CN218115675U - Novel quartz crucible vacuum crucible cover - Google Patents

Novel quartz crucible vacuum crucible cover Download PDF

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Publication number
CN218115675U
CN218115675U CN202221796810.9U CN202221796810U CN218115675U CN 218115675 U CN218115675 U CN 218115675U CN 202221796810 U CN202221796810 U CN 202221796810U CN 218115675 U CN218115675 U CN 218115675U
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Prior art keywords
crucible
vacuum
quartz crucible
concave surface
groove
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CN202221796810.9U
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Chinese (zh)
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赵国伟
吴树飞
张文霞
王建平
王林
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Inner Mongolia Zhonghuan Crystal Materials Co Ltd
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Inner Mongolia Zhonghuan Crystal Materials Co Ltd
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Abstract

The utility model provides a novel quartz crucible vacuum crucible lid, including crucible lid and ladder absorption portion, the crucible lid is equipped with interior concave surface, forms the concave surface and holds the chamber, the concave surface holds chamber top and is equipped with rings and is used for hoist and mount, rings one side is equipped with the vacuum valve, ladder absorption portion sets up the concave surface holds chamber bottom opening edge, the vacuum valve is vacuumed in with quartz crucible, ladder absorption portion can adsorb with not unidimensional quartz crucible, makes the concave surface holds the chamber and exceeds the polycrystalline silicon material contactless on quartz crucible. The beneficial effects of the utility model are that during hoist and mount polycrystalline silicon material, a vacuum crucible lid is applicable in the quartz crucible of multiple size, avoids polycrystalline silicon material and vacuum pot lid contact, and simple structure has reduced manufacturing cost, simple operation.

Description

Novel quartz crucible vacuum crucible cover
Technical Field
The utility model belongs to the technical field of quartz crucible, especially, relate to a novel quartz crucible vacuum crucible lid.
Background
In the solar photovoltaic manufacturing industry, various process technologies for manufacturing silicon single crystals by the Czochralski method are increasingly perfect and tend to be mature. When the quartz crucible is put into the single crystal furnace, the quartz crucible and the vacuum crucible are tightly combined together usually by adopting a vacuum crucible cover hoisting mode. The quartz crucibles with different specifications need to be matched with vacuum crucible covers with different sizes, so that the number and the variety of the vacuum crucible covers on the production site are various, and the production cost and the operation difficulty are increased. Especially when the raw materials is the polycrystalline silicon material, the charge capacity is great, usually more than 300kg, because polycrystal appearance is irregular, fills the back raw materials height and often exceeds on the quartz crucible more than 100mm along the line, the polycrystalline raw materials very easily with crucible cover contact, easily cause the raw materials pollution, damage crucible cover even, hoist and mount to the polycrystalline silicon material now, provide a novel quartz crucible vacuum pot cover.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a novel quartz crucible vacuum crucible lid, when the effectual polycrystalline silicon material of having solved hoisted, vacuum crucible lid was of a great variety, and the raw materials easily contacts the problem of vacuum crucible lid.
The utility model adopts the technical proposal that: a novel quartz crucible vacuum crucible cover comprises:
the crucible cover body is provided with an inner concave surface to form a concave surface containing cavity, the top of the concave surface containing cavity is provided with a hanging ring for hoisting, and one side of the hanging ring is provided with a vacuum valve;
the stepped adsorption part is arranged at the edge of an opening at the bottom of the concave cavity, the vacuum valve vacuumizes the quartz crucible, and the stepped adsorption part can be adsorbed by quartz crucibles with different sizes, so that the concave cavity is not in contact with the polycrystalline silicon material higher than the upper edge of the quartz crucible.
Further, the ladder adsorption part at least comprises a first-order adsorption clamping groove and a second-order adsorption clamping groove, the first-order adsorption clamping groove is formed in the edge of an opening in the bottom of the concave cavity, the second-order adsorption clamping groove is formed below the first-order adsorption clamping groove and extends outwards in the radial direction of the bottom of the concave cavity.
Furthermore, a sealing gasket is arranged on the adsorption clamping groove.
Further, the hanging ring is arranged in the center of the top of the concave cavity.
Further, a handle is arranged on one side of the top of the concave cavity, and an anti-skid layer is arranged on the handle.
Further, a barometer is arranged at the top of the concave cavity.
The utility model has the advantages and positive effects be: by adopting the technical scheme, when the polycrystalline silicon material is hoisted, the vacuum crucible cover is applicable to quartz crucibles with various sizes, the polycrystalline silicon material is prevented from contacting the vacuum pot cover, the structure is simple, the production cost is reduced, and the operation is convenient and fast.
Drawings
Fig. 1 is a schematic structural diagram of a novel quartz crucible vacuum crucible cover of the embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a novel quartz crucible vacuum crucible cover of the embodiment of the utility model.
In the figure:
1. crucible cover body 2, concave cavity 3 and ladder adsorption part
4. Vertical protrusion 5, first-order adsorption clamping groove 6 and second-order adsorption clamping groove
7. Three-order absorption clamping groove 8, horizontal bulge 9 and barometer
10. Vacuum valve 11, hanging ring 12 and quartz crucible
13. Raw material 14, handle
Detailed Description
The embodiment of the utility model provides a novel quartz crucible vacuum crucible lid, it is right to combine the attached drawing below the embodiment of the utility model makes the explanation.
As shown in fig. 1 and fig. 2, the embodiment of the utility model provides a novel quartz crucible vacuum crucible lid, including crucible lid 1 and ladder absorption portion 3, crucible lid 1 is equipped with interior concave surface, forms the concave surface and holds chamber 2, and when owing to hoist and mount polycrystalline silicon material, fill back raw materials 13 and highly often exceed quartz crucible 12 along the line, the concave surface holds chamber 2 and can avoid polycrystalline silicon material to touch vacuum crucible lid to avoid pollution raw materials 13 and damage vacuum crucible lid. The top of the concave cavity 2 is provided with a hanging ring 11 and a vacuum valve 10. Rings 11 are used for hoist and mount, and ladder adsorption portion 3 sets up and holds 2 bottom opening edges at the concave surface, makes quartz crucible 12 inside take out into the negative pressure through the effect of vacuum valve 10, and under the effect of inside and outside pressure differential, ladder adsorption portion 3 can adsorb with quartz crucible 12 of unidimensional, and ladder adsorption portion 3 makes the quartz crucible 12 of different diameters correspond different adsorption height, ensures that the concave surface holds 2 and exceeds the raw materials 13 on quartz crucible 12 upper edge and can not contact.
Specifically, ladder adsorption portion 3 includes first-order absorption draw-in groove 5 and second-order absorption draw-in groove 6 at least, and first-order absorption draw-in groove 5 sets up and holds 2 bottom opening edges in the concave surface, and second-order absorption draw-in groove 6 sets up in first-order absorption draw-in groove 5 below, and follows the concave surface holds 2 radial outside extensions in the bottom of the chamber. Each stepped clamping groove corresponds to one quartz crucible 12 with one size, and in order to avoid the contact between the raw materials 13 in the large-size quartz crucible 12 and the concave cavity 2, the larger the diameter, the farther the distance between the adsorption clamping groove of the quartz crucible 12 and the top of the concave cavity 2 is. The edge of the opening at the bottom of the concave cavity 2 is provided with a vertical bulge 4 to form a first-order adsorption clamping groove 5. In some embodiments, vertical protrusions 4 are provided in a horizontal direction near the stepped corners of the feedstock 13 to form second-order adsorption pockets 6. In some embodiments, the second-order adsorption card slot 6 is formed by disposing the horizontal protrusion 8 in the vertical direction near the stepped corner of the raw material 13. A plurality of ladder adsorption clamping grooves can be arranged according to actual use conditions.
Preferably, a sealing gasket is arranged in the adsorption clamping groove of the step adsorption part 3. For better absorption of ladder absorption portion 3 and quartz crucible 12, guarantee the leakproofness, the sealed pad of installation in adsorbing the draw-in groove makes better and the quartz crucible 12 of ladder absorption portion 3 adsorb, guarantees the leakproofness, avoids gas leakage, guarantees the security of hoist and mount. In certain embodiments, the gasket is a rubber gasket.
Preferably, the hanging ring 11 is arranged in the center of the top of the concave cavity 2, so that the hanging is more stable.
Preferably, for the convenience of operation, concave surface holds cavity top one side and is equipped with handle 14, is equipped with the skid resistant course on handle 14, and in some embodiments, the handle 14 is last to be equipped with the rubber skid resistant course, is equipped with the wave stripe on the skid resistant course.
Preferably, in order to facilitate vacuum pumping and ensure that the stepped adsorption part 3 is completely adsorbed with the quartz crucible 12, a barometer 9 is arranged at the top of the concave cavity 2. During evacuation, the internal air pressure is monitored at any time by the barometer 9.
The first embodiment is as follows: as shown in figure 1, the novel quartz crucible vacuum crucible cover comprises a crucible cover body 1 and a stepped adsorption part 3. Crucible lid 1 is equipped with the concave surface, forms the concave surface and holds chamber 2, and the concave surface holds 2 top central authorities in chamber and installs rings 11 for hoist and mount. A vacuum valve 10 and an air pressure gauge 9 are arranged on one side of the hanging ring 11, and a handle 14 is arranged on the other side of the hanging ring 11. Ladder adsorption portion 3 includes that first-order absorption draw-in groove 5 and second order absorb draw-in groove 6, and first-order absorption draw-in groove 5 sets up and hold 2 bottom opening edges in the concave surface, and second order absorption draw-in groove 6 sets up in first-order absorption draw-in groove 5 below, and follows the concave surface holds 2 radial outside extensions in the bottom of the chamber. The edge of the opening at the bottom of the concave cavity 2 is provided with a vertical bulge 4 to form a first-order adsorption clamping groove 5. A horizontal bulge 8 is arranged in the vertical direction close to the step corner of the raw material 13 to form a second-order adsorption clamping groove 6. And a rubber sealing gasket is arranged in the adsorption clamping groove. The handle 14 is provided with a rubber anti-slip layer, and the anti-slip layer is provided with wave stripes. The inside of the quartz crucible 12 is pumped into negative pressure through the vacuum valve 10, the quartz crucible 12 and the ladder adsorption part 3 are tightly combined together, the lifting of the quartz crucibles 12 with two different sizes can be realized, and the raw material 13 is prevented from contacting the concave cavity 2.
Example two: as shown in figure 2, the novel quartz crucible vacuum crucible cover comprises a crucible cover body 1 and a stepped adsorption part 3. Crucible lid 1 is equipped with the concave surface, forms the concave surface and holds chamber 2, and the concave surface holds 2 top central authorities in chamber and installs rings 11 for hoist and mount. A vacuum valve 10 and an air pressure gauge 9 are arranged on one side of the hanging ring 11, and a handle 14 is arranged on the other side of the hanging ring 11. Ladder adsorption portion 3 includes that first-order absorption draw-in groove 5, second order absorb draw-in groove 6 and third-order absorption draw-in groove 7, and first-order absorption draw-in groove 5 sets up and hold 2 bottom opening edges in the concave surface, and second-order absorption draw-in groove 6 sets up in first-order absorption draw-in groove 5 below, and follows the concave surface holds 2 bottoms radial outside extensions, and third-order absorption draw-in groove 7 sets up and adsorbs draw-in groove 6 below in the second order, and follows the concave surface holds 2 bottoms radial outside extensions. The edge of the opening at the bottom of the concave cavity 2 is provided with a vertical bulge 4 to form a first-order adsorption clamping groove 5. The vertical protrusion 4 is arranged in the horizontal direction close to the stepped corner of the raw material 13 to form a second-order adsorption clamping groove 6 and a third-order adsorption clamping groove 7. And a rubber sealing gasket is arranged in the adsorption clamping groove. The handle 14 is provided with a rubber anti-slip layer, and the anti-slip layer is provided with wave stripes. The inside of the quartz crucible 12 is pumped into negative pressure through the vacuum valve 10, the quartz crucible 12 and the ladder adsorption part 3 are tightly combined together, the lifting of the quartz crucibles 12 with three different sizes can be realized, and the raw materials 13 are prevented from contacting the concave cavity 2.
The utility model has the advantages and positive effects that:
through setting up concave surface and holding chamber 2 and ladder adsorption portion 3, can make a vacuum crucible lid realize the hoist and mount of multiple not unidimensional quartz crucible 12, and can guarantee to exceed raw materials 13 and crucible lid 1 contactless along the line on quartz crucible 12, avoid raw materials 13 to pollute and the damage to crucible lid 1, simple structure, convenient operation has reduced manufacturing cost.
The embodiments of the present invention have been described in detail, but the description is only for the preferred embodiments of the present invention and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.

Claims (6)

1. A novel quartz crucible vacuum crucible cover is characterized by comprising
The crucible cover body is provided with an inner concave surface to form a concave surface containing cavity, the top of the concave surface containing cavity is provided with a hanging ring for hoisting, and one side of the hanging ring is provided with a vacuum valve;
the stepped adsorption part is arranged at the edge of an opening at the bottom of the concave cavity, the vacuum valve vacuumizes the quartz crucible, and the stepped adsorption part can be adsorbed by quartz crucibles with different sizes, so that the concave cavity is not in contact with the polycrystalline silicon material higher than the upper edge of the quartz crucible.
2. The novel quartz crucible vacuum crucible cover according to claim 1, characterized in that: the ladder adsorbs the portion and includes first-order absorption draw-in groove and second order absorption draw-in groove at least, first-order absorption draw-in groove sets up concave surface holds chamber bottom opening edge, the second order is adsorbed the draw-in groove setting and is in first-order absorption draw-in groove below, and follow concave surface holds chamber bottom radial outside extension.
3. The novel quartz crucible vacuum crucible cover according to claim 2, characterized in that: and a sealing gasket is arranged on the adsorption clamping groove.
4. The novel quartz crucible vacuum crucible cover according to claim 1, characterized in that: the hanging ring is arranged in the center of the top of the concave cavity.
5. The novel quartz crucible vacuum crucible cover according to claim 1, characterized in that: the handle is arranged on one side of the top of the concave cavity, and an anti-skid layer is arranged on the handle.
6. The novel quartz crucible vacuum crucible cover according to any one of claims 1 to 5, characterized in that: and a barometer is arranged at the top of the concave cavity.
CN202221796810.9U 2022-07-12 2022-07-12 Novel quartz crucible vacuum crucible cover Active CN218115675U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221796810.9U CN218115675U (en) 2022-07-12 2022-07-12 Novel quartz crucible vacuum crucible cover

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221796810.9U CN218115675U (en) 2022-07-12 2022-07-12 Novel quartz crucible vacuum crucible cover

Publications (1)

Publication Number Publication Date
CN218115675U true CN218115675U (en) 2022-12-23

Family

ID=84517423

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221796810.9U Active CN218115675U (en) 2022-07-12 2022-07-12 Novel quartz crucible vacuum crucible cover

Country Status (1)

Country Link
CN (1) CN218115675U (en)

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