CN218280927U - Solid-containing emptying tail gas separation system - Google Patents
Solid-containing emptying tail gas separation system Download PDFInfo
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- CN218280927U CN218280927U CN202222217110.6U CN202222217110U CN218280927U CN 218280927 U CN218280927 U CN 218280927U CN 202222217110 U CN202222217110 U CN 202222217110U CN 218280927 U CN218280927 U CN 218280927U
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Abstract
The utility model discloses a solid-containing emptying tail gas separation system, which relates to the technical field of polysilicon tail gas treatment and comprises a silicon powder filter, a fine filter, a leaching tower and a tail gas receiving tank; the outlet of the silicon powder filter is connected with the inlet of the fine filter through a first pipeline, connected with the inlet of the leaching tower through a second pipeline, and connected with the inlet of the tail gas receiving tank through a third pipeline; the outlet of the fine filter is connected with the inlet of the leaching tower through a fourth pipeline and is connected with the inlet of the tail gas receiving tank through a fifth pipeline. The silicon powder filter filters the silicon powder in the solid vent tail gas, the fine filter intercepts the silicon powder which is not completely intercepted by the silicon powder filter, the silicon powder is prevented from entering the leaching tower, and the silicon powder in the vent gas is intercepted by setting two-stage filtration so as to completely filter the silicon powder in the solid vent tail gas; and (4) feeding the emptying tail gas after the silicon powder is filtered into the leaching tower, and purifying the emptying tail gas by the leaching tower to obtain dischargeable tail gas.
Description
Technical Field
The utility model relates to a polycrystalline silicon tail gas treatment technical field, more specifically say and relate to a contain solid unloading tail gas piece-rate system.
Background
Polycrystalline silicon is a form of elemental silicon. When molten elemental silicon is solidified under undercooling conditions, silicon atoms are arranged in the form of a diamond lattice into a plurality of crystal nuclei, and if the crystal nuclei grow into crystal grains with different crystal plane orientations, the crystal grains are combined and crystallized into polycrystalline silicon.
In a chlorosilane treatment system in the current stage of polycrystalline silicon production, a tail gas recovery system mainly aims to carry out cooling, compression, condensation, absorption, analysis and other means on reduction tail gas so as to reduce chlorosilane (including DCS, TCS and STC) and H in the reduction tail gas 2 And separating HCl. Providing liquid chlorosilane for recovery and rectification and qualified H for reduction or adsorption 2 And qualified HCl is provided for TCS synthesis. However, the reduction tail gas contains a certain amount of amorphous fine silicon powder, and the silicon powder enters the liquid phase circulation of the steel structure along with silane condensed by the pre-mechanical condensation system and finally enters the rectification system, so that the scouring abrasion or the blockage of a steel structure heat exchanger or a rectification reboiler is caused; the chlorosilane containing silicon powder has more metal impurities, and the quality of a rectification product is seriously influenced.
In the prior art, patent publication No. CN111228932a discloses a silicon powder filtering system, which includes a main filter and a residual liquid filter connected with each other, liquid chlorosilane is conveyed into the main filter, the chlorosilane liquid passes through micropores of a metal membrane element, is guided out from a clear liquid outlet, and is guided into a subsequent steel heater to perform subsequent process flows, silicon powder and other particulate impurities are intercepted outside the metal membrane element, the main filter inputs the filtered silicon powder and residual liquid into the residual liquid filter, the residual liquid filter heats the silicon powder and residual liquid, gaseous chlorosilane is output through a chlorosilane outlet, and the heated and replaced clean silicon powder is output through a silicon powder outlet and collected. The silicon powder filtering system provided by the invention effectively intercepts the silicon powder in the reduction tail gas, greatly reduces the possibility that the silicon powder enters a steel structure and a subsequent system, ensures the stable and safe operation of the system, improves the quality of a refined rectification product, and realizes the drying and recycling of the silicon powder.
The silicon powder filtering system disclosed in the above patent has the following defects:
1. the above patent is specially directed to silica powder interception in a reduction tail gas system, and is not suitable for solid phase filtration in gas phase because it is a liquid filter.
2. Because it is a liquid filter, does not have the drip washing tower, so does not have the gas purification treatment ability.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects existing in the prior art, the utility model aims to provide a separation system for tail gas containing solid emptying, which aims to solve the defect that the separation system can not be applicable to solid phase filtration in gas phase and does not have gas purification treatment capacity.
In order to realize the above purpose, the utility model discloses a technical scheme:
a tail gas separation system containing solid and vent gas comprises a silicon powder filter, a fine filter, a leaching tower and a tail gas receiving tank;
the outlet of the silicon powder filter is connected with the inlet of the fine filter through a first pipeline, connected with the inlet of the leaching tower through a second pipeline, and connected with the inlet of the tail gas receiving tank through a third pipeline; and the outlet of the fine filter is connected with the inlet of the leaching tower through a fourth pipeline and is connected with the inlet of the tail gas receiving tank through a fifth pipeline.
Further, the fine filter comprises a barrel body and a filter element; the staving is vertical to be arranged, and its top is provided with the staving import, and the bottom is provided with the staving export, the filter core is installed inside the staving.
Furthermore, the bottom of the barrel body is a flared port which contracts downwards, and the outlet of the barrel body is arranged at the flared port.
Further, the filter element is a filter element with a pore diameter of 5 mu m.
Further, the top end of the silicon powder filter is connected with a nitrogen pipe.
Further, a first valve is arranged at the outlet of the silicon powder filter, a second valve and a third valve are respectively arranged on the second pipeline and the third pipeline, a fourth valve and a fifth valve are sequentially arranged on the first pipeline along the conveying direction, a sixth valve and a seventh valve are respectively arranged at the inlet and the outlet of the fine filter, front end pipelines of the fourth pipeline and the fifth pipeline are collinear, an eighth valve and a ninth valve are sequentially arranged on the collinear pipelines along the conveying direction, and a tenth valve and an eleventh valve are respectively arranged on independent pipelines of the fourth pipeline and the fifth pipeline.
The utility model has the advantages that:
the utility model provides a contain solid unloading tail gas separation system, silica flour filter contain solid unloading tail gas in silica flour, the silica flour that the fine filter interception silica flour filter did not intercept completely prevents that silica flour from getting into the drip washing tower, through setting up two-stage filtration, intercepts silica flour in the unloading gas to filter completely the silica flour in the solid unloading tail gas; the emptying tail gas after the silicon powder is filtered enters a leaching tower, and the leaching tower is used for purifying the emptying tail gas to remove hydrogen and chlorosilane in the emptying tail gas to obtain dischargeable tail gas; meanwhile, when the leaching tower is overhauled, the vented gas can be switched to the tail gas collecting tank and then sent to the leaching system for treatment.
The utility model provides a contain solid unloading tail gas piece-rate system is applicable to solid phase filtration in the gaseous phase, possesses gaseous purification treatment ability.
Drawings
FIG. 1 is a schematic view of the present invention;
FIG. 2 is a schematic view of a fine filter according to the present invention;
reference numerals:
1. a silicon powder filter; 11. a nitrogen gas pipe; 2. a fine filter; 21. a barrel body; 22. a filter element; 23. a barrel body inlet; 24. a barrel body outlet; 3. leaching the tower; 4. a tail gas receiving tank; 5. a first pipeline; 6. a second pipeline; 7. a third pipeline; 8. a fourth pipeline; 9. a fifth pipeline; 101. a first valve; 102. a second valve; 103. a third valve; 104. a fourth valve; 105. a fifth valve; 106. a sixth valve; 107. a seventh valve; 108. an eighth valve; 109. a ninth valve; 110. a tenth valve; 111. an eleventh valve.
Detailed Description
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below with reference to the embodiments and the accompanying drawings, so as to fully understand the objects, the features, and the effects of the present invention.
Example 1
A tail gas separation system containing solid and vent gas is shown in figure 1 and comprises a silicon powder filter 1, a fine filter 2, a leaching tower 3 and a tail gas receiving tank 4;
an outlet of the silicon powder filter 1 is connected with an inlet of the fine filter 2 through a first pipeline 5, is connected with an inlet of the leaching tower 3 through a second pipeline 6, and is connected with an inlet of the tail gas receiving tank 4 through a third pipeline 7; the outlet of the fine filter 2 is connected with the inlet of the leaching tower 3 through a fourth pipeline 8 and is connected with the inlet of the tail gas receiving tank 4 through a fifth pipeline 9.
In this embodiment, the silicon powder filter 1 is used for filtering silicon powder in the solid-containing exhaust gas, and is of a conventional gas-phase and solid-phase filtering structure; the fine filter 2 is used for intercepting silicon powder which is not completely intercepted by the silicon powder filter and preventing the silicon powder from entering the leaching tower; the leaching tower 3 is used for treating the emptying tail gas, is of a conventional gas removal leaching structure and is provided with a tower body, a water inlet, a gas inlet, a water outlet, an exhaust port, a water seal tank and the like; the tail gas receiving tank 4 is used for collecting emptying tail gas which cannot be processed during maintenance of the leaching tower.
In this embodiment, the tail gas (containing nitrogen, hydrogen, chlorosilane, silicon powder, and other substances) containing solid and gas enters the silicon powder filter 1 first, and the silicon powder filter 1 filters the tail gas to remove a great part of silicon powder; the vented tail gas (containing nitrogen, hydrogen, chlorosilane and silicon powder) treated by the silicon powder filter 1 enters the fine filter 2 through the first pipeline 5, the fine filter 2 filters the vented tail gas to remove the silicon powder which is not completely intercepted by the silicon powder filter, and the vented tail gas (containing nitrogen, hydrogen and chlorosilane) treated by the fine filter 2 enters the leaching tower 3 through the fourth pipeline 8; when the fine filter 2 is not installed, the vented tail gas (containing nitrogen, hydrogen, chlorosilane and silicon powder) treated by the silicon powder filter 1 enters the tail gas receiving tank 4 through the third pipeline 7, or enters the leaching tower 3 through the second pipeline 6.
In the fine filter 2, the fine filter 2 filters the emptied tail gas filtered by the silicon powder filter 1 again to remove silicon powder incompletely intercepted by the silicon powder filter 1; the vent tail gas (containing nitrogen, hydrogen and chlorosilane) treated by the fine filter 2 enters the leaching tower 3 through a fourth pipeline 8; or when the vent tail gas cannot be treated during maintenance of the leaching tower, the vent tail gas (containing nitrogen, hydrogen and chlorosilane) treated by the fine filter 2 enters the tail gas receiving tank 4 through the fifth pipeline 9.
In the leaching tower 3, the leaching tower 3 purifies the vented tail gas to remove hydrogen and chlorosilane in the vented tail gas, so as to obtain dischargeable tail gas (only containing nitrogen).
The tail gas receiving tank 4 is connected with a leaching system, and in the tail gas receiving tank 4, the tail gas receiving tank 4 collects and stores the emptying tail gas and conveys the emptying tail gas to the leaching system for treatment.
Example 2
This embodiment is further explained on the basis of embodiment 1, and as shown in fig. 2, the fine filter 2 includes a barrel 21 and a filter element 22; the barrel body 21 is vertically arranged, a barrel body inlet 23 is arranged at the top end of the barrel body 21, a barrel body outlet 24 is arranged at the bottom end of the barrel body, and the filter element 22 is arranged inside the barrel body 21. The material enters from the top barrel inlet 23, is filtered by the filter element 22 and then is discharged from the bottom barrel outlet 24, and the material is filtered from top to bottom so as to intercept the silicon powder in the emptying tail gas in the fine filter.
The bottom of the barrel body 21 is a flared mouth which shrinks downwards, and the barrel body outlet 24 is arranged at the flared mouth, so that the flow of the emptying tail gas is convenient, and the emptying tail gas after being filtered is sent to the leaching tower or the tail gas collecting tank. The filter element 22 is a 5 μm pore size filter element to facilitate the filtration of the silica fume from the vented tail gas.
Example 3
In this embodiment, as further described in example 2, as shown in fig. 1, a nitrogen gas pipe 11 is connected to the top end of the silicon powder filter 1, and the nitrogen gas pipe 11 is used for introducing nitrogen gas into the silicon powder filter 1 to facilitate gas replacement during maintenance.
The outlet of the silicon powder filter 1 is provided with a first valve 101, the second pipeline 6 and the third pipeline 7 are respectively provided with a second valve 102 and a third valve 103, the first pipeline 5 is sequentially provided with a fourth valve 104 and a fifth valve 105 along the conveying direction, the inlet and the outlet of the fine filter 2 are respectively provided with a sixth valve 106 and a seventh valve 107, the front end pipelines of the fourth pipeline 8 and the fifth pipeline 9 are collinear, the collinear pipelines are sequentially provided with an eighth valve 108 and a ninth valve 109 along the conveying direction, and the independent pipelines of the fourth pipeline 8 and the fifth pipeline 9 are respectively provided with a tenth valve 110 and an eleventh valve 111.
In this embodiment, the first valve 101 is used for controlling the outlet of the silicon powder filter 1; the second valve 102 is used for cutting off the pipeline from the washing tower 3 and the tail gas emptying to the tail gas receiving tank 4; the third valve 103 is used for cutting off pipelines from the tail gas receiving tank 4 and the tail gas emptying to the leaching tower 3; the fourth valve 104 is used for cutting off the pipeline of the fine filter 2 and the vent gas to the leaching tower 3 or the vent gas receiving tank 4; the fifth valve 105 is used for cutting off the pipelines of the fine filter 2 and the silicon powder filter 1; the sixth valve 106 is used for connecting a nitrogen metal hose; the seventh valve 107 is used for connecting the tail gas metal hose; the eighth valve 108 is used for cutting off the fine filter 2 and the leaching tower 3 or the tail gas receiving tank 4; the ninth valve 109 is used for cutting off the pipeline between the fine filter 2 and the leaching tower 3 or the tail gas receiving tank 4; the tenth valve 110 is used to cut off the lines of the fine filter 2 and the leaching tower 3; the eleventh valve 111 is used to cut off the line connecting the fine filter 2 to the exhaust gas receiving tank 4.
The embodiments of the present invention have been described in detail, but the present invention is not limited to the embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and the equivalents or substitutions are included in the scope of the present invention defined by the claims.
Claims (6)
1. The solid-containing emptying tail gas separation system is characterized by comprising a silicon powder filter (1), a fine filter (2), a leaching tower (3) and a tail gas receiving tank (4);
an outlet of the silicon powder filter (1) is connected with an inlet of the fine filter (2) through a first pipeline (5), is connected with an inlet of the leaching tower (3) through a second pipeline (6), and is connected with an inlet of the tail gas receiving tank (4) through a third pipeline (7); the outlet of the fine filter (2) is connected with the inlet of the leaching tower (3) through a fourth pipeline (8), and is connected with the inlet of the tail gas receiving tank (4) through a fifth pipeline (9).
2. The solids laden spent gas separation system of claim 1 wherein the fine filter (2) comprises a barrel (21) and a cartridge (22); the barrel body (21) is vertically arranged, a barrel body inlet (23) is formed in the top end of the barrel body (21), a barrel body outlet (24) is formed in the bottom end of the barrel body (21), and the filter element (22) is installed inside the barrel body (21).
3. The solids laden spent gas separation system of claim 2 wherein the bottom of the barrel (21) is flared downwardly and the barrel outlet (24) is located at the flare.
4. The solids laden spent gas separation system of claim 2 wherein the filter cartridge (22) is a 4 to 6 μm pore size filter cartridge.
5. The solid-containing vent tail gas separation system according to claim 1, wherein a nitrogen gas pipe (11) is connected to the top end of the silicon powder filter (1).
6. The tail gas separation system for solid-containing vent gas as defined in claim 1, wherein a first valve (101) is arranged at the outlet of the silicon powder filter (1), a second valve (102) and a third valve (103) are respectively arranged on the second pipeline (6) and the third pipeline (7), a fourth valve (104) and a fifth valve (105) are sequentially arranged on the first pipeline (5) along the conveying direction, a sixth valve (106) and a seventh valve (107) are respectively arranged at the inlet and the outlet of the fine filter (2), the front end pipelines of the fourth pipeline (8) and the fifth pipeline (9) are collinear, an eighth valve (108) and a ninth valve (109) are sequentially arranged on the pipelines along the conveying direction, and a tenth valve (110) and an eleventh valve (111) are respectively arranged on the independent pipelines of the fourth pipeline (8) and the fifth pipeline (9).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222217110.6U CN218280927U (en) | 2022-08-23 | 2022-08-23 | Solid-containing emptying tail gas separation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222217110.6U CN218280927U (en) | 2022-08-23 | 2022-08-23 | Solid-containing emptying tail gas separation system |
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| Publication Number | Publication Date |
|---|---|
| CN218280927U true CN218280927U (en) | 2023-01-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222217110.6U Active CN218280927U (en) | 2022-08-23 | 2022-08-23 | Solid-containing emptying tail gas separation system |
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| CN (1) | CN218280927U (en) |
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- 2022-08-23 CN CN202222217110.6U patent/CN218280927U/en active Active
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