CN213255465U - Perovskite film coating equipment with negative pressure device - Google Patents
Perovskite film coating equipment with negative pressure device Download PDFInfo
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- CN213255465U CN213255465U CN202022047768.8U CN202022047768U CN213255465U CN 213255465 U CN213255465 U CN 213255465U CN 202022047768 U CN202022047768 U CN 202022047768U CN 213255465 U CN213255465 U CN 213255465U
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Abstract
The utility model discloses a perovskite film coating equipment with negative pressure device, include: a base; the coating platform is arranged on the base and is in sliding connection with the base, and the coating platform is used for bearing a coating substrate; a die assembly, comprising: the die head frame is arranged on the die head frame, the die head is arranged on the die head frame, the solution channel is arranged in the die head, the die lip is arranged at the liquid outlet of the solution channel at the bottom of the die head, and the die head can lift up and down; the liquid supply device is connected with the liquid inlet of the solution channel and provides solution for the die head; negative pressure device includes: and the negative pressure box is connected with the vacuum pump through a vacuum pumping pipeline, is arranged on the coating platform and is in sliding connection with the coating platform. The utility model discloses increased the negative pressure between die head and coating basement, can effectively reduce the regional atmospheric pressure of coating on the one hand, on the other hand applys a negative pressure pulling force for the liquid bridge, makes the liquid bridge more stable to the production in greatly reduced hole.
Description
Technical Field
The utility model relates to a perovskite film preparation technical field, concretely relates to perovskite film coating equipment with negative pressure device.
Background
In recent years, perovskite solar cells have attracted much attention due to their excellent photovoltaic characteristics and simple and inexpensive fabrication processes. Perovskite thin films can be prepared by a simple and inexpensive solution coating process, and have great potential in commercial solar cells. The perovskite thin film has high requirements on appearance and morphology, and especially the formation of pores is strictly controlled, otherwise, the perovskite thin film has great influence on the photoelectric conversion efficiency.
At present, large area coating of rigid substrate perovskite thin films is most commonly performed by using a conventional slit flat plate coating device. During coating, the coating liquid forms a liquid bridge between the die lip and the substrate, and the coating liquid is uniformly spread on the surface of the substrate through the liquid bridge as the die head and the substrate move relatively. Because the surface of the substrate is microscopically uneven, the liquid bridge vertically falls on the surface of the substrate, the stress is unbalanced, the stability of the liquid bridge is poor, gas is easily doped into the liquid bridge, and finally a hole is formed on the surface of the perovskite film.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a perovskite film coating equipment with negative pressure device, it has increased the negative pressure between die head and coating basement, can effectively reduce the regional atmospheric pressure of coating on the one hand, and on the other hand exerts a negative pressure pulling force for the liquid bridge, makes the liquid bridge more stable to the production in greatly reduced hole.
In order to achieve the above purpose, the technical scheme of the utility model is as follows:
a perovskite thin film coating equipment with negative pressure device includes:
a base;
the coating platform is arranged on the base and is in sliding connection with the base, and the coating platform is used for bearing a coating substrate;
a die assembly, comprising: the die head frame is arranged on the die head frame, the die head is arranged on the die head frame, the solution channel is arranged in the die head, the die lip is arranged at the liquid outlet of the solution channel at the bottom of the die head, and the die head can lift up and down;
the liquid supply device is connected with the liquid inlet of the solution channel and provides solution for the die head;
negative pressure device includes: and the negative pressure box is connected with the vacuum pump through a vacuum pumping pipeline, is arranged on the coating platform and is in sliding connection with the coating platform.
The utility model relates to a perovskite film coating equipment with negative pressure device, it has increased the negative pressure between die head and coating basement, can effectively reduce the regional atmospheric pressure of coating on the one hand, and on the other hand exerts a negative pressure pulling force for the liquid bridge, makes the liquid bridge more stable to the production in greatly reduced hole.
On the basis of the technical scheme, the following improvements can be made:
as the preferred scheme, be equipped with the spout on the coating platform, the slip end of negative pressure box is arranged in the spout, and can slide along the spout.
Adopt above-mentioned preferred scheme, simple structure, the negative pressure box slides more smoothly.
Preferably, a sealing element is arranged between the sliding chute and the sliding end of the negative pressure box.
With the preferred arrangement described above, the sealed environment makes the liquid bridge more stable during coating.
Preferably, the negative pressure cartridge includes:
the inner shape of the front part of the box is matched with the outer contour of the coating end of the die head, and the coating end of the die head is tightly attached to the front part of the box during coating;
and a sliding gap is arranged between the bottom surface of the rear part of the box and the bearing surface of the coating platform.
By adopting the preferable scheme, the die head is tightly attached to the front part of the box during coating so as to play a role in sealing. A small sliding gap is reserved between the rear part of the box and the coating platform, and the box and the coating platform slide relatively during coating, so that large sliding friction is not generated, and a sealing effect can be achieved.
Preferably, a negative pressure detection device is arranged in the negative pressure box, and the negative pressure detection device and the vacuum pump are respectively and electrically connected with the control device.
By adopting the preferable scheme, the negative pressure of the negative pressure box can be accurately adjusted.
Preferably, the coating platform is slidably connected to the base by a guide track structure.
Adopt above-mentioned preferred scheme, the coating platform passes through guide rail guide slot structure and base sliding connection, and especially when the guide rail is accurate linear guide, the coating platform can carry out more accurate removal through the guide rail, can satisfy the actual demand of large tracts of land coating on the one hand, and on the other hand, the improvement of the accurate nature and the stability of removal is favorable to further promoting the homogeneity of coating thickness.
Preferably, the coating station comprises:
an upper horizontal plate for carrying a coated substrate;
the lower supporting plate is arranged below the upper horizontal plate;
the adjusting assembly is used for adjusting the distance between the upper horizontal plate and the lower supporting plate;
and the fixing component is used for connecting the upper horizontal plate and the lower supporting plate.
By adopting the preferable scheme, the flatness of the coating platform is high, and the height of the coating platform can be precisely adjusted.
Preferably, a heating element for providing heat for the upper horizontal plate is arranged on the upper horizontal plate.
With the preferred arrangement described above, the coating platform has a heating function.
Preferably, the liquid supply device comprises a liquid storage tank, a liquid supply pump and a liquid supply pipeline, wherein an inlet and an outlet of the liquid supply pump are respectively connected with the liquid storage tank and a liquid inlet of a solution channel on the die head through the liquid supply pipeline.
By adopting the preferable scheme, the liquid storage tank and the liquid supply pump are arranged, so that stable and continuous solution can be provided for the die head, the stability of coating thickness can be improved, and the coating device is particularly suitable for the requirement of large-area coating.
Preferably, the die holder is a gantry-type structure spanning the coating platform.
By adopting the preferable scheme, the die head frame has a stable structure.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a schematic structural diagram of a perovskite thin film coating device with a negative pressure device provided by an embodiment of the present invention.
Fig. 2 is a front view of the negative pressure box provided by the embodiment of the present invention.
Fig. 3 is a side view of the negative pressure box provided by the embodiment of the present invention.
Wherein: 1-base, 2-coating platform, 21-upper horizontal plate, 22-lower support plate, 23-adjusting component, 24-fixing component, 3-die head, 31-coating end, 4-negative pressure box, 41-sliding end, 42-box front part, 43-box rear part, 5-guide rail guide groove structure and 6-coating substrate.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
As shown in fig. 1 to 3, a perovskite thin film coating apparatus with a negative pressure device includes:
a base 1;
the coating platform 2 is arranged on the base 1 and is in sliding connection with the base 1, and the coating platform 2 is used for bearing a coating substrate 6;
a die assembly (not shown) comprising: the die head frame (not shown in the figure) and the die head 3 are arranged on the die head frame, a solution channel (not shown in the figure) is arranged inside the die head 3, a die lip (not shown in the figure) is arranged at a liquid outlet of the solution channel at the bottom of the die head 3, and the die head 3 can be lifted up and down under the action of an air cylinder or other driving devices;
a liquid supply device (not shown in the figure) connected to the liquid inlet of the solution channel for supplying the solution to the die head 3;
negative pressure device includes: and the negative pressure box 4 is connected with a vacuum pump (not shown in the figure) through a vacuum pumping pipeline (not shown in the figure), and the negative pressure box 4 is arranged on the coating platform 2 and is in sliding connection with the coating platform 2.
To reduce the friction force, the negative pressure box 4 can be made of, but not limited to, nylon or teflon, which has self-lubricating properties.
In order to further optimize the effect of the present invention, in other embodiments, other features are the same, except that the coating platform 2 is provided with a sliding slot, and the sliding end 41 of the negative pressure box 4 is disposed in the sliding slot and can slide along the sliding slot.
Adopt above-mentioned preferred scheme, simple structure, negative pressure box 4 slides more smoothly.
In order to further optimize the effect of the present invention, in the above embodiment, a sealing member (not shown) is provided between the chute and the sliding end 41 of the negative pressure box 4.
With the preferred arrangement described above, the sealed environment makes the liquid bridge more stable during coating.
In order to further optimize the effect of the present invention, in other embodiments, the rest of the features are the same, except that the negative pressure box 4 comprises:
the inner shape of the box front part 42 is matched with the outer contour of the coating end 31 of the die head 3, and the coating end 31 of the die head 3 is tightly attached to the box front part 42 during coating;
a sliding gap is arranged between the rear part 43 of the box and the bottom surface of the rear part 43 of the box and the bearing surface of the coating platform 2.
With the preferred arrangement, the die 3 is sealed against the front 42 of the cartridge during coating. The rear part 43 of the box has a small sliding gap with the coating platform 2, and slides relative to the coating platform 2 during coating, thereby not generating large sliding friction, but also playing a role in sealing.
In order to further optimize the utility model discloses an implement the effect, in some other embodiments, all the other characteristic techniques are the same, and the difference lies in, is equipped with negative pressure detection device (not shown in the figure) in the negative pressure box 4, and negative pressure detection device and vacuum pump are connected with the controlling means electricity respectively.
By adopting the preferable scheme, the negative pressure in the negative pressure box 4 can be accurately adjusted.
In order to further optimize the effect of the present invention, in other embodiments, the rest of the features are the same, except that the coating platform 2 is slidably connected to the base 1 through the guide rail structure 5.
Adopt above-mentioned preferred scheme, coating platform 2 passes through guide rail guide slot structure 5 and base 1 sliding connection, especially when the guide rail is accurate linear guide, coating platform 2 can carry out more accurate removal through the guide rail, can satisfy the actual demand of large tracts of land coating on the one hand, and on the other hand, the improvement of the accurate nature and the stability of removal is favorable to further promoting the homogeneity of coating thickness.
In order to further optimize the effectiveness of the present invention, in other embodiments, the remaining features are the same, except that the coating platform 2 comprises:
an upper horizontal plate 21 for carrying the coated substrate 6;
a lower support plate 22 disposed below the upper horizontal plate 21;
an adjusting assembly 23 for adjusting the distance between the upper horizontal plate 21 and the lower support plate 22;
and a fixing assembly 24 for connecting the upper horizontal plate 21 and the lower support plate 22.
With the above preferred scheme, the coating platform 2 has high flatness, and the height of the coating platform 2 can be precisely adjusted. The adjusting assembly 23 can be but not limited to an adjusting bolt, the fixing assembly 24 can be but not limited to a fastening bolt, furthermore, the adjusting assembly 23 and the fixing assembly 24 can be uniformly distributed at four corners of the lower supporting plate 22, and the height of the upper horizontal plate 21 can be adjusted from different angles, which helps to improve the horizontal accuracy of the upper horizontal plate 21.
In order to further optimize the effect of the present invention, in the above embodiment, a heating element (not shown) for supplying heat to the upper horizontal plate 21 is provided on the upper horizontal plate 21.
With the preferred solution described above, the coating platform 2 has a heating function.
In order to further optimize the utility model discloses an implement the effect, in some other embodiments, all the other characteristic techniques are the same, and the difference lies in, and the confession liquid device includes reservoir, feed pump and confession liquid pipeline, and the import and the export of feed pump are passed through the feed pipeline and are gone into the liquid mouth with the solution passageway on reservoir and the die head 3 respectively and be connected.
By adopting the preferable scheme, the arrangement of the liquid storage tank and the liquid supply pump can provide stable and continuous solution for the die head 3, is favorable for improving the stability of coating thickness, and is particularly suitable for the requirement of large-area coating.
In order to further optimize the working effect of the present invention, in other embodiments, the rest of the features are the same, except that the die head frame is a gantry structure spanning the coating platform 2.
By adopting the preferable scheme, the die head frame has a stable structure.
The various embodiments above may be implemented in cross-parallel.
The utility model relates to a perovskite film coating equipment's with negative pressure device work flow as follows:
coating preparation work:
firstly, moving a coating platform 2 to a preparation position, and placing a gap adjusting substrate on the coating platform 2;
then, the coating stage 2 is moved to the coating start position;
secondly, the die head 3 descends to a coating position under the action of the cylinder, and the gap between the die lip and the gap adjusting substrate is adjusted to a proper value and is adjusted to be uniform through the precise height adjusting mechanism of the die head 3;
and finally, moving the coating platform 2 back and forth to different positions, adjusting the gap between the die lip and the gap adjusting substrate to be consistent with the gap at the coating starting position, and enabling the gap to be uniform from left to right, finishing the coating preparation work and starting the formal coating work.
Formal coating work:
and (3) placing the coating substrate 6 on the coating platform 2, moving to a coating starting position, descending the die head 3, pushing the negative pressure box 4 to be tightly attached to the die head 3, starting the liquid supply pump, establishing a liquid bridge between the die head 3 and the coating substrate 6, starting the negative pressure device and adjusting the negative pressure in the negative pressure box 4 to a proper negative pressure value.
The coating platform 2 is moved to complete coating, and when coating is completed, the coating platform 2 moves back and forth through the driving device and the transmission mechanism, and the die head 3 is not moved.
The utility model relates to a perovskite film coating equipment with negative pressure device, it has increased the negative pressure between die head 3 and coating basement 6, can effectively reduce the regional atmospheric pressure of coating on the one hand, and on the other hand applys a negative pressure pulling force for the liquid bridge, makes the liquid bridge more stable to the production in greatly reduced hole.
The above embodiments are only for illustrating the technical conception and the features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and the protection scope of the present invention can not be limited thereby, and all equivalent changes or modifications made according to the spirit of the present invention should be covered in the protection scope of the present invention.
Claims (10)
1. A perovskite thin film coating equipment with negative pressure device includes:
a base;
the coating platform is arranged on the base and is in sliding connection with the base, and the coating platform is used for bearing a coating substrate;
a die assembly, comprising: the die head comprises a die head frame and a die head arranged on the die head frame, wherein a solution channel is arranged in the die head, a die lip is arranged at a liquid outlet of the solution channel at the bottom of the die head, and the die head can lift up and down;
the liquid supply device is connected with the liquid inlet of the solution channel and is used for supplying solution to the die head;
it is characterized by also comprising:
negative pressure device includes: the negative pressure box is connected with a vacuum pump through a vacuum pumping pipeline, and the negative pressure box is arranged on the coating platform and is in sliding connection with the coating platform.
2. The perovskite thin film coating equipment with the negative pressure device as claimed in claim 1, wherein the coating platform is provided with a sliding groove, and the sliding end of the negative pressure box is arranged in the sliding groove and can slide along the sliding groove.
3. The perovskite thin film coating apparatus with the negative pressure device as claimed in claim 2, wherein a sealing member is provided between the slide groove and the sliding end of the negative pressure cartridge.
4. The perovskite thin film coating apparatus with the negative pressure device as claimed in claim 1, wherein the negative pressure cartridge comprises:
the inner shape of the front part of the box is matched with the outer contour of the coating end of the die head, and the coating end of the die head is tightly attached to the front part of the box during coating;
and a sliding gap is arranged between the bottom surface of the rear part of the box and the bearing surface of the coating platform.
5. The perovskite thin film coating equipment with the negative pressure device as claimed in claim 1, wherein a negative pressure detection device is arranged in the negative pressure box, and the negative pressure detection device and the vacuum pump are respectively and electrically connected with the control device.
6. The perovskite thin film coating equipment with the negative pressure device as claimed in any one of claims 1 to 5, wherein the coating platform is slidably connected with the base through a guide rail guide groove structure.
7. The perovskite thin film coating apparatus with the negative pressure device as claimed in any one of claims 1 to 5, wherein the coating platform comprises:
an upper horizontal plate for carrying a coated substrate;
the lower supporting plate is arranged below the upper horizontal plate;
the adjusting assembly is used for adjusting the distance between the upper horizontal plate and the lower supporting plate;
and the fixing component is used for connecting the upper horizontal plate and the lower supporting plate.
8. The perovskite thin film coating equipment with the negative pressure device as claimed in claim 7, wherein a heating element for supplying heat to the upper horizontal plate is arranged on the upper horizontal plate.
9. The perovskite thin film coating equipment with the negative pressure device as claimed in any one of claims 1 to 5, wherein the liquid supply device comprises a liquid storage tank, a liquid supply pump and a liquid supply pipeline, and an inlet and an outlet of the liquid supply pump are respectively connected with the liquid storage tank and a solution channel liquid inlet on the die head through the liquid supply pipeline.
10. The perovskite thin film coating apparatus with the negative pressure device as claimed in any one of claims 1 to 5, wherein the die head is of a gantry type structure crossing the coating platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022047768.8U CN213255465U (en) | 2020-09-17 | 2020-09-17 | Perovskite film coating equipment with negative pressure device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022047768.8U CN213255465U (en) | 2020-09-17 | 2020-09-17 | Perovskite film coating equipment with negative pressure device |
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| CN213255465U true CN213255465U (en) | 2021-05-25 |
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| CN202022047768.8U Active CN213255465U (en) | 2020-09-17 | 2020-09-17 | Perovskite film coating equipment with negative pressure device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023035449A1 (en) * | 2021-09-10 | 2023-03-16 | 中国华能集团清洁能源技术研究院有限公司 | In-situ flash evaporation film-forming device for perovskite solar cells |
-
2020
- 2020-09-17 CN CN202022047768.8U patent/CN213255465U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023035449A1 (en) * | 2021-09-10 | 2023-03-16 | 中国华能集团清洁能源技术研究院有限公司 | In-situ flash evaporation film-forming device for perovskite solar cells |
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