CN218160268U - Tantalum tube insulating part structure of hollow cathode ion source neutralizer - Google Patents
Tantalum tube insulating part structure of hollow cathode ion source neutralizer Download PDFInfo
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- CN218160268U CN218160268U CN202222212894.3U CN202222212894U CN218160268U CN 218160268 U CN218160268 U CN 218160268U CN 202222212894 U CN202222212894 U CN 202222212894U CN 218160268 U CN218160268 U CN 218160268U
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Abstract
The utility model discloses a hollow cathode ion source neutralizer tantalum tube insulating part structure, utilize and additionally increase one section insulating distance on the reaction portion outer wall of hollow cathode tantalum tube, make hollow cathode tantalum tube and keeper casing effective discharge area reduce, and then can make the whole functions of hollow cathode neutralizer ignition operating energy in hollow cathode tantalum tube port department, thereby make the energy reduction of ignition striking needs, the gas demand also reduces, including keeper casing (1), hollow cathode tantalum tube (2) and insulating little ceramic member (3), still be provided with tantalum tube insulating tube (4) on the outer wall of the nearly insulating little ceramic member (3) of hollow cathode tantalum tube (2), be provided with recess (5) on tantalum tube insulating tube (4).
Description
Technical Field
The utility model belongs to the technical field of plasma coating equipment technique and specifically relates to a hollow cathode ion source neutralizer tantalum tube insulator structure.
Background
As shown in figure 1, the hollow cathode tantalum tube 2 and the keeper shell 1 in the prior art can work normally only by an insulating small ceramic part 3, and the part between the insulating small ceramic part 3 and the end of the hole-core cathode tantalum tube 2 is called a reaction part, so that most area of the hollow cathode tantalum tube 2 corresponds to the exposed area of the keeper shell 1, and the reaction part of the keeper shell 1 and the hollow cathode tantalum tube 2 can discharge at multiple points if the air pressure of a keeper chamber is in an ionization region during working, because the hollow cathode tantalum tube 2 is expected to work at the inner hollow tube wall when the hollow cathode tantalum tube 2 is used most of the time, and meanwhile, the hollow cathode tantalum tube 2 and the keeper shell 1 are in a working condition of instant high-voltage pulse when the hollow cathode is started, and if the exposed surface is too much, the hollow cathode tantalum tube 2 and the keeper shell 1 can discharge at multiple points during starting, and the starting is unstable. And the hollow cathode tantalum tube 2 can cause the material of tantalum to volatilize at the working temperature of the hollow cathode tantalum tube 2 when in work, and a layer of nanoscale sputtering conductive film can be formed on the surface of the existing small insulating ceramic piece 3 after volatilization, so that the short circuit between the hollow cathode tantalum tube 2 and the keeper shell 1 can be caused, and the service life can be shortened.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to design a hollow cathode ion source neutralizer tantalum tube insulating part structure, utilize and additionally increase one section insulating distance on the reaction portion outer wall of hollow cathode tantalum tube, make hollow cathode tantalum tube and keeper casing effective discharge area reduce, and then can make the whole effects of hollow cathode neutralizer ignition operating energy in hollow cathode tantalum tube port department to the energy that the messenger igniteed arc ignition needs reduces, and the gas demand also reduces.
The utility model discloses a following technical scheme realizes: the utility model provides a hollow cathode ion source neutralizer tantalum tube insulating part structure, includes keeper casing, hollow cathode tantalum pipe and insulating little ceramic part, still is provided with tantalum pipe insulating tube on the outer wall of the little ceramic part of nearly insulating of hollow cathode tantalum pipe, is provided with the recess on tantalum pipe insulating tube.
Further for better realizing the utility model, the structure of the tantalum tube insulator of the hollow cathode ion source neutralizer is characterized in that the following structure is adopted: and a plurality of stages are arranged on the groove on the tantalum tube insulating tube.
Further for realizing better the utility model, the structure of the tantalum tube insulating part of the hollow cathode ion source neutralizer is particularly provided with the following structure: and each stage of groove is formed by rounding the inner concave part of the circumference of the tantalum tube insulating tube, and the grooves are mutually parallel.
Further for better realizing the utility model, the structure of the tantalum tube insulator of the hollow cathode ion source neutralizer is characterized in that the following structure is adopted: the width of the groove is larger than or equal to the depth of the groove.
Further for better realizing the utility model, the structure of the tantalum tube insulator of the hollow cathode ion source neutralizer is characterized in that the following structure is adopted: the ratio of the depth of the groove to the distance between the bottom of the groove and the inner wall of the tantalum tube insulating tube is 1:1 to 4.
Further for better realizing the utility model, the structure of the tantalum tube insulator of the hollow cathode ion source neutralizer is characterized in that the following structure is adopted: the length of the tantalum tube insulating tube accounts for 2/3-3/4 of the length of the reaction part of the hollow cathode tantalum tube.
Further for better realizing the utility model, the structure of the tantalum tube insulator of the hollow cathode ion source neutralizer is characterized in that the following structure is adopted: the tantalum tube insulating tube is made of ceramic materials.
Compared with the prior art, the utility model, following advantage and beneficial effect have:
the utility model discloses a can improve hollow cathode tantalum pipe and keeper casing insulation degree under the help of the multistage recess of tantalum pipe insulating tube, concrete reason is because metal material volatilizees the characteristic that generally has the rectilinear propagation, tantalum pipe insulating tube surface high point part can form the metallic film like this, but the possibility that a plurality of pits department formed conductive metal film is very little or hardly does, just so improved the insulation degree of hollow cathode tantalum pipe and keeper casing, the life that the insulation degree improvement will make neutralizer becomes about 3 times, the clean frequency of maintenance has been reduced.
The utility model discloses increase tantalum tube insulating tube on hollow cathode tantalum tube surface and can effectual reduction keeper casing to the waste heat absorption of hollow cathode tantalum tube lower extreme surface, because ceramic coefficient of heat conductivity is lower, reduced the partial temperature rise of coating film like this.
Drawings
FIG. 1 is a schematic diagram of a prior art tantalum tube insulator of a hollow cathode ion source neutralizer.
Fig. 2 is a schematic structural diagram of the present invention.
Fig. 3 is a schematic diagram of the structure of the tantalum tube insulation tube of the present invention.
Wherein, the device comprises a 1-keeper shell, a 2-hollow cathode tantalum tube, a 3-small insulating ceramic part, a 4-tantalum tube insulating tube and a 5-groove.
Detailed Description
The present invention will be described in further detail with reference to examples, but the present invention is not limited thereto.
To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention. Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention.
In the description of the present invention, it is to be understood that the terms and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, which are only for convenience of description and simplified description, and do not indicate or imply that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise explicitly specified or limited, the terms "mounting", "connecting", "setting", "laying", "fixing" and the like are to be understood broadly, and may be, for example, a fixed connection, a detachable connection, or an integral connection, and are not limited to various conventional mechanical connection manners such as screwing, interference fit, riveting, screw thread auxiliary connection and the like by what means. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.
In the present application, unless expressly stated or limited otherwise, the recitation of a first feature "on" or "under" a second feature may include the recitation of the first and second features being in direct contact, and may also include the recitation of the first and second features not being in direct contact, but being in contact with another feature between them. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
Example 1:
as shown in fig. 2 to 3, a tantalum tube insulating part structure of a hollow cathode ion source neutralizer is characterized in that an additional insulating distance is additionally arranged on the outer wall of a reaction part of a hollow cathode tantalum tube, so that the effective discharge area of the hollow cathode tantalum tube and a keeper shell is reduced, and further, the ignition working energy of the hollow cathode neutralizer can be completely acted on the port of the hollow cathode tantalum tube, so that the energy required by ignition and arc striking is reduced, the gas demand is also reduced, the structure comprises the keeper shell 1, the hollow cathode tantalum tube 2 and a small insulating ceramic part 3, a tantalum tube insulating tube 4 is further arranged on the outer wall of the small insulating ceramic part 3 close to the hollow cathode tantalum tube 2, and a groove 5 is arranged on the tantalum tube insulating tube 4.
As a preferred arrangement scheme, a section of tantalum tube insulating tube 4 is additionally arranged on the outer wall of the small insulating ceramic part 3 close to the hollow cathode tantalum tube 2, namely the reaction part of the hole-center cathode tantalum tube 2, and a groove 5 is formed in the tantalum tube insulating tube 4, when the device works, argon is introduced into the hole-center cathode tantalum tube 2, the reaction part and the keeper shell 1 are subjected to high-voltage electric field action and started, and enter a constant-current mode to carry out hollow cathode effect electron emission, and as the section of tantalum tube insulating tube 4 is additionally arranged at the reaction part, namely an insulation distance is additionally increased, the effective discharge areas of the hollow cathode tantalum tube and the keeper shell are reduced, so that ignition working energy of the hollow cathode neutralizer can be completely acted at the port of the hollow cathode tantalum tube, the energy required by ignition arc ignition is reduced, and the gas demand is also reduced.
Due to the design of the groove 5, the insulation degree of the hollow cathode tantalum tube and the keeper shell can be further improved, and the reason is that the metal material volatilization generally has the characteristic of linear propagation, so that a metal film can be formed on a high-point part of the surface of the tantalum tube insulation tube, but the possibility of forming a conductive metal film on a plurality of concave points is very small or almost zero, the insulation degree of the hollow cathode tantalum tube and the keeper shell is improved, the service life of the neutralizer is prolonged to about 3 times due to the improvement of the insulation degree, and the maintenance and cleaning frequency is reduced.
Example 2:
the present embodiment is further optimized on the basis of the above embodiment, and the same parts as the above technical solution are not repeated herein, as shown in fig. 2 and fig. 3, further to better implement the present invention, a structure of a hollow cathode ion source neutralizer tantalum tube insulator particularly adopts the following arrangement structure: the groove 5 on the tantalum tube insulating tube 4 is provided with multiple levels, and the levels can be set from 3 to 8, preferably 5, according to actual conditions in specific design.
Example 3:
this embodiment is further optimized on the basis of any of the above embodiments, and the same parts as the above technical solutions are not repeated herein, as shown in fig. 2 and fig. 3, further to better implement the present invention, a hollow cathode ion source neutralizer tantalum tube insulator structure particularly adopts the following arrangement structure: each stage of the grooves 5 are formed by surrounding the circumference of the tantalum tube insulating tube 4 in a concave way, and the grooves 5 of each stage are mutually parallel.
Example 4:
this embodiment is further optimized on the basis of any of the above embodiments, and the same parts as the above technical solutions are not repeated herein, as shown in fig. 2 and fig. 3, further to better implement the present invention, a hollow cathode ion source neutralizer tantalum tube insulator structure particularly adopts the following arrangement structure: the width of the groove 5 is greater than or equal to the depth of the groove 5, preferably, the width of the groove 5 is greater than the depth of the groove 5, and the ratio of the width of the groove 5 to the depth of the groove 5 is 3:1.
example 5:
this embodiment is further optimized on the basis of any of the above embodiments, and the same parts as the above technical solutions are not repeated herein, as shown in fig. 2 and fig. 3, further to better implement the present invention, a hollow cathode ion source neutralizer tantalum tube insulator structure particularly adopts the following arrangement structure: the ratio of the depth of the groove 5 to the distance between the bottom of the groove 5 and the inner wall of the tantalum tube insulating tube 4 is 1:1 to 4, the ratio of the depth of the groove 5 to the distance between the bottom of the groove 5 and the inner wall of the tantalum tube insulating tube 4 is 1:2.4.
example 6:
this embodiment is further optimized on the basis of any of the above embodiments, and the same parts as the above technical solutions are not repeated herein, as shown in fig. 2 and fig. 3, further to better implement the present invention, a hollow cathode ion source neutralizer tantalum tube insulator structure particularly adopts the following arrangement structure: the length of the tantalum tube insulating tube 4 accounts for 2/3 to 3/4 of the length of the reaction part of the hollow cathode tantalum tube 2, and the preferable length of the tantalum tube insulating tube 4 accounts for 0.6 of the reaction part of the hollow cathode tantalum tube 2.
Example 7:
this embodiment is further optimized on the basis of any of the above-mentioned embodiments, and the same parts with the above-mentioned technical solution are not repeated herein, as shown in fig. 2 and fig. 3, further in order to better realize the utility model discloses a hollow cathode ion source neutralizer tantalum tube insulating part structure, especially adopt the following arrangement structure: the tantalum tube insulating tube 4 is made of ceramic materials.
Example 8:
the embodiment is further optimized on the basis of any one of the above embodiments, and the same parts as the above technical solutions are not repeated herein, as shown in fig. 2 and 3, a tantalum tube insulating part structure of a hollow cathode ion source neutralizer comprises a keeper shell 1, a hollow cathode tantalum tube 2 and a small insulating ceramic part 3, wherein a tantalum tube insulating tube 4 made of a ceramic material is further arranged on the outer wall of the small insulating ceramic part 3 of the hollow cathode tantalum tube 2, a groove 5 is arranged on the tantalum tube insulating tube 4, the groove 5 is arranged on the tantalum tube insulating tube 4, each groove 5 is formed by recessing the circumference of the tantalum tube insulating tube 4, and the grooves 5 of each step are parallel to each other; wherein, the ratio of the width of the groove 5 to the depth of the groove 5 is 3:1, the ratio of the depth of the groove 5 to the distance between the bottom of the groove 5 and the inner wall of the tantalum tube insulating tube 4 is 1:2.4, the length of the tantalum tube insulating tube 4 accounts for 0.6 of the length of the reaction part of the hollow cathode tantalum tube 2.
During operation, argon is led into the hole-center cathode tantalum tube 2, the reaction part and the keeper shell 1 are subjected to high-voltage electric field action starting and enter a constant-current mode to emit electrons under the hollow cathode effect, a section of tantalum tube insulating tube 4 is additionally arranged at the reaction part, namely, an insulating distance is additionally increased, so that the effective discharge area of the hollow cathode tantalum tube and the keeper shell is reduced, further, the ignition working energy of the hollow cathode neutralizer can be completely acted at the port of the hollow cathode tantalum tube, the energy required by ignition arc striking is reduced, and the gas demand is also reduced.
Due to the design of the groove 5, the insulation degree of the hollow cathode tantalum tube and the keeper shell can be further improved, and the reason is that the metal material volatilization generally has the characteristic of linear propagation, so that a metal film can be formed on a high-point part of the surface of the tantalum tube insulation tube, but the possibility of forming a conductive metal film on a plurality of concave points is very small or almost zero, the insulation degree of the hollow cathode tantalum tube and the keeper shell is improved, the service life of the neutralizer is prolonged to about 3 times due to the improvement of the insulation degree, and the maintenance and cleaning frequency is reduced.
The above description is only the preferred embodiment of the present invention, and is not intended to limit the present invention in any form, and all the technical matters of the present invention are within the protection scope of the present invention for any simple modification and equivalent changes made to the above embodiments.
Claims (7)
1. The utility model provides a hollow cathode ion source neutralizer tantalum tube insulating part structure, includes keeper casing (1), hollow cathode tantalum pipe (2) and insulating little ceramic member (3), its characterized in that: a tantalum tube insulating tube (4) is further arranged on the outer wall of the hollow cathode tantalum tube (2) close to the small insulating ceramic piece (3), and a groove (5) is arranged on the tantalum tube insulating tube (4).
2. The hollow cathode ion source neutralizer tantalum tube insulator structure of claim 1, wherein: the groove (5) on the tantalum tube insulating tube (4) is provided with multiple stages.
3. The structure of claim 2, wherein the tantalum tube insulator comprises: each stage of the groove (5) is formed by surrounding the inner concave of the circumference of the tantalum tube insulating tube (4), and each stage of the groove (5) is mutually parallel.
4. The hollow cathode ion source neutralizer tantalum tube insulator structure of claim 3, wherein: the width of the groove (5) is more than or equal to the depth of the groove (5).
5. The hollow cathode ion source neutralizer tantalum tube insulator structure of claim 4, wherein: the ratio of the depth of the groove (5) to the distance between the bottom of the groove (5) and the inner wall of the tantalum tube insulating tube (4) is 1:1 to 4.
6. The hollow cathode ion source neutralizer tantalum tube insulating member structure according to any one of claims 1 to 5, wherein: the length of the tantalum tube insulating tube (4) accounts for 2/3-3/4 of the length of the reaction part of the hollow cathode tantalum tube (2).
7. The hollow cathode ion source neutralizer tantalum tube insulating part structure as claimed in any one of claims 1 to 5, wherein: the tantalum tube insulating tube (4) is made of ceramic materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222212894.3U CN218160268U (en) | 2022-08-23 | 2022-08-23 | Tantalum tube insulating part structure of hollow cathode ion source neutralizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222212894.3U CN218160268U (en) | 2022-08-23 | 2022-08-23 | Tantalum tube insulating part structure of hollow cathode ion source neutralizer |
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| CN218160268U true CN218160268U (en) | 2022-12-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202222212894.3U Active CN218160268U (en) | 2022-08-23 | 2022-08-23 | Tantalum tube insulating part structure of hollow cathode ion source neutralizer |
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- 2022-08-23 CN CN202222212894.3U patent/CN218160268U/en active Active
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