CN217824935U

CN217824935U - Output power signal synthesis circuit structure of radio frequency generator

Info

Publication number: CN217824935U
Application number: CN202221963646.6U
Authority: CN
Inventors: 贺振华; 陈立岗; 魏欢
Original assignee: Shanghai Ienai Semiconductor Technology Co ltd
Current assignee: Shanghai Ienai Semiconductor Technology Co ltd
Priority date: 2022-07-27
Filing date: 2022-07-27
Publication date: 2022-11-15
Anticipated expiration: 2032-07-27

Abstract

The utility model discloses an output power signal synthesis circuit structure of radio frequency generator, include: the preceding stage signal driving circuit is used for dividing the radio frequency signal provided by the radio frequency signal source into two paths of equidirectional signals; the input ends of the two primary power amplifying circuits are respectively connected with the output end of the preceding stage signal driving circuit and are used for amplifying the two equal-large reverse-phase signals; and the output BALUN circuit is used for synthesizing the two equal-large phase-reversed signals amplified and output by the primary power amplifying circuit into a radio frequency output signal. The output BALUN circuit is adopted for power distribution and power synthesis, two-path asynchronous power synthesis is adopted, each path of PA outputs 25 omega + j0 impedance power, and then two paths of reverse-phase power signals can be synthesized to a path of final output power signal of 50 omega + j0 through the BALUN short board. The tolerance to the unbalance of the two paths of radio frequency power signals is greatly improved, so that the PA part of the power amplifier works more stably in the whole life cycle.

Description

Output power signal synthesis circuit structure of radio frequency generator

Technical Field

The present application relates to the field of radio frequency technology, and more particularly, to an output power signal combining circuit structure of a radio frequency generator.

Background

The radio frequency generator is a device for generating radio frequency power signals, belongs to a core part of semiconductor processing equipment, and all equipment for generating plasma to process materials needs the radio frequency generator to provide energy. In integrated circuits, solar cells and LED (light emitting diode) manufacturing equipment, such as etchers, PVD (physical vapor deposition), PECVD (plasma enhanced chemical vapor deposition), ALD (atomic layer deposition), and the like, are equipped with radio frequency generators with different power specifications.

The radio frequency generator generally comprises a radio frequency signal generator, a radio frequency power amplifying circuit, a power supply line and a radio frequency power detector. Currently, the integrated circuit manufacturing industry is moving towards the goal of finer line widths, ranging from 90 nm, 65 nm, 45 nm to the latest 7 nm, which places higher demands on the output power of the rf generator, i.e., the fluctuation range of the output power should be sufficiently small. For output power control of the rf generator, it is crucial whether the rf power detection is accurate.

As shown in fig. 1, the dc voltage-tunable power supply is connected to the drain of the power amplifier through a parallel decoupling capacitor and a series choke, wherein the decoupling capacitor prevents the high-frequency signal from coupling to the dc current and affecting the operating efficiency, and the choke provides a flat transmission characteristic for the current of the dc source and prevents the high-frequency signal from flowing through the dc current path. Meanwhile, the rectangular square wave with the duty ratio is connected with a gate pole of the power amplifier through two parallel resistors, and a source pole of the amplifier is directly grounded. Thus, the direct current power can be converted into radio frequency power by enabling the amplifier to work in an amplification-like state under the driving of the signal. The drain electrode as the output end of the radio frequency power can ensure that the amplifier works in a similar amplification state to convert the direct current power supply power into the radio frequency power as much as possible through a proper matching network instead of being consumed on the power amplifier, and the matching network matches the input impedance to the characteristic impedance of the load line, so that the damage of the power amplifier caused by overlarge reflected power due to impedance mismatching is greatly reduced.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a main aim at provides a radio frequency generator's output power signal synthesis circuit structure, has greatly improved the unbalanced tolerance of the radio frequency power signal to the two-way for in the whole life cycle, power amplifier PA part work is more stable.

In order to solve the above technical problem, the utility model provides an output power signal synthesis circuit structure of radio frequency generator, include:

the front-stage signal driving circuit is used for dividing the radio-frequency signal provided by the radio-frequency signal source into two paths of equal-direction signals;

the input ends of the two primary power amplifying circuits are respectively connected with the output end of the preceding stage signal driving circuit and are used for amplifying the two equal-large reverse-phase signals;

and the output BALUN circuit is used for synthesizing the two equal-large phase-reversed signals amplified and output by the primary power amplifying circuit into a radio frequency output signal.

Furthermore, the output end of the preceding stage signal driving circuit provides equal-size inverted signals with 25 Ω + j0 impedance to the two primary power amplifying circuits respectively.

Further, the input end of the output BALUN circuit is connected to the output end of the primary power amplifying circuit, the output end of the output BALUN circuit provides the radio frequency output signal, and the impedance of the radio frequency output signal is 50 Ω + j0.

Optionally, the output end of the output BALUN circuit is respectively connected to filter capacitors C1 and C2, the filter capacitor C1 outputs the radio frequency output signal, and the filter capacitor C2 is grounded.

Further, the preceding stage signal driving circuit includes:

the input BALUN circuit is used for converting an unbalanced radio frequency input signal into a balanced radio frequency input signal and outputting two paths of radio frequency input signals, and the impedance of the two paths of radio frequency input signals is 50 omega + j0;

and the input ends of the two paths of preposed power amplifying circuits are respectively connected with the output end of the input BALUN circuit and are used for amplifying the two paths of radio frequency input signals.

Further, the output end of the pre-power amplifying circuit is connected with the input end of the primary power amplifying circuit, and the pre-power amplifying circuit provides the radio frequency input signal with impedance of 25 Ω + j0.

Optionally, one of the input ends of the input BALUN circuit is grounded, and the other input end of the input BALUN circuit is provided with a filter capacitor C3; and the output end of the input BALUN circuit is respectively connected with the input end of one path of the preposed power amplifying circuit.

The utility model discloses technical scheme's beneficial effect:

the output power signal synthesis circuit structure of the radio frequency generator adopts the output BALUN circuit to carry out power distribution and power synthesis, adopts two-way asynchronous power synthesis, and each way of PA outputs 25 omega + j0 impedance power, and then can synthesize two ways of reversed-phase power signals to a way of 50 omega + j0 final output power signal through the BALUN short board. The tolerance to the unbalance of the two paths of radio frequency power signals is greatly improved, so that the PA part of the power amplifier works more stably in the whole life cycle.

Drawings

Fig. 1 is a schematic diagram of a hardware architecture of a radio frequency generator for implementing various embodiments of the present invention;

fig. 2 is a schematic structural diagram of an output power signal synthesizing circuit of a radio frequency generator according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a preceding stage signal driving circuit provided in an embodiment of the present invention;

the objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.

Detailed Description

It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

In the following description, suffixes such as "unit", "means", or "unit" used to denote elements are used only for facilitating the explanation of the present invention, and have no specific meaning by themselves. Thus, "unit", "part" or "unit" may be used mixedly.

Example 1

As shown in fig. 2, an embodiment of the present invention provides an output power signal synthesizing circuit structure of a radio frequency generator, including:

the preceding stage signal driving circuit 10 is used for dividing the radio frequency signal provided by the radio frequency signal source into two paths of equidirectional signals;

the input ends of the two primary power amplifying circuits 20 are respectively connected with the output end of the preceding signal driving circuit 10 and are used for amplifying the two equal-large reverse-phase signals;

the output BALUN circuit 30 is configured to combine the two equal-magnitude inverted signals amplified and output by the primary power amplifying circuit 20 into a radio frequency output signal.

Specifically, the output end of the preceding-stage signal driving circuit 10 provides equal-magnitude inverted signals with 25 Ω + j0 impedance to the two primary power amplifying circuits 20, respectively.

Specifically, the input end of the output BALUN circuit 30 is connected to the output end of the primary power amplifying circuit 20, and the output end of the output BALUN circuit 30 provides the rf output signal, where the impedance of the rf output signal is 50 Ω + j0.

Optionally, the output end of the output BALUN circuit 30 is respectively connected to filter capacitors C1 and C2, the filter capacitor C1 outputs the radio frequency output signal, and the filter capacitor C2 is grounded.

As shown in fig. 3, the preceding-stage signal driving circuit 10 includes:

the input BALUN circuit 11 is configured to convert an unbalanced radio frequency input signal into a balanced radio frequency input signal, and output two paths of radio frequency input signals with impedance of 50 Ω + j0;

the input ends of the two pre-power amplifying circuits 12 are respectively connected to the output end of the input BALUN circuit 30, and are configured to amplify the two rf input signals.

Specifically, the output end of the pre-power amplifier circuit 10 is connected to the input end of the primary power amplifier circuit 20, and the pre-power amplifier circuit 10 provides the radio frequency input signal with impedance of 25 Ω + j0.

Optionally, one of the input ends of the input BALUN circuit 30 is grounded, and the other input end is provided with a filter capacitor C3; the output end of the input BALUN circuit 30 is connected to the input end of one of the pre-power amplifying circuits 10.

According to the output power signal synthesis circuit structure of the radio frequency generator, the output BALUN circuit is adopted for power distribution and power synthesis, two paths of asynchronous power synthesis are adopted, each path of PA outputs 25 omega + j0 impedance power, and then two paths of reverse-phase power signals can be synthesized to a path of final output power signal of 50 omega + j0 through the BALUN short board. The tolerance for the imbalance of the two paths of radio frequency power signals is greatly improved, so that the PA part of the power amplifier works more stably in the whole life cycle.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising a component of' 8230; \8230;" does not exclude the presence of another like element in a process, method, article, or apparatus that comprises the element.

The above embodiment numbers of the present invention are only for description, and do not represent the advantages and disadvantages of the embodiments.

Through the above description of the embodiments, those skilled in the art will clearly understand that the method of the above embodiments can be implemented by software plus a necessary general hardware platform, and certainly can also be implemented by hardware, but in many cases, the former is a better implementation manner. Based on such understanding, the technical solution of the present invention essentially or the part contributing to the prior art can be embodied in the form of software product, and the computer software product is stored in a storage medium (such as ROM/RAM, magnetic disk, optical disk), and includes a plurality of instructions for enabling a terminal device (which may be a mobile phone, a computer, a server, an air conditioner, or a network device, etc.) to execute the method according to the embodiments of the present invention.

The above is only the preferred embodiment of the present invention, and not the scope of the present invention, all the equivalent structures or equivalent flow changes made by the contents of the specification and the drawings or the direct or indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. An output power signal combining circuit configuration for a radio frequency generator, the circuit configuration comprising:

the input ends of the two primary power amplifying circuits are respectively connected with the output end of the preceding stage signal driving circuit and are used for amplifying the two equal-size inverted signals;

2. The output power signal synthesizing circuit structure of the rf generator according to claim 1, wherein the output end of the preceding stage signal driving circuit provides equal-magnitude inverted signals with 25 Ω + j0 impedance to the two first-stage power amplifying circuits, respectively.

3. The output power signal synthesizing circuit structure of the rf generator according to claim 2, wherein the input terminals of the output BALUN circuit are connected to the output terminals of the first stage power amplifying circuit, respectively, the output terminal of the output BALUN circuit provides the rf output signal, and the impedance of the rf output signal is 50 Ω + j0.

4. The output power signal synthesizing circuit structure of the rf generator according to claim 1, wherein the output ends of the output BALUN circuit are respectively connected to filter capacitors C1 and C2, the filter capacitor C1 outputs the rf output signal, and the filter capacitor C2 is grounded.

5. The output power signal synthesizing circuit structure of the rf generator according to claim 1, wherein the previous stage signal driving circuit includes:

6. The output power signal combining circuit structure of claim 5, wherein the output terminals of the pre-power amplifying circuits are respectively connected to the input terminals of the first-stage power amplifying circuits, and the pre-power amplifying circuits provide the rf input signal with impedance of 25 Ω + j0.

7. The output power signal synthesis circuit structure of the radio frequency generator according to claim 5, wherein one of the input ends of the input BALUN circuit is grounded, and the other input end is provided with a filter capacitor C3; and the output end of the input BALUN circuit is respectively connected with the input end of one path of the preposed power amplifying circuit.