CN218203027U - Planar target replacing device - Google Patents
Planar target replacing device Download PDFInfo
- Publication number
- CN218203027U CN218203027U CN202222465262.8U CN202222465262U CN218203027U CN 218203027 U CN218203027 U CN 218203027U CN 202222465262 U CN202222465262 U CN 202222465262U CN 218203027 U CN218203027 U CN 218203027U
- Authority
- CN
- China
- Prior art keywords
- frame
- vacuum chucks
- lifting platform
- target
- support frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model provides a planar target replacing device; comprises a base, a lifting platform, a lifting mechanism, a negative pressure component and a plurality of supporting frames; the lifting platform is arranged on the upper side of the base, the lifting mechanism controls the lifting platform to move up and down relative to the base, the lower end of the support frame is fixedly connected to the edge of one side of the lifting platform, the support frame extends to the outer side of the lifting platform to form two supporting plates which are distributed up and down, and a space for accommodating a target material back plate is formed between the two supporting plates which are distributed up and down on the same support frame; the negative pressure assembly at least comprises a plurality of groups of vacuum chucks, the groups of vacuum chucks are in one-to-one correspondence with the support frames, each group of vacuum chucks is arranged on the corresponding support frame, each group of vacuum chucks comprises a plurality of vacuum chucks, the same group of vacuum chucks are located in the interval area of the corresponding support frames, and the vacuum chucks can adsorb the target backboard. The device can save labor and is more labor-saving in the disassembly process. The moving is convenient, no additional space is occupied, and the target changing operation can be completed on a vehicle.
Description
Technical Field
The utility model belongs to the target field of changing, in particular to device is changed to plane target.
Background
At present, a planar target is often selected in the field of magnetron sputtering, target replacement is basically vehicle replacement or manual moving replacement, but the cost of vehicle construction is too high, and the cost is too high for medium and small planar target parts. More than three people are used for manually lifting the small-sized test equipment for dismounting and mounting, the mounting mode can be completed by three people, manpower is wasted, and the small-sized test equipment is not easy to operate in the mounting process.
Although there are techniques related to the planar target replacing device in the prior patents, such as: the problems of complex use flow, inconvenient movement and the like exist in the Chinese utility model 'a magnetron sputtering device convenient for target replacement' with the patent number of CN202122910626.4 and the Chinese utility model 'auxiliary target replacement tool and auxiliary target replacement device' with the patent number of CN202121054651.0, and the problems existing in the actual target replacement cannot be solved.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problem of providing a device is changed to rational in infrastructure, practice thrift artifical plane target.
In order to solve the technical problem, the utility model provides a plane target replacing device;
comprises a base, a lifting platform, a lifting mechanism, a negative pressure component and a plurality of supporting frames;
the lifting platform is arranged on the upper side of the base, the lifting mechanism controls the lifting platform to move up and down relative to the base, the lower end of the support frame is fixedly connected to the edge of one side of the lifting platform, the support frame extends to the outer side of the lifting platform to form two supporting plates which are distributed up and down, and a space for accommodating a target material back plate is formed between the two supporting plates which are distributed up and down on the same support frame;
the negative pressure assembly at least comprises a plurality of groups of vacuum chucks, the groups of vacuum chucks are in one-to-one correspondence with the support frames, each group of vacuum chucks is arranged on the corresponding support frame, each group of vacuum chucks comprises a plurality of vacuum chucks, the same group of vacuum chucks are located in the interval area of the corresponding support frame, and the vacuum chucks can adsorb the target backboard.
Preferably, the planar target replacing device is characterized in that the lifting mechanism is a lifting cylinder, a cylinder body of the lifting cylinder is fixedly connected with the lifting platform, a piston rod of the lifting cylinder penetrates through the lifting platform and is fixedly connected with the upper end face of the base, and the telescopic direction of the piston rod of the lifting cylinder is consistent with the vertical direction.
As the optimization of the plane target replacing device, the plane target replacing device further comprises a plurality of guide assemblies, each guide assembly comprises a guide sleeve and a guide rod, the guide sleeves are fixedly connected to the lifting platform, the axial direction of inner holes of the guide sleeves is vertical, the lower ends of the guide rods are fixedly connected to the upper end face of the base, and the upper ends of the guide rods penetrate through the lifting platform and are matched with the guide sleeves.
Preferably, the plurality of vacuum chucks in the same group are arranged in series in the vertical direction.
As the optimization of the plane target replacing device, the bottom of the base is provided with a plurality of rollers.
Preferably, in the planar target replacing device, the rollers are universal wheels.
Preferably, the negative pressure assembly further comprises an air pump, and the air pump is respectively communicated with the plurality of groups of vacuum chucks through hoses.
As the optimization of the plane target replacing device, the plane target replacing device further comprises a counterweight assembly, the counterweight assembly comprises a counterweight frame and a plurality of counterweight blocks, the counterweight frame is fixedly connected to the upper side of the lifting platform, the counterweight frame is positioned on one side of the lifting platform far away from one side of the supporting frame, and the plurality of counterweight blocks can be distributed to be matched with the counterweight frame.
As the optimization of the plane target replacing device, the supporting frame comprises an upper frame, a lower frame and a positioning column, the bottom of the lower frame is fixedly connected to the lifting table, the upper frame is hinged to the lower frame through a hinge, the hinge is installed on the side wall of the upper frame and the side wall of the lower frame, the side wall of the upper frame is close to the center of the lifting table, the supporting frame is provided with positioning holes, the upper portions of the positioning holes penetrate through the end faces of the two sides of the upper frame, the lower ends of the positioning holes extend into the lower frame, the positioning column is matched with the positioning holes, and the lower ends of the positioning columns can penetrate through the upper frame and extend into the bottom ends of the positioning holes in the lower frame.
As the optimization of the planar target replacing device, the lower frame side wall close to one side of the center position of the lifting platform is fixedly connected with a limiting block, and the upper frame side wall after being overturned can abut against the upper end face of the limiting block.
After adopting such structure, this plane target change device can directly utilize the layer board of support frame at target backplate bottom sprag target, has removed the artifical location installation of directly highly adsorbing on this plane target change device after the dismantlement from when dismantling, can be after changing the target directly accurate location, has avoided the artifical location of lifting once more when installing. The operation is simple and labor-saving, and the target replacing operation can be completed by one person. The back plate and the back plate are fixed on the plane target replacing device, and the target replacing process can be completed on the plane target replacing device.
Compared with the prior art that the target material is manually lifted out and replaced, the device can save two labors and is more labor-saving in the disassembly process. The moving is convenient, no additional space is occupied, and the target changing operation can be completed on a vehicle. The installation process location is accurate, can direct quick completion installation. Not only saves labor but also saves time. The operation of replacing the target can be rapidly completed by one person.
Drawings
Fig. 1 is a left side view of the first embodiment of the present planar target exchanging apparatus.
Fig. 2 is a front view of the first embodiment of the present planar target exchanging apparatus.
Fig. 3 is a left side view of the support frame in the second embodiment of the present planar target replacing apparatus in the initial state.
Fig. 4 is a left side view of the planar target replacing device according to the second embodiment after the upper frame is turned over.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention can be embodied in many different forms other than those specifically described herein, and it will be apparent to those skilled in the art that similar modifications can be made without departing from the spirit and scope of the invention, and it is therefore not to be limited to the specific embodiments disclosed below.
The terms "vertical," "horizontal," "left," "right," and the like as used herein are for illustrative purposes only and do not denote a single embodiment.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
Example one
Please refer to fig. 1-2.
The plane target replacing device comprises a base 1, a lifting platform 2, a lifting mechanism, a negative pressure assembly, two supporting frames 3, a counterweight assembly and four groups of guide assemblies.
The base 1 is substantially rectangular, four rollers 11 are arranged at the bottom of the base 1, and the four rollers 11 are distributed at four corners of the base 1.
The guide assembly comprises a guide sleeve 41 and a guide rod 42, the guide sleeve 41 is installed on the lifting platform 2 through a bolt, the axial direction of an inner hole of the guide sleeve 41 is vertical, the lower end of the guide rod 42 is welded on the upper end face of the base 1, and the upper end of the guide rod 42 penetrates through the lifting platform 2 and is matched with the corresponding guide sleeve 41.
The negative pressure assembly comprises an air pump 51 and two groups of vacuum chucks 53, the two groups of vacuum chucks 53 correspond to the two groups of support frames 3 one by one, each group of vacuum chucks 53 are arranged on the corresponding support frames 3, one group of vacuum chucks 53 comprise four vacuum chucks 53, the same group of vacuum chucks 53 are arranged in the interval area of the corresponding support frames 3, the vacuum chucks 53 can adsorb a target backboard, the air pump 51 is communicated with the two groups of vacuum chucks 53 through a hose 52, and the same group of four vacuum chucks 53 are distributed in sequence along the vertical direction.
The lifting mechanism is a lifting oil cylinder 6, a cylinder body of the lifting oil cylinder 6 is fixed with the lifting platform 2 through bolts, a piston rod of the lifting oil cylinder 6 penetrates through the lifting platform 2 and is fixed with the upper end face of the base 1 through bolts, and the telescopic direction of the piston rod of the lifting oil cylinder 6 is consistent with the vertical direction.
The counterweight assembly comprises a counterweight frame 71 and a plurality of counterweights 72, the counterweight frame 71 is welded and fixed on the upper side of the lifting platform 2, the counterweight frame 71 is arranged at the rear part of the lifting platform 2, and the counterweights 72 can be distributed and matched with the counterweight frame 71.
During the use, utilize four universal wheels can change the device with this plane target and move to the assigned position in a flexible way, make the dismouting process of plane target remove conveniently, utilize lift cylinder 6, remove to the assigned height at dismantlement in-process support frame 3, the installation need not fix a position once more.
Two supporting plates 31 of the supporting frame 3 are positioned in the middle of the planar target, the two groups of vacuum suckers 53 are in contact with the target back plate, the target is fixed on the planar target replacing device, and workers do not need to hold the target back plate when moving the trolley, so that the target is prevented from falling obliquely.
This device is changed to plane target can be directly at target backplate bottom sprag target, has removed the manual work when dismantling from and has lifted up, directly utilizes vacuum chuck 53 at former high absorption on this device is changed to plane target after the dismantlement, can directly accurate location installation after changing the target, has avoided the manual work once more to lift up the location when installing. The plane target replacing device is simple to operate and labor-saving, and target replacing operation can be completed by one person. And the target material back plate are fixed on the plane target material replacing device, and the target material replacing process can be completed on a vehicle.
Example two
Please refer to fig. 3-4.
The difference between this embodiment and the first embodiment is: the weight components are reduced; the negative pressure assembly includes no air pump, and the two sets of vacuum suction cups 53 'are directly connected to an external negative pressure source through hoses 52'. The support frame comprises an upper frame 32', a lower frame 33' and a positioning column 34', the bottom of the lower frame 33' is welded and fixed on the lifting platform 2', the upper frame 32' is hinged with the lower frame 33 'through a hinge 37', the hinge 37 'is installed on the side walls of the upper frame 32' and the lower frame 33 'close to one side of the center of the lifting platform 2', the support frame is provided with a positioning hole 35', the upper part of the positioning hole 35' penetrates through the end surfaces of the two sides of the upper frame 32', the lower end of the positioning hole 35' extends into the lower frame 33', the positioning column 34' is matched with the positioning hole 35', and the lower end of the positioning column 34' can extend into the bottom end of the positioning hole 35 'in the lower frame 33'. A limiting block 36 'is fixedly welded on the side wall of the lower frame 33' close to the central position of the lifting platform 2', the upper end face of the limiting block 36' is a horizontal plane, and the side wall of the upper frame 32 'after being overturned can abut against the upper end face of the limiting block 36'.
Utilize this plane target to change device in this implementation to carry out the process of dismouting to plane target all the same with embodiment one, do not describe it here again, the advantage of this embodiment can be dismantled the back at plane target, takes out reference column 34 'in the support frame, controls upper bracket 32' and communicates the target and overturn 90 backward, until upper bracket 32 'lateral wall supports and leans on stopper 36' up end, this plane target changes the device stably, can directly change the target on the car and the target process of changing does not produce and rocks.
When the target material is just taken in the first embodiment, the target material is fixed by the adsorption force of the two groups of vacuum chucks 53', the adsorbed target material is vertical, the target material is directly taken and easily falls off and falls underground, the upper frame 32' is controlled in the first embodiment to communicate the target material and turn over backwards by 90 degrees, and even if the two groups of vacuum chucks 53' do not have the adsorption force after turning over, the target material cannot fall off, which is equal to that the target material is directly placed on a vehicle, so that the risk that the target material falls off is reduced.
The foregoing description is only for two embodiments of the present invention, and it should be noted that, for those skilled in the art, many modifications and improvements can be made without departing from the principle of the present invention, and these should also be considered as belonging to the protection scope of the present invention.
Claims (10)
1. A planar target replacing apparatus, characterized in that:
comprises a base, a lifting platform, a lifting mechanism, a negative pressure component and a plurality of supporting frames;
the lifting platform is arranged on the upper side of the base, the lifting mechanism controls the lifting platform to move up and down relative to the base, the lower end of the support frame is fixedly connected to the edge of one side of the lifting platform, the support frame extends to the outer side of the lifting platform to form two supporting plates which are distributed up and down, and a space for accommodating a target material back plate is formed between the two supporting plates which are distributed up and down on the same support frame;
the negative pressure assembly at least comprises a plurality of groups of vacuum chucks, the groups of vacuum chucks are in one-to-one correspondence with the support frames, each group of vacuum chucks is arranged on the corresponding support frame, each group of vacuum chucks comprises a plurality of vacuum chucks, the same group of vacuum chucks are positioned in the interval area of the corresponding support frame, and the vacuum chucks can adsorb the target backboard.
2. The planar target replacing apparatus according to claim 1, wherein:
the lifting mechanism is a lifting oil cylinder, a cylinder body of the lifting oil cylinder is fixedly connected with the lifting platform, a piston rod of the lifting oil cylinder penetrates through the lifting platform and is fixedly connected with the upper end face of the base, and the stretching direction of the piston rod of the lifting oil cylinder is consistent with the vertical direction.
3. The planar target replacing apparatus according to claim 2, wherein:
still include a plurality of direction subassemblies, the direction subassembly includes uide bushing and guide bar, and uide bushing fixed connection is on the elevating platform, and the hole axial of uide bushing is vertical direction, and guide bar lower extreme fixed connection is at the base up end, and the guide bar upper end runs through the elevating platform and cooperates with the uide bushing.
4. The planar target replacement apparatus according to claim 1, wherein:
the vacuum suction discs in the same group are sequentially distributed along the vertical direction.
5. The planar target replacement apparatus according to claim 1, wherein:
the bottom of the base is provided with a plurality of rollers.
6. The planar target replacing apparatus according to claim 5, wherein:
the rollers are universal wheels.
7. The planar target replacing apparatus according to claim 1, wherein:
the negative pressure assembly further comprises an air pump which is respectively communicated with the groups of vacuum suckers through hoses.
8. The planar target replacement apparatus according to claim 1, wherein:
still include the counter weight subassembly, the counter weight subassembly includes counter weight frame and polylith balancing weight, counter weight frame fixed connection is at the elevating platform upside, the counter weight frame is in the elevating platform one side of keeping away from support frame one side, and the polylith balancing weight can distribute and cooperate with the counter weight frame.
9. The planar target replacing apparatus according to claim 1, wherein:
the support frame comprises an upper frame, a lower frame and a positioning column, the bottom of the lower frame is fixedly connected to the lifting platform, the upper frame is hinged to the lower frame through a hinge, the hinge is installed on the side wall of the upper frame and the side wall of the lower frame, which are close to one side of the central position of the lifting platform, the support frame is provided with positioning holes, the upper portions of the positioning holes penetrate through the end faces of the two sides of the upper frame, the lower ends of the positioning holes extend into the lower frame, the positioning column is matched with the positioning holes, and the lower ends of the positioning columns can penetrate through the upper frame and extend into the bottom ends of the positioning holes in the lower frame.
10. The planar target changing apparatus according to claim 9, wherein:
fixedly connected with stopper on the lower carriage lateral wall that is close to elevating platform central point and puts one side, the upper ledge lateral wall after the upset can lean on the stopper up end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222465262.8U CN218203027U (en) | 2022-09-15 | 2022-09-15 | Planar target replacing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222465262.8U CN218203027U (en) | 2022-09-15 | 2022-09-15 | Planar target replacing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218203027U true CN218203027U (en) | 2023-01-03 |
Family
ID=84633135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222465262.8U Active CN218203027U (en) | 2022-09-15 | 2022-09-15 | Planar target replacing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218203027U (en) |
-
2022
- 2022-09-15 CN CN202222465262.8U patent/CN218203027U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5184930A (en) | Vehicle lifting system and method | |
| CN218203027U (en) | Planar target replacing device | |
| CN104626041B (en) | A kind of glass fitting machine | |
| CN101612951B (en) | Trolley for through printing forme | |
| CN215281278U (en) | Optical lens piece objective table | |
| US3356070A (en) | Spray painting fixture | |
| CN212524645U (en) | Paint spraying equipment for furniture plates with non-flat end surfaces | |
| CN107933059A (en) | A kind of laminating equipment and its operation method for mobile phone liquid crystal screen glass | |
| CN209757158U (en) | Effectual conveyer of shock attenuation for communication product | |
| CN106477300B (en) | Bottom plate intermediate station | |
| US3356069A (en) | Spray painting apparatus including a workholder, mask and aligning means therefor | |
| CN216708745U (en) | Plastic products printing device with adjustable | |
| CN220637109U (en) | Machine tool workpiece blanking assembly with limiting structure | |
| CN220506499U (en) | Steel cylinder clamping structure for low-temperature liquid oxygen filling assembly line | |
| CN219351091U (en) | Ring main unit insulator mounting device | |
| CN110976152A (en) | Spray painting frame mechanism | |
| CN220700697U (en) | A remove two dollies for lithography apparatus | |
| CN219216013U (en) | Auto-parts processing transfer device | |
| CN217145547U (en) | Tire dismounting device | |
| CN219902346U (en) | Plate grooving device | |
| CN218753099U (en) | Turnover mechanism for aviation transportation tray production line | |
| CN220315629U (en) | Automobile door plate transferring frame | |
| CN210065058U (en) | Stator lifting device | |
| CN217264601U (en) | Tire lifting and moving device | |
| CN203833556U (en) | Lifting platform for cab front suspension assembly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |