CN218301918U

CN218301918U - Low-impurity-sense device for silicon carbide double-pulse low-temperature test

Info

Publication number: CN218301918U
Application number: CN202221575768.8U
Authority: CN
Inventors: 陈俊; 李宝华
Original assignee: Chenxin Electronics Suzhou Co ltd
Current assignee: Chenxin Electronics Suzhou Co ltd
Priority date: 2022-06-22
Filing date: 2022-06-22
Publication date: 2023-01-13
Anticipated expiration: 2032-06-22

Abstract

The application relates to a silicon carbide double-pulse low-temperature test low-impurity-inductance device which comprises a cooling box, wherein a module to be tested is arranged in the cooling box, a sealing plate is arranged outside the cooling box and corresponds to the module to be tested, the cooling box can be sealed by the sealing plate, and a driving plate and a main power connecting plate are integrated into the sealing plate; the drive plate on the sealing plate is arranged corresponding to the tested module; the position of the cooling box corresponding to the sealing plate is provided with a hot air channel, and the hot air channel is mutually abutted with the upper surface of the sealing plate. Even under the low temperature environment again, the application has the silicon carbide module of being surveyed, and survey major loop and signal return circuit can also keep low miscellaneous feeling. Thereby guaranteeing the effect of testing precision.

Description

Low-impurity-sense device for silicon carbide double-pulse low-temperature test

Technical Field

The application relates to the field of low-temperature detection, in particular to a silicon carbide double-pulse low-temperature test low-impurity-sense device.

Background

The current silicon carbide test platform has the advantages that due to the switching characteristic of silicon carbide, the rising and falling speeds of current are very high, and the silicon carbide module can be accurately tested in a full-range test only by the aid of a small enough stray induction main loop/signal loop of measurement equipment. With increasing testing requirements, low temperature testing has become increasingly desired by customers.

In view of the above-mentioned related art, the inventors believe that the low temperature testing requires that the module be placed in a cold box for testing to ensure that the silicon carbide module under test reaches-40 °. But at the same time, the connecting wire of the main loop and the signal loop needs to be led out, thus increasing the noise of the main loop and the signal loop. The existence of low impurity with silicon carbide is contradictory due to the visible low temperature test.

SUMMERY OF THE UTILITY MODEL

In order to keep the main loop and the signal loop to be tested low in noise even in the low-temperature environment of the silicon carbide module to be tested. Thereby guarantee the measuring accuracy, this application provides a carborundum dipulse low temperature test low miscellaneous sense device.

The application provides a low miscellaneous sense device of carborundum dipulse low temperature test adopts following technical scheme:

a silicon carbide double-pulse low-temperature test low-impurity-degree device comprises a cooling box, wherein a tested module is arranged in the cooling box, a sealing plate is arranged outside the cooling box and corresponds to the tested module, the cooling box can be sealed by the sealing plate, and the sealing plate integrates a driving plate and a main power connecting plate; the drive plate on the sealing plate is arranged corresponding to the tested module; the position of the cooling box corresponding to the sealing plate is provided with a hot air channel, and the hot air channel is mutually abutted with the upper surface of the sealing plate.

By adopting the technical scheme, the heated module is arranged in the cooling box, and the driving plate and the main power connecting plate on the sealing plate are arranged in the greenhouse, so that the state that the noise of a driving loop is lowest and the driving waveform is best is ensured; because the lower surface of the sealing plate is arranged in a thermostatic chamber with the temperature of minus 40 ℃, and the upper surface is arranged in the normal temperature, the temperature difference exists between the upper surface and the lower surface, thereby the phenomenon of condensation is inevitably generated, the upper surface of the sealing tank is conducted with heat conduction through the hot air channel, and the problem of condensation on the upper surface is solved.

Optionally, the sealing plate adopts a multilayer laminated PCB structure; the sealing plate is connected with the bus through a copper column, and the copper column stray inductance =4nh; the closing plate is the material PCB board, and thickness is 3mm.

By adopting the technical scheme, the positive electrode and the negative electrode of the main power connecting plate are connected with the main circuit board and the external bus capacitor through the copper columns, so that the stray inductance of the whole circuit can be reduced, the stray inductance of a signal circuit is lowest, the driving waveform is best, and the sealing plate adopts a multilayer laminated PCB structure, so that the stray inductance is further reduced; the position that the drive plate set up is just to being surveyed the module, makes on the module signal that is surveyed can the first time conduction to the drive plate.

Optionally, a locking groove is formed in the position, corresponding to the sealing plate, of the cooling box, the locking groove is a key groove, a locking block is arranged at the position, corresponding to the locking groove, of the cooling box, the locking block is abutted to the sealing plate, a guide inclined plane is formed in one end, close to the sealing plate, of the locking block, the guide inclined plane takes the lower end of the locking block as a starting point, one side, close to the sealing plate, tends to be inclined upwards, an elastic part pushing the locking block to abut against the sealing plate is arranged above the locking block, a vertically-arranged guide rod is arranged in the locking block, the guide groove is formed in the position, corresponding to the guide rod, of the locking block, and the guide rod can be connected into the guide groove in a sliding mode.

Through adopting above-mentioned technical scheme, detect the module to be surveyed when the cooler bin, the temperature is great around the closing plate, leads to the deformation of closing plate easily, promotes through the elastic component that the lock position piece moves along vertical direction, and guide bar and guide way mutually support, inject the direction of sliding of lock position piece, promote the lock position piece through the elastic component and seal the closing plate.

Optionally, a fixing bolt is arranged at a position of the cooling box corresponding to the sealing plate, a plastic shell is arranged at a position of the cooling box corresponding to the fixing bolt, the plastic shell can be in threaded connection with the fixing bolt, a positioning hole is arranged at a position of the sealing plate corresponding to the plastic shell, and the fixing bolt can be inserted into the positioning hole.

Through adopting above-mentioned technical scheme, seal the closing plate through fixing bolt, insert through fixing bolt and locate the fixed of realization to closing plate relative position in the locating hole, set up the plastic casing in the cooler bin body and reduce fixing bolt and lead to the box internal temperature to change with external air heat conduction to the cooler bin, thereby lead to being surveyed the module detection effect not good.

Optionally, a hot air pipeline is arranged above the cooling box corresponding to the sealing plate, a water bag is arranged between the hot air pipeline and the sealing plate, a thermometer is arranged on the water bag, the thermometer can detect the temperature of the water bag, the constant-temperature water bag is abutted to the external air, and the water bag is abutted to the sealing plate.

Optionally, a refrigerator is arranged in the cooling box, a heat conduction pipe is arranged between an exchange port of the refrigerator and the hot air pipeline, an air compressor is arranged outside the heat conduction pipe, and a gas check valve is arranged in the heat conduction pipe.

By adopting the technical scheme, the heat generated by the refrigerating machine is sent to the hot air pipeline through the air compressor, the gas heat energy utilization rate is increased, then the gas one-way valve is used for preventing gas in the hot air pipeline from flowing back, the water bag is observed through the temperature machine, the temperature is conducted through the water bag, the specific heat capacity of water is greater than that of air, the probability of abrupt temperature change of the sealing plate is reduced through the water bag, and the sealing plate is prevented from being damaged due to abrupt temperature change.

Optionally, a plurality of reset grooves are formed in the lock position groove, adjacent reset grooves are parallel to each other, a reset spring is arranged in each reset groove, a reset block is connected to each reset groove in a sliding manner, each reset spring can push each reset block to slide in a direction away from the cooling box, a rotating rod which moves synchronously is arranged on each reset block, a rotating wheel which moves synchronously and rotates synchronously is arranged on each rotating rod, and the rotating direction of each rotating wheel is the same as the pushing direction of the sealing plate; the cooling box is provided with a clamping groove, a pressing plate is fixedly connected at the position of the cooling box corresponding to the clamping groove, and the gap between the pressing plate and the clamping groove is the same as the thickness of the sealing plate.

By adopting the technical scheme, when the sealing plate slides to seal the cooling box, the sealing plate is abutted with the rotating wheel, the upper surface of the sealing plate is abutted with the pressing plate, so that the sealing plate can be abutted with the locking groove, and when the sealing plate slides, the sealing plate is limited in the sliding direction through the pressing plate, the sealing plate is abutted with the outer peripheral surface of the rotating plate when the sealing plate slides, so that the rotating rod and the rotating wheel are driven to rotate synchronously, and when the sealing plate is abutted with the pressing plate, the sealing plate pushes the rotating wheel and the reset block to slide along the direction of the reset groove; the return spring is extruded and has the acting force for pushing the rotating wheel to reset.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the heated module is arranged in the cooling box, and the driving plate and the main power connecting plate on the sealing plate are arranged in the greenhouse, so that the state that the noise of a driving loop is lowest and the driving waveform is best is ensured; because the lower surface of the sealing plate is arranged in a thermostatic chamber with the temperature of minus 40 ℃, the upper surface is arranged in the normal temperature, and the temperature difference exists between the upper surface and the lower surface, the condensation phenomenon is inevitably generated;

2. when the cooling box detects a module to be detected, the front temperature and the rear temperature of the sealing plate are high, the deformation of the sealing plate is easily caused, the locking block is pushed by the elastic piece to move along the vertical direction, the guide rod and the guide groove are matched with each other to limit the sliding direction of the locking block, and the elastic piece pushes the locking block to seal the sealing plate;

3. when the sealing plate slides to seal the cooling box, the sealing plate and the rotating wheel are mutually abutted, the upper surface of the sealing plate is mutually abutted with the pressing plate, so that the sealing plate can be mutually abutted with the locking groove, the sealing plate is limited in the sliding direction through the pressing plate when the sealing plate slides, the sealing plate is mutually abutted with the outer peripheral surface of the rotating plate when the sealing plate slides, so that the rotating rod and the rotating wheel are driven to synchronously rotate, and when the sealing plate is mutually abutted with the pressing plate, the sealing plate pushes the rotating wheel and the reset block to slide along the direction of the reset groove; the return spring is extruded and has the acting force for pushing the rotating wheel to reset.

Drawings

Fig. 1 is an overall schematic diagram of a silicon carbide double-pulse low-temperature testing low-impurity-level device in this embodiment.

FIG. 2 is a schematic view of a portion of a protruding sealing plate of a silicon carbide double-pulse low-temperature testing device in this embodiment.

FIG. 3 is a schematic view of the whole cooling box of the silicon carbide double-pulse low-temperature testing low-noise device in the present embodiment.

FIG. 4 is a partial schematic view of a protruding spring frame of a silicon carbide double-pulse low-temperature-testing low-noise apparatus according to the present embodiment.

FIG. 5 is a schematic cross-sectional view of a protruding elastic member of a silicon carbide double-pulse low-temperature-testing low-noise apparatus in this embodiment.

FIG. 6 is a partial schematic view of a protruded reset element of a silicon carbide double-pulse low-temperature-testing low-noise device in this embodiment.

FIG. 7 is a schematic view of a portion of a hot air pipe protruding from a silicon carbide double-pulse low-temperature testing apparatus according to the present embodiment.

Description of reference numerals: 1. a cooling tank; 11. a clamping groove; 12. a position locking groove; 13. a sealing plate; 14. a module to be tested; 15. a bus bar; 16. a copper pillar; 2. a spring holder; 21. an elastic member; 22. a position locking block; 23. a guide rod; 24. a guide groove; 25. a guide slope; 3. resetting the assembly; 31. a reset groove; 32. a return spring; 33. a reset block; 34. rotating the rod; 35. a rotating wheel; 36. pressing a plate; 4. fixing the bolt; 41. a plastic housing; 42. positioning holes; 5. a hot air duct; 51. a hot air blower; 52. a refrigerator; 53. a heat conducting pipe; 54. a gas check valve; 55. a water bag; 56. a thermometer.

Detailed Description

The present application is described in further detail below with reference to figures 1-7.

The embodiment of the application discloses a low miscellaneous sense device of carborundum dipulse low temperature test.

Referring to fig. 1 and 2, the silicon carbide double-pulse low-temperature test low-impurity-sensation device comprises a cooling box 1, wherein a clamping groove 11 is formed in the cooling box 1, the clamping groove 11 is formed at a position close to one side of the cooling box 1, and the clamping groove 11 is a through groove; a locking groove 12 is formed in the periphery of the surface of the cooling box 1, which is opposite to the clamping groove 11, and the locking groove 12 is a key groove; a sealing plate 13 is arranged at the position of the cooling box 1 corresponding to the locking groove 12, the size of the sealing plate 13 is the same as that of the locking groove 12, and the sealing plate 13 can cover the clamping groove 11 so as to seal the inside of the cooling box 1; the position that the closing plate 13 corresponds the cold district case is rigid coupling has measured module 14, is provided with drive plate and main power connecting plate on the closing plate 13, and the position that corresponds the main power board connecting plate on the closing plate 13 is provided with generating line 15, is connected through copper post 16 between generating line 15 and the main power connecting plate, and copper post 16 is miscellaneous to feel =4nh, and closing plate 13 material is the PCB board, and closing plate 13's thickness is 3mm.

When the circuit is used, the positive electrode and the negative electrode of the main power connecting plate are connected with the main circuit board and an external bus 15 capacitor through the copper columns 16, so that the stray inductance of the whole circuit can be reduced, the stray inductance of a signal circuit is lowest, the driving waveform is best, and the sealing plate 13 adopts a multilayer laminated PCB structure, so that the stray inductance is further reduced; the driving plate is arranged at a position opposite to the tested module 14, so that signals of the tested module 14 can be transmitted to the driving plate at the first time.

Referring to fig. 3 and 4, the position rigid coupling that cooling box 1 corresponds to the groove 12 that locks has spring frame 2, the rigid coupling has the elastic component 21 of vertical setting on the spring frame 2, the vertical setting of elastic component 21 axis, the other end rigid coupling of elastic component 21 has a block 22 that locks, the rigid coupling has the guide bar 23 that the coaxial line set up in the elastic component 21, guide way 24 has been seted up to the position that block 22 corresponds guide bar 23, guide way 24 is seted up along vertical direction, guide bar 23 can be followed vertical direction and slided and connect in guide way 24, the one end that elastic component 21 was kept away from to block 22 has been seted up the direction inclined plane 25, direction inclined plane 25 uses the lower extreme of block 22 that locks as the starting point, the one side slope that the trend is close to closing plate 13 upwards sets up, direction inclined plane 25 can be with closing plate 13 mutual butt.

During the use, seal plate 13 seals cooler bin 1, seal plate 13 is placed in the position locking groove 12, seal plate 13 and the mutual butt of the direction inclined plane 25 on the piece 22 of keeping a lock, can promote the piece 22 of keeping a lock and slide along vertical direction, elastic component 21 has the vertical downward trend of promotion piece 22 of keeping a lock, the slip direction of piece 22 of keeping a lock is injectd through guide bar 23 and guide way 24, when cooler bin 1 carries out the during operation to the module 14 of being surveyed, cause the expend with heat and contract with cold of seal plate 13 easily, drive the piece 22 of keeping a lock and slide downwards through elastic component 21, make seal plate 13 can seal cooler bin 1.

Referring to fig. 2 and 6, a plurality of sets of reset assemblies 3 are disposed on the lock slot 12 along the vertical direction, each reset assembly 3 includes two reset slots 31 disposed on the lock slot 12, the two reset slots 31 are parallel to each other, a reset spring 32 with a vertical axis is fixedly connected in each reset slot 31, a lower end of each reset spring 32 is fixedly connected with each reset slot 31, an upper end of each reset spring 32 is fixedly connected with a reset block 33, one side of each reset block 33, which is close to each other, is rotatably connected with a rotating rod 34, a rotating wheel 35 is fixedly connected in the middle of each rotating rod 34, and the rotating direction of each rotating wheel 35 is the same as the pushing direction of the sealing plate 13; a pressure plate 36 is fixedly connected to the position of the cooling box 1 corresponding to the clamping groove 11, and the gap between the pressure plate 36 and the clamping groove 11 is the same as the thickness of the sealing plate 13.

When the cooling box 1 is used, when the sealing plate 13 slides to seal the cooling box 1, the sealing plate 13 is abutted with the rotating wheel 35, the upper surface of the sealing plate 13 is abutted with the pressing plate 36, so that the sealing plate 13 can be abutted with the locking groove 12, and when the sealing plate 13 slides, the sealing plate 13 is limited in the sliding direction through the pressing plate 36, when the sealing plate 13 slides, the outer peripheral surfaces of the sealing plate 13 and the rotating wheel 35 are abutted with each other, so that the rotating rod 34 and the rotating wheel 35 are driven to rotate synchronously, and when the sealing plate 13 is abutted with the pressing plate 36, the sealing plate 13 pushes the rotating wheel 35 and the reset block 33 to slide along the direction of the reset groove 31; the return spring 32 is pressed, and the return spring 32 has a force of pushing the rotating wheel 35 to return.

Referring to fig. 1 and 2, the cooling box 1 is connected with fixing bolts 4 through threads on the periphery corresponding to the sealing plate 13, the sealing plate 13 is provided with positioning holes 42 corresponding to the fixing bolts 4, the fixing bolts 4 can penetrate through the positioning holes 42, the position where the fixing bolts 4 can be fixed in the cooling box 1 is fixedly connected with a plastic shell 41, and the plastic shell 41 can be in threaded fit with the end portions of the fixing bolts 4 extending into the cooling box 1.

During the use, insert fixing bolt 4 and locate in locating hole 42, fixing bolt 4's tip can with plastics casing 41 screw-thread fit, reduce external heat through plastics casing 41 and conduct heat to the cooling box 1 internal from fixing bolt 4, lead to the interior temperature of cooling box 1 not invariable.

Referring to fig. 1 and 7, an axis horizontal hot air pipeline 5 is arranged above the cooling box 1 corresponding to the sealing plate 13, one end of the hot air pipeline 5 is fixedly connected with a hot air blower 51, and the other end of the hot air pipeline 5 is communicated with the outside; a refrigerator 52 is arranged in the cooling box 1, a cold air port of the refrigerator 52 is communicated with the cooling box 1, a heat conduction pipe 53 is arranged on an exchange port of the refrigerator 52, the heat conduction pipe 53 is communicated with the hot air pipeline 5, a gas one-way valve 54 is arranged on the heat conduction pipe 53, and the gas in the heat conduction pipe 53 can only circulate from the refrigerator 52 to the hot air pipeline 5 through the gas one-way valve 54. A water bag 55 is provided between the hot air duct 5 and the sealing plate 13, and a thermometer 56 is provided on the water bag 55.

When the refrigerator is used, heat generated by the refrigerator 52 is sent to the hot air pipeline 5, the gas heat energy utilization rate is increased, then the gas one-way valve 54 is used for preventing gas in the hot air pipeline 5 from flowing back, the water bag 55 is observed through the thermometer 56, temperature conduction is carried out through the water bag 55, the probability of sudden temperature change of the sealing plate 13 is reduced through the water bag 55 because the specific heat capacity of water is larger than that of air, and the sealing plate 13 is prevented from being damaged due to the sudden temperature change.

The above are preferred embodiments of the present application, and the scope of protection of the present application is not limited thereto, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides a low miscellaneous device of carborundum dipulse low temperature test which characterized in that: the device comprises a cooling box (1), a module to be tested (14) is arranged in the cooling box (1), a sealing plate (13) is arranged outside the cooling box (1) and corresponds to the module to be tested (14), the cooling box (1) can be sealed by the sealing plate (13), and a driving plate and a main power connecting plate are integrated in the sealing plate (13); the driving plate on the sealing plate (13) is arranged corresponding to the module to be tested (14); a hot air channel is arranged outside the cooling box (1) corresponding to the position of the sealing plate (13), and the hot air channel is mutually abutted with the upper surface of the sealing plate (13).

2. The silicon carbide double-pulse low-temperature test low-impurity-feeling device according to claim 1, characterized in that: the sealing plate (13) adopts a multilayer laminated PCB structure; the sealing plate (13) is connected with the bus bar (15) through a copper column (16), and the stray inductance of the copper column (16) is =4nh; the sealing plate (13) is a PCB with the thickness of 3mm.

3. The silicon carbide double-pulse low-temperature test low-impurity-sensitivity device according to claim 1, wherein: the cooling box (1) has seted up the lock groove (12) corresponding to the position of closing plate (13), lock groove (12) are the keyway, the position that cooling box (1) corresponds lock groove (12) is provided with lock piece (22), lock piece (22) and closing plate (13) butt each other, lock piece (22) are close to the one end of closing plate (13) and have seted up direction inclined plane (25), direction inclined plane (25) use the lower extreme of lock piece (22) as the starting point, the one side slope that tends to be close to closing plate (13) upwards sets up, lock piece (22) top is provided with the elastic component (21) that promotes lock piece (22) butt in closing plate (13), be provided with guide bar (23) of vertical setting in lock piece (22), guide groove (24) have been seted up to the position that lock piece (22) correspond guide bar (23), guide bar (23) can sliding connection in guide groove (24).

4. The silicon carbide double-pulse low-temperature test low-impurity-sensitivity device according to claim 1, wherein: the cooling box is characterized in that a fixing bolt (4) is arranged at the position, corresponding to the sealing plate (13), of the cooling box (1), a plastic shell (41) is arranged at the position, corresponding to the fixing bolt (4), of the cooling box body (1), the plastic shell (41) can be in threaded connection with the fixing bolt (4), a positioning hole (42) is formed in the position, corresponding to the plastic shell (41), of the sealing plate (13), and the fixing bolt (4) can be inserted into the positioning hole (42).

5. The silicon carbide double-pulse low-temperature test low-impurity-sensitivity device according to claim 1, wherein: a hot air pipeline (5) is arranged above the cooling box (1) corresponding to the sealing plate (13), a water bag (55) is arranged between the hot air pipeline (5) and the sealing plate (13), a thermometer (56) is arranged on the water bag (55), the thermometer (56) can detect the temperature of the water bag (55), the water bag (55) is abutted to the outside air, and the water bag (55) is abutted to the sealing plate (13).

6. The silicon carbide double-pulse low-temperature testing low-impurity-feeling device according to claim 5, characterized in that: a refrigerating machine (52) is arranged in the cooling box (1), a heat conduction pipe (53) is arranged between an exchange port of the refrigerating machine (52) and the hot air pipeline (5), and a gas one-way valve (54) is arranged in the heat conduction pipe (53).

7. The silicon carbide double-pulse low-temperature test low-impurity-sensitivity device according to claim 3, wherein: the cooling box is characterized in that a plurality of reset grooves (31) are formed in the position locking groove (12), adjacent reset grooves (31) are parallel to each other, reset springs (32) are arranged in the reset grooves (31), reset blocks (33) are connected in the reset grooves (31) in a sliding mode, the reset springs (32) can push the reset blocks (33) to slide in a direction away from the cooling box (1), synchronously moving rotating rods (34) are arranged on the reset blocks (33), synchronously moving and synchronously rotating wheels (35) are arranged on the rotating rods (34), and the rotating direction of the rotating wheels (35) is the same as the pushing direction of the sealing plate (13); the cooling box (1) is provided with a clamping groove (11), a pressing plate (36) is fixedly connected to the position, corresponding to the clamping groove (11), of the cooling box (1), and the gap between the pressing plate (36) and the clamping groove (11) is the same as the thickness of the sealing plate (13).