CN220424860U - System for improve polycrystalline silicon reduction tail gas silica flour and retrieve - Google Patents
System for improve polycrystalline silicon reduction tail gas silica flour and retrieve Download PDFInfo
- Publication number
- CN220424860U CN220424860U CN202321473807.8U CN202321473807U CN220424860U CN 220424860 U CN220424860 U CN 220424860U CN 202321473807 U CN202321473807 U CN 202321473807U CN 220424860 U CN220424860 U CN 220424860U
- Authority
- CN
- China
- Prior art keywords
- tail gas
- chlorosilane
- filter
- silicon powder
- silica flour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 39
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 21
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 14
- 235000013312 flour Nutrition 0.000 title claims abstract description 8
- 239000005046 Chlorosilane Substances 0.000 claims abstract description 70
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 claims abstract description 66
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 39
- 239000011863 silicon-based powder Substances 0.000 claims abstract description 39
- 229920005591 polysilicon Polymers 0.000 claims abstract description 9
- 238000011084 recovery Methods 0.000 claims abstract description 9
- 238000001816 cooling Methods 0.000 claims description 10
- 239000007789 gas Substances 0.000 abstract description 61
- 238000001914 filtration Methods 0.000 abstract description 14
- 239000007791 liquid phase Substances 0.000 abstract description 9
- 239000007787 solid Substances 0.000 abstract description 9
- 229910021487 silica fume Inorganic materials 0.000 abstract description 5
- 239000012071 phase Substances 0.000 description 13
- 239000000843 powder Substances 0.000 description 13
- 238000000034 method Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000007790 solid phase Substances 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 4
- 238000011010 flushing procedure Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002893 slag Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012065 filter cake Substances 0.000 description 1
- 239000000706 filtrate Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 238000011946 reduction process Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Abstract
The utility model discloses a system for improving recovery of polysilicon reduction tail gas silicon powder, which relates to the technical field of polysilicon tail gas treatment. The tail gas filter in the system filters silica fume in the solid reduction tail gas, and the silica fume collecting tank collects the filtered silica fume to prevent the silica fume from entering the heat exchange system; the chlorosilane filter filters silicon powder in the chlorosilane condensate, so that a large amount of silicon powder in a liquid phase is prevented from entering a subsequent system. Through setting up gas, liquid phase two-stage filtration, intercept the silica flour in the reduction tail gas to the silica flour in the complete filtration contains solid tail gas and the silica flour in the chlorosilane solution, reduce the silica flour possibility in getting into, guaranteed the stable safe operation of system, improved the refined product quality of rectification, realized silica flour dry recycle simultaneously.
Description
Technical Field
The utility model belongs to the field of chemical industry, and particularly relates to a system for improving recovery of silicon powder from polycrystalline silicon reduction tail gas.
Background
In the production process of polysilicon by adopting the improved Siemens method, a certain amount of tail gas is discharged in the rectification process, the reduction process and the tail gas recovery, and the tail gas has complex components and more impurity content. Specifically, the main components of the tail gas include nitrogen, hydrogen, trichlorosilane, silicon tetrachloride, silane, silicon powder and the like. In the existing process, a tail gas filter is generally adopted to filter the silica powder. However, when the solid-containing tail gas is treated by adopting the existing process, the problem that the filtration of the small-particle-size silicon powder is incomplete exists, and the small-particle-size silicon powder enters a subsequent heat exchange system along with the gas phase, so that the chlorosilane solution contains the fine silicon powder, equipment or pipelines are easily blocked, and the service performance of the equipment and the product quality are affected.
Disclosure of Invention
In order to solve the above-mentioned technical problems, the present utility model aims to solve the above-mentioned problems: the method is reasonable in design, and through gas phase and liquid phase twice filtration, the method not only can realize the filtration of silicon powder in the gas phase of the reduction tail gas, but also can reduce the silicon powder content in the chlorosilane solution, reduce the possibility that the silicon powder in the liquid phase enters a subsequent system, solve the problem of solid impurity treatment in the chlorosilane solution, ensure the stable and safe operation of the system, improve the quality of the rectifying refined product, and realize the drying and recycling of the silicon powder.
The aim of the utility model can be achieved by the following technical scheme:
a system for improving recovery of polysilicon reduction tail gas silicon powder comprises a tail gas filter and a chlorosilane filter, wherein the tail gas filter is connected with a chlorosilane condensate tank sequentially through a heat exchange system and a cooling system, and the output end of the chlorosilane condensate tank is connected with the chlorosilane filter.
The technical scheme of the utility model is as follows: the output end of the heat exchange system is connected with the chlorosilane condensate tank.
The technical scheme of the utility model is as follows: the output end of the bottom of the tail gas filter is connected with the silicon powder collecting tank.
The technical scheme of the utility model is as follows: the output end of the chlorosilane condensate tank is connected with a chlorosilane filter through a chlorosilane condensate pump.
In some technical solutions, a method for improving recovery of polysilicon reduction tail gas silicon powder includes: the device comprises a gas-phase silicon powder filter, a silicon powder collecting tank, a heat exchange system, a tail gas condensate tank, a chlorosilane condensate pump and a chlorosilane filter.
The reduction tail gas enters a gas-phase silica powder filter, an air outlet is formed in the top of the filter, a solid-phase discharge outlet is formed in the bottom of the filter, solid-phase silica powder at the bottom enters a silica powder collecting tank for centralized treatment, gas-phase tail gas which is primarily filtered at the top of the filter enters a subsequent heat exchange system, chlorosilane condensate is obtained after the gas-phase tail gas passes through a cooling system, the chlorosilane condensate enters the middle of the chlorosilane filter, silica powder in liquid phase is removed after the chlorosilane solution is filtered from bottom to top, the solution containing the silica powder is collected at the bottom of the chlorosilane filter and then enters a subsequent treatment system through top discharge, and the solution containing the silica powder is sent to slurry treatment.
Furthermore, the tail gas filter and the chlorosilane filter adopt ceramic filter cores, have the advantages of corrosion resistance and high temperature resistance, and have smaller pressure drop and high filtering efficiency.
Furthermore, the filter system is a plurality of filters which are arranged in parallel, and can be mutually standby filters, so that continuous and stable operation of the system is ensured.
Further, the filtering precision of the tail gas filter is 0.1-3 microns, the unfiltered fine silicon powder is easy to generate particle agglomeration phenomenon after passing through a heat exchange system and a cooling system and is present in the liquid phase chlorosilane solution, and the fine silicon powder in the chlorosilane solution is removed through the chlorosilane filter.
Further, the chlorosilane filter has a filtration accuracy of 0.5 to 5 μm and is provided with: the material inlet is positioned below the end position of the filter element of the filter; a ceramic filter element, a filtrate outlet and a nitrogen purging port; the liquid outlet is arranged at the bottom of the chlorosilane filter; and a chlorosilane circulating pipeline is arranged and is positioned at the lower part of the ceramic filter element. The chlorosilane solution circulation line is used for small circulation of the liquid in the chlorosilane filter. Before back flushing, small circulation flushing is carried out to take away a part of slag slurry, so that the problem that a bottom pipe orifice is blocked when a filter cake attached to the outer surface of a filter core is instantaneously stripped and falls into the conical bottom of a filter when back flushing is directly carried out from the top of the device can be effectively avoided.
The utility model has the beneficial effects that:
compared with the prior art, the utility model has the beneficial effects that: on the basis of the process of the gas phase filter, the original reaction conditions are not changed, the gas phase filter is combined with the liquid phase filter, the silicon powder in the tail gas is recovered through twice filtration in the continuous production process, the silicon powder content in the chlorosilane solution is reduced, the possibility that a large amount of silicon powder exists in the liquid phase and enters a subsequent system is reduced, and the ceramic filter element has the advantages of more stable filtration effect and longer service life, ensures the stable and safe operation of the system, improves the quality of the subsequent rectifying refined products, and simultaneously realizes the drying and reutilization of the silicon powder.
Drawings
FIG. 1 is a schematic diagram of the present utility model.
Wherein: 1-reduction tail gas inlet, 2-tail gas filter, 3-solid phase outlet, 4-silica powder collecting tank, 5-silica powder outlet, 6-first pipeline, 7-heat exchange system, 8-second pipeline, 9-cooling system, 10-third pipeline, 11-fourth pipeline, 12-chlorosilane condensate tank, 13-fifth pipeline, 14-chlorosilane condensate pump, 15-sixth pipeline, 16-chlorosilane filter, 17-chlorosilane solution outlet and 18-silica powder-containing slag slurry outlet.
Detailed Description
The utility model is further illustrated below with reference to examples, but the scope of the utility model is not limited thereto:
referring to fig. 1, a system for improving recovery of polysilicon reduction tail gas silicon powder comprises a tail gas filter 2 and a chlorosilane filter 16, wherein the tail gas filter 2 is connected with a chlorosilane condensate tank 12 sequentially through a heat exchange system 7 and a cooling system 9, and the output end of the chlorosilane condensate tank 12 is connected with the chlorosilane filter 16.
The output end of the heat exchange system 7 is connected with a chlorosilane condensate tank 12. The output end of the bottom of the tail gas filter 2 is connected with a silicon powder collecting tank 4. The output of the chlorosilane condensate tank 12 is connected to a chlorosilane filter 16 via a chlorosilane condensate pump 14.
The reduction tail gas inlet 1 is connected with the tail gas filter 2, and the solid phase outlet 3 of the tail gas filter 2 is connected with the inlet of the silica powder collecting tank 4; the gas phase of the tail gas filter 2 is connected with a heat exchange system 7 through a first pipeline 6, the gas phase outlet of the heat exchange system 7 is connected with the inlet of a cooling system 9 through a second pipeline 8, the condensate outlet of the heat exchange system 7 is connected with a chlorosilane condensate tank 12 through a third pipeline 10, the cooling system 9 is connected with the chlorosilane condensate tank 12 through a fourth pipeline, and the outlet of the chlorosilane condensate tank 12 is connected with a chlorosilane filter 16 through a sixth pipeline 15.
In this embodiment, the tail gas filter 2 is used for filtering silica fume in the tail gas containing solid reduction, and is a conventional solid phase filtering structure in gas phase; the chlorosilane filter 16 is used for intercepting silicon powder which is not completely intercepted by the tail gas filter in the chlorosilane condensate, and preventing the silicon powder from entering a subsequent system; the silica powder collecting tank 4 is used for collecting solid-phase silica powder filtered by the tail gas filter.
In the embodiment, the solid reduction-containing tail gas (comprising nitrogen, hydrogen, chlorosilane, silicon powder and other substances) firstly enters a tail gas filter 2, and the tail gas filter 2 filters the solid reduction-containing tail gas to remove silicon powder with granularity larger than 5 mu m in a gas phase; the reduced tail gas treated by the tail gas filter 2 enters a heat exchange system 7 through a first pipeline 6;
after the tail gas passes through the heat exchange system 7, the obtained chlorosilane condensate is connected with a chlorosilane condensate tank 12 through a third pipeline 10; the uncooled tail gas is connected with a cooling system 9 through a second pipeline 8 for further condensation;
the chlorosilane solution obtained by condensation of the cooling system 9 is connected with a chlorosilane condensate tank 12 through a fourth pipeline 11;
the chlorosilane condensate is connected with a chlorosilane condensate pump 14 through a fifth pipeline 13, and the chlorosilane condensate is conveyed into a chlorosilane filter 16 for secondary filtration to remove silicon powder with smaller granularity contained in the chlorosilane solution.
According to the utility model, the tail gas filter is combined with the chlorosilane filter, so that the problem that a large amount of silicon powder enters a heat exchange system along with reduction tail gas in the production of polycrystalline silicon is solved, residual silicon powder in a liquid phase is removed through the chlorosilane filter, and after two-stage filtration, solid silicon powder can be recycled as much as possible, so that the silicon powder consumption is reduced, the device economy is improved, and meanwhile, the problem that the pipeline is easily blocked by the solid silicon powder in the chlorosilane condensate is solved.
Claims (4)
1. The utility model provides an improvement polycrystalline silicon reduces system that tail gas silica flour retrieved which characterized in that: the system comprises a tail gas filter (2) and a chlorosilane filter (16), wherein the tail gas filter (2) is connected with a chlorosilane condensate tank (12) sequentially through a heat exchange system (7) and a cooling system (9), and the output end of the chlorosilane condensate tank (12) is connected with the chlorosilane filter (16).
2. A system for improving recovery of polysilicon reduction tail gas silicon powder as set forth in claim 1, wherein: the output end of the heat exchange system (7) is connected with a chlorosilane condensate tank (12).
3. A system for improving recovery of polysilicon reduction tail gas silicon powder as set forth in claim 1, wherein: the output end of the bottom of the tail gas filter (2) is connected with a silicon powder collecting tank (4).
4. A system for improving recovery of polysilicon reduction tail gas silicon powder as set forth in claim 1, wherein: the output end of the chlorosilane condensate tank (12) is connected with a chlorosilane filter (16) through a chlorosilane condensate pump (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321473807.8U CN220424860U (en) | 2023-06-09 | 2023-06-09 | System for improve polycrystalline silicon reduction tail gas silica flour and retrieve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321473807.8U CN220424860U (en) | 2023-06-09 | 2023-06-09 | System for improve polycrystalline silicon reduction tail gas silica flour and retrieve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220424860U true CN220424860U (en) | 2024-02-02 |
Family
ID=89700648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321473807.8U Active CN220424860U (en) | 2023-06-09 | 2023-06-09 | System for improve polycrystalline silicon reduction tail gas silica flour and retrieve |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220424860U (en) |
-
2023
- 2023-06-09 CN CN202321473807.8U patent/CN220424860U/en active Active
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