CN218158726U - Front-back double-platform exposure machine - Google Patents

Front-back double-platform exposure machine Download PDF

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Publication number
CN218158726U
CN218158726U CN202221698171.2U CN202221698171U CN218158726U CN 218158726 U CN218158726 U CN 218158726U CN 202221698171 U CN202221698171 U CN 202221698171U CN 218158726 U CN218158726 U CN 218158726U
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CN
China
Prior art keywords
exposure
calibration
feeding mechanism
base
feed mechanism
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Expired - Fee Related
Application number
CN202221698171.2U
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Chinese (zh)
Inventor
蔡志国
吴德和
普丽宏
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Caiz Optronics Corp
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Caiz Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Caiz Optronics Corp filed Critical Caiz Optronics Corp
Priority to CN202221698171.2U priority Critical patent/CN218158726U/en
Application granted granted Critical
Publication of CN218158726U publication Critical patent/CN218158726U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model relates to a two platform exposure machines around, the problem of the work piece exposure equipment exposure inefficiency of solving prior art. Including the base, the exposure platform of setting on the base, and exposure device, during the exposure, first feed mechanism carries out the material loading from the front side, first feed mechanism slides along the exposure platform and sends the work piece to exposure device below and exposes, second feed mechanism carries out the material loading from the rear side simultaneously, the material loading of second feed mechanism finishes, the work piece exposure on the first feed mechanism finishes, then first feed mechanism returns and sends the work piece out to the position of first feed mechanism material loading, then first feed mechanism slides and sends the work piece to exposure device below and exposes, first feed mechanism carries out the unloading back and carries out the material loading this moment, the work piece exposure on the second feed mechanism finishes, then second feed mechanism returns and sends the work piece out to the position of second feed mechanism material loading, so relapse, thereby the unloading of two platforms around, two mesa alternate operation around, high production efficiency.

Description

Front and back double-platform exposure machine
Technical Field
The utility model relates to an optical equipment field especially relates to a front and back double-platform exposure machine.
Background
When the existing workpiece is exposed, the workpiece can only be subjected to loading, unloading and exposure in a single table-board mode, and the production efficiency is low.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the problem of the work piece exposure equipment exposure inefficiency of prior art.
For solving the utility model provides a technical scheme that technical problem adopted does: the utility model discloses a front and back double-platform exposure machine, including the base, set up the exposure platform on the base to and be used for the exposure device of work piece exposure, the base go up and cross exposure platform middle part top and be equipped with exposure gantry support, the exposure device set up on exposure gantry support, the front and back both sides of exposure platform be equipped with first feed mechanism and second feed mechanism respectively, first feed mechanism and second feed mechanism slide respectively along the exposure platform around and locate on the base, the base on be equipped with respectively and drive first feed mechanism actuating mechanism and second feed mechanism actuating mechanism that drive first feed mechanism and second feed mechanism slide respectively along the exposure platform around; the exposure device comprises an exposure platform, a base, a first workpiece position calibration device, a second workpiece position calibration device, a calibration camera and a camera driving mechanism, wherein the base on the front side and the base on the rear side of the exposure device are respectively provided with the first workpiece position calibration device and the second workpiece position calibration device, the first workpiece position calibration device and the second workpiece position calibration device respectively comprise a calibration gantry support crossing the exposure platform and the calibration camera arranged on the calibration gantry support in a sliding manner, and the calibration gantry support is provided with the camera driving mechanism for driving the calibration camera to slide along the calibration gantry support.
Right the utility model discloses do further limited technical scheme and include:
the first feeding mechanism and the second feeding mechanism respectively comprise a feeding table which is arranged on the base in a front-back sliding mode, a left workpiece positioning groove and a right workpiece positioning groove which are used for positioning workpieces are formed in the feeding table in the left-right direction, and calibration cameras are arranged on the left side and the right side of the calibration gantry support, corresponding to the left workpiece positioning groove and the right workpiece positioning groove respectively.
And the left work material positioning groove and the right work material positioning groove are internally provided with positioning suction heads for tightly sucking and positioning work materials.
The base on be equipped with first slide rail and second slide rail along the fore-and-aft direction respectively, first feeding mechanism and second feeding mechanism slide and locate on first slide rail and second slide rail, first feeding mechanism actuating mechanism and second feeding mechanism actuating mechanism be first tow chain actuating mechanism and second tow chain actuating mechanism respectively.
The side surface of the calibration gantry support is provided with a third slide rail, the calibration camera is arranged on the third slide rail in a sliding manner, and the camera driving mechanism is a third drag chain driving mechanism.
Through the technical scheme, the beneficial effects of the utility model are that: the utility model discloses a when front and back double platform exposure machine exposes, first feed mechanism carries out the material loading from the front side, then first feed mechanism driver drive first feed mechanism slides along the exposure platform and sends the work piece to the exposure device below and expose, second feed mechanism carries out the material loading from the rear side simultaneously, the material loading of second feed mechanism finishes, the work piece exposure on the first feed mechanism finishes, then first feed mechanism driver drive first feed mechanism slides along the exposure platform and returns and send out the work piece to the position of first feed mechanism material loading, then second feed mechanism driver drive first feed mechanism slides along the exposure platform and sends the work piece to the exposure device below and expose, first feed mechanism carries out unloading back and carries out the material loading this moment, the work piece exposure on the second feed mechanism finishes, then second feed mechanism driver drive second feed mechanism slides along the exposure platform and returns and sends out the work piece to the position of second feed mechanism material loading, so repeatedly, thereby front and back double platform, front and back mesa alternation operation, high production efficiency; meanwhile, large-size production can be realized, and the occupied space of equipment is reduced.
Drawings
Fig. 1 is a schematic view of a three-dimensional structure of a front and back double-platform exposure machine of the present invention.
Fig. 2 is a schematic view of a three-dimensional structure of a front and a back double-platform exposure machine of the present invention.
Fig. 3 is a schematic view of a front and back double-platform exposure machine of the present invention.
Detailed Description
The structure of the present invention will be further explained with reference to the accompanying drawings.
Referring to fig. 1 to 3, a front and rear double-platform exposure machine comprises a base 1, an exposure table 11 arranged on the base, and an exposure device 2 used for exposing a workpiece 9, wherein an exposure gantry support 12 is arranged above the middle part of the exposure table transversely on the base 1, the exposure device is arranged on the exposure gantry support, a first feeding mechanism 3 and a second feeding mechanism 4 are respectively arranged on the front side and the rear side of the exposure table, the first feeding mechanism and the second feeding mechanism are respectively arranged on the base in a front-and-rear sliding manner along the exposure table, and a first feeding mechanism driving mechanism 5 and a second feeding mechanism driving mechanism 6 which respectively drive the first feeding mechanism and the second feeding mechanism to respectively slide along the exposure table in the front-and-rear manner are respectively arranged on the base; the base of the front side and the base of the back side of the exposure device are respectively provided with a first workpiece position calibration device 7 and a second workpiece position calibration device 8, the first workpiece position calibration device and the second workpiece position calibration device both comprise a calibration gantry support 71 which stretches across the exposure platform and a calibration camera 72 which is arranged on the calibration gantry support in a sliding manner, and the calibration gantry support is provided with a camera driving mechanism 73 which drives the calibration camera to slide along the calibration gantry support. During exposure, the first feeding mechanism carries out feeding from the front side, then the first feeding mechanism driver drives the first feeding mechanism to slide along the exposure platform to send a workpiece to the position below the exposure device for exposure, meanwhile, the second feeding mechanism carries out feeding from the rear side, the second feeding mechanism finishes feeding, the workpiece on the first feeding mechanism is completely exposed, then the first feeding mechanism driver drives the first feeding mechanism to slide along the exposure platform and return to send the workpiece to the position where the first feeding mechanism carries out feeding, then the second feeding mechanism driver drives the first feeding mechanism to slide along the exposure platform to send the workpiece to the position below the exposure device for exposure, at the moment, the first feeding mechanism carries out feeding after carrying out blanking, the workpiece on the second feeding mechanism is completely exposed, then the second feeding mechanism driver drives the second feeding mechanism to slide along the exposure platform and return to send the workpiece to the position where the second feeding mechanism carries out, and the steps are repeated, so that the front and rear double platforms alternately operate, and the front and rear platforms operate, and the production efficiency is high; meanwhile, large-size production can be realized, and the occupied space of equipment is reduced.
In this embodiment, the first feeding mechanism 3 and the second feeding mechanism 4 each include a feeding table 31 disposed on the base in a front-back sliding manner, a left workpiece positioning groove 32 and a right workpiece positioning groove 33 for positioning the workpiece are disposed on the feeding table along the left-right direction, and calibration cameras are disposed on the left and right sides of the calibration gantry support corresponding to the left workpiece positioning groove and the right workpiece positioning groove respectively. During the material loading, can be at left work material constant head tank and right work material constant head tank material loading simultaneously, then carry out the position through maring the camera simultaneously and markd. Thereby left work material constant head tank and right work material constant head tank material loading simultaneously, production efficiency is high.
In this embodiment, all be equipped with in left worker material constant head tank and the right worker material constant head tank and be used for inhaling the location suction head 34 of tight location with the worker material, during the material loading, the worker material is inhaled tightly through left worker material constant head tank and right worker material constant head tank location back to the material loading is simple swift.
In this embodiment, the base 1 is provided with a first slide rail 13 and a second slide rail 14 along the front-back direction, the first feeding mechanism and the second feeding mechanism are slidably disposed on the first slide rail and the second slide rail, and the first feeding mechanism driving mechanism and the second feeding mechanism driving mechanism are respectively a first drag chain driving mechanism and a second drag chain driving mechanism. The first drag chain driving mechanism drives the first feeding mechanism to slide on the first slide rail and the second slide rail. The second drag chain driving mechanism drives the second feeding mechanism to slide on the first slide rail and the second slide rail.
In this embodiment, a third slide rail 711 is disposed on a side surface of the calibration gantry support 71, the calibration camera is slidably disposed on the third slide rail, and the camera driving mechanism is a third drag chain driving mechanism. The third drag chain driving mechanism drives the calibration camera to slide on the third slide rail, and the position of the calibration camera can be adjusted according to the size of the workpiece on the feeding table.
While the present invention has been described in detail and with reference to the accompanying drawings, it is not to be understood as limited by the scope of the invention. Various modifications and changes may be made by those skilled in the art without inventive work within the scope of the present invention as described in the claims.

Claims (5)

1. The utility model provides a front and back double-platform exposure machine, is including the base, sets up the exposure platform on the base to and be used for the exposure device of work piece exposure, its characterized in that: the exposure device is arranged on the exposure gantry support, a first feeding mechanism and a second feeding mechanism are respectively arranged on the front side and the rear side of the exposure platform, the first feeding mechanism and the second feeding mechanism are respectively arranged on the base in a front-back sliding manner along the exposure platform, and a first feeding mechanism driving mechanism and a second feeding mechanism driving mechanism which drive the first feeding mechanism and the second feeding mechanism to respectively slide in the front-back manner along the exposure platform are respectively arranged on the base; the exposure device comprises an exposure platform, a base, a first workpiece position calibration device, a second workpiece position calibration device, a calibration camera and a camera driving mechanism, wherein the base on the front side and the base on the rear side of the exposure device are respectively provided with the first workpiece position calibration device and the second workpiece position calibration device, the first workpiece position calibration device and the second workpiece position calibration device respectively comprise a calibration gantry support crossing the exposure platform and the calibration camera arranged on the calibration gantry support in a sliding manner, and the calibration gantry support is provided with the camera driving mechanism for driving the calibration camera to slide along the calibration gantry support.
2. The tandem double stage exposure machine according to claim 1, wherein: the first feeding mechanism and the second feeding mechanism respectively comprise a feeding table which is arranged on the base in a front-back sliding mode, a left workpiece positioning groove and a right workpiece positioning groove which are used for positioning workpieces are formed in the feeding table in the left-right direction, and calibration cameras are arranged on the left side and the right side of the calibration gantry support, corresponding to the left workpiece positioning groove and the right workpiece positioning groove respectively.
3. The tandem double stage exposure machine according to claim 2, wherein: and the left work material positioning groove and the right work material positioning groove are internally provided with positioning suction heads for tightly sucking and positioning work materials.
4. The tandem double stage exposure machine according to claim 1, wherein: the base on be equipped with first slide rail and second slide rail along the fore-and-aft direction respectively, first feeding mechanism and second feeding mechanism slide and locate on first slide rail and second slide rail, first feeding mechanism actuating mechanism and second feeding mechanism actuating mechanism be first tow chain actuating mechanism and second tow chain actuating mechanism respectively.
5. The tandem double stage exposure machine according to claim 1, wherein: the side surface of the calibration gantry support is provided with a third slide rail, the calibration camera is arranged on the third slide rail in a sliding manner, and the camera driving mechanism is a third drag chain driving mechanism.
CN202221698171.2U 2022-07-04 2022-07-04 Front-back double-platform exposure machine Expired - Fee Related CN218158726U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221698171.2U CN218158726U (en) 2022-07-04 2022-07-04 Front-back double-platform exposure machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221698171.2U CN218158726U (en) 2022-07-04 2022-07-04 Front-back double-platform exposure machine

Publications (1)

Publication Number Publication Date
CN218158726U true CN218158726U (en) 2022-12-27

Family

ID=84591029

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221698171.2U Expired - Fee Related CN218158726U (en) 2022-07-04 2022-07-04 Front-back double-platform exposure machine

Country Status (1)

Country Link
CN (1) CN218158726U (en)

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20221227