CN218232561U - Vacuum coating structure for coating film on inner wall of guide sleeve by induction heating technology - Google Patents
Vacuum coating structure for coating film on inner wall of guide sleeve by induction heating technology Download PDFInfo
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- CN218232561U CN218232561U CN202222863136.8U CN202222863136U CN218232561U CN 218232561 U CN218232561 U CN 218232561U CN 202222863136 U CN202222863136 U CN 202222863136U CN 218232561 U CN218232561 U CN 218232561U
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- uide bushing
- induction heating
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Abstract
The utility model belongs to the technical field of the coating film, a vacuum coating structure of response heating technique at uide bushing inner wall coating film is disclosed, including uide bushing, double-deck water-cooling vacuum coating room and high vacuum pumping system, high vacuum pumping system is connected with double-deck water-cooling vacuum coating room's inside, double-deck water-cooling vacuum coating room's bottom is higher installs the induction heating power, double-deck water-cooling vacuum coating room's inner diapire fixed mounting has rotatory substrate platform, induction heater is installed at the top of rotatory substrate platform, the uide bushing is placed in rotatory substrate bench. The utility model discloses a, let the surface and the shaping film forming of the high-quality micron/nanometer composite lubrication layer of inseparable laminating uide bushing on the uide bushing, realized the purpose of the better nanometer tin phosphor bronze lubricating coating of quality of the interior wall plating of more bright and clean, more even, more lubricated uide bushing.
Description
Technical Field
The utility model relates to a coating film technical field, concretely relates to vacuum coating structure of induction heating technique at uide bushing inner wall coating film.
Background
It is known that with the rapid development of science and technology, the vacuum coating technology has been widely applied, when the inner wall of the guide sleeve is coated with a micron/nano composite tin-phosphor bronze lubricating film, the vacuum coating structure is an important problem, the coating quality of the product can be seriously affected due to the unreasonable design of the coating structure, and the coating of the micron/nano composite tin-phosphor bronze lubricating film on the inner surface of the guide sleeve refers to the coating of a micron/nano thin film material with good lubricating property on the inner surface of the guide sleeve, which is related to the heating temperature, the position arrangement of an induction heater, the power of an induction heating power supply and the structure of a gas path.
The existing guide sleeve inner wall lubricating film preparation mainly adopts a laser cladding technology, but a tin-phosphor bronze film prepared on the inner surface of the guide sleeve by utilizing an induction heating technology can be better, so that a vacuum coating structure capable of improving the growth quality of the guide sleeve inner surface lubricating film is provided, and the vacuum coating structure becomes a basic requirement of technical personnel in the field.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a vacuum coating structure of tectorial membrane is plated to induction heating technique at the uide bushing inner wall to solve above-mentioned background technical problem.
In order to solve the problem, the utility model adopts the following technical proposal.
The utility model provides an induction heating technique plates vacuum coating structure of tectorial membrane at uide bushing inner wall, includes uide bushing, double-deck water-cooling vacuum coating room and high-vacuum air exhaust system, high-vacuum air exhaust system is connected with double-deck water-cooling vacuum coating room's inside, double-deck water-cooling vacuum coating room's bottom is higher installs the induction heating power, double-deck water-cooling vacuum coating room's interior diapire fixed mounting has rotatory substrate platform, induction heater is installed at the top of rotatory substrate platform, the uide bushing is placed in rotatory substrate bench, induction heater is located the inboard of uide bushing bottom, double-deck water-cooling vacuum coating room's inside fixed mounting has the heating baking system, electric connection between induction heating power and the induction heater.
As a further description of the above technical solution:
the heating and baking system is a heating rod which is fixedly arranged in the double-layer water-cooling vacuum coating chamber and is uniformly distributed around the guide sleeve.
As a further description of the above technical solution:
and the double-layer water-cooling vacuum coating chamber is provided with a mass flow meter.
As a further description of the above technical solution:
and an electromagnetic valve is arranged between the high vacuum air pumping system and the double-layer water-cooling vacuum coating chamber.
Compared with the prior art, the utility model has the advantages of:
when the device is used, the air inflow size of the high-vacuum air pumping system is adjusted as required, the power of the power supply of the induction heater controls the temperature of the induction heater, the temperature of the heating and baking system is controlled, the film is conveniently formed, the heating uniformity of the guide sleeve is improved by the rotating speed of the rotary substrate table, and the uniformity of the film forming is ensured, so that the high-quality micron/nanometer composite lubricating layer on the guide sleeve is tightly attached to the surface of the guide sleeve and is formed into a film, and the purpose of plating a nanometer tin-phosphor-bronze lubricating coating with better quality on the inner wall of the guide sleeve which is smoother, more uniform and more lubricated is realized.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic front sectional view of the present invention.
The reference numbers in the figures illustrate:
1. a double-layer water-cooling vacuum coating chamber; 2. a guide sleeve; 3. an induction heater; 4. a mass flow meter; 5. a high vacuum pumping system; 6. a heating and baking system; 61. a heating rod; 7. rotating the substrate table; 8. an induction heating power supply; 9. an electromagnetic valve.
Detailed Description
The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present invention;
referring to fig. 1 and 2, in the present invention, a vacuum coating structure for coating a film on the inner wall of a guide sleeve by an induction heating technique includes a guide sleeve 2, a double-layer water-cooling vacuum coating chamber 1 and a high vacuum pumping system 5;
wherein the high vacuum pumping system 5 can be a vacuum pump, and the vacuum pump is the existing mature and well-known equipment, and is not described in detail herein;
high vacuum pumping system 5 is connected with double-deck water-cooling vacuum coating room 1's inside, double-deck water-cooling vacuum coating room 1's bottom is higher installs induction heating power 8, double-deck water-cooling vacuum coating room 1's interior diapire fixed mounting has rotatory substrate platform 7, induction heater 3 is installed at the top of rotatory substrate platform 7, uide bushing 2 is placed on rotatory substrate platform 7, induction heater 3 is located the inboard of uide bushing 2 bottom, double-deck water-cooling vacuum coating room 1's inside fixed mounting has heating baking system 6, electric connection between induction heating power 8 and the induction heater 3.
The utility model discloses in, when using, adjust high vacuum pumping system 5's air input size as required, induction heater power 8's power size control induction heater 3's temperature height, and the temperature height of control heating baking system 6, make things convenient for the shaping of film, the rotational speed of rotatory substrate platform 7 has improved the homogeneity of being heated of uide bushing 2, the fashioned homogeneity of film has been guaranteed, thereby let the high-quality micron/nanometer composite lubrication layer on the uide bushing 2 closely laminate the surface and the shaping film forming of uide bushing 2, more bright and clean has been realized, more even, the better nanometer tin phosphor bronze lubricating coating's of 2 inner wall plating quality of lubricated uide bushing purpose.
Wherein: the heating and baking system 6 is a heating rod 61, and the heating rod 61 is fixedly arranged in the double-layer water-cooling vacuum coating chamber 1 and is uniformly distributed around the guide sleeve 2.
The utility model discloses in, can carry out the even heating to the inside of double-deck water-cooling vacuum coating room 1 through a plurality of heating rod 61, increase the homogeneity of being heated of uide bushing 2 to make things convenient for the one shot forming of the lubricated rete of nanometer tin phosphor bronze.
Wherein: the double-layer water-cooling vacuum coating chamber 1 is provided with a mass flow meter 4.
The utility model discloses in, mass flow meter 4 adopts the thermal type to measure, thereby what comes the measurement flow through the molecular mass that the components of a whole that can function independently molecule was taken away, because measure with the thermal type, thereby can not influence measuring result because of the change of gas temperature, pressure, mass flow meter is a flow measuring instrument comparatively accurate, quick, reliable, high-efficient, stable, nimble, the flow of the double-deck water-cooling vacuum coating room 1 inside of detection that can be more accurate.
Wherein: an electromagnetic valve 9 is arranged between the high vacuum air pumping system 5 and the double-layer water-cooling vacuum coating chamber 1.
The utility model discloses in, open and close through control solenoid valve 9, can adjust the pumping speed of high vacuum pumping system 5 to double-deck water-cooling vacuum coating room 1, guarantee nanometer tin phosphor bronze lubricating coating's high quality.
The working principle is as follows: when the device is used, the air input of the high vacuum air pumping system 5 is adjusted as required, the power of the power supply 8 of the induction heater controls the temperature of the induction heater 3 and controls the temperature of the heating and baking system 6, so that the film is conveniently formed, the heating uniformity of the guide sleeve 2 is improved by the rotating speed of the rotary substrate table 7, and the forming uniformity of the film is ensured, so that a high-quality micron/nanometer composite lubricating layer on the guide sleeve 2 is tightly attached to the surface of the guide sleeve 2 and is formed into a film, and the purpose of plating a better-quality nanometer tin-phosphor bronze lubricating coating on the inner wall of the guide sleeve 2 which is smoother, more uniform and more lubricated is realized.
The foregoing is only a preferred embodiment of the present invention; the scope of the present invention is not limited thereto. Any person skilled in the art should also be able to cover the technical scope of the present invention by replacing or changing the technical solution and the improvement concept of the present invention with equivalents and modifications within the technical scope of the present invention.
Claims (4)
1. The utility model provides an induction heating technique is at vacuum coating structure of uide bushing inner wall coating film, includes uide bushing (2), double-deck water-cooling vacuum coating room (1) and high vacuum pumping system (5), high vacuum pumping system (5) are connected with the inside of double-deck water-cooling vacuum coating room (1), its characterized in that: the utility model discloses a high temperature induction heating system, including double-deck water-cooling vacuum coating chamber (1), induction heating power (8) are installed to the bottom of double-deck water-cooling vacuum coating chamber (1) is higher, the interior diapire fixed mounting of double-deck water-cooling vacuum coating chamber (1) has rotatory substrate platform (7), induction heater (3) are installed at the top of rotatory substrate platform (7), place on rotatory substrate platform (7) uide bushing (2), induction heater (3) are located the inboard of uide bushing (2) bottom, the inside fixed mounting of double-deck water-cooling vacuum coating chamber (1) has heating baking system (6), electric connection between induction heating power (8) and induction heater (3).
2. The vacuum coating structure for coating the inner wall of the guide sleeve by the induction heating technology according to claim 1, wherein: the heating and baking system (6) is a heating rod (61), and the heating rod (61) is fixedly arranged in the double-layer water-cooling vacuum coating chamber (1) and uniformly distributed around the guide sleeve (2).
3. The vacuum coating structure for coating the inner wall of the guide sleeve by the induction heating technology according to claim 1, characterized in that: and a mass flow meter (4) is arranged on the double-layer water-cooling vacuum coating chamber (1).
4. The vacuum coating structure for coating the inner wall of the guide sleeve by the induction heating technology according to claim 1, wherein: and an electromagnetic valve (9) is arranged between the high vacuum air pumping system (5) and the double-layer water-cooling vacuum coating chamber (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222863136.8U CN218232561U (en) | 2022-10-28 | 2022-10-28 | Vacuum coating structure for coating film on inner wall of guide sleeve by induction heating technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222863136.8U CN218232561U (en) | 2022-10-28 | 2022-10-28 | Vacuum coating structure for coating film on inner wall of guide sleeve by induction heating technology |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218232561U true CN218232561U (en) | 2023-01-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222863136.8U Active CN218232561U (en) | 2022-10-28 | 2022-10-28 | Vacuum coating structure for coating film on inner wall of guide sleeve by induction heating technology |
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| Country | Link |
|---|---|
| CN (1) | CN218232561U (en) |
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2022
- 2022-10-28 CN CN202222863136.8U patent/CN218232561U/en active Active
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