CN218122047U

CN218122047U - Three-dimensional electric probe seat convenient to adjust

Info

Publication number: CN218122047U
Application number: CN202222049067.7U
Authority: CN
Inventors: 王国华; 李泽林
Original assignee: Shenzhen Sireda Technology Co ltd
Current assignee: Shenzhen Sireda Technology Co ltd
Priority date: 2022-08-03
Filing date: 2022-08-03
Publication date: 2022-12-23
Anticipated expiration: 2032-08-03

Abstract

The utility model discloses a three-dimensional electronic probe seat convenient to adjust, including X axle horizontal adjustment subassembly and contact probe subassembly, X axle horizontal adjustment subassembly's upper end top is provided with Y axle horizontal adjustment subassembly, and Y axle horizontal adjustment subassembly's upper end top is provided with connects the platform, outside one side of connecting the platform is provided with Z axle horizontal adjustment subassembly, Z axle horizontal adjustment subassembly's outside one end is provided with contact probe subassembly. This three-dimensional electronic probe seat convenient to adjust constitutes XYZ three direction moving mechanism through three horizontal adjustment subassemblies of group, utilizes the last installation contact probe subassembly of Z axle horizontal adjustment subassembly, is convenient for carry out the contact test, through the lead screw drive structure in the horizontal adjustment subassembly, can carry out stable horizontal slip, greatly improves the precision of detecting time measuring, provides probe pricking power feedback, guarantees that the contact is good, avoids the virtual joint of dynamics undersize simultaneously, and the too big test point gold layer that damages of dynamics.

Description

Three-dimensional electric probe seat convenient to adjust

Technical Field

The utility model relates to a chip test technical field specifically is a three-dimensional electronic probe seat convenient to adjust.

Background

Nowadays, due to the development of the current semiconductor chip and the micro-assembly technology, the wafer test and the test of the micro-assembly bare chip circuit are widely popularized, in the chip test, a probe is required to be used for contact type detection, the alignment and contact conditions of a tungsten steel needle and a radio frequency probe in the wafer test process directly influence the final result of the test, the tungsten steel needle or the radio frequency probe cannot be powered or controlled if the tungsten steel needle or the radio frequency probe is in a virtual connection, and the probe and the product are burnt out if the tungsten steel needle or the radio frequency probe is in a fire state, so that irreversible serious consequences are caused.

Most of the prior art manually adjusts and positions the probe seat to compensate, the efficiency is very low, the misoperation also exists, and the excessive adjustment often occurs, so that the probe is damaged.

Therefore, in view of the above, research and improvement are made for the existing structure and defects, and a three-dimensional electric probe base convenient to adjust is provided, so as to achieve the purpose of higher practical value.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a three-dimensional electronic probe seat convenient to adjust to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a three-dimensional electronic probe seat convenient to adjust, includes X axle horizontal adjustment subassembly and contact probe subassembly, the upper end top of X axle horizontal adjustment subassembly is provided with Y axle horizontal adjustment subassembly, and the upper end top of Y axle horizontal adjustment subassembly is provided with connects the platform, outside one side of connecting the platform is provided with Z axle horizontal adjustment subassembly, the outside one end of Z axle horizontal adjustment subassembly is provided with the contact probe subassembly, the contact probe subassembly includes probe installation cantilever, picture peg, slot, connecting plate and probe feeler lever, the outside one end of probe installation cantilever is provided with the picture peg, and the outside department of picture peg is provided with the connecting plate, the slot has been seted up to the inside department of connecting plate, the inside one end of connecting plate is run through and is provided with the probe feeler lever.

Further, the X-axis horizontal adjusting assembly comprises a slide rail bottom plate, a sliding table, a transmission lead screw and a rotating motor, the sliding table is embedded at the upper end of the slide rail bottom plate, the transmission lead screw is installed at the bottom of the lower end of the sliding table, and the rotating motor is arranged at one end of the outside of the transmission lead screw.

Furthermore, a sliding structure is formed between the sliding rail bottom plate and the sliding table, and the sliding rail bottom plate and the sliding table are mutually embedded in size.

Furthermore, the sliding table forms a screw rod structure between the transmission screw rod and the sliding rail bottom plate, and a transmission structure is formed between the transmission screw rod and the rotating motor.

Furthermore, the positions among the X-axis horizontal adjusting assembly, the Y-axis horizontal adjusting assembly and the Z-axis horizontal adjusting assembly are distributed in an XYZ shape.

Furthermore, constitute detachable construction between probe installation cantilever, picture peg, slot, connecting plate and the probe feeler lever, and constitute fixed connection between probe installation cantilever and the Z axle horizontal adjustment subassembly.

Furthermore, the probe feeler lever is vertical form distribution, the picture peg passes through to constitute the plug connection between slot and the connecting plate.

The utility model provides a three-dimensional electronic probe seat convenient to adjust possesses following beneficial effect:

constitute the three direction moving mechanism of XYZ through three horizontal adjustment subassemblies of group, utilize installation contact probe subassembly on the Z axle horizontal adjustment subassembly, be convenient for carry out the contact test, through the lead screw transmission structure in the horizontal adjustment subassembly, can carry out stable horizontal slip, greatly improve the precision when detecting, provide probe needle power feedback, guarantee that the contact is good, avoid the dynamics undersize to connect in vain simultaneously, the too big test point gold layer that damages of dynamics.

1. The utility model discloses, regard as main accent to the mechanism with X axle horizontal adjustment subassembly, Y axle horizontal adjustment subassembly and Z axle horizontal adjustment subassembly, its sliding construction by slide rail bottom plate and slip table is as horizontal adjustment spare to can form the screw rod transmission structure under transmission lead screw and rotating electrical machines and other auxiliary members, can convert the revolving force into accurate horizontal migration distance, greatly improve the precision of detecting time measuring.

2. The utility model discloses, the probe installation cantilever of external installation is adopted, as the support piece of probe feeler lever, can make the connecting plate that has different angle probe feeler levers, adopts the mode of plug to install, the chip test demand of the various specifications of better adaptation.

Drawings

Fig. 1 is a schematic perspective view of a three-dimensional electric probe base convenient for adjustment according to the present invention;

fig. 2 is a schematic structural view of an X-axis horizontal adjustment assembly of a three-dimensional electric probe base convenient for adjustment according to the present invention;

fig. 3 is a schematic structural view of the contact probe assembly of the three-dimensional electric probe base convenient for adjustment according to the present invention.

In the figure: 1. an X-axis horizontal adjustment assembly; 101. a slide rail bottom plate; 102. a sliding table; 103. a transmission screw rod; 104. a rotating electric machine; 2. a Y-axis horizontal adjustment assembly; 3. a connecting table; 4. a Z-axis horizontal adjustment assembly; 5. a contact probe assembly; 501. a cantilever is installed on the probe; 502. inserting plates; 503. a slot; 504. a connecting plate; 505. the probe feeler lever.

Detailed Description

The following describes embodiments of the present invention in further detail with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.

As shown in fig. 1-3, a three-dimensional electric probe base convenient for adjustment comprises an X-axis horizontal adjusting assembly 1 and a contact probe assembly 5,X, a Y-axis horizontal adjusting assembly 2 is arranged on the top of the upper end of the Y-axis horizontal adjusting assembly 1, a connecting table 3 is arranged on the top of the upper end of the Y-axis horizontal adjusting assembly 2, a Z-axis horizontal adjusting assembly 4,Z is arranged on one side of the outside of the connecting table 3, a contact probe assembly 5 is arranged on one end of the outside of the horizontal adjusting assembly 4, the contact probe assembly 5 comprises a probe mounting cantilever 501, an insert plate 502, an insert slot 503, a connecting plate 504 and a probe contact rod 505, an insert slot 503 is arranged on the outside of the insert plate 502, an insert slot 503 is arranged on the inside of the connecting plate 504, a probe contact rod 505 is arranged on one end of the inside of the connecting plate 504, the X-axis horizontal adjusting assembly 1 comprises a slide rail base plate 101, a slide table 102, a transmission screw 103 and a rotary motor 104, the upper end of the slide rail bottom plate 101 is embedded with a slide table 102, the bottom of the lower end of the slide table 102 is provided with a transmission screw rod 103, one end of the outer part of the transmission screw rod 103 is provided with a rotating motor 104, a sliding structure is formed between the slide rail bottom plate 101 and the slide table 102, the slide rail bottom plate 101 and the slide table 102 are mutually embedded in size, the slide table 102 forms a screw rod structure through the transmission screw rod 103 and the slide rail bottom plate 101, a transmission structure is formed between the transmission screw rod 103 and the rotating motor 104, the positions among the X-axis horizontal adjusting component 1, the Y-axis horizontal adjusting component 2 and the Z-axis horizontal adjusting component 4 are distributed in an XYZ shape, a detachable structure is formed among the probe installation cantilever 501, the plugboard 502, the slot 503, the connecting plate 504 and the probe touch rod 505, and the probe installation cantilever 501 and the Z-axis horizontal adjusting component 4 are fixedly connected, the probe touch rods 505 are vertically distributed, the plug board 502 is connected with the connecting board 504 in a plugging mode through the slots 503, the X-axis horizontal adjusting assembly 1, the Y-axis horizontal adjusting assembly 2 and the Z-axis horizontal adjusting assembly 4 are used as main direction adjusting mechanisms, the sliding structures of the sliding rail bottom plate 101 and the sliding table 102 are used as horizontal adjusting parts, a screw rod transmission structure can be formed under the transmission screw rod 103, the rotating motor 104 and other auxiliary parts, rotating force can be converted into accurate horizontal moving distance, accuracy in detection is greatly improved, the externally-installed probe installation cantilever 501 is used as a supporting part of the probe touch rods 505, the connecting board 504 with the probe touch rods 505 in different angles can be installed in a plugging mode, and chip testing requirements of various specifications are better met.

In summary, as shown in fig. 1-3, when the three-dimensional electric probe holder convenient for adjustment is used, firstly, the three-dimensional electric probe holder can be fixedly installed through the slide rail bottom plate 101 of the X-axis horizontal adjustment assembly 1, and then, the X-axis horizontal adjustment assembly 1, the Y-axis horizontal adjustment assembly 2, and the Z-axis horizontal adjustment assembly 4 are independently and electrically controlled through the wire harnesses outside the X-axis horizontal adjustment assembly 1, the Y-axis horizontal adjustment assembly 2, and the Z-axis horizontal adjustment assembly 4, and the internal screw transmission assembly, for example, in the X-axis horizontal adjustment assembly 1, through the rotation of the external rotating motor 104, the transmission screw 103 is rotated to push the sliding table 102 to horizontally slide, so as to drive the external probe installation cantilever 501 to finely adjust the distance on the XYZ axis, and control the probe touch bar 505 to adjust, and in addition, the connection plate 504 with the probe touch bars 505 at different angles can be installed in a plugging and unplugging manner, thereby better adapting to the chip test requirements of various specifications.

The embodiments of the present invention have been presented for purposes of illustration and description, and are not intended to be exhaustive or limited to the invention in the form disclosed. Many modifications and variations will be apparent to practitioners skilled in this art. The embodiment was chosen and described in order to best explain the principles of the invention and the practical application, and to enable others of ordinary skill in the art to understand the invention for various embodiments with various modifications as are suited to the particular use contemplated.

Claims

1. The utility model provides a three-dimensional electronic probe seat convenient to adjust, includes X axle horizontal adjustment subassembly (1) and contact probe subassembly (5), its characterized in that: the utility model discloses a probe mounting structure, including X axle horizontal adjustment subassembly (1), the upper end top of X axle horizontal adjustment subassembly (1) is provided with Y axle horizontal adjustment subassembly (2), and the upper end top of Y axle horizontal adjustment subassembly (2) is provided with connects platform (3), outside one side of connecting platform (3) is provided with Z axle horizontal adjustment subassembly (4), the outside one end of Z axle horizontal adjustment subassembly (4) is provided with contact probe subassembly (5), contact probe subassembly (5) are including probe installation cantilever (501), picture peg (502), slot (503), connecting plate (504) and probe feeler lever (505), the outside one end of probe installation cantilever (501) is provided with picture peg (502), and the outside department of picture peg (502) is provided with connecting plate (504), slot (503) have been seted up to the inside department of connecting plate (504), the inside one end of connecting plate (504) runs through and is provided with probe feeler lever (505).

2. The three-dimensional electric probe seat convenient to adjust according to claim 1, wherein the X-axis horizontal adjusting assembly (1) comprises a slide rail base plate (101), a sliding table (102), a transmission screw rod (103) and a rotating motor (104), the sliding table (102) is embedded at the upper end of the slide rail base plate (101), the transmission screw rod (103) is installed at the bottom of the lower end of the sliding table (102), and the rotating motor (104) is arranged at one end of the exterior of the transmission screw rod (103).

3. The three-dimensional electric probe seat convenient to adjust as claimed in claim 2, characterized in that a sliding structure is formed between the slide rail base plate (101) and the sliding table (102), and the slide rail base plate (101) and the sliding table (102) are mutually embedded in size.

4. The three-dimensional electric probe seat convenient to adjust as claimed in claim 2, wherein the sliding table (102) forms a screw structure through the transmission screw (103) and the slide rail base plate (101), and forms a transmission structure between the transmission screw (103) and the rotating motor (104).

5. The three-dimensional motorized probe holder for facilitating adjustment according to claim 1, wherein the positions of the X-axis leveling assembly (1), the Y-axis leveling assembly (2) and the Z-axis leveling assembly (4) are distributed in XYZ.

6. The three-dimensional motorized probe holder for facilitating adjustment according to claim 1, wherein the probe mounting cantilever (501), the insertion plate (502), the insertion slot (503), the connection plate (504) and the probe feeler lever (505) form a detachable structure, and the probe mounting cantilever (501) and the Z-axis horizontal adjustment assembly (4) form a fixed connection.

7. The three-dimensional motorized probe holder convenient for adjustment according to claim 1, wherein the probe contact rods (505) are vertically distributed, and the plug board (502) is connected with the connecting board (504) through the slots (503).