CN218124999U - Plasma source mechanism - Google Patents
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- CN218124999U CN218124999U CN202221579348.7U CN202221579348U CN218124999U CN 218124999 U CN218124999 U CN 218124999U CN 202221579348 U CN202221579348 U CN 202221579348U CN 218124999 U CN218124999 U CN 218124999U
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- 230000007246 mechanism Effects 0.000 title claims abstract description 40
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- 238000003199 nucleic acid amplification method Methods 0.000 claims description 28
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Abstract
The present application relates to a plasma source mechanism including an energy radiation device and a current control device. Wherein the energy radiation device is mounted in a housing outside the vacuum chamber. The current control device comprises a power supply and a multi-output matching module; the power supply is connected with the multi-output matching module; each output end of the multi-output matching module is correspondingly connected with a plurality of coils of the energy radiation device; the current provided by the current control device is transmitted to the coils through the multi-output matching module, and the coils acquire current quantities with the same or different proportions and currents with the same phase angle or different phase angles. Under the non-ideal state, because the manufacturing process causes the difference in performance of each coil, and the magnetic induction intensity that each coil produced under the same electric current is different, this application current control device is according to the difference of the magnetic induction intensity of each coil, adjusts the proportion between the electric current of output to each coil, and through adjusting the electric current thereby the magnetic induction intensity that each coil produced is uniformized.
Description
Technical Field
This application relates to radio frequency power supplies and, more particularly, to plasma source mechanisms.
Background
The plasma source mechanism transmits information beyond a certain distance by means of transmission radio waves without the need for transmission lines. The energy radiation device in the plasma source mechanism includes a plurality of coils. However, in the energy radiation device including a plurality of coils, since the manufacturing processes of the coils cannot be completely the same, the magnetic induction intensity generated by the same current applied to each coil is different, and the output accuracy of the plasma source mechanism is affected, therefore, in the implementation process, the inventor finds that at least the following problems exist in the conventional technology: the conventional plasma source mechanism outputs electromagnetic waves unevenly.
SUMMERY OF THE UTILITY MODEL
In view of the above, it is necessary to provide a plasma source mechanism for solving the problem of low output accuracy of the conventional multi-coil energy radiation structure.
In order to achieve the above object, the embodiments of the present application provide a plasma source mechanism applied to a vacuum chamber device having a vacuum chamber, including an energy radiation device and a current control device;
the energy radiation device is arranged in a shell outside the vacuum chamber;
the current control device comprises a power supply and a multi-output matching module;
the power supply is connected with the multi-output matching module;
each output end of the multi-output matching module is correspondingly connected with a plurality of coils of the energy radiation device;
the current provided by the current control device is transmitted to the coils through the multi-output matching module, and the coils acquire current quantities with the same or different proportions and currents with the same phase angle or different phase angles.
In one embodiment, the multiple output matching modules are multiple; the power supply provides currents with the same proportion or different proportions to each multi-output matching module.
In one embodiment, the number of the power supplies and the number of the multi-output matching modules are plural, the power supply connection to the multi-output matching module includes at least one of a one-to-one connection relationship, a one-to-many connection relationship, and a multi-to-many connection relationship, and each power supply provides the same proportion or different proportions of current to the connected multi-output matching module.
In one embodiment, the power supply provides a first current to the multi-output matching module, the multi-output matching module adjusts the first current to form a plurality of second currents and transmits the second currents to the plurality of coils, and the plurality of second currents are equal to or different from each other in proportion to the current amount.
In one embodiment, the number of the multi-output matching modules is single and has more than two input terminals, each input terminal corresponds to an output terminal of a different multi-output matching module, and the two input terminals obtain currents with the same or different phase angles from the power supply.
In one embodiment, the power supply comprises a master power supply, at least one slave power supply and at least one multi-output matching module;
each output end of the master control power supply is correspondingly connected with the slave power supply; the slave power supplies are correspondingly connected with the multi-output matching module.
In one embodiment, the power supply comprises a master power supply and at least one slave power supply, the master power supply and the slave power supplies are respectively connected with the input end of the multi-output matching module and provide current, and the master power supply controls the phase angle of the current output by each slave power supply.
In one embodiment, the power supply comprises a controller and at least one slave power supply, and the at least one slave power supply is respectively connected with the input end of the multi-output matching module and provides current; the controller adjusts at least one phase angle of the output current from the power source.
In one embodiment, the number of the multi-output matching modules is multiple, and the currents with the same or different phase angles are obtained from the power supply.
In one embodiment, the power supply comprises a controller and a plurality of slave power supplies, the slave power supplies are respectively connected with the multi-output matching module, and the controller controls the power supplies to provide currents at the same or different phase angles.
In one embodiment, the multi-output matching module is a dual-output matching module;
the power supply is connected with the double-output matching module;
and each output end of the double-output matching module is correspondingly connected with each coil of the energy radiation device.
In one embodiment, the dual output matching module comprises a capacitor C 0 Variable capacitor C 1 Variable capacitor C 2 Variable capacitor C 3 ；
Capacitor C 0 One end of which is connected with a variable capacitor C 1 One end and the other end are connected with a variable capacitor C 2 One terminal of (1), variable capacitance C 3 One end of which is connected with a variable capacitor C 1 The other end, variable capacitance C 3 The other end of the capacitor is connected with a variable capacitor C 2 And the other end.
In one embodiment, the current control apparatus further comprises a power amplification module;
the power supply is connected with the multi-output matching module through the power amplification module.
One of the above technical solutions has the following advantages and beneficial effects:
the plasma source mechanism comprises an energy radiation device and a current control device. Wherein the energy radiation device is mounted in a housing outside the vacuum chamber. The current control device comprises a power supply and a multi-output matching module; the power supply is connected with the multi-output matching module; each output end of the multi-output matching module is correspondingly connected with a plurality of coils of the energy radiation device; the current provided by the current control device is transmitted to the coils through the multi-output matching module, and the coils acquire current quantities with the same or different proportions and currents with the same phase angle or different phase angles. Under the nonideal state, because manufacturing process results in each coil to have the difference in performance, the magnetic induction that each coil produced under the same electric current is different, and this application current control device adjusts the proportion between the electric current of output for each coil according to the difference of the magnetic induction of each coil, thereby adjusts the magnetic induction homogenization that each coil produced through adjusting the electric current, and then promotes the output accuracy of the energy radiation structure of multicoil.
Drawings
Fig. 1 is a schematic structural diagram of a plasma source mechanism according to an embodiment of the present disclosure.
Fig. 2 is a schematic structural diagram of a plasma source mechanism according to an embodiment of the present disclosure.
Fig. 3 is a schematic structural diagram of a plasma source mechanism according to an embodiment of the present disclosure.
Fig. 4 is a schematic structural diagram of a plasma source mechanism according to an embodiment of the present disclosure.
Fig. 5 is a schematic structural diagram of a plasma source mechanism according to an embodiment of the present disclosure.
Fig. 6 is a schematic structural diagram of a plasma source mechanism provided in the present application.
Fig. 7 is a schematic structural diagram of a plasma source mechanism according to an embodiment of the present disclosure.
Fig. 8 is a schematic structural diagram of a dual output matching module according to an embodiment of the present disclosure.
Detailed Description
To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present application are shown in the drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element and be integral therewith, or intervening elements may also be present. The terms "mounted," "one end," "the other end," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
The plasma source mechanism is used for emitting radio waves, the energy radiation device 2 in the plasma source mechanism comprises two or more coils, performance differences exist among the coils due to different manufacturing processes, and magnetic induction intensity generated by the coils is different under the condition that the same current is introduced, so that the output accuracy of the energy radiation device 2 is not high. In order to solve this problem, as shown in fig. 1 to 6, a plasma source mechanism is provided for a vacuum chamber apparatus having a vacuum chamber. The plasma source mechanism comprises an energy radiation device 2 and a current control device 1, wherein the energy radiation device 2 is arranged in a shell outside a vacuum chamber of the vacuum chamber equipment. In one example, the current control apparatus 1 includes a power supply and a multi-output matching module 13; wherein, the power supply is connected with the multi-output matching module 13; each output end of the multi-output matching module 13 is correspondingly connected with a plurality of coils of the energy radiation device 2; the current provided by the current control device 1 is transmitted to a plurality of coils through the multi-output matching module 13, and the plurality of coils obtain current quantities with the same or different proportions and currents with the same phase angle or different phase angles. The current control device 1 can adjust the ratio of the current output to the coil, and can also adjust the phase angle output to the coil. Specifically, the current ratios output to the coils may be the same or different, and the phase angles of the coils may be the same or different. Specifically, in one example, the power supply provides a first current to the multi-output matching module 13, and the multi-output matching module 13 adjusts the first current to form a plurality of second currents and transmits the second currents to the plurality of coils, wherein the plurality of second currents are equal to or different from each other in proportion to the current amount.
In one example, as shown in fig. 1, the current control apparatus 1 includes a multi-output matching module 13. In another example, as shown in fig. 2, the current control apparatus 1 includes at least two multi-output matching modules 13, for example, two, three, four … … N multi-output matching modules 13, and the specific number may be determined according to actual requirements. When there are a plurality of multi-output matching modules 13, the power supply provides currents of the same proportion or different proportions to each multi-output matching module 13. Similarly, when the number of the multi-output matching modules 13 is plural, the multi-output matching modules 13 obtain the currents of the same or different phase angles from the power supply.
The power supply 11 is configured to modulate a current required by the energy radiation device 2, and the multiple output matching module 13 is configured to divide the current transmitted by the power supply 11 in proportion. The power source may be a single power source or a battery pack having a plurality of power sources connected together, and in one example, as shown in fig. 3, the power source includes a master power source 211, at least one slave power source 213, and at least one multi-output matching module 13. Each output end of the master power supply 211 is correspondingly connected with the slave power supply 213; the slave power supplies 213 are connected to the multi-output matching module 13. It should be noted that, when there is one multi-output matching module 13, the master power supply 211 may control the slave power supply 213 to adjust the current output to each multi-output matching module 13. When there are two or more multi-output matching modules 13, the master power supply 211 can control the power supply 213 to adjust the ratio and magnitude of the currents output to the multi-output matching modules 13. Of course, in this embodiment, as shown in fig. 3, the master power supply is connected to all the slave power supplies and a part of the multi-output matching modules 13, respectively, and the slave power supply is connected to another part of the multi-output matching modules 13. In this example, the master power supply has the function of controlling the slave power supply and the output current to the multi-output matching module 13.
In order to apply the ac power, since the current value in the ac power is changed according to the change of the phase angle, the magnetic induction intensity of each coil is further uniformized by changing the phase angle of each path of current output to the multi-output matching module 13. In one example, as shown in fig. 4, the power supply includes a master power supply and at least one slave power supply, the master power supply and the slave power supply are respectively connected to the input terminal of the multi-output matching module 13 and provide current, and the master power supply controls the phase angle of the current output by each slave power supply. For example, at least one of the master power supply 211 and the slave power supply 213 is a phase shift control power supply. For example, the master power supply 211 is a phase-shift control power supply, and the master power supply 211 transmits the current of the adjusted phase angle to the corresponding slave power supply 213 through the output terminal. The slave power supply 213 is a phase control power supply, and the slave power supply 213 adjusts the phase angle of the current output from the slave power supply 213 after receiving the control command from the master power supply 211. For another example, the power source may also be directly controlled by the controller 115, as shown in fig. 5, the power source includes the controller 115 and at least one slave power source, and the at least one slave power source is respectively connected to the input terminals of the multi-output matching module 13 and supplies current; the controller 115 adjusts at least one phase angle of the current output from the power source, in this example as long as one slave power source is guaranteed to be controlled by the controller 115 to vary the phase angle of the current. As another example, the power supply includes a controller 115 and a plurality of slave power supplies, the plurality of slave power supplies are respectively connected to the multi-output matching module 13, the controller 115 controls the plurality of power supplies to provide currents of the same or different phase angles, in this example, all of the power supplies
In one example, the number of multi-output matching modules 13 is a single number and has more than two inputs, each input corresponding to an output of a different multi-output matching module 13, the two inputs drawing currents of the same or different phase angles from the power supply. The number of the input ends is one, two, three, four … … N output ends, and the specific number can be determined according to actual requirements. In one example, the number of outputs of the multi-output matching module 13 is two, i.e. the multi-output matching module 13 is a dual-output matching module. Also, in one example, the multi-output matching module 13 has an input terminal connectable to an output terminal of the power supply, or to at least two output terminals of the power supply. In another example, the multi-output matching module 13 has at least two input terminals, each of which can be connected to the output terminals of the power supply in a one-to-one correspondence, and each of which can also be connected to the output terminals of a variable number of power supplies.
In one example, a dual output matching module structure is provided, the dual output matching module including a capacitor C 0 Variable capacitor C 1 Variable capacitor C 2 Variable capacitor C 3 ；
Capacitor C 0 One end of which is connected with a variable capacitor C 1 One end of the capacitor is connected with the variable capacitor C 2 One terminal of (1), variable capacitance C 3 One end of which is connected with a variable capacitor C 1 The other end, variable capacitance C 3 The other end of the capacitor is connected with a variable capacitor C 2 And the other end.
The current control device 1 adjusts the current so that the magnetic induction intensity generated by each coil is equal by:
in step S1, the current control device 1 obtains the magnetic induction intensity generated by each coil of the energy radiation device 2 under the same current.
Wherein, the magnetic induction intensity generated by each coil under the same current can be detected by a magnetic induction intensity detector. In one example, the magnetic induction generated by each coil under the same current can be detected in advance and stored in the current control device 1, and when the energy radiation device 2 needs to be controlled to generate radio waves, the current control device 1 calls the magnetic induction already stored in the current control device. Further, the current control apparatus 1 can simultaneously store the magnetic induction intensity of each coil of the plurality of different energy radiation apparatuses 2. In another example, the current control device 1 may detect the magnetic induction in real time through a magnetic induction detector, and the current control device 1 dynamically adjusts the current output to the coil through the magnetic induction acquired in real time. It should be noted that the current control device 1 is used to transmit current to each coil, and can adjust the ratio between the currents transmitted to each coil.
And S3, adjusting the proportion of the currents transmitted to each coil by the current control device 1 according to each magnetic induction intensity so as to homogenize the magnetic induction intensity generated by each coil under the adjusted currents.
The current control device 1 modulates total current with a magnitude corresponding to the sum of the magnetic induction intensities according to the magnetic induction intensities of the coils stored in the current control device or the magnetic induction intensities acquired in real time, acquires the proportion between currents output to the coils according to the magnetic induction intensities, branches the total current into branch currents transmitted to the coils according to the proportion, and transmits the branch currents with the corresponding magnitude to the corresponding coils.
In one example, as shown in fig. 1, the current control apparatus 1 includes a power supply 11 and a multi-output matching module 13. It should be noted that the number of the output ends of the multi-output matching module 13 in this example is equal to the number of the coils on the energy radiation device 2, and the output ends of the multi-output matching module 13 are connected to the coils on the energy radiation device 2 in a one-to-one correspondence. It should be noted that the multi-output matching module 13 includes at least two output ends.
In this example, the step of the current control device 1 adjusting the ratio between the currents transmitted to the respective coils according to the respective magnetic inductances includes the steps of:
in step S21, the power supply 11 modulates the current output to the multi-output matching module 13 according to each magnetic induction. The power supply 11 obtains the sum of each magnetic induction, modulates the current with the magnitude corresponding to the sum of each magnetic induction, and transmits the current to the multi-output matching module 13.
In step S31, the multi-output matching module 13 adjusts the ratio between the currents transmitted to the coils according to the magnetic induction intensities, and shunts the current transmitted by the power supply 11 according to the ratio to output the current to the coils correspondingly. The multi-output matching module 13 processes the ratio of the currents to be output to the coils according to the difference of the magnetic induction intensities, and then shunts the current transmitted by the power supply 11 according to the ratio, and transmits the corresponding shunted current to the corresponding coil. The number of divided paths is equal to the number of coils.
In another example, as shown in fig. 2, the current control apparatus 1 includes a power supply 11 and at least two multi-output matching modules 13. In this example, the sum of the number of the output terminals of each multi-output matching module 13 connected to the energy radiation device 2 is equal to the number of the coils on the energy radiation device 2, and the output terminals of the multi-output matching modules 13 are connected to the coils on the energy radiation devices 2 in a one-to-one correspondence.
In this example, the step of adjusting the ratio between the currents transmitted to the respective coils by the current control device 1 according to the respective magnetic inductances includes the steps of:
in step S31, the power supply 11 adjusts the ratio between the currents output to the multi-output matching modules 13 according to the respective magnetic induction intensities. The power supply 11 obtains the sum of each magnetic induction intensity, and modulates the total current with the magnitude corresponding to the sum of each magnetic induction intensity. The power supply 11 separately obtains the sum of the magnetic induction intensities of the coils connected to each multi-output matching module 13, obtains the proportion between the currents output to each multi-output matching module 13 according to the sum of the magnetic induction intensities corresponding to each multi-output matching module 13, shunts the total current according to the proportion, and transmits the shunted current to the corresponding multi-output matching module 13. The number of divided paths is equal to the number of the multi-output matching modules 13.
In step S33, each multi-output matching module 13 adjusts the ratio of the currents transmitted to each coil connected to the multi-output matching module 13 according to the magnetic induction intensity of the coil connected to the multi-output matching module 13, and shunts the current transmitted by the power supply 11 according to the ratio, and outputs the current to the coil connected to the multi-output matching module 13. Each multi-output matching module 13 obtains the ratio between the currents output to the coils connected thereto according to the magnetic induction intensity of the coils connected thereto, shunts the correspondingly input currents by using the ratio, and outputs the shunted currents to the corresponding coils.
To enable the multi-output matching module 13 to adjust the ratio between the output currents, in one example, the multi-output matching module 13 includes a variable capacitance. Wherein the variable capacitance is controllable to vary the capacitance.
The multi-output matching module 13 adjusts the proportion of the currents in each path: the multi-output matching module 13 adjusts the ratio between the output currents by changing the capacitance value of the variable capacitor.
In order to ensure that the circuit back end receives a sufficiently large current, in one example, as shown in fig. 7, the current control device 1 further includes a power amplification module 15. The power amplification module 15 is configured to amplify the current.
The power supply 11 adjusts the current output to the multi-output matching module 13 according to each magnetic induction: the power supply 11 adjusts the current output to the power amplification module 15 according to each magnetic induction intensity; the power amplification module 15 adjusts the current transmitted by the power source 11 and transmits the adjusted current to the multi-output matching module 13.
In order to more specifically understand the principle of the current control device 1 of the present application, the following description will be given by taking the current control device 1 described with reference to fig. 7 as an example:
the first output end of the power supply 11 is connected with the power amplification module 1, and the second output end is connected with the power amplification module 2. The power supply 11 adjusts the current I at the first output end of the power supply 11 according to the sum of the magnetic induction intensity of the coil 1 and the coil 2 connected to the double-output matching module 1 and the sum of the magnetic induction intensity of the coil 1 and the coil 2 connected to the double-output matching module 2 ps1 With current I at the second output terminal ps2 Current ratio of (I) ps1 /I ps2 And the total current output by the power supply 11 is output in a shunt way according to the current ratio and is respectively output to the power amplification module 1 and the power amplification module 2.
The power amplification module 1 converts the current I ps1 Amplifying, outputting current I 1 The output end of the double-output matching module 1 is connected with the input end of the double-output matching module; the power amplification module 2 amplifies the current I ps2 Amplifying and outputting current I 2 And the output end of the double-output matching module is connected with the input end of the double-output matching module 2.
The double-output matching module 1 outputs current I to the power amplification module 1 according to the magnetic induction intensity of the coil 1 and the magnetic induction intensity of the coil 2 1 The current is divided, the first output end of the power amplification module 1 is connected with the coil 1, the second output end is connected with the coil 2, and the current flowing into the coil 1 is I u1 The current flowing in the coil 2 is I u2 In which I 1 ＝I u1 +I u2 ；
The double-output matching module 2 outputs current I to the power amplification module 2 according to the magnetic induction of the coil 3 and the magnetic induction of the coil 4 2 The first output end of the power amplification module 2 is connected with the coil 3, the second output end is connected with the coil 4, so that the current is dividedThe current into the coil 1 is I d1 The current flowing in the coil 2 is I d2 In which I 2 ＝I d1 +I d2 。
The dual output matching module 1 includes: 4 capacitors C u0 、C u1 、C u2 、C u3 In which C is u1 、C u2 、C u3 For variable capacitance, by adjusting variable capacitance C u1 、C u2 、C u3 Can adjust the current I of the first output end of the double-output matching module 1 u1 Current I of second output end of double-output matching module 1 u2 Current ratio of (I) u1 /I u2 。
The dual output matching module 2 includes: 4 capacitors C d0 、C d1 、C d2 、C d3 In which C is d1 、C d2 、C d3 For variable capacitance, by adjusting variable capacitance C d1 、C d2 、C d3 Can adjust the current I of the first output end of the double-output matching module 2 d1 Current I of second output end of double-output matching module 2 d2 Current ratio of (I) d1 /I d2 。
The coil module comprises a coil 1, a coil 2, a coil 3 and a coil 4, wherein: the coil 1 is connected with the first output end of the double-output matching module 1, and the current flowing through the coil 1 is I u1 (ii) a The coil 2 is connected with a second output end of the double-output matching module 1, and the current flowing through the coil 2 is I u2 (ii) a The coil 3 is connected with the first output end of the double-output matching module 2, and the current flowing through the coil 3 is I d1 (ii) a The coil 4 is connected with the second output end of the double-output matching module 2, and the current flowing through the coil 4 is I u2 。
The current control device 1 of the energy radiation device 2 comprises a power supply 11 and at least one multi-output matching module 13; the power supply 11 is connected with the multi-output matching module 13; the output ends of the multi-output matching module 13 are connected to the coils of the energy radiation device 2 in a one-to-one correspondence. Under the nonideal state, because manufacturing process causes that each coil has difference in performance, and the magnetic induction that each coil produced under the same electric current is different, this application current control device 1 adjusts the proportion between the electric current of exporting to each coil according to the difference of the magnetic induction of each coil, thereby adjusts the magnetic induction homogenization that each coil produced through adjusting the electric current, and then promotes the output accuracy of the energy radiation device 2 structure of multicoil.
In one embodiment, there is provided a plasma source mechanism including an energy radiation device 2 and a current control device 1. Wherein, the energy radiation device 2 comprises at least two coils, for example, 2, 3, 4 coils … … N coils. The power supply 11 in the current control device 1 is connected to each coil via a multi-output matching module 13. The current control device 1 is configured to obtain magnetic induction generated by each coil of the energy radiation device 2 under the same current, and adjust a ratio between currents transmitted to each coil according to each magnetic induction, so as to homogenize the magnetic induction generated by each coil under the adjusted current.
The current control device 1 is divided into two cases according to the number of output ports of the multi-output matching module 13, and in the first case, as shown in fig. 1, the power supply 11 and one multi-output matching module 13; the power supply 11 is connected with the multi-output matching module 13; the multi-output matching module 13 is connected to each coil. It should be noted that the output end of the multi-output matching module 13 is exactly the same as the number of coils. In a second case, as shown in fig. 2, the current control device 1 comprises a power supply 11 and at least two multi-output matching modules 13; the power supply 11 is respectively connected with the multi-output matching module 13; each multi-output matching module 13 is connected to a corresponding number of coils. It should be noted that each multi-output matching module 13 at least includes two output ends, and the sum of the output ends of each multi-output matching module 13 is equal to the number of coils. In one example, the multi-output matching module 13 is a dual-output matching module, i.e. the multi-output matching module 13 comprises two outputs. The energy radiation device 2 includes four coils as an example. The current control device 1 comprises two multi-output matching modules 13, each multi-output matching module 13 being connected to a respective one of the two coils, i.e. in this example the multi-output matching module 13 is a dual-output matching module. Further, in this example, the two coils connected to the multi-output matching module 13 have opposite winding directions, that is, two coils connected to one multi-output matching module 13, one coil is wound clockwise and one coil is wound counterclockwise.
In one example, as shown in FIG. 8, the dual output matching module includes a capacitor C 0 Variable capacitor C 1 Variable capacitor C 2 Variable capacitor C 3 Wherein the capacitance C 0 One end of which is connected with a variable capacitor C 1 One end and the other end are connected with a variable capacitor C 2 One terminal of (1), variable capacitance C 3 One end of which is connected with a variable capacitor C 1 The other end, variable capacitance C 3 The other end of the capacitor is connected with a variable capacitor C 2 And the other end. By adjusting the variable capacitance C 1 Variable capacitor C 2 Variable capacitor C 3 The capacitance value of the dual-output matching module can change the proportion of the currents output by the two output ends of the dual-output matching module.
In order to ensure that the rear end of the circuit receives enough current, the current control device 1 further comprises a power amplification module 15; the power supply 11 is connected to the multi-output matching module 13 through the power amplification module 15.
In order to directly detect the magnetic induction intensity, the plasma source mechanism further comprises a magnetic induction intensity detector; the number of the magnetic induction intensity detectors is equal to that of the coils; the magnetic induction intensity detectors and the coils are arranged in a one-to-one correspondence manner; the magnetic induction intensity detector is connected with the current control device 1. The magnetic induction detector detects the magnetic induction of the corresponding coil and transmits the magnetic induction to the current control device 1.
To further understand the structure of the plasma source mechanism of the present application, a specific embodiment is provided as shown in fig. 7 for illustration:
the plasma source mechanism comprises a power supply 11, an energy radiation device 2, a power amplification module 1, a power amplification module 2, a double-output matching module 1 and a double-output matching module 2. Wherein the energy radiation device 2 comprises a coil 1, a coil 2, a coil 3 and a coil 4. The power source 11 is respectively connected with the power amplification module 1 and the power amplification module 2, the power amplification module 1 is respectively connected with the coil 1 and the coil 2, and the power amplification module 2 is respectively connected with the coil 3 and the coil 4.
The power supply 11 adjusts the current ratio output to the power amplification module 1 and the power amplification module 2 according to the sum of the magnetic induction of the coil 1 and the coil 2 and the sum of the magnetic induction of the coil 3 and the coil 4. The dual-output matching module 1 adjusts the current ratio output to the coil 1 and the coil 2 according to the magnetic induction intensity of the coil 1 and the coil 2. The dual-output matching module 2 adjusts the current ratio output to the coil 3 and the coil 4 according to the magnetic induction intensity of the coil 3 and the coil 4.
According to the plasma source mechanism, the magnetic induction intensity generated by each coil is adjusted by adjusting the current, and the accuracy and stability of the output of the radio frequency power supply are improved. The realization of the function requires the cooperative adjustment of the multi-output matching module 13 and the power supply 11, and the principle is that the adjustable capacitor C in the multi-output matching module 13 is adjusted to change the ratio of the multi-path output currents of the multi-output matching module 13, so that the magnetic induction intensities generated in the coils connected with the dual-output matching module are the same; the power supply 11 can adjust the ratio of the two paths of current at the output end thereof, so as to further adjust the ratio of the current at the respective input ends of the two output matching modules, so that the magnetic induction intensities of the coils connected with different two output matching modules are the same.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the claims. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (13)
1. A plasma source mechanism is applied to vacuum cavity equipment with a vacuum cavity and is characterized by comprising an energy radiation device and a current control device;
the energy radiation device is arranged in a shell outside the vacuum chamber;
the current control device comprises a power supply and a multi-output matching module;
the power supply is connected with the multi-output matching module;
each output end of the multi-output matching module is correspondingly connected with a plurality of coils of the energy radiation device;
the current provided by the current control device is transmitted to the plurality of coils through the multi-output matching module, and the plurality of coils acquire current quantities with the same or different proportions and currents with the same phase angle or different phase angles.
2. The plasma source mechanism of claim 1, wherein the multiple output matching module is plural; the power supply provides currents with the same proportion or different proportions to each multi-output matching module.
3. The plasma source mechanism of claim 1, wherein the power supplies and the multi-output matching modules are plural, the connection of the power supplies to the multi-output matching modules includes at least one of one-to-one, one-to-many, and many-to-many, and each power supply provides the same or different proportion of current to the connected multi-output matching modules.
4. The plasma source mechanism of claim 1, wherein the current control device provides a first current to the multi-output matching module, the multi-output matching module adjusts the first current to form a plurality of second currents and transmits the plurality of second currents to the plurality of coils, and the plurality of second currents are equal to or different from each other in proportion to the amount of current.
5. The plasma source mechanism of claim 1, wherein the number of the multi-output matching modules is single and has more than two inputs, each input corresponding to an output of a different one of the multi-output matching modules, the two inputs drawing current from the power supply at the same or different phase angles.
6. The plasma source mechanism of claim 1, wherein the power supply comprises a master power supply, at least one slave power supply, and at least one multi-output matching module;
each output end of the master control power supply is correspondingly connected with the slave power supply; and each slave power supply is correspondingly connected with the multi-output matching module.
7. The plasma source mechanism of claim 1, wherein the power supply comprises a master power supply and at least one slave power supply, the master power supply and the slave power supply are respectively connected to the input terminals of the multi-output matching module and provide current, and the master power supply controls a phase angle of current output by each slave power supply.
8. The plasma source mechanism of claim 1, wherein the power supply comprises a controller and at least one slave power supply, the at least one slave power supply being respectively connected to the input terminals of the multiple output matching module and providing current; the controller adjusts a phase angle of the at least one slave power source output current.
9. The plasma source mechanism of claim 6, wherein the multiple output matching modules are plural in number and draw currents of the same or different phase angles from the power supply.
10. The plasma source mechanism of claim 1, wherein the power supply comprises a controller and a plurality of slave power supplies, the plurality of slave power supplies are respectively connected with the multi-output matching module, and the controller controls the plurality of power supplies to provide currents at the same or different phase angles.
11. The plasma source mechanism of any of claims 1 to 10, wherein the multi-output matching module is a dual-output matching module;
the power supply is connected with the double-output matching module;
and each output end of the double-output matching module is correspondingly connected with each coil of the energy radiation device.
12. The plasma source mechanism of claim 11, wherein the dual output matching module comprises a capacitor C 0 Variable capacitor C 1 Variable capacitor C 2 Variable capacitor C 3 ；
The capacitor C 0 One end of is connected with the variable capacitor C 1 One end and the other end of the capacitor is connected with the variable capacitor C 2 One terminal of the variable capacitor C 3 One end of is connected with the variable capacitor C 1 The other end, the variable capacitance C 3 Is connected with the variable capacitor C at the other end 2 And the other end.
13. The plasma source mechanism of any of claims 1 to 10, wherein the current control device further comprises a power amplification module;
the power supply is connected with the multi-output matching module through the power amplification module.
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| CN202221579348.7U CN218124999U (en) | 2022-06-22 | 2022-06-22 | Plasma source mechanism |
| PCT/CN2023/100861 WO2023246663A1 (en) | 2022-06-22 | 2023-06-16 | Current control method and energy radiation system |
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| WO2023246663A1 (en) * | 2022-06-22 | 2023-12-28 | 深圳市恒运昌真空技术有限公司 | Current control method and energy radiation system |
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| WO2023246663A1 (en) * | 2022-06-22 | 2023-12-28 | 深圳市恒运昌真空技术有限公司 | Current control method and energy radiation system |
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Inventor after: Lin Weiqun Inventor after: Liu Tao Inventor before: Lin Weiqun Inventor before: Liu Tao Inventor before: Zhang Guidong Inventor before: He Zhuolin |
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Address after: 518000 functional supporting area B, Taohuayuan Zhichuang Town, Tiegang community, Xixiang street, Bao'an District, Shenzhen, Guangdong 101201301 Patentee after: Shenzhen Hengyunchang Vacuum Technology Co.,Ltd. Country or region after: China Address before: 518000 functional supporting area B, Taohuayuan Zhichuang Town, Tiegang community, Xixiang street, Bao'an District, Shenzhen, Guangdong 101201301 Patentee before: SHENZHEN HENGYUNCHANG VACUUM TECHNOLOGY CO.,LTD. Country or region before: China |
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