CN218188874U - Gas cooling device and waste gas treatment equipment - Google Patents

Abstract

The utility model provides a gaseous heat sink and exhaust-gas treatment equipment, relate to exhaust-gas treatment technical field, form the overflow clearance between the terminal surface through the first end with the first end of breather pipe and the internal face of the first end wall of outer barrel, and the outer peripheral face and the second end wall of breather pipe are used for forming second open-ended surface sealing connection, the outer peripheral face of breather pipe encloses into the retaining chamber with the internal surface of outer barrel jointly from this, thereby rise to behind the first end of submerging the breather pipe through the liquid level of the water of setting up the portion of intaking on outer barrel to the retaining intracavity input, can form the water curtain through overflow clearance inflow in the breather pipe, if high temperature waste gas such as acid gas lets in the back by first opening, can cool down it through the water curtain, waste gas after the cooling is discharged from the second opening again, in order to realize the effect of cooling down high temperature waste gas, and simultaneously, owing to formed the water curtain, consequently, can prevent that waste gas from corroding the breather pipe, the protective action has been had, equipment life has been improved.

Description

Gas cooling device and waste gas treatment equipment

Technical Field

The utility model belongs to the technical field of the exhaust-gas treatment technique and specifically relates to a gaseous heat sink and exhaust-gas treatment equipment are related to.

Background

Gases harmful to humans and the environment are generated during modern semiconductor manufacturing. These gases need to be rendered harmless by special waste gas treatment equipment and discharged to the atmosphere.

In the operation process of the waste gas treatment equipment, after entering the pyrolysis reaction of the reaction cavity, the gas needs to be cooled, however, the current cooling device has certain corrosivity due to the high-temperature gas, so that the cooling device can be corroded, and the service life of the equipment is short.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a gaseous heat sink and exhaust-gas treatment equipment can still improve corrosion when cooling down.

In a first aspect, an embodiment of the present invention provides a gas cooling device, which includes:

the water inlet part is arranged on the outer cylinder, and a first end wall and a second end wall of the outer cylinder in the axial direction are respectively provided with a first opening and a second opening;

the breather pipe, its ascending first end of axial with the internal face of first end wall is relative, just first end is in orthographic projection on the first end wall encircle in outside the first opening, the terminal surface of first end with form the overflow clearance between the internal face of first end wall, breather pipe ascending second end by the second opening stretches out outside the outer barrel, just the second end wall is used for forming the second open-ended surface with the outer peripheral face sealing connection of breather pipe, the outer peripheral face of breather pipe with the internal surface of outer barrel encloses into the water storage chamber jointly, the portion of intaking be used for to the water storage chamber water delivery, the water storage chamber passes through the overflow clearance with the inner chamber intercommunication of breather pipe.

Above-mentioned technical scheme, form the overflow clearance between the terminal surface through the first end of breather pipe and the internal face of the first end wall of outer barrel, and the outer peripheral face and the second end wall of breather pipe are used for forming second open-ended surface sealing connection, the outer peripheral face of breather pipe encloses into the retaining chamber with the internal surface of outer barrel jointly from this, thereby through the liquid level that sets up the water of the portion of intaking on the outer barrel to retaining intracavity input after to submerging the first end of breather pipe, can flow into the breather pipe through the overflow clearance and form the water curtain, after high temperature waste gas such as acid gas lets in by first opening, can cool down it through the water curtain, waste gas after the cooling is discharged from the second opening again, in order to realize the effect of cooling high temperature waste gas, and simultaneously, owing to formed the water curtain, consequently, can prevent that waste gas from corroding the breather pipe, has the guard action, and the service life of equipment is prolonged.

Optionally, the inner diameter of the vent pipe gradually decreases from the first end wall to the second end wall.

Above-mentioned technical scheme can make the water that gets into in the breather pipe by the overflow clearance flow to the second end along the inner peripheral surface of breather pipe to improve the homogeneity of water curtain distribution, better cover the inner peripheral surface of breather pipe, have better cooling and anticorrosion function.

Optionally, the vent pipe is in a circular truncated cone shape;

or the like, or a combination thereof,

the vent pipe is in a circular truncated cone shape, and the taper angle of the vent pipe is 15-25 degrees.

Among the above-mentioned technical scheme, through setting up the breather pipe into round platform form, consequently can be so that after the water liquid that gets into in the breather pipe by the overflow clearance falls on the inner peripheral surface of breather pipe, water liquid is the slope and rectilinearly flows to the second end to this effect that water liquid more evenly flows on the inner peripheral surface of breather pipe is reached, thereby further improve the homogeneity that the water curtain distributes, in addition, through setting up the cone angle of round platform form breather pipe to 15 ~ 25, in order to avoid the too big resistance that leads to water liquid to receive at the inner peripheral surface of breather pipe or cone angle undersize leads to the phenomenon that water liquid area of contact is little on the inner peripheral surface of breather pipe that leads to the too big cone angle, thereby more be favorable to the homogeneity that the water curtain distributes.

Optionally, a flow guide ring is disposed on an inner wall surface of the first end wall, and the flow guide ring surrounds the first opening and is located in an orthographic projection of the first end on the first end wall.

Among the above-mentioned technical scheme, keep off from overflow clearance spun water when water pressure is too big through the water conservancy diversion ring to let water fall on the inner peripheral surface of breather pipe.

Optionally, a vertical distance between an end surface of the deflector ring facing the second end wall and an inner wall surface of the first end wall is greater than or equal to a vertical distance between an end surface of the first end and an inner wall surface of the first end wall.

Above-mentioned technical scheme can make the water conservancy diversion ring keep off the water from overflow clearance spun when water pressure is too big better.

Optionally, a vertical distance between an end surface of the deflector ring facing the second end wall and an inner wall surface of the first end wall is 0.5 to 1.5mm.

Above-mentioned technical scheme can make the water conservancy diversion ring keep off the water from overflow clearance spun when water pressure is too big better.

Optionally, a vertical distance between an end surface of the first end and an inner wall surface of the first end wall is 0.5 to 1.5mm.

Above-mentioned technical scheme can make the water storage chamber enter into the water yield in the breather pipe by the overflow clearance suitable to guarantee rivers and can cover this overflow clearance and form the even water curtain of distribution in the breather pipe.

Optionally, be provided with two at least of circumference interval setting on the outer barrel the portion of intaking, and every the projected axis in the predetermined plane of portion of intaking with the axis dislocation set of outer barrel, wherein, predetermined plane with the axis of outer barrel is perpendicular.

Above-mentioned technical scheme can make through the at least two portions of intaking that the circumference interval set up to each regional water delivery in the retaining intracavity, the water of intaking moreover still can form the rivers of circling round to make the water level evenly rise.

Optionally, the outer cylinder body is provided with at least two water inlet parts arranged at intervals in the circumferential direction.

Above-mentioned technical scheme can improve the homogeneity of each regional water level in the retaining intracavity, makes the water level rise evenly better.

Optionally, the outer barrel includes outer tube, first apron and second apron, first apron with the second apron can be dismantled respectively and connect in outer tube axial ascending both ends, first apron with the position that the inner chamber of outer tube corresponds is first end wall, the second apron with the position that the inner chamber of outer tube corresponds is the second end wall, first apron the outer tube the second apron with the breather pipe encloses jointly and becomes the retaining chamber.

Above-mentioned technical scheme, through the setting of dismantling of first apron and second apron, can make things convenient for the dismouting of whole device.

Optionally, the outer cylinder further includes a first mounting ring and a second mounting ring, the inner diameter of the first mounting ring and the inner diameter of the second mounting ring are both greater than or equal to the outer diameter of the outer tube, the first mounting ring and the second mounting ring are respectively connected to two axial ends of the outer tube, and the end faces of the first mounting ring and the second mounting ring, which are opposite to each other, are respectively connected to the first cover plate and the second cover plate in a sealing manner.

Above-mentioned technical scheme, the outer tube comes to dismantle with first apron and second apron through first collar and second collar and is connected, and increase area of contact improves the connection reliability of whole device.

The second aspect, the utility model provides an exhaust-gas treatment equipment, it includes foretell gaseous heat sink, consequently also has corresponding beneficial effect.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic perspective view of a gas cooling device according to an embodiment of the present invention;

FIG. 2 is a front view of FIG. 1;

FIG. 3 isbase:Sub>A cross-sectional view A-A of FIG. 2;

FIG. 4 is an enlarged view of section I of FIG. 3;

fig. 5 is a cross-sectional view taken along line C-C of fig. 2.

An icon: 10-outer cylinder; 11-an outer tube; 12-a first cover plate; 120-a first opening; 121-a first end wall; 13-a second cover plate; 131-a second opening; 132-a second end wall; 14-a first mounting ring; 15-a second mounting ring; 16-a water inlet part; 17-a flow guide ring; 20-a breather pipe; 21-a first end; 22-a second end; 30-an overflow gap; 40-water storage cavity.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which is usually placed when the product of the present invention is used, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical", "overhang" and the like do not imply that the components are required to be absolutely horizontal or overhang, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Some embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The embodiments and features of the embodiments described below can be combined with each other without conflict.

Referring to fig. 1 to 4, an embodiment of the present invention provides a gas cooling device, which includes:

an outer cylinder 10 provided with a water inlet portion 16, and a first end wall 121 and a second end wall 132 of the outer cylinder 10 in an axial direction are respectively provided with a first opening 120 and a second opening 131;

the first end 21 of the breather pipe 20 in the axial direction is opposite to the inner wall surface of the first end wall 121, the orthographic projection of the first end 21 on the first end wall 121 surrounds the outside of the first opening 120, an overflow gap 30 is formed between the end surface of the first end 21 and the inner wall surface of the first end wall 121, the second end 22 of the breather pipe 20 in the axial direction extends out of the outer cylinder 10 from the second opening 131, the surface of the second end wall 132 for forming the second opening 131 is hermetically connected with the outer peripheral surface of the breather pipe 20, the outer peripheral surface of the breather pipe 20 and the inner surface of the outer cylinder 10 jointly form a water storage cavity 40, the water inlet part 16 is used for conveying water to the water storage cavity 40, and the water storage cavity 40 is communicated with the inner cavity of the breather pipe 20 through the overflow gap 30.

Therefore, in the gas cooling device of the embodiment, the overflow gap 30 is formed between the end surface of the first end 21 of the vent pipe 20 and the inner wall surface of the first end wall 121 of the outer cylinder 10, and the outer peripheral surface of the vent pipe 20 and the second end wall 132 are used for forming the surface sealing connection of the second opening 131, so that the outer peripheral surface of the vent pipe 20 and the inner surface of the outer cylinder 10 jointly enclose the water storage cavity 40, so that after the liquid level of water input into the water storage cavity 40 through the water inlet part 16 arranged on the outer cylinder 10 rises to submerge the first end 21 of the vent pipe 20, water curtain can be formed in the vent pipe 20 through the overflow gap 30, high-temperature waste gas such as acid gas and the like is introduced from the first opening 120, the temperature of the waste gas can be cooled through the water curtain, and the cooled waste gas is discharged from the second opening 131, so as to realize the cooling effect of the high-temperature waste gas, meanwhile, the water curtain is formed, so that the corrosion of the vent pipe 20 can be prevented, the protective effect is provided, and the service life of the device is prolonged.

In this embodiment, with reference to fig. 2 and 3, the outer cylinder 10 includes an outer tube 11, a first cover plate 12 and a second cover plate 13, the first cover plate 12 and the second cover plate 13 are detachably connected to two ends of the outer tube 11 in the axial direction, a portion of the first cover plate 12 corresponding to the inner cavity of the outer tube 11 is a first end wall 121, a portion of the second cover plate 13 corresponding to the inner cavity of the outer tube 11 is a second end wall 132, and the first cover plate 12, the outer tube 11, the second cover plate 13 and the ventilation tube 20 together enclose a water storage cavity 40. Therefore, the first cover plate 12 and the second cover plate 13 can be detachably arranged, so that the whole device can be conveniently detached.

The outer cylinder 10 further comprises a first mounting ring 14 and a second mounting ring 15, the inner diameter of the first mounting ring 14 and the inner diameter of the second mounting ring 15 are both larger than or equal to the outer diameter of the outer tube 11, the first mounting ring 14 and the second mounting ring 15 are respectively connected to two axial ends of the outer tube 11, and the end faces, opposite to each other, of the first mounting ring 14 and the second mounting ring 15 are respectively connected with the first cover plate 12 and the second cover plate 13 in a sealing manner. Therefore, the outer tube 11 is detachably connected with the first cover plate 12 and the second cover plate 13 through the first mounting ring 14 and the second mounting ring 15, the contact area is increased, and the connection reliability of the whole device is improved.

In the present embodiment, the inner diameter of the vent tube 20 gradually decreases from the first end wall 121 to the second end wall 132. Therefore, the water entering the breather pipe 20 from the overflow gap 30 can flow to the second end 22 along the inner circumferential surface of the breather pipe 20, so as to improve the uniformity of water curtain distribution, better cover the inner circumferential surface of the breather pipe 20, and have better functions of cooling and corrosion prevention.

The air pipe 20 is approximately in a circular truncated cone shape, and the cone angle of the air pipe is 15 to 25 degrees, so that after the water liquid entering the air pipe 20 from the overflow gap 30 falls on the inner circumferential surface of the air pipe 20, the water liquid flows towards the second end 22 in an inclined straight line shape, the effect that the water liquid flows on the inner circumferential surface of the air pipe 20 more uniformly is achieved, the uniformity of water curtain distribution is further improved, in addition, the cone angle of the circular truncated cone-shaped air pipe 20 is set to 15 to 25 degrees, the phenomenon that the contact area of the water liquid on the inner circumferential surface of the air pipe is small due to the fact that the resistance of the water liquid on the inner circumferential surface of the air pipe is too large or the cone angle is too small due to the fact that the cone angle is too large is avoided, and the uniformity of the water curtain distribution is more facilitated.

With reference to fig. 3 and 4, in the present embodiment, the inner wall surface of the first end wall 121 is provided with the baffle ring 17, and the baffle ring 17 surrounds the first opening 120 and is located inside an orthographic projection of the first end 21 on the first end wall 121. Accordingly, the deflector ring 17 receives water discharged from the relief gap 30 when the water pressure is too high, and the water is dropped on the inner circumferential surface of the breather pipe 20.

Optionally, a perpendicular distance between an end surface of the deflector ring 17 facing the second end wall 132 and an inner wall surface of the first end wall 121 is greater than or equal to a perpendicular distance between an end surface of the first end 21 and an inner wall surface of the first end wall 121. So that the deflector ring 17 better blocks water that is ejected from the overflow gap 30 when the water pressure is too high.

Illustratively, the perpendicular distance between the end surface of the deflector ring 17 facing the second end wall 132 and the inner wall surface of the first end wall 121 is 0.5 to 1.5mm, for example, 0.5mm, 0.8mm.1.0mm, 1.2mm, 1.5mm, etc. As a result, the deflector ring 17 can better block water that is ejected from the overflow gap 30 when the water pressure is too high.

The perpendicular distance between the end surface of the first end 21 and the inner wall surface of the first end wall 121 is 0.5 to 1.5mm, for example, 0.5mm, 0.8mm.1.0mm, 1.2mm, 1.5mm, etc. Therefore, the water quantity of the water storage cavity 40 entering the breather pipe 20 from the overflow gap 30 can be proper, so that the water flow can cover the overflow gap 30 and a water curtain with uniform distribution can be formed in the breather pipe 20.

In this embodiment, the outer cylinder 10 is provided with at least two water inlet portions 16 circumferentially spaced apart from each other, and a central axis of a projection of each water inlet portion 16 in a preset plane does not intersect with an axis of the outer cylinder 10 to form a staggered arrangement, where the preset plane is perpendicular to the axis of the outer cylinder 10.

Thus, the water can be supplied to each region in the water storage chamber 40 through the at least two water inlet parts 16 arranged at intervals in the circumferential direction, and the supplied water forms a swirling water flow so that the water level rises uniformly.

Specifically, referring to fig. 5, the water inlet portions 16 are disposed on the circumferential side of the outer tube 11 of the outer cylinder 10, and the two water inlet portions 16 are disposed in a staggered manner so as to form a swirling water flow that uniformly rises when water is supplied into the water storage chamber 40.

The embodiment of the utility model provides a still provide an exhaust-gas treatment equipment, its gaseous heat sink that includes above-mentioned embodiment consequently also has corresponding structure and beneficial effect, specifically refers to above-mentioned content, no longer gives unnecessary details here.

To sum up, the embodiment of the utility model provides a gaseous heat sink and exhaust-gas treatment equipment, form overflow clearance 30 between the terminal surface through the terminal surface of the first end 21 with breather pipe 20 and the internal face of the first end wall 121 of outer barrel 10, and breather pipe 20's outer peripheral face and second end wall 132 are used for forming the surface sealing connection of second opening 131, the outer peripheral face of breather pipe 20 encloses into water storage cavity 40 with the internal surface of outer barrel 10 jointly from this, thereby rise to submerging behind the first end 21 of breather pipe 20 through the liquid level of the water of setting up the portion of intaking 16 on outer barrel 10 in to water storage cavity 40, can flow into the interior water curtain that forms of breather pipe 20 through overflow clearance 30, high temperature waste gas such as acid gas lets in the back by first opening 120, can cool down it through the water curtain, waste gas after the cooling discharges from second opening 131 again, in order to realize the effect of cooling down high temperature waste gas, and simultaneously, owing to having formed the water curtain, consequently, can prevent that waste gas from corroding breather pipe 20, and has the protective action, and prolonged the equipment service life.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications or substitutions do not depart from the scope of the invention in its corresponding aspects.

Claims (10)

1. A gas cooling device, comprising:

the water inlet structure comprises an outer cylinder (10) provided with a water inlet part (16), and a first end wall (121) and a second end wall (132) of the outer cylinder (10) in the axial direction are respectively provided with a first opening (120) and a second opening (131);

the breather pipe (20), its ascending first end (21) of axial is relative with the internal wall face of first endwall (121), just first end (21) is in orthographic projection on first endwall (121) encircles outside first opening (120), form overflow clearance (30) between the terminal surface of first end (21) and the internal wall face of first endwall (121), breather pipe (20) axial second end (22) by second opening (131) stretch out outside outer barrel (10), and second endwall (132) are used for forming sealing connection between the surface of second opening (131) and the outer peripheral face of breather pipe (20), the outer peripheral face of breather pipe (20) and the internal surface of outer barrel (10) enclose into water storage chamber (40) jointly, water inlet portion (16) are used for to water storage chamber (40), water storage chamber (40) pass through overflow clearance (30) with the inner chamber of breather pipe (20) communicates.

2. The gas cooling device according to claim 1, wherein the inner diameter of the vent tube (20) decreases in a direction from the first end wall (121) to the second end wall (132).

3. The gas cooling device according to claim 2, wherein the ventilation tube (20) is truncated cone-shaped;

or the like, or, alternatively,

the vent pipe (20) is in a circular truncated cone shape, and the taper angle of the vent pipe is 15-25 degrees.

4. The gas cooling device according to claim 1, wherein a deflector ring (17) is disposed on an inner wall surface of the first end wall (121), and the deflector ring (17) surrounds the first opening (120) and is located within an orthographic projection of the first end (21) on the first end wall (121).

5. The gas cooling device according to claim 4, wherein the perpendicular distance between the end face of the deflector ring (17) facing the second end wall (132) and the inner wall surface of the first end wall (121) is greater than or equal to the perpendicular distance between the end face of the first end (21) and the inner wall surface of the first end wall (121);

and/or the presence of a gas in the gas,

the vertical distance between the end face of the guide ring (17) facing the second end wall (132) and the inner wall surface of the first end wall (121) is 0.5-1.5 mm;

and/or the presence of a gas in the gas,

the vertical distance between the end surface of the first end (21) and the inner wall surface of the first end wall (121) is 0.5-1.5 mm.

6. The gas cooling device according to claim 1, wherein the outer cylinder (10) is provided with at least two water inlets (16) circumferentially spaced apart from each other, and a central axis of a projection of each water inlet (16) in a predetermined plane is offset from an axis of the outer cylinder (10), wherein the predetermined plane is perpendicular to the axis of the outer cylinder (10).

7. The gas cooling device according to claim 1, wherein a perpendicular distance between an end surface of the first end (21) and an inner wall surface of the first end wall (121) is 0.5-1.5 mm.

8. The gas cooling device according to claim 1, wherein the outer cylinder (10) includes an outer tube (11), a first cover plate (12) and a second cover plate (13), the first cover plate (12) and the second cover plate (13) are detachably connected to two axial ends of the outer tube (11), a portion of the first cover plate (12) corresponding to the inner cavity of the outer tube (11) is the first end wall (121), a portion of the second cover plate (13) corresponding to the inner cavity of the outer tube (11) is the second end wall (132), and the first cover plate (12), the outer tube (11), the second cover plate (13) and the ventilation tube (20) together enclose the water storage cavity (40).

9. The gas cooling device according to claim 8, wherein the outer cylinder (10) further comprises a first mounting ring (14) and a second mounting ring (15), the inner diameter of each of the first mounting ring (14) and the second mounting ring (15) is greater than or equal to the outer diameter of the outer tube (11), the first mounting ring (14) and the second mounting ring (15) are respectively connected to two ends of the outer tube (11) in the axial direction, and the end faces of the first mounting ring (14) and the end faces of the second mounting ring (15) opposite to each other are respectively connected with the first cover plate (12) and the second cover plate (13) in a sealing manner.

10. An exhaust gas treatment apparatus comprising a gas temperature reduction device according to any one of claims 1 to 9.

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