floating roller assembly, a discharging roller assembly, a second floating roller assembly, a first film sticking base support, a second film sticking base support, a material collecting roller assembly, a film sticking detection assembly, a film taking roller assembly and a film taking auxiliary cutter assembly;

the film device support comprises a film sticking support motor side edge along one side of a Y-axis negative direction and a film sticking support side edge along one side of a Y-axis positive direction, the film sticking support motor side edge and the film sticking support side edge are connected together through a plurality of film sticking support connecting rods, a film sticking support rib plate is arranged on the film sticking support motor side edge, a film sticking support connecting block is arranged between the film sticking support rib plate and the film sticking support motor side edge, a film sticking support connecting plate is also connected and arranged at the bottom position between the film sticking support motor side edge and the film sticking support side edge, a film sticking support extending plate I is arranged at one side of the top of the film sticking support side edge along the X-axis positive direction, a film sticking support extending plate II is arranged at one side of the film sticking support motor side edge close to the top along the X-axis positive direction, a film sticking support extending plate III is arranged at one side of the film sticking support side edge close to the middle part along the X-axis positive direction, and a plurality of film sticking support leaning edges are arranged at the bottom of the film sticking support side edge;

a triple amplifier fixing plate is arranged at a position, close to the bottom, on a film sticking support rib plate on one side of the side edge of a film sticking support motor along the positive direction of an X axis, a triple amplifier is mounted on the triple amplifier fixing plate, a double amplifier fixing plate is arranged at a position, close to the top, on one side of the side edge of the film sticking support along the negative direction of the X axis, and a double amplifier is mounted on the double amplifier fixing plate;

the side edge of the film sticking support is arranged on the first film sticking base support, the side edge of a motor of the film sticking support is arranged on the second film sticking base support, a discharging roller assembly is arranged on the position, close to the top, of the side edge of the motor of the film sticking support along the Y-axis direction, a first steering assembly is arranged on one side of the discharging roller assembly along the positive direction of the X-axis, the first steering assembly is connected with the side edge of the motor of the film sticking support through a second film sticking support extension plate, the steering roller assembly is connected with the side edge of the film sticking support through a first film sticking support extension plate, a second steering assembly, a first floating roller assembly and a first pressure roller unit are sequentially arranged on one side of the discharging roller assembly along the negative direction of the X-axis, the second steering assembly, the first floating roller assembly and the first pressure roller unit are all arranged between the side edge of the motor of the film sticking support and the side edge of the film sticking support along the Y-axis direction, the film sticking detection assembly and the third steering assembly are sequentially arranged at the position below the first pressure roller unit, the third steering assembly is sequentially provided with a film taking auxiliary cutter assembly and a film taking roller assembly along one side of the X-axis negative direction, the third steering assembly is sequentially provided with a second pressure roller unit, a floating roller second assembly, a fourth steering assembly and a material receiving roller assembly along one side of the X-axis positive direction, the film sticking detection assembly, the third steering assembly, the film taking roller assembly, the film taking auxiliary cutter assembly, the second pressure roller unit, the floating roller second assembly and the fourth steering assembly are all installed between the side edge of the film sticking support motor and the side edge of the film sticking support along the Y-axis direction, and the material receiving roller assembly is installed at the position, close to the bottom, of the side edge of the film sticking support motor along the X-axis positive direction.

As a further improvement of the utility model, the first pressure roller unit comprises a pressure feeding slave roller component and a pressure feeding master roller component which are arranged in sequence along the positive direction of the X axis;

the pressure-feed slave roller assembly comprises a pressure-feed slave roller adapter plate I, a pressure-feed slave roller adapter plate III, a pressure-feed slave roller adapter plate II, a pressure-feed slave roller cylinder and a pressure-feed slave roller spindle, wherein the pressure-feed slave roller adapter plate II is arranged between the side edge of the film sticking support motor and the side edge of the film sticking support along the Y-axis direction, the pressure-feed slave roller adapter plate III is arranged on one side of the pressure-feed slave roller adapter plate II along the X-axis negative direction, the bottom parts of the pressure-feed slave roller adapter plate III along the Y-axis direction are both connected with the pressure-feed slave roller adapter plate I, the pressure-feed slave roller cylinder is arranged between the two pressure-feed slave roller adapter plates along the Y-axis direction, the pressure-feed slave roller cylinder is arranged between the two pressure-feed slave roller adapter plates II along the X-axis direction, the pressure-feed slave roller cylinder is connected with the pressure-feed slave roller spindle through a pressure-feed roller bearing from the inner side of the pressure-feed slave roller cylinder along the X-feed spindle direction, the pressure-feed slave roller spindle shaft is arranged on the two sides of the Y-axis direction from the pressure-feed slave roller spindle shaft, and the two pressure-feed slave roller bearings are respectively arranged on the outer sides of the pressure-feed slave roller adapter plate from the roller bearing from the roller;

the pressure-feed main roller assembly comprises a pressure-feed main roller servo motor, a pressure-feed main roller reducer, a pressure-feed main roller supporting upright post, a pressure-feed main roller motor plate and a pressure-feed main roller rubber coating roller, the pressure-feed main roller servo motor and the pressure-feed main roller reducer are arranged on the side edge of the film sticking support motor through the pressure-feed main roller motor plate and a plurality of pressure-feed main roller supporting upright posts, the pressure-feed main roller servo motor and the pressure-feed main roller reducer are connected with the pressure-feed main roller rubber coating roller through a pressure-feed main roller coupler, the pressure-feed main roller rubber coating roller is arranged on the side edge of the film sticking support motor through a pressure-feed main roller flange I, the pressure-feed main roller rubber coating roller is arranged on the side edge of the film sticking support through a pressure-feed main roller flange II, the pressure-feed main roller rubber coating roller is connected with a pressure-feed main roller flange I and the pressure-feed main roller flange II through a pressure-feed main roller bearing, and the pressure-feed main roller rubber coating roller is positioned on one side of the pressure-feed auxiliary roller along the X axis.

As a further improvement of the present invention, the second nip roller unit includes a nip driven roller assembly and a nip main roller assembly which are sequentially arranged along the Z-axis negative direction;

the pressure-feed slave roller assembly comprises a pressure-feed slave roller adapter plate I, a pressure-feed slave roller adapter plate III, a pressure-feed slave roller adapter plate II, a pressure-feed slave roller cylinder and a pressure-feed slave roller spindle, the pressure-feed slave roller adapter plate II is installed between the side edge of the film sticking support motor and the side edge of the film sticking support along the Y-axis direction, the pressure-feed slave roller adapter plate III is installed on one side of the pressure-feed slave roller adapter plate II along the Z-axis positive direction, the bottom of the pressure-feed slave roller adapter plate III along the Y-axis direction is connected with the pressure-feed slave roller adapter plate I, the pressure-feed slave roller cylinder is installed between the two pressure-feed slave roller adapter plates along the Y-axis direction, the pressure-feed slave roller cylinder is installed between the two pressure-feed slave roller adapter plates along the Z-axis, the pressure-feed slave roller cylinder is connected with the pressure-feed slave roller spindle from the pressure-feed roller bearing through the pressure-feed from the inner side of the pressure-feed slave roller cylinder along the Z-axis direction and the side edge of the film sticking support, the pressure-feed slave roller adapter plate II along the Y-axis direction, the two adapter plates are respectively installed on the outer side of the pressure-feed slave roller adapter plate, and the pressure-feed slave roller adapter plate from the two adapter plates, and the pressure-feed slave roller adapter plates are respectively, and the pressure-feed slave roller adapter plate from the outside of the pressure feed slave roller adapter plate, and the pressure-feed slave roller adapter plate, and the pressure feed slave roller adapter plate are provided with the pressure feed slave roller adapter plate from the adapter plate, and the pressure feed slave roller adapter plate;

the pressure-feed main roller assembly comprises a pressure-feed main roller servo motor, a pressure-feed main roller reducer, a pressure-feed main roller supporting upright post, a pressure-feed main roller motor plate and a pressure-feed main roller rubber coating roller, the pressure-feed main roller servo motor and the pressure-feed main roller reducer are arranged on the side edge of the film sticking support motor through the pressure-feed main roller motor plate and a plurality of pressure-feed main roller supporting upright posts, the pressure-feed main roller servo motor and the pressure-feed main roller reducer are connected with the pressure-feed main roller rubber coating roller through a pressure-feed main roller coupler, the pressure-feed main roller rubber coating roller is arranged on the side edge of the film sticking support motor through a pressure-feed main roller flange I, the pressure-feed main roller rubber coating roller is arranged on the side edge of the film sticking support through a pressure-feed main roller flange II, the pressure-feed main roller rubber coating roller is connected with a pressure-feed main roller flange I and a pressure-feed main roller flange II through a pressure-feed main roller bearing, and the pressure-feed main roller rubber coating roller is arranged right below the pressure-feed auxiliary roller.

As a further improvement, the utility model discloses a first subassembly that turns to, the second turns to the subassembly, the third turns to subassembly and fourth and turns to the subassembly and is turning roll subassembly, turning roll subassembly is including turning to roller axle and turning to the roller, the turning to roller is connected with inboard turning to the roller through turning to the roller bearing, the turning to roller is installed on the pad pasting support motor side through turning to the solid fixed ring of roller along one side of Y axle negative direction, the turning to roller is through turning to roller flange mounting on the pad pasting support side along one side in Y axle positive direction, be provided with the solid fixed ring of turning to the roller on the turning to the roller in the turning to the roller bearing outside along Y axle positive direction one side, and still be provided with the spacing subassembly of membrane on the turning to the roller.

As a further improvement of the present invention, a floating roll assembly comprises a first floating roll sliding plate, a first floating roll cylinder, a first floating roll guide rail, a first floating roll shaft and a second floating roll sliding plate, the first floating roll cylinder is connected with the first floating roll shaft at the inner side through a first floating roll bearing, the first floating roll shaft is installed on the second floating roll sliding plate on the side edge of the film sticking bracket motor through a first floating roll shaft sleeve along one side of the Y-axis negative direction, the first floating roll shaft is installed on the first floating roll sliding plate on the side edge of the film sticking bracket through a spherical bearing along one side of the Y-axis positive direction, the first floating roll sliding plate is connected with the first floating roll guide rail installed on the side edge of the film sticking bracket along the Z-axis direction, the first floating roll sliding plate is connected with the first floating roll guide rail installed on the side edge of the film sticking bracket motor along the Z-axis direction, a first floating roll fixing ring is arranged on the first floating roll shaft outside the first floating roll shaft sleeve along one side of the Y-axis negative direction, a first floating roll sliding plate is provided with a first floating roll sensing sheet, and a first floating roll limiting assembly is further provided on the first floating roll; a floating roller induction assembly is further arranged on the side edge of the film sticking support motor on one side of the floating roller first sliding plate and the other side of the floating roller second sliding plate, the floating roller induction assembly comprises a floating roller induction strip which is arranged on the side edge of the film sticking support motor along the Z-axis direction, and a floating roller inductor can be arranged on the floating roller induction strip in a way that the floating roller inductor can move along the Z-axis direction through a floating roller inductor sliding block;

the second floating roll component comprises a first floating roll sliding plate, a second floating roll guide rail, a second floating roll roller, a second floating roll sliding plate and a second floating roll shaft, the second floating roll roller is connected with the second floating roll shaft on the inner side through a second floating roll bearing, one side of the second floating roll shaft along the Y-axis negative direction is installed on the second floating roll sliding plate on the side edge of the film sticking support motor through a second floating roll shaft sleeve, one side of the second floating roll shaft along the Y-axis positive direction is installed on the first floating roll sliding plate on the side edge of the film sticking support through the second floating roll bearing, the first floating roll sliding plate is connected with the second floating roll guide rail installed on the side edge of the film sticking support along the Z-axis direction, the second floating roll sliding plate is connected with the second floating roll guide rail installed on the side edge of the film sticking support motor along the Z-axis direction, a second floating roll sensing sheet is arranged on the second floating roll sliding plate, and a film limiting component is further arranged on the second floating roll roller; and a floating roller two-sensor assembly is further arranged on the side edge of the film sticking support motor on one side of the floating roller two-sliding plate, the floating roller two-sensor assembly comprises a floating roller two-sensor strip which is arranged on the side edge of the film sticking support motor along the Z-axis direction, and a floating roller two-sensor can be arranged on the floating roller two-sensor strip along the Z-axis direction through a floating roller two-sensor sliding block.

As a further improvement of the utility model, the discharging roller component comprises a discharging roller shaft, a key-free synchronous belt pulley, a discharging roller reducer, a synchronous belt pulley, a discharging roller cylinder and a discharging roller servo motor;

a discharging roller servo motor is connected with a discharging roller shaft sequentially through a synchronous belt pulley, a synchronous belt and a key-free synchronous belt pulley, the discharging roller shaft is provided with a discharging roller barrel along one side of the positive Y-axis direction, a discharging roller bearing sleeve is arranged on the discharging roller shaft between the discharging roller barrel and the key-free synchronous belt pulley and is connected with the discharging roller shaft through a discharging roller bearing, a discharging roller retainer ring II, a discharging roller retainer ring I and a discharging roller retainer ring III are arranged on the discharging roller shaft between the discharging roller bearing sleeve and the discharging roller barrel, a pipe connector I is arranged on one side of the discharging roller shaft along the negative Y-axis direction, a discharging roller adapter and a diaphragm type clamping cylinder are sequentially arranged in a groove of the discharging roller along the positive Y-axis direction, a pipe connector II is arranged on the discharging roller adapter, a micro pipe connector is arranged on one side of the diaphragm type clamping cylinder along the negative Y-axis direction, and a discharging roller fixing shaft collar is arranged on the discharging roller shaft between the discharging roller bearing sleeve and the key-free synchronous belt pulley; the discharging roller assembly is provided with an optical fiber sensor fixing plate along the side edge of the film sticking support motor on one side of the X-axis negative direction, and an optical fiber sensor and a reflecting baffle are mounted on the optical fiber sensor fixing plate.

As a further improvement, receive material roller subassembly including receiving material roller motor, receive material roller reduction gear, receive material roller and receive material roller cylinder, receive material roller motor and receive material roller reduction gear and receive material roller bracing piece through receiving material roller fixed plate and a plurality of and install on pad pasting support motor side, receive material roller motor and receive material roller reduction gear and be connected with receiving material roller shaft through receiving material roller shaft coupling, receive material roller shaft and receive material roller flange and be connected through receiving material roller bearing, receive material roller flange mounting on pad pasting support motor side, be provided with on receiving material roller shaft bearing and the receipts material roller shaft coupling between receive material roller bearing and receive material roller shaft coupling and receive material roller fixed ring.

As a further improvement of the utility model, a film base support I sequentially comprises a film base support I, a film base backing plate I, a film base sliding plate I and a film base adapter block II from bottom to top, the film base support I is provided with the film base backing plate I, the film base backing plate I is provided with a plurality of film base guide rails along the X-axis direction, the film base guide rails are arranged along the Y-axis direction, the film base backing plate I at the two sides of the film base guide rails along the Y-axis direction is provided with the film base retaining block I, the bottom of the film base sliding plate I is connected with the film base guide rail at the lower part through a film base sliding block I, the film base sliding plate I at the two sides of the film base sliding plate I along the X-axis direction is provided with a film base fixing block I for fixing the film base sliding plate I, a first film sticking base adjusting block I and a second film sticking base adjusting block II are sequentially arranged on the first film sticking base adjusting block II from bottom to top, the first film sticking base adjusting block I and the second film sticking base adjusting block II are connected together through a bidirectional bolt, the first film sticking base adjusting block II is connected with the side edge of the film sticking support above, and the second film sticking base adjusting block II is positioned between the abutting edges of the two film sticking supports;

the film sticking base support II sequentially comprises a film sticking base second support II, a film sticking base second backing plate II and a film sticking base second backing plate I from bottom to top, a film sticking base second backing plate II is arranged on the film sticking base second support II, a plurality of film sticking base second guide rails are uniformly arranged on the film sticking base second backing plate II along the X-axis direction, the bottom of the film sticking base second backing plate I is connected with the film sticking base second guide rail below through a film sticking base second slider, the two sides of the film sticking base second backing plate I along the X-axis direction are connected with a film sticking base support rib plate through a film sticking base second shaft II and a film sticking base second shaft seat II, the film sticking base second backing plate I can be fixedly installed on the film sticking base support rib plate through a film sticking base second transfer block IV, the film sticking base second backing plate II on the outer side of the film sticking support rib plate is provided with a film sticking base second fixing block II, the film sticking base second backing plate II is arranged on the film sticking base second fixing block II, and the film sticking base second backing plate II are connected together through a film sticking base second plunger block knob and a film sticking base second plunger I.

As a further improvement of the utility model, the pad pasting detection component comprises a first pad pasting detection fixing plate, a second pad pasting detection fixing plate, a fifth pad pasting detection fixing plate and a sixth pad pasting detection fixing plate, the first pad pasting detection fixing plate is movably arranged on the side edge of the motor of the pad pasting bracket along the Z-axis direction through a pad pasting detection adjusting rod and a pad pasting detection adjusting nut, the second pad pasting detection fixing plate is connected with the first pad pasting detection fixing plate along the Y-axis direction through a plurality of third pad pasting detection fixing plates, one side of the second pad pasting detection fixing plate along the X-axis negative direction is provided with a fifth pad pasting detection fixing plate and a sixth pad pasting detection fixing plate from top to bottom in sequence, the fifth pad pasting detection fixing plate and the sixth pad pasting detection fixing plate are both connected with the first pad pasting detection fixing plate along the Y-axis direction, and a fourth pad pasting detection fixing plate is connected between the fifth pad pasting detection fixing plate and the sixth pad pasting detection fixing plate, the bottom of pad pasting detection fixed plate five along Y axle positive direction one side is provided with the pad pasting and detects the cylinder, the drive end that the pad pasting detected the cylinder is connected with the pad pasting detection fixed plate seven along X axle positive direction one side, the bottom of pad pasting detection fixed plate seven is installed the pad pasting and is detected the clamp plate, be provided with pad pasting detection inductor board on the pad pasting detection fixed plate six under the pad pasting detection cylinder, install the pad pasting along the X axle direction on the pad pasting detection inductor board and detect the inductor, the response hole has been seted up on the pad pasting detection fixed plate two of pad pasting detection inductor along X axle positive direction one side, the response hole is provided with pad pasting inductor baffle on the pad pasting detection fixed plate two of X axle positive direction one side, pad pasting inductor baffle passes through pad pasting inductor connecting plate and installs on pad pasting detection fixed plate two.

As a further improvement of the utility model, the film taking roller component comprises a film taking roller fixing plate III and a film taking roller fixing plate I from top to bottom in sequence, the film taking roller fixing plate III is arranged between the side edge of the film sticking bracket motor and the side edge of the film sticking bracket along the Y-axis direction, the film taking roller fixing plate III is provided with a film taking roller fixing plate II, a thin cylinder is arranged at the middle position of the film taking roller fixing plate II along the Y-axis direction, the driving end at the bottom of the thin cylinder is connected with the film taking roller fixing plate I below through a cylinder floating joint, the bottom of the film taking roller fixing plate I is provided with a film taking rubber roller along the Y-axis direction, the film taking rubber roller is arranged on the film taking roller fixing plate I through a film taking roller bearing and a film taking roller bearing seat, one side of the film taking roller fixing plate III along the X-axis negative direction is provided with a static electricity eliminator through a film taking ion wind bracket, a plurality of guide mechanisms are connected and arranged between the film taking roller fixing plate II and the film taking roller fixing plate I, each guide mechanism comprises a film taking roller guide shaft, a film taking roller linear bearing and a film taking roller limiting block, one side, close to the top, of each film taking roller guide shaft is installed on the film taking roller fixing plate II through the film taking roller linear bearing, one side of the bottom of each film taking roller guide shaft is connected with the film taking roller fixing plate I, the top of each film taking roller guide shaft is provided with the film taking roller limiting block, film taking roller leaning edges are arranged on the film taking roller fixing plates III on two sides of the film taking roller fixing plate II along the Y-axis direction, a film taking roller sensor mounting plate is arranged in the middle position of the bottom of the film taking roller fixing plate I along one side of the X-axis positive direction, and a film taking roller sensor arranged towards the film taking roller is installed at the bottom of the film taking roller sensor mounting plate;

get supplementary sword subassembly of membrane and include getting the membrane sword fixed plate, get the membrane blade holder and install between pad pasting support motor side and pad pasting support side along the Y axle direction through getting the membrane sword fixed plate, get and install on the membrane blade holder and get the membrane blade that the membrane rubber roll set up towards getting.

Borrow by above-mentioned scheme, the utility model discloses at least, have following advantage:

the utility model provides a pad pasting device for semiconductor wafer tectorial membrane to solve the problem that appears the bubble easily among the prior art to the wafer pad pasting in-process existence, the subsequent processing procedure of being convenient for goes on, can realize automatic pad pasting simultaneously, labour saving and time saving can improve production efficiency, mainly includes following advantage:

1. the multi-stage multi-channel film roller assembly is arranged to convey the wafer film, so that the stability of film conveying can be effectively ensured;

2. the membrane is always kept in a tensioning state by arranging the floatable floating roller;

3. the film taking roller assembly and the film taking auxiliary knife assembly are arranged, so that the cut film can be effectively taken, the film is separated on the film material and then pasted on a wafer, and the film pasting is completed;

4. the film conveying device comprises a conveying roller, a motor-driven main roller and a driven roller without the motor drive, wherein the main roller can provide power to ensure the conveying of the film, and the driven roller provides direction to ensure the conveying of the film according to a preset route;

5. a film monitoring sensor is arranged above the discharging roller assembly and can monitor whether the film material on the discharging roller exists or not;

6. the air cylinders are arranged on the pressure feed main roller assembly and the pressure feed slave roller assembly, and can adjust the rollers on the pressure feed master-slave roller assembly, so that the film material can be compressed, the force of the main roller can be effectively conveyed, and the film material can be adjusted after being loosened;

7. an adjusting base support guide rail is arranged below the whole mounting frame and can be used for adjusting the mounting distance of the main roller and the auxiliary roller on two sides, the mounting accuracy of the film sticking device can be effectively guaranteed, and the film sticking accuracy is further guaranteed.

The above description is only an overview of the technical solution of the present invention, and in order to make the technical means of the present invention clearer and can be implemented according to the content of the description, the following detailed description is made with reference to the preferred embodiments of the present invention and accompanying drawings.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and that those skilled in the art can also obtain other related drawings based on these drawings without inventive efforts.

FIG. 1 is a schematic view of the first side of the present invention;

FIG. 2 is a schematic structural view of a second side of the present invention;

fig. 3 is a schematic structural diagram of a third side of the present invention;

FIG. 4 is a schematic view of the first side of the membrane device holder of FIG. 1;

FIG. 5 is a schematic view of the second side of the membrane device support of FIG. 1;

FIG. 6 is a schematic view of the construction of the nip slave roll assembly of FIG. 1;

FIG. 7 is a schematic view of the internal structure of FIG. 6;

FIG. 8 is a schematic structural view of the press main roller assembly of FIG. 1;

FIG. 9 is a schematic view of the internal structure of FIG. 8;

FIG. 10 is a schematic structural view of the turn roll assembly of FIG. 1;

FIG. 11 is a schematic view of the internal structure of FIG. 10;

FIG. 12 is a schematic structural view of an assembly of the dancer roll of FIG. 1;

FIG. 13 is a schematic view of the internal structure of FIG. 12;

FIG. 14 is a schematic view of the discharge roller assembly of FIG. 1;

FIG. 15 is a schematic view of the internal structure of FIG. 14;

FIG. 16 is a schematic structural view of the second dancer assembly of FIG. 1;

FIG. 17 is a schematic view of the internal structure of FIG. 16;

FIG. 18 is a schematic structural view of a first film-coated base support in FIG. 1;

FIG. 19 is a schematic structural view of a second film base support in FIG. 1;

FIG. 20 is a schematic structural view of the take-up roll assembly of FIG. 1;

FIG. 21 is a schematic view of the first side of the film attachment detection assembly of FIG. 1;

FIG. 22 is a schematic view of the second side of the film attachment detection assembly of FIG. 1;

FIG. 23 is a schematic structural view of the take-up roll assembly of FIG. 1;

FIG. 24 is a schematic view of the auxiliary knife assembly for taking out the film in FIG. 1;

FIG. 25 is a schematic view of a sensing assembly of the dancer roll of FIG. 1;

FIG. 26 is a schematic structural view of a second sensing assembly of the dancer roll of FIG. 1;

fig. 27 is a schematic structural view of the middle membrane position limiting assembly of the present invention;

figure 28 is a diagram of a membrane drive circuit of the present invention.

In the drawings, the meanings of the reference numerals are as follows.

The device comprises a membrane device bracket 1, a pressure feeding slave roller assembly 2, a two-unit amplifier fixing plate 3, a two-unit amplifier 4, a pressure feeding main roller assembly 5, a turning roller assembly 6, a floating roller assembly 7, a discharging roller assembly 8, a floating roller assembly 9, a first film pasting base bracket 10, a second film pasting base bracket 11, a receiving roller assembly 12, a triple amplifier fixing plate 13, a triple amplifier 14, an optical fiber sensor 15, an optical fiber sensor fixing plate 16, a reflecting baffle plate 17, a film pasting detection assembly 18, a film taking roller assembly 19, a film taking auxiliary knife assembly 20, a floating roller sensing assembly 21, a floating roller second sensing assembly 22 and a membrane limiting assembly 23;

membrane device holder 1: a film sticking support connecting rod 101, a film sticking support rib plate 102, a second film sticking support extension plate 103, a film sticking support motor side 104, a film sticking support leaning edge 105, a film sticking support side 106, a film sticking support connecting plate 107, a third film sticking support extension plate 108, a first film sticking support extension plate 109 and a film sticking support connecting block 110;

pressure-feed slave roller assembly 2: a speed control valve 201, a sliding table air cylinder 202, a pressure feed slave roller adjusting block 203, a pressure feed slave roller adapter plate one 204, a pressure feed slave roller adapter plate three 205, a pressure feed slave roller adapter plate two 206, a pressure feed slave roller drum 207, a pressure feed slave roller fixing ring 208, a pressure feed slave roller mandrel 209, and a pressure feed slave roller bearing 210;

nip main roller assembly 5: a pressure-feed main roller servo motor 501, a pressure-feed main roller speed reducer 502, a pressure-feed main roller supporting upright 503, a pressure-feed main roller coupling 504, a pressure-feed main roller flange I505, a pressure-feed main roller bearing 506, a pressure-feed main roller motor plate 507, a pressure-feed main roller rubber-covered roller 508 and a pressure-feed main roller flange II 509;

turning roll assembly 6: a turning roll bearing 601, a turning roll flange 602, a turning roll shaft 603, a turning roll fixing ring 604, a turning roll roller 605 and a film limiting component 23;

dancer roller assembly 7: a first floating roller sliding plate 701, a spherical bearing 702, a first floating roller fixing ring 703, a first floating roller 704, a first floating roller bearing 705, a first floating roller guide rail 706, a floating roller shaft 707, a first floating roller shaft sleeve 708, a first floating roller sliding plate 709, a first floating roller sensing sheet 710 and a membrane limiting assembly 23;

the discharging roller assembly 8: a discharging roller retainer ring III 801, a miniature pipe joint 802, a discharging roller adapter 803, a discharging roller bearing 804, a pipe joint I805, a discharging roller shaft 806, a discharging roller fixing shaft collar 807, a key-free synchronous pulley 808, a discharging roller reducer 809, a synchronous belt 810, a synchronous pulley 811, a discharging roller bearing sleeve 812, a pipe joint II 813, a diaphragm type clamping cylinder 814, a discharging roller drum 815, a discharging roller retainer ring I816, a discharging roller retainer ring II 817 and a discharging roller servo motor 818;

the floating roller assembly 9: a first floating roller sliding plate 901, a second floating roller guide rail 902, a second floating roller 903, a second floating roller shaft sleeve 904, a second floating roller sliding plate 905, a film limiting component 23, a second floating roller shaft 906, a second floating roller sensing sheet 907, a first floating roller bearing 908 and a second floating roller bearing 909;

the first film base support 10: a first film sticking base shaft seat 1001, a first film sticking base transfer block 1002, a third film sticking base transfer block 1003, a second film sticking base transfer block 1004, a first film sticking base adjusting block 1005, a first film sticking base sliding block 1006, a first film sticking base sliding plate 1007, a first film sticking base fixing block 1008, a first film sticking base backing plate 1009, a first film sticking base support 1010, a first film sticking base guide rail 1011, a first film sticking base adjusting block 1012 and a first film sticking base stop 1013;

a second film base support 11: a second film sticking base fixing block II 1101, a fourth film sticking base transfer block II 1102, a second film sticking base guide rail 1103, a first film sticking base backing plate II 1104, a second film sticking base sliding block 1105, a second film sticking base shaft seat II 1106, a second film sticking base shaft seat 1107, a second film sticking base plunger block II 1108, a second film sticking base backing plate 1109, a second film sticking base support II 1110, a first film sticking base plunger block 1111 and a second film sticking base knob plunger 1112;

the receiving roller assembly 12: a receiving roller motor 1201, a receiving roller reducer 1202, a receiving roller fixing plate 1203, a receiving roller coupler 1204, a receiving roller supporting rod 1205, a receiving roller fixing ring 1206, a receiving roller flange 1207, a receiving roller shaft 1208, a receiving roller bearing 1209 and a receiving roller drum 1210;

the film sticking detection assembly 18: a film sticking detection pressing plate 1801, a film sticking detection fixing plate seven 1802, a film sticking detection fixing plate two 1803, a film sticking detection cylinder 1804, a film sticking detection fixing plate five 1805, a film sticking detection adjusting rod 1806, a film sticking detection adjusting nut 1807, a film sticking detection sensor plate 1808, a film sticking detection sensor 1809, a film sticking detection fixing plate six 1810, a film sticking detection fixing plate four 1811, a film sticking detection fixing plate one 1812, a film sticking detection fixing plate three 1813, a film sticking sensor baffle 1814 and a film sticking sensor connecting plate 1815;

the film taking roller assembly 19: a film taking roller fixing plate III 1901, a film taking roller bearing seat 1902, a film taking roller bearing 1903, a film taking rubber roller 1904, a film taking roller abutting edge 1905, a film taking roller fixing plate I1906, a film taking roller guide shaft 1907, a film taking roller linear bearing 1908, a film taking roller fixing plate II 1909, a thin cylinder 1910, a film taking roller sensor mounting plate 1911, a film taking roller sensor 1912, a cylinder floating joint 1913, a film taking roller limiting block 1914, a static eliminator 1915 and a film taking ion wind bracket 1916;

get membrane auxiliary knife tackle spare 20: a membrane taking knife fixing plate 2001, a membrane taking knife seat 2002 and a membrane taking knife plate 2003;

dancer-sensing assembly 21: a floating roll-sensor slider 2101, a floating roll-sensor 2102, a floating roll-sensor bar 2103;

floating roller two sensing assembly 22: a floating roller two sensor slider 2201, a floating roller two sensor 2202 and a floating roller two sensor bar 2203;

membrane limiting assembly 23: a membrane limiting jackscrew 2301, a membrane limiting nut 2302, a membrane limiting block upper portion 2303, a membrane limiting block lower portion 2304, and a membrane limiting bolt 2305.

Detailed Description

The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

In order to make the technical solution of the present invention better understood, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiment of the present invention, all other embodiments obtained by the person skilled in the art without creative work belong to the protection scope of the present invention.

Examples

As shown in figures 1 to 28 of the drawings,

a film sticking device for semiconductor wafer film coating comprises a film device support 1, a first pressure roller unit, a second pressure roller unit, a first steering assembly, a second steering assembly, a third steering assembly, a fourth steering assembly, a first floating roller assembly 7, a discharging roller assembly 8, a second floating roller assembly 9, a first film sticking base support 10, a second film sticking base support 11, a material receiving roller assembly 12, a film sticking detection assembly 18, a film taking roller assembly 19 and a film taking auxiliary knife assembly 20;

the film device support 1 comprises a film sticking support motor side 104 on one side of a Y-axis negative direction and a film sticking support side 106 on one side of the Y-axis positive direction, the film sticking support motor side 104 and the film sticking support side 106 are connected together through a plurality of film sticking support connecting rods 101, a film sticking support rib plate 102 is arranged on the film sticking support motor side 104, a film sticking support connecting block 110 is arranged between the film sticking support rib plate 102 and the film sticking support motor side 104, a film sticking support connecting plate 107 is also connected and arranged at the bottom between the film sticking support motor side 104 and the film sticking support side 106, a film sticking support extending plate I109 is arranged on one side of the top of the film sticking support side 106 along the X-axis positive direction, a film sticking support extending plate II 103 is arranged on one side of the film sticking support motor side 104 close to the top along the X-axis positive direction, a film sticking support extending plate III 108 is arranged on one side of the film sticking support side 106 close to the middle part along the X-axis positive direction, and a plurality of film sticking support abutting edges 105 are arranged at the bottom of the film sticking support side 106;

a triple amplifier fixing plate 13 is arranged on the position, close to the bottom, of the film sticking support rib plate 102 on one side of the film sticking support motor side 104 in the positive direction of the X axis, a triple amplifier 14 is installed on the triple amplifier fixing plate 13, a two-amplifier fixing plate 3 is arranged on the position, close to the top, on one side of the film sticking support side 106 in the negative direction of the X axis, and a two-amplifier 4 is installed on the two-amplifier fixing plate 3;

the film sticking base bracket side 106 is arranged on the first film sticking base bracket 10, the film sticking bracket motor side 104 is arranged on the second film sticking base bracket 11, the position of the film sticking bracket motor side 104 close to the top is provided with a discharging roller assembly 8 along the Y-axis direction, one side of the discharging roller assembly 8 along the positive direction of the X-axis is provided with a first steering assembly, the first steering assembly is connected with the film sticking bracket motor side 104 through a second film sticking bracket extension plate 103, the steering roller assembly 6 is connected with the film sticking bracket side 106 through a first film sticking bracket extension plate 109, the discharging roller assembly 8 is sequentially provided with a second steering assembly, a first pressure roller assembly 7 and a first pressure roller unit along one side of the negative direction of the X-axis, the second steering assembly, the first pressure roller assembly 7 and the first pressure roller unit are all arranged between the film sticking bracket motor side 104 and the film sticking bracket side 106 along the Y-axis direction, the film sticking detection assembly 18 and the third steering assembly are sequentially arranged at the position below the first pressure roller unit, the film taking auxiliary knife assembly 20 and the film taking roller assembly 19 are sequentially arranged on one side of the third steering assembly along the negative direction of the X axis, the second pressure roller unit, the floating roller second assembly 9, the fourth steering assembly and the material receiving roller assembly 12 are sequentially arranged on one side of the third steering assembly along the positive direction of the X axis, the film sticking detection assembly 18, the third steering assembly, the film taking roller assembly 19, the film taking auxiliary knife assembly 20, the second pressure roller unit, the floating roller second assembly 9 and the fourth steering assembly are all installed between the film sticking support motor side 104 and the film sticking support side 106 along the Y axis direction, and the material receiving roller assembly 12 is installed at the position, close to the bottom, on one side of the film sticking support motor side 104 along the positive direction of the X axis.

Preferably, the first nip roller unit comprises a nip slave roller assembly 2 and a nip master roller assembly 5 which are arranged in sequence along the positive direction of the X axis;

the pressure-feed slave roller assembly 2 comprises a pressure-feed slave roller adapter plate I204, a pressure-feed slave roller adapter plate III 205, a pressure-feed slave roller adapter plate II 206, a pressure-feed slave roller cylinder 207 and a pressure-feed slave roller center shaft 209, the pressure-feed slave roller adapter plate II 206 is arranged between the film sticking bracket motor side 104 and the film sticking bracket side 106 along the Y-axis direction, the pressure-feed slave roller adapter plate III 205 is arranged on one side of the pressure-feed slave roller adapter plate II 206 along the X-axis negative direction, the pressure-feed slave roller adapter plate I204 is connected to the bottom of the pressure-feed slave roller adapter plate III 205 along the Y-axis direction, the pressure-feed slave roller adapter plate I204 is arranged between the two pressure-feed slave roller adapter plate I204 along the Y-axis direction, the pressure-feed slave roller cylinder 207 is arranged on the film sticking bracket motor side 104 and the film sticking bracket side 106 along the X-axis positive direction side of the pressure-feed slave roller adapter plate II 205, a speed control valve and a sliding table cylinder 202 are arranged on the two pressure-feed slave roller adapter plate pressure-feed roller bearings 209, the pressure-feed slave roller cylinder pressure-feed roller adapter plate II 204 can drive the pressure-feed slave roller adapter plate pressure-feed roller adapter plate II 206 along the X-feed roller shaft 210, the X-feed roller bearing 210 is arranged on the two sides of the pressure-feed roller bearing 209, the pressure-feed slave roller bearing 210 is arranged on the two pressure-feed roller bearing 210 from the two sides of the pressure-feed roller bearing 210;

the pressure-feed main roller assembly 5 comprises a pressure-feed main roller servo motor 501, a pressure-feed main roller reducer 502, a pressure-feed main roller supporting upright 503, a pressure-feed main roller motor plate 507 and a pressure-feed main roller wrapping rubber roller 508, wherein the pressure-feed main roller servo motor 501 and the pressure-feed main roller reducer 502 are installed on the side edge 104 of the film sticking bracket motor through the pressure-feed main roller motor plate 507 and a plurality of pressure-feed main roller supporting upright 503, the pressure-feed main roller servo motor 501 and the pressure-feed main roller reducer 502 are connected with the pressure-feed main roller wrapping rubber roller 508 through a pressure-feed main roller coupler 504, the pressure-feed main roller wrapping rubber roller 508 is installed on the side edge 104 of the film sticking bracket motor through a pressure-feed main roller flange I505, the pressure-feed main roller wrapping rubber roller 508 is installed on the side edge 106 of the film sticking bracket through a pressure-feed main roller flange II 509, the pressure-feed main roller wrapping rubber roller 508 is connected with a pressure-feed main roller flange I505 and a pressure-feed main roller flange II 509 through a pressure-feed roller bearing 506, and the pressure-feed main roller wrapping rubber roller 508 is located on one side of the X shaft of the pressure-feed auxiliary roller 207.

Preferably, the second nip roller unit comprises a nip slave roller assembly 2 and a nip master roller assembly 5 which are arranged in sequence along the negative direction of the Z axis;

the pressure-feed slave roller assembly 2 comprises a pressure-feed slave roller adapter plate I204, a pressure-feed slave roller adapter plate III 205, a pressure-feed slave roller adapter plate II 206, a pressure-feed slave roller cylinder 207 and a pressure-feed slave roller spindle 209, the pressure-feed slave roller adapter plate II 206 is arranged between the film sticking bracket motor side 104 and the film sticking bracket side 106 along the Y-axis direction, the pressure-feed slave roller adapter plate III 205 is arranged on the pressure-feed slave roller adapter plate II 206 along one side of the Z-axis positive direction, the pressure-feed slave roller adapter plate I204 is connected to the bottom of the pressure-feed slave roller adapter plate III 205 along two sides of the Y-axis direction, a pressure-feed slave roller cylinder 207 is arranged between the two pressure-feed slave roller adapter plate I204 along the Y-axis direction, a pressure-feed slave roller cylinder 207 is arranged on the film sticking bracket motor side 104 and the film sticking bracket side 106 along one side of the Z-axis negative direction, a speed control valve and a sliding table cylinder 202 are arranged on the pressure-feed slave roller adapter plate pressure-feed roller adapter plate II 202, the cylinder 202 can drive the pressure-feed slave roller adapter plate pressure-feed roll adapter plate II 206 along the Z-axis direction, the Y-feed slave roller spindle shaft 209 and the pressure-feed slave roller bearing 209 are arranged on the two pressure-feed slave roller bearings 210, the pressure-feed slave roller adapter plate II, the pressure-feed slave roller bearing 209, the pressure-feed slave roller bearing 201 is arranged on the pressure-feed slave roller adapter plate II from the pressure-feed roller spindle 209, the pressure feed roller adapter plate II from the pressure feed roller bearing 210 and the pressure feed roller bearing 209 along the pressure feed roller spindle 209, the two sides of the pressure feed roller spindle 209, the pressure feed roller bearing 210;

the pressure-feed main roller assembly 5 comprises a pressure-feed main roller servo motor 501, a pressure-feed main roller reducer 502, a pressure-feed main roller support upright 503, a pressure-feed main roller motor plate 507 and a pressure-feed main roller wrapping roller 508, wherein the pressure-feed main roller servo motor 501 and the pressure-feed main roller reducer 502 are arranged on the side edge 104 of the film sticking bracket motor through the pressure-feed main roller motor plate 507 and a plurality of pressure-feed main roller support upright 503, the pressure-feed main roller servo motor 501 and the pressure-feed main roller reducer 502 are connected with the pressure-feed main roller wrapping roller 508 through a pressure-feed main roller coupler 504, the pressure-feed main roller wrapping roller 508 is arranged on the side edge 104 of the film sticking bracket motor through a pressure-feed main roller flange I505, the pressure-feed main roller wrapping roller 508 is arranged on the side edge 106 of the film sticking bracket through a pressure-feed main roller flange II 509, the pressure-feed main roller wrapping roller 508 is connected with a pressure-feed main roller flange I505 and a pressure-feed main roller flange II 509 through a pressure-feed main roller bearing 506, and the pressure-feed main roller wrapping roller 508 is positioned at the position under the pressure-feed auxiliary roller 207.

Preferably, the first steering assembly, the second steering assembly, the third steering assembly and the fourth steering assembly are all steering roller assemblies 6, each steering roller assembly 6 comprises a steering roller shaft 603 and a steering roller cylinder 605, each steering roller cylinder 605 is connected with the steering roller shaft 603 on the inner side through a steering roller bearing 601, each steering roller shaft 603 is mounted on the film sticking support motor side 104 through a steering roller fixing ring 604 along one side of the negative direction of the Y axis, each steering roller shaft 603 is mounted on the film sticking support side 106 through a steering roller flange 602 along one side of the positive direction of the Y axis, each steering roller shaft 603 on the outer side of the steering roller bearing 601 along one side of the positive direction of the Y axis is provided with a steering roller fixing ring 604, and each steering roller cylinder 605 is further provided with a film limiting assembly 23.

Preferably, the first floating roll assembly 7 comprises a first floating roll sliding plate 701, a first floating roll roller 704, a first floating roll guide rail 706, a first floating roll shaft 707 and a second floating roll sliding plate 709, the first floating roll roller 704 is connected with the first floating roll shaft 707 on the inner side through a first floating roll bearing 705, one side of the first floating roll shaft 707 along the negative direction of the Y-axis is installed on the first floating roll sliding plate 709 on the side edge 104 of the film sticking bracket motor through a first floating roll shaft sleeve 708, one side of the first floating roll shaft 707 along the positive direction of the Y-axis is installed on the first floating roll sliding plate 701 on the side edge 106 of the film sticking bracket through a spherical bearing 702, the first floating roll sliding plate 701 is connected with the first floating roll guide rail 706 on the side edge 106 of the film sticking bracket along the Z-axis direction, the first floating roll sliding plate 709 is connected with the first floating roll guide rail 706 on the side edge 104 of the film sticking bracket motor along the Z-axis direction, a first floating roll fixing ring is arranged on the first floating roll shaft 707 on one side of the first floating roll shaft 708 along the one side direction of the Y-axis, the first floating roll sliding plate 709 is provided with a first floating roll sliding plate 704, the second floating roll sliding plate 704, a first floating roll sliding plate 704 is provided with a limiting film roll guiding plate 23; a floating roller first sensing assembly 21 is further arranged on the film sticking bracket motor side edge 104 on one side of the floating roller first sliding plate II 709, the floating roller first sensing assembly 21 comprises a floating roller first sensing strip 2103 which is arranged on the film sticking bracket motor side edge 104 along the Z-axis direction, and a floating roller first sensor 2102 is arranged on the floating roller first sensing strip 2103 through a floating roller first sensor sliding block 2101 which can move along the Z-axis direction;

the floating roll second assembly 9 comprises a floating roll second sliding plate I901, a floating roll second guide rail 902, a floating roll second roller 903, a floating roll second sliding plate II 905 and a floating roll second shaft 906, the floating roll second roller 903 is connected with the floating roll second shaft 906 on the inner side through a floating roll second bearing II 909, one side of the floating roll second shaft 906 along the Y-axis negative direction is installed on the floating roll second sliding plate II 905 on the film sticking support motor side edge 104 through a floating roll second shaft sleeve 904, one side of the floating roll second shaft 906 along the Y-axis positive direction is installed on the floating roll second sliding plate I901 on the film sticking support side edge 106 through a floating roll second bearing I908, the floating roll second sliding plate I901 is connected with the floating roll second guide rail 902 installed on the film sticking support side edge 106 along the Z-axis direction, the floating roll second sliding plate II 905 is connected with the floating roll second guide rail 902 installed on the film sticking support motor side edge 104 along the Z-axis direction, a floating roll second sensing piece 907 is arranged on the floating roll second sliding plate II 905, and a floating roll second limiting assembly 23 is further arranged on the floating roll second roller 903; a second floating roller sensing assembly 22 is further arranged on the film sticking support motor side edge 104 on one side of the second floating roller sliding plate 905, the second floating roller sensing assembly 22 comprises a second floating roller sensing strip 2203 which is arranged on the film sticking support motor side edge 104 along the Z-axis direction, and a second floating roller sensor 2202 is arranged on the second floating roller sensing strip 2203 through a second floating roller sensor sliding block 2201 which can move along the Z-axis direction.

Preferably, the discharging roller assembly 8 comprises a discharging roller shaft 806, a key-free synchronous pulley 808, a discharging roller reducer 809, a synchronous belt 810, a synchronous pulley 811, a discharging roller drum 815 and a discharging roller servo motor 818;

an emptying roller servo motor 818 is connected with an emptying roller shaft 806 through a synchronous belt pulley 811, a synchronous belt 810 and a key-free synchronous belt pulley 808 in sequence, one side of the emptying roller shaft 806 along the positive direction of the Y axis is provided with an emptying roller barrel 815, the emptying roller shaft 806 between the emptying roller barrel 815 and the key-free synchronous belt pulley 808 is provided with an emptying roller bearing sleeve 812, the emptying roller bearing sleeve 812 is connected with the emptying roller shaft 806 through an emptying roller bearing 804, the emptying roller shaft 806 between the emptying roller bearing sleeve 812 and the emptying roller barrel 815 is provided with an emptying roller retainer ring II 817, an emptying roller retainer ring I816 and an emptying roller retainer ring III 801, a first pipe joint 805 is arranged on one side of the discharging roller shaft 806 along the Y-axis negative direction, a discharging roller adapter 803 and a diaphragm type clamping cylinder 814 are sequentially arranged in a groove of the discharging roller cylinder 815 along the Y-axis positive direction, a second pipe joint 813 is arranged on the discharging roller adapter 803, a micro pipe joint 802 is arranged on one side of the diaphragm type clamping cylinder 814 along the Y-axis negative direction, and a discharging roller fixing collar 807 is arranged on the discharging roller shaft 806 between a discharging roller bearing sleeve 812 and a keyless synchronous pulley 808; an optical fiber sensor fixing plate 16 is arranged on the film sticking bracket motor side 104 on one side of the discharging roller assembly 8 along the X-axis negative direction, and an optical fiber sensor 15 and a reflecting baffle 17 are arranged on the optical fiber sensor fixing plate 16.

Preferably, the material receiving roller assembly 12 comprises a material receiving roller motor 1201, a material receiving roller speed reducer 1202, a material receiving roller shaft 1208 and a material receiving roller drum 1210, the material receiving roller motor 1201 and the material receiving roller speed reducer 1202 are mounted on the side edge 104 of the film sticking support motor through a material receiving roller fixing plate 1203 and a plurality of material receiving roller supporting rods 1205, the material receiving roller motor 1201 and the material receiving roller speed reducer 1202 are connected with the material receiving roller shaft 1208 through a material receiving roller coupling 1204, the material receiving roller shaft 1208 is connected with a material receiving roller flange 1207 through a material receiving roller bearing 1209, the material receiving roller flange 1207 is mounted on the side edge 104 of the film sticking support motor, and a material receiving roller fixing ring 1206 is arranged on the material receiving roller shaft between the material receiving roller bearing 1209 and the material receiving roller coupling 1204.

Preferably, the first film sticking base support 10 sequentially comprises a first film sticking base support 1010, a first film sticking base backing plate 1009, a first film sticking base sliding plate 1007 and a second film sticking base transfer block 1004 from bottom to top, the first film sticking base support 1010 is provided with the first film sticking base backing plate 1009, the first film sticking base backing plate 1009 is arranged on the first film sticking base backing plate 1009 along the X-axis direction, the first film sticking base guide rail 1011 is arranged along the Y-axis direction, the first film sticking base guide rail 1011 is provided with the first film sticking base stop 1013 on the first film sticking base backing plate 1009 on both sides along the Y-axis direction, the bottom of the first film sticking base sliding plate 1007 is connected with the first film sticking base guide rail 1011 below the first film sticking base 1012 through a first film sticking base sliding block 1012, the first film sticking base sliding plate 1007 is provided with a first film sticking base first sliding plate 1008 for fixing the first film sticking base sliding plate 1007 to the first film sticking base sliding plate 1007, the first film sticking base sliding plate 1005 is provided with a second film sticking base 1004, the first film sticking base 1005 and the second film sticking base 1005 are connected with the first film sticking base pad 1004 through a first film sticking base transfer block 1002 and a second film sticking base 1004, the first film sticking base transfer block 1005, the first film sticking base 1005 and the second film sticking base 1004 are sequentially arranged on the first film sticking base transfer block 1002 from bottom of the first film sticking base 1002, a second film sticking base transition block 1004 is positioned between the two film sticking support leaning edges 105;

the second pad pasting base support 11 sequentially comprises a second pad pasting base support 1110, a second pad pasting base backing 1109 and a first pad pasting base backing 1104 from bottom to top, the second pad pasting base support 1110 is provided with a second pad pasting base backing 1109, the second pad pasting base backing 1109 is evenly provided with a plurality of second pad pasting base guide rails 1103 along the X-axis direction, the bottom of the first pad pasting base backing 1104 is connected with the second pad pasting base guide rails 1103 below through a second pad pasting base slider 1105, the first pad pasting base backing 1104 is connected with the second pad pasting base support 102 through a second pad pasting base 1107 and a second pad pasting base 1106 along the X-axis direction, the first pad pasting base backing 1104 is fixedly installed on the pad pasting support rib plate 102 through a fourth pad pasting base transfer block 1102, the second pad pasting base 1101 and the second pad base 1109 outside the pad pasting support rib plate 102 are provided with a second pad pasting base rib plate, the second pad pasting base plunger 1108 is connected with the second pad pasting base plunger 1108 through a second plunger piston plunger 1108 and a second plunger piston plunger 1108.

Preferably, the film detection assembly 18 includes a first film detection fixing plate 1812, a second film detection fixing plate 1803, a fifth film detection fixing plate 1805 and a sixth film detection fixing plate 1810, the first film detection fixing plate 1812 is movably mounted on the side 104 of the film support motor along the Z-axis direction through a film detection adjusting rod 1806 and a film detection adjusting nut 1807, the second film detection fixing plate 1803 is connected with the first film detection fixing plate 1812 along the Y-axis direction through a plurality of third film detection fixing plates 1813, the second film detection fixing plate 1803 is sequentially provided with a fifth film detection fixing plate 1805 and a sixth film detection fixing plate 1810 from top to bottom along one side of the X-axis negative direction, the fifth film detection fixing plate 1805 and the sixth film detection fixing plate 1810 are both connected with the first film detection fixing plate 1812 along the Y-axis direction, a film detection fixing plate four 1811 is connected between the film detection fixing plate five 1805 and the film detection fixing plate six 1810, a film detection cylinder 1804 is arranged at the bottom of the film detection fixing plate five 1805 along one side of the positive direction of the Y axis, the driving end of the film detection cylinder 1804 is connected with the film detection fixing plate seven 1802 along one side of the positive direction of the X axis, a film detection pressing plate 1801 is installed at the bottom of the film detection fixing plate seven 1802, a film detection sensor plate 1808 is arranged on the film detection fixing plate six 1810 under the film detection cylinder 1804, a film detection sensor 1809 is installed on the film detection sensor plate 1808 along the X axis direction, a sensing hole is formed in the film detection fixing plate two 1803 along one side of the positive direction of the X axis by the film detection sensor 1809, a film sensor baffle 1814 is arranged on the film detection fixing plate two 1803 along one side of the positive direction of the X axis by the film sensor baffle 1815, and the film sensor baffle 1814 is installed on the film detection fixing plate two 1803.

Preferably, the film taking roller assembly 19 sequentially comprises a third film taking roller fixing plate 1901 and a first film taking roller fixing plate 1906 from top to bottom, the third film taking roller fixing plate 1901 is installed between the side edge 104 of the film sticking bracket motor and the side edge 106 of the film sticking bracket along the Y-axis direction, a second film taking roller fixing plate 1909 is arranged on the third film taking roller fixing plate 1901, a thin cylinder 1910 is arranged on the second film taking roller fixing plate 1909 along the Y-axis direction, the driving end of the bottom of the thin cylinder 1910 is connected with the first film taking roller fixing plate 1906 below through a cylinder floating joint 1913, a film taking roller 1904 is installed at the bottom of the first film taking roller fixing plate 1906 along the Y-axis direction, the film taking roller 1904 is installed on the first film taking roller fixing plate 1906 through a film taking roller bearing 1903 and a film taking roller bearing block, a static electricity eliminator 1915 is installed on one side of the third film taking roller fixing plate 1901 along the X-axis direction through a film taking ion wind bracket 1916, a plurality of film taking roller fixing plate guide mechanisms are connected between the second film taking roller fixing plate 1909 and the first film taking roller fixing plate 1906, and the guide mechanisms 1902 comprise film taking roller guide shafts 1907, a film taking roller linear bearing 1908 and a film taking roller limiting block 1914, wherein one side, close to the top, of a film taking roller guide shaft 1907 is mounted on a film taking roller fixing plate II 1909 through the film taking roller linear bearing 1908, one side of the bottom of the film taking roller guide shaft 1907 is connected with a film taking roller fixing plate I1906, the top of the film taking roller guide shaft 1907 is provided with a film taking roller limiting block 1914, film taking roller abutting edges 1905 are arranged on film taking roller fixing plates III 1901 on two sides of the film taking roller fixing plate II 1909 along the Y-axis direction, a film taking roller sensor mounting plate 1911 is arranged at the middle position of the bottom of the film taking roller fixing plate I1906 along the X-axis positive direction side, and a film taking roller sensor 1912 arranged towards the film taking roller 1904 is mounted at the bottom of the film taking roller sensor mounting plate 1911;

the auxiliary membrane taking knife assembly 20 comprises a membrane taking knife fixing plate 2001, a membrane taking knife seat 2002 and a membrane taking knife plate 2003, wherein the membrane taking knife seat 2002 is installed between the side edge 104 of the membrane sticking support motor and the side edge 106 of the membrane sticking support along the Y-axis direction through the membrane taking knife fixing plate 2001, and the membrane taking knife plate 2003 arranged towards the membrane taking rubber roll 1904 is installed on the membrane taking knife seat 2002.

The utility model discloses a concrete embodiment: the film sticking device is characterized in that the film sticking device support 1 at the bottom bears the whole film sticking device, a second film sticking base support 11 is arranged on one side below the film sticking device support 1, a first film sticking base support 10 is arranged on the other side, the mounting distances of the master-slave rollers at two sides are adjusted by adjusting a first film sticking base guide rail 1011 on the first film sticking base support 10 and a second film sticking base guide rail 1103 on the second film sticking base support 11, the mounting accuracy of the film sticking device can be effectively guaranteed, and each running film conveying roller is mounted on the film sticking device support 1 at the upper part.

Fig. 28 is a film transmission route diagram, and the film transmission sequentially passes through a first steering assembly, a second steering assembly, a floating roller assembly 7, a pressure feed main roller assembly 5, a pressure feed slave roller assembly 2, a discharging roller assembly 8, a film taking roller assembly 19, a third steering assembly, a pressure feed main roller assembly 5, a pressure feed slave roller assembly 2, a floating roller assembly 9, a fourth steering assembly and a receiving roller assembly 12.

The film is firstly cut by a film cutting device, then conveyed to a first steering assembly at a position on a film sticking device, and is turned by the first steering assembly, the film is conveyed in a preset direction, the film enters a second steering assembly from the first steering assembly and then is conveyed to a first floating roller assembly 7, the first floating roller assembly 7 is mounted on a film sticking device support frame 1 through a floating roller shaft 707, then the film is conveyed through a pressure-feeding slave roller assembly 2 and a pressure-feeding main roller assembly 5, the film is conveyed, wherein the pressure-feeding main roller assembly 5 comprises a driving motor and can provide power for the operation of the whole film, the operation smoothness of the film is ensured, no middle film clamping occurs, the film identifies the starting point position of the film sticking through a film sticking detection assembly 18, after the film passes through a third steering assembly, after the film taking auxiliary knife assembly 20 and a film taking roller assembly 19, the whole film is slowly taken off from a film belt, the film is stuck to a wafer by a subsequent film taking (not shown in the figure), after the film passes through the pressure-feeding auxiliary knife assembly 20 and the film taking roller assembly 19, the whole film is slowly taken off from the film belt, the film is conveyed from the pressure-feeding auxiliary knife assembly 2 and is conveyed to a floating roller assembly 9 through a pressure-feeding roller assembly, and then the floating roller assembly 9, the floating roller assembly is conveyed to a floating roller assembly, and the film collecting assembly 9, and the film collecting assembly is ensured that the film is conveyed to be wound on a floating roller assembly.

Wherein, the membrane stopper upper portion 2303 and the membrane stopper lower part 2304 card of the spacing subassembly 23 of membrane are locked on each roller axle that needs carry out spacing to the membrane, use the spacing bolt 2305 of membrane to lock, use the spacing jackscrew 2301 of membrane and membrane limit nut 2302 to fix a position.

The descriptions about the directions of the X, Y and Z axes described herein are based on fig. 1.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly referring to the number of technical features being indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted", "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected: either mechanically or electrically: they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

The above description is only a preferred embodiment of the present invention, and should not be used to limit the present invention, it should be noted that, for those skilled in the art, without departing from the technical principle of the present invention, a plurality of improvements and modifications can be made, and these improvements and modifications should also be regarded as the protection scope of the present invention.

Claims (10)

1. A film sticking device for semiconductor wafer film sticking is characterized by comprising a film device support (1), a first pressure roller unit, a second pressure roller unit, a first steering assembly, a second steering assembly, a third steering assembly, a fourth steering assembly, a first floating roller assembly (7), a discharging roller assembly (8), a second floating roller assembly (9), a first film sticking base support (10), a second film sticking base support (11), a receiving roller assembly (12), a film sticking detection assembly (18), a film taking roller assembly (19) and a film taking auxiliary cutter assembly (20);

the film device support (1) comprises a film sticking support motor side edge (104) on one side of a Y-axis negative direction and a film sticking support side edge (106) on one side of a Y-axis positive direction, the film sticking support motor side edge (104) and the film sticking support side edge (106) are connected together through a plurality of film sticking support connecting rods (101), a film sticking support rib plate (102) is arranged on the film sticking support motor side edge (104), a film sticking support connecting block (110) is arranged between the film sticking support rib plate (102) and the film sticking support motor side edge (104), a film sticking support connecting plate (107) is further connected and arranged at the bottom position between the film sticking support motor side edge (104) and the film sticking support side edge (106), a film sticking support extending plate I (109) is arranged at the top of the film sticking support side edge (106) on one side of the X-axis positive direction, a film sticking support extending plate II (103) is arranged at one side of the film sticking support motor side edge (104) close to the top of the X-axis positive direction, a film sticking support extending plate III (108) is arranged at one side edge (106) close to the middle part of the X-axis positive direction, and a plurality of film sticking support supports (105) are arranged at the bottom side edge (106) close to the film sticking support side edge of the film sticking support bracket side edge;

a triple amplifier fixing plate (13) is arranged on a position, close to the bottom, on a film sticking support rib plate (102) on one side of the film sticking support motor side edge (104) along the positive direction of an X axis, a triple amplifier (14) is installed on the triple amplifier fixing plate (13), a double amplifier fixing plate (3) is arranged on a position, close to the top, on one side of the film sticking support motor side edge (106) along the negative direction of the X axis, and a double amplifier (4) is installed on the double amplifier fixing plate (3);

the film sticking bracket side edge (106) is arranged on a first film sticking base bracket (10), the film sticking bracket motor side edge (104) is arranged on a second film sticking base bracket (11), a discharge roller component (8) is arranged on the position, close to the top, of the film sticking bracket motor side edge (104) along the Y-axis direction, a first steering component is arranged on one side of the discharge roller component (8) along the X-axis positive direction, the first steering component is connected with the film sticking bracket motor side edge (104) through a second film sticking bracket extension plate (103), a steering roller component (6) is connected with the film sticking bracket side edge (106) through a first film sticking bracket extension plate (109), a second steering component, a first floating roller component (7) and a first pressure roller unit are sequentially arranged on one side of the discharge roller component (8) along the X-axis negative direction, the second steering component, the first floating roller component (7) and the first pressure roller unit are sequentially arranged between the film sticking bracket motor side edge (104) and the film sticking bracket (106), a third steering component (18) and a fourth pressure roller component (18) and a third pressure roller component (19) are sequentially arranged on one side of the pressure roller unit along the Y-axis direction, the film sticking detection assembly (18), the third steering assembly, the film taking roller assembly (19), the film taking auxiliary cutter assembly (20), the second pressure roller unit, the floating roller assembly (9) and the fourth steering assembly are all installed between a film sticking support motor side edge (104) and a film sticking support side edge (106) along the Y-axis direction, and the material receiving roller assembly (12) is installed at one side position, close to the bottom, of the film sticking support motor side edge (104) along the X-axis positive direction.

2. The film laminating apparatus for semiconductor wafer film laminating according to claim 1, wherein said first nip roller unit comprises a nip slave roller assembly (2) and a nip master roller assembly (5) which are arranged in order along the positive direction of the X axis;

the pressure feed slave roller assembly (2) comprises a pressure feed slave roller adapter plate I (204), a pressure feed slave roller adapter plate III (205), a pressure feed slave roller adapter plate II (206), a pressure feed slave roller cylinder (207) and a pressure feed slave roller spindle (209), the pressure feed slave roller adapter plate II (206) is installed between the film sticking support motor side (104) and the film sticking support side (106) along the Y-axis direction, the pressure feed slave roller adapter plate III (205) is installed on the pressure feed slave roller adapter plate II (206) along one side of the X-axis negative direction, the pressure feed slave roller adapter plate III (205) is connected with the pressure feed slave roller adapter plate I (204) at the bottom of two sides of the pressure feed slave roller adapter plate III (205) along the Y-axis direction, the pressure feed slave roller cylinder (207) is installed between the two pressure feed slave roller adapter plate I (204) along the Y-axis direction, the pressure feed slave roller cylinder (202) and the pressure feed slave roller adapter plate II (206) are respectively installed on the film sticking support motor side (104) and the film sticking support side (106) of one side of the X-axis, the pressure feed slave roller adapter plate II (206) and the pressure feed cylinder (209) are respectively installed on the pressure feed slave roller spindle shaft (207), and the pressure feed slave roller spindle (201) along the two cylinders (201) along the direction, and the pressure feed cylinders (cylinder(s) are respectively connected with the pressure feed cylinders (201) from the pressure feed cylinders (207), and the pressure feed cylinders (cylinder(s) along the pressure feed cylinders (s (209), the pressure-feed slave roller fixing ring (208) is arranged on a pressure-feed slave roller spindle (209) outside the pressure-feed slave roller bearing (210);

the pressure-feed main roller assembly (5) comprises a pressure-feed main roller servo motor (501), a pressure-feed main roller reducer (502), a pressure-feed main roller supporting upright post (503), a pressure-feed main roller motor plate (507) and a pressure-feed main roller rubber coating roller (508), wherein the pressure-feed main roller servo motor (501) and the pressure-feed main roller reducer (502) are arranged on the side edge (104) of the film sticking bracket motor through the pressure-feed main roller motor plate (507) and a plurality of pressure-feed main roller supporting upright posts (503), the pressure-feed main roller servo motor (501) and the pressure-feed main roller reducer (502) are connected with the pressure-feed main roller rubber coating roller (508) through a pressure-feed main roller coupling (504), the pressure-feed main roller rubber coating roller (508) is arranged on the side edge (104) of the film sticking bracket motor through a pressure-feed main roller flange I (505), the pressure-feed main roller rubber coating roller (508) is arranged on the side edge (106) of the film sticking bracket through a pressure-feed main roller flange II (509), the pressure-feed main roller rubber coating roller (508) is connected with the pressure-feed main roller flange I (505) and the pressure-feed main roller flange II (509) through a pressure-feed main roller bearing (506), and the pressure-feed main roller rubber coating roller (508) is positioned on one side of the pressure-feed slave roller cylinder (207) along the positive direction of the X axis.

3. The film laminating apparatus for semiconductor wafer film laminating according to claim 1, wherein said second nip roller unit comprises a nip slave roller assembly (2) and a nip master roller assembly (5) which are arranged in sequence along the negative direction of the Z-axis;

the pressure feed slave roller assembly (2) comprises a pressure feed slave roller adapter plate I (204), a pressure feed slave roller adapter plate III (205), a pressure feed slave roller adapter plate II (206), a pressure feed slave roller cylinder (207) and a pressure feed slave roller spindle (209), the pressure feed slave roller adapter plate II (206) is installed between the film sticking support motor side edge (104) and the film sticking support side edge (106) along the Y-axis direction, the pressure feed slave roller adapter plate III (205) is installed on the pressure feed slave roller adapter plate II (206) along one side of the Z-axis direction, the pressure feed slave roller adapter plate III (205) is connected with the pressure feed slave roller adapter plate I (204) at the bottom of the two sides of the pressure feed slave roller adapter plate III (205) along the Y-axis direction, the pressure feed slave roller cylinder (207) is installed between the two pressure feed slave roller adapter plate I (204) along the Y-axis direction, the pressure feed slave roller cylinder (202) and the pressure feed slave roller adapter plate II (206) are respectively installed on the film sticking support motor side edge (104) and the film sticking support side edge (106) along the negative direction of the Z-axis direction, and the pressure feed slave roller spindle (209) are respectively installed on the pressure feed slave roller spindle shaft (207), and the pressure feed slave roller spindle (202) from the two pressure feed slave roller adapter plate II (206) along the Y-axis direction, and the cylinder (201, the cylinder (201) are respectively installed on the cylinder (209), a pressure-feed slave roller fixing ring (208) is arranged on a pressure-feed slave roller spindle (209) outside the pressure-feed slave roller bearing (210), and a pressure-feed slave roller adjusting block (203) is arranged between a pressure-feed slave roller adapter plate III (205) and a pressure-feed slave roller adapter plate II (206);

the pressure feed main roller assembly (5) comprises a pressure feed main roller servo motor (501), a pressure feed main roller speed reducer (502), a pressure feed main roller supporting upright post (503), a pressure feed main roller motor plate (507) and a pressure feed main roller rubber coating roller (508), wherein the pressure feed main roller servo motor (501) and the pressure feed main roller speed reducer (502) are arranged on the side edge (104) of the film sticking bracket motor through a pressure feed main roller motor plate (507) and a plurality of pressure feed main roller supporting upright posts (503), the pressure feed main roller servo motor (501) and the pressure feed main roller speed reducer (502) are connected with the pressure feed main roller rubber coating roller (508) through a pressure feed main roller coupling (504), the pressure feed main roller rubber coating roller (508) is arranged on the side edge (104) of the film sticking bracket motor through a pressure feed main roller flange I (505), the pressure feed main roller rubber coating roller (508) is arranged on the side edge (106) of the film sticking bracket motor through a pressure feed main roller flange II (509), the pressure feed main roller rubber coating roller (508) is connected with the pressure feed main roller flange II (509), and the pressure feed main roller rubber coating roller (508) is arranged on the side edge (207) of the film sticking bracket main roller flange II, and the pressure feed roller (508) and the pressure feed main roller (207) is arranged at the position of the pressure feed main roller (207).

4. The film laminating device for laminating the semiconductor wafer as claimed in claim 1, wherein the first steering component, the second steering component, the third steering component and the fourth steering component are all steering roller components (6), the steering roller components (6) comprise a steering roller shaft (603) and a steering roller barrel (605), the steering roller barrel (605) is connected with the inner steering roller shaft (603) through a steering roller bearing (601), the steering roller shaft (603) is installed on the motor side (104) of the film laminating bracket through a steering roller fixing ring (604) along one side of the Y-axis negative direction, the steering roller shaft (603) is installed on the side (106) of the film laminating bracket through a steering roller flange (602) along one side of the Y-axis positive direction, a steering roller fixing ring (604) is arranged on the steering roller shaft (603) outside the steering roller bearing (601) along one side of the Y-axis positive direction, and a film limiting component (23) is further arranged on the steering roller barrel (605).

5. The film laminating apparatus for semiconductor wafer lamination according to claim 1, wherein the first floating roll assembly (7) comprises a first floating roll slider (701), a first floating roll drum (704), a first floating roll guide (706), a first floating roll shaft (707), and a second floating roll slider (709), the first floating roll drum (704) is connected to the first floating roll shaft (707) inside through a first floating roll bearing (705), the first floating roll shaft (707) is mounted to the second floating roll slider (709) on the motor side (104) of the film laminating support through a first floating roll sleeve (708) on one side of the Y-axis negative direction, the first floating roll shaft (707) is mounted to the first floating roll slider (701) on the side (106) of the film laminating support through a spherical bearing (702) on one side of the Y-axis positive direction, the first floating roll slider (701) is connected to the first floating roll guide (706) mounted to the side (106) of the film laminating support along the Z-axis positive direction, the first floating roll sleeve (709) is mounted to the second floating roll guide (706) on one side of the film laminating support along the Z-axis positive direction, the first floating roll sleeve (707) is mounted to the first floating roll slider (706), and the second floating roll slider (707) is mounted to the motor (708) on one side of the film laminating support along the Y-axis positive direction, a film limiting component (23) is further arranged on the floating roller I roller (704); a floating roller first sensing assembly (21) is further arranged on the film sticking bracket motor side edge (104) on one side of the floating roller first sliding plate II (709), the floating roller first sensing assembly (21) comprises a floating roller first sensing strip (2103) which is arranged on the film sticking bracket motor side edge (104) along the Z-axis direction, and a floating roller first sensor (2102) is arranged on the floating roller first sensing strip (2103) in a manner that the floating roller first sensor sliding block (2101) can move along the Z-axis direction;

the film sticking support is characterized in that the floating roller two component (9) comprises a floating roller two sliding plate I (901), a floating roller two guide rail (902), a floating roller two roller barrel (903), a floating roller two sliding plate II (905) and a floating roller two shaft (906), the floating roller two roller barrel (903) is connected with the floating roller two shaft (906) on the inner side through a floating roller two bearing II (909), one side of the floating roller two shaft (906) along the Y-axis negative direction is installed on the floating roller two sliding plate II (905) on the film sticking support side (104) through a floating roller two bearing I (908) and is installed on the floating roller two sliding plate I (901) on the film sticking support side (106) along the Y-axis positive direction, the floating roller two sliding plate I (901) is connected with the floating roller two guide rail (902) installed on the film sticking support side (106) along the Z-axis direction, the floating roller two sliding plate I (901) is connected with the floating roller two sliding plate II (905) installed on the film sticking support side (104) along the Z-axis direction, and a floating roller two sliding plate roller guide rail (902) is provided with a floating roller two sensing roller (903) component (23); the film sticking support motor side (104) on one side of the second floating roller sliding plate (905) is further provided with a second floating roller sensing assembly (22), the second floating roller sensing assembly (22) comprises a second floating roller sensing strip (2203) installed on the film sticking support motor side (104) along the Z-axis direction, and a second floating roller sensor (2202) can be installed on the second floating roller sensing strip (2203) in a moving mode along the Z-axis direction through a second floating roller sensor sliding block (2201).

6. The film sticking device for semiconductor wafer film coating according to claim 1, wherein the discharging roller assembly (8) comprises a discharging roller shaft (806), a key-free synchronous pulley (808), a discharging roller reducer (809), a synchronous belt (810), a synchronous pulley (811), a discharging roller cylinder (815) and a discharging roller servo motor (818);

the discharging roller servo motor (818) is connected with the discharging roller shaft (806) through a synchronous pulley (811), a synchronous belt (810) and a key-free synchronous pulley (808) in turn, a discharging roller drum (815) is arranged on one side of the discharging roller shaft (806) along the positive direction of the Y axis, a discharging roller bearing sleeve (812) is arranged on a discharging roller shaft (806) between the discharging roller barrel (815) and the key-free synchronous pulley (808), the discharging roller bearing sleeve (812) is connected with a discharging roller shaft (806) through a discharging roller bearing (804), a second discharging roller retainer ring (817), a first discharging roller retainer ring (816) and a third discharging roller retainer ring (801) are arranged on a discharging roller shaft (806) between the discharging roller bearing sleeve (812) and the discharging roller drum (815), one side of the discharging roller shaft (806) along the negative direction of the Y axis is provided with a first pipe joint (805), a discharging roller adapter (803) and a diaphragm type clamping cylinder (814) are sequentially arranged in the groove of the discharging roller drum (815) along the positive direction of a Y axis, a second pipe joint (813) is arranged on the emptying roller adapter (803), one side of the diaphragm type clamping cylinder (814) along the negative direction of the Y axis is provided with a micro pipe joint (802), an emptying roller fixing shaft collar (807) is arranged on an emptying roller shaft (806) between the emptying roller bearing sleeve (812) and the key-free synchronous pulley (808); an optical fiber sensor fixing plate (16) is arranged on the side edge (104) of the film sticking support motor on one side of the discharging roller assembly (8) along the X-axis negative direction, and an optical fiber sensor (15) and a reflection baffle (17) are installed on the optical fiber sensor fixing plate (16).

7. The film laminating apparatus for laminating a semiconductor wafer according to claim 1, wherein the material receiving roller assembly (12) comprises a material receiving roller motor (1201), a material receiving roller reducer (1202), a material receiving roller shaft (1208) and a material receiving roller drum (1210), the material receiving roller motor (1201) and the material receiving roller reducer (1202) are mounted on the side edge (104) of the film laminating support motor through a material receiving roller fixing plate (1203) and a plurality of material receiving roller supporting rods (1205), the material receiving roller motor (1201) and the material receiving roller reducer (1202) are connected with the material receiving roller shaft (1208) through a material receiving roller coupling (1204), the material receiving roller shaft (1208) is connected with a material receiving roller flange (1207) through a material receiving roller bearing (1209), the material receiving roller flange (1207) is mounted on the side edge (104) of the film laminating support motor, and a material receiving roller fixing ring (1206) is arranged on the material receiving roller shaft (1209) between the material receiving roller coupling (1204).

8. The film sticking device for the film sticking of the semiconductor wafer according to claim 1, wherein said first film sticking base support (10) comprises, in order from bottom to top, a first film sticking base support (1010), a first film sticking base pad (1009), a first film sticking base slide plate (1007) and a second film sticking base transfer block (1004), said first film sticking base support (1010) is provided with a first film sticking base pad (1009), said first film sticking base pad (1009) is provided with a plurality of first film sticking base guide rails (1011) along the X-axis direction, said first film sticking base guide rails (1011) are arranged along the Y-axis direction, said first film sticking base guide rails (1011) are provided with a first film sticking base stopper (1013) along the first pad (1009) of the film sticking base on both sides of the Y-axis direction, the bottom of a pad pasting base slide (1007) is connected with a pad pasting base guide rail (1011) of below through a pad pasting base slider (1006), all be provided with on a pad pasting base backing plate (1009) of a pad pasting base slide (1007) along X axle direction both sides and be used for a pad pasting base fixed block (1008) fixed to a pad pasting base slide (1007), be provided with a pad pasting base transfer block two (1004) along X axle direction on a pad pasting base slide (1007), a pad pasting base transfer block two (1004) bottom all through a pad pasting base axle with a pad pasting base axle bed that sets up on a pad pasting base slide (1007) along the both sides of X axle direction (1001) The first film base transfer block (1004) and the second film base transfer block (1002) are fixedly mounted on the first film base sliding plate (1007) sequentially through the third film base transfer block (1003) and the first film base transfer block (1002), a first film base adjusting block (1012) and a second film base adjusting block (1005) are sequentially arranged on the second film base transfer block (1004) from bottom to top, the first film base adjusting block (1012) and the second film base adjusting block (1005) are connected together through a bidirectional bolt, the second film base adjusting block (1005) is connected with the side edge (106) of the film support above the second film base adjusting block (1005), and the second film base transfer block (1004) is located between the two film support abutting edges (105);

the second film sticking base bracket (11) sequentially comprises a second film sticking base bracket (1110), a second film sticking base backing plate (1109) and a first film sticking base backing plate (1104) from bottom to top, a second backing plate (1109) of the film sticking base is arranged on the second support (1110) of the film sticking base, a plurality of second pad pasting base guide rails (1103) are uniformly arranged on the second pad pasting base (1109) along the X-axis direction, the bottom of the first pad I (1104) of the second pad II of the film sticking base is connected with the second guide rail (1103) of the film sticking base below through a second slide block (1105) of the film sticking base, two sides of the first pad (1104) of the second pad of the film sticking base along the X-axis direction are connected with the rib plate (102) of the film sticking support through a second pad (1107) of the film sticking base and a second pad (1106) of the second pad of the film sticking base, the first pad (1104) of the pad pasting base can be fixedly arranged on the rib plate (102) of the pad pasting bracket through the second transfer block (1102) of the pad pasting base, a second pad II (1109) of the film sticking base at the outer side of the rib plate (102) of the film sticking support is provided with a second fixing block II (1101) of the film sticking base, a second plunger block II (1108) of the film sticking base is arranged on the film sticking support rib plate (102) above the second fixing block II (1101) of the film sticking base, the second fixing block (1101) of the film sticking base and the second plunger block (1108) of the film sticking base are connected together through a plunger (1112) of a second knob of the film sticking base and a first plunger block (1111) of the film sticking base.

9. The film sticking device for semiconductor wafer film sticking according to claim 1, wherein the film sticking detection assembly (18) comprises a first film sticking detection fixing plate (1812), a second film sticking detection fixing plate (1803), a fifth film sticking detection fixing plate (1805) and a sixth film sticking detection fixing plate (1810), the first film sticking detection fixing plate (1812) is movably mounted on the side edge (104) of the film sticking bracket motor along the Z-axis direction through a first film sticking detection adjusting rod (1806) and a second film sticking detection adjusting nut (1807), the second film sticking detection fixing plate (1803) is connected with the first film sticking detection fixing plate (1812) along the Y-axis direction through a plurality of third film sticking detection fixing plates (1813), the second film sticking detection fixing plate (1803) is provided with the fifth film sticking detection fixing plate (1805) and the sixth film sticking detection fixing plate (1810) from top to bottom along the Y-axis negative direction, the fifth film sticking detection fixing plate (1805) and the sixth film sticking detection fixing plate (1810) are sequentially arranged along the Y-axis direction, the fifth film sticking detection fixing plate (1805) and the sixth film sticking detection fixing plate (1810) are connected with the detection fixing plate (1805) along the Y-axis, the X-axis, the detection fixing plate (1815) and the detection cylinder detection fixing plate (1810) are arranged between the bottom of the detection cylinder (1815), pad pasting detects clamp plate (1801) is installed to the bottom of pad pasting detection fixed plate seven (1802), be provided with pad pasting detection inductor board (1808) on six (1810) of pad pasting detection fixed plate under pad pasting detection cylinder (1804), install pad pasting detection inductor (1809) along the X axle direction on pad pasting detection inductor board (1808), set up the response hole on pad pasting detection inductor (1809) along X axle positive direction one side detects fixed plate two (1803), the response hole is provided with pad pasting inductor baffle (1814) on pad pasting detection fixed plate two (1803) along X axle positive direction one side, install on pad pasting detection fixed plate two (1803) through pad pasting inductor connecting plate (1815) pad pasting inductor baffle (1814).

10. The film sticking device for semiconductor wafer film sticking as claimed in claim 1, wherein the film taking roller assembly (19) comprises a film taking roller fixing plate three (1901) and a film taking roller fixing plate one (1906) in sequence from top to bottom, the film taking roller fixing plate three (1901) is installed between a motor side (104) of the film sticking bracket and a side (106) of the film sticking bracket along a Y-axis direction, a film taking roller fixing plate two (1909) is arranged on the film taking roller fixing plate three (1901), a thin air cylinder (1910) is arranged at the middle position of the film taking roller fixing plate two (1909) along the Y-axis direction, the driving end of the bottom of the thin air cylinder (1910) is connected with the film taking roller fixing plate one (1906) below through an air cylinder floating joint (1913), a film taking roller (1904) is installed at the bottom of the film taking roller fixing plate one (1906) along the Y-axis direction, the film taking roller fixing plate (1904) is installed on the film taking roller fixing plate (1906) through a film taking roller bearing (1903) and a film taking roller bearing seat (1906), a film taking roller fixing plate bearing guide block (1905) and a film taking roller guide mechanism (1915) is installed on one side of the film taking roller fixing plate (1906), and a film taking roller guide mechanism is installed between the film taking roller guide block (1905) and a film taking roller guide block (1906), one side, close to the top, of the film taking roller guide shaft (1907) is installed on a second film taking roller fixing plate (1909) through a first film taking roller linear bearing (1908), one side, close to the bottom, of the film taking roller guide shaft (1907) is connected with a first film taking roller fixing plate (1906), a film taking roller limiting block (1914) is arranged at the top of the film taking roller guide shaft (1907), film taking roller abutting edges (1905) are arranged on third film taking roller fixing plates (1901) on two sides of the second film taking roller fixing plate (1909) along the Y-axis direction, a first film taking roller sensor installing plate (1911) is arranged at the middle position of the bottom of the first film taking roller fixing plate (1906) along one side of the X-axis positive direction, and a film taking roller sensor (1912) arranged towards the film taking roller (1904) is installed at the bottom of the first film taking roller sensor installing plate (1911);

the auxiliary membrane taking knife assembly (20) comprises a membrane taking knife fixing plate (2001), a membrane taking knife seat (2002) and a membrane taking knife plate (2003), wherein the membrane taking knife seat (2002) is installed between a membrane sticking support motor side edge (104) and a membrane sticking support side edge (106) along the Y-axis direction through the membrane taking knife fixing plate (2001), and the membrane taking knife plate (2003) arranged towards a membrane taking rubber roll (1904) is installed on the membrane taking knife seat (2002).

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