CN218115665U - Heat preservation section of thick bamboo support ring - Google Patents

Heat preservation section of thick bamboo support ring Download PDF

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Publication number
CN218115665U
CN218115665U CN202222672459.9U CN202222672459U CN218115665U CN 218115665 U CN218115665 U CN 218115665U CN 202222672459 U CN202222672459 U CN 202222672459U CN 218115665 U CN218115665 U CN 218115665U
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Prior art keywords
arc
section
support ring
heat
heat preservation
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CN202222672459.9U
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Chinese (zh)
Inventor
杨建松
许堃
吴超慧
朱厚军
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Yunnan Yuze Semiconductor Co ltd
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Yuze Semiconductor Yunnan Co ltd
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Abstract

The utility model relates to a heat preservation cylinder support ring, belonging to the technical field of monocrystalline silicon production; the heat-insulation barrel supporting ring comprises at least two arc-shaped supporting sections, the at least two arc-shaped supporting sections are mutually butted to form a circular supporting ring structure, clamping grooves for butting adjacent heat-insulation barrels are formed in the upper side and the lower side of each arc-shaped supporting section, lug plates are symmetrically arranged on the head side and the tail side of each arc-shaped supporting section along the outer side, and bolts and nuts are installed along the lug plates for connecting and fixing the adjacent arc-shaped supporting sections; the utility model discloses a two at least arcs support the concatenation mode that the section formed circular support ring structure, can reduce support ring purchasing cost, when the installation, can be according to the deformation condition of a heat preservation section of thick bamboo, actually adjust the installation interval for a heat preservation section of thick bamboo can be intact fall into in the support ring, ensured the centering in thermal field, and the drawing of single crystal.

Description

Supporting ring of heat-insulating cylinder
Technical Field
The utility model relates to a heat preservation section of thick bamboo support ring belongs to monocrystalline silicon production technical field.
Background
The thermal system of the czochralski crystal growing furnace, namely the thermal field, is the whole system which is used for melting silicon materials and keeping the single crystal growth at a certain temperature, the quality of the thermal field has great influence on the quality of the single crystal silicon, and the single crystal with high quality can be grown by the proper thermal field. The key of the thermal field thermal insulation performance lies in a furnace thermal insulation system, and the current thermal insulation system is divided into 3 parts: the upper heat-insulating cylinder, the middle heat-insulating cylinder and the lower heat-insulating cylinder are arranged in sequence, and a heat-insulating cylinder supporting ring is additionally arranged between every two heat-insulating cylinders for better connecting and fixing the upper heat-insulating cylinder and the lower heat-insulating cylinder.
In the installation process of the existing thermal field, two clamping grooves are arranged on a support ring along the vertical direction, and a heat-insulating cylinder is placed in the clamping grooves of the support ring to be connected and fixed up and down. However, the heat-insulating cylinder is easy to deform after being used for a period of time, and the deformed heat-insulating cylinder cannot be clamped into the clamping grooves of the support ring, so that the centering of a thermal field is influenced, and the single crystal forming environment is influenced.
SUMMERY OF THE UTILITY MODEL
In order to overcome the problem that exists among the background art, the utility model discloses a two at least arcs support the concatenation mode that the section formed circular support ring structure, can reduce support ring purchasing cost, when the installation, can be according to the deformation condition of a heat preservation section of thick bamboo, actually adjust the installation interval for the heat preservation section of thick bamboo can be intact fall into in the support ring, ensured the centering in thermal field to and the drawing of single crystal.
A heat preservation section of thick bamboo supporting ring includes arc support section, otic placode, bolt, nut, the arc supports the section and is provided with two at least, and two at least arcs support the section and dock each other and form circular support ring structure, and both sides all are provided with the draw-in groove of the adjacent heat preservation section of thick bamboo of butt joint about the arc supports the section, and the arc supports the section and has covered the insulating layer along the draw-in groove position, and the insulating layer coats and is stamped the heat preservation, and the arc supports the section and is provided with the otic placode along the outside in head and the tail bilateral symmetry, and adjacent arc supports the section and connects fixedly along otic placode position installation bolt and nut.
Preferably, the number of the arc-shaped supporting sections is three, and the three arc-shaped supporting sections are butted end to form a circular supporting ring structure.
Preferably, the heat insulation layer is a heat insulation silica gel layer.
Preferably, the heat-insulating layer is a silica gel hydrochloric acid layer.
Preferably, the arc-shaped supporting section is provided with a flexible sealing ring through a screw connection, the surface of the flexible sealing ring is provided with a circle of groove, and the groove is sleeved with a sealing rubber ring.
The utility model has the advantages that:
the utility model discloses a concatenation mode that two at least arcs supported the section and formed circular support ring structure can reduce support ring purchasing cost, when the installation, can be according to the deformation condition of a heat preservation section of thick bamboo, actually adjusts the erection space for a heat preservation section of thick bamboo can be intact fall into in the support ring, has ensured the centering in thermal field, and the drawing of single crystal.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic cross-sectional view of the arcuate support section of the present invention;
FIG. 3 is a schematic view of the installation support ring connected between adjacent heat-preservation cylinders;
FIG. 4 is a schematic view of an embodiment of the mounting ear plate of the present invention;
fig. 5 is a schematic view illustrating the butt joint of the support ring and the flexible sealing ring according to the present invention;
fig. 6 is a schematic cross-sectional view of the flexible seal ring of the present invention installed;
fig. 7 is a schematic view of the cross section of the supporting ring sleeved with the sealing rubber ring of the present invention.
The reference numbers in the drawings are as follows: 1-arc support section, 2-clamping groove, 3-ear plate, 4-bolt, 5-upper heat-insulating cylinder, 6-middle heat-insulating cylinder, 7-nut, 8-heat-insulating layer, 9-heat-insulating layer, 10-flexible sealing ring, 11-screw, 12-sealing rubber ring and 13-groove.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the following will make a detailed description of a preferred embodiment of the present invention with reference to the accompanying drawings to facilitate understanding of the skilled person.
Example 1
As shown in fig. 1-3, the heat-insulating cylinder supporting ring comprises arc-shaped supporting sections 1, ear plates 3, bolts 4 and nuts 7, wherein at least two arc-shaped supporting sections 1 are arranged, at least two arc-shaped supporting sections 1 are butted with each other to form a circular supporting ring structure, and the upper side and the lower side of each arc-shaped supporting section 1 are provided with clamping grooves 2 for butting adjacent heat-insulating cylinders. In this embodiment, three arc-shaped supporting sections 1 are provided, three arc-shaped supporting sections 1 are butted end to form a circular supporting ring structure, clamping grooves 2 are formed on the inner edges of the upper side and the lower side of each arc-shaped supporting section 1 along the upper side and the lower side, the upper clamping groove 2 and the lower clamping groove 2 can be clamped with adjacent heat-insulating cylinders, the arc-shaped supporting sections 1 are made of carbon materials, the inner diameter of a circular supporting ring formed by the arc-shaped supporting sections 1 is consistent with the inner diameter of the heat-insulating cylinder of the single crystal furnace, the diameter of a spigot formed between the upper clamping groove 2 and the lower clamping groove 2 is consistent with the outer diameter of the heat-insulating cylinder (as shown in fig. 3), the outer diameter of the supporting ring is 10-20mm larger than the outer diameter of the heat-insulating cylinder, in the specific installation process, a thermal field is firstly removed, a lower heat-insulating cylinder is installed, the lower heat-insulating cylinder is clamped into the lower clamping groove 2 of the arc-shaped supporting sections 1 along the upper edge of the lower heat-insulating cylinder 6, the arc-shaped supporting sections 1 are then installed, the upper heat-insulating cylinder 5 is clamped into butt joint with the middle heat-insulating cylinder 6 along the upper edge of the upper heat-insulating cylinder 5 along the upper clamping groove 2 of the middle-shaped supporting sections 1.
Example 2
As shown in fig. 4-7, the heat-insulating cylinder support ring comprises three arc-shaped support sections 1, the three arc-shaped support sections 1 are butted end to form a circular support ring structure, the upper side and the lower side of each arc-shaped support section 1 are respectively provided with a clamping groove 2 butted with the adjacent heat-insulating cylinder, the arc-shaped support sections 1 are covered with a heat-insulating layer 8 along the positions of the clamping grooves 2, the heat-insulating layers 8 are covered with heat-insulating layers 9, the arc-shaped support sections 1 are made of carbon materials, the inner diameter of the circular support ring formed by the arc-shaped support sections 1 is consistent with the inner diameter of the heat-insulating cylinder of the single crystal furnace, the spigot diameter formed between the upper clamping groove 2 and the lower clamping groove 2 is consistent with the outer diameter of the heat-insulating cylinder (as shown in fig. 3), and the outer diameter of the support ring is 10-20mm larger than the outer diameter of the heat-insulating cylinder. The heat insulation layer 8 is a heat insulation silica gel layer, and the heat insulation layer 9 is a silica gel hydrochloric acid layer.
On the basis of above-mentioned embodiment, arc supports section 1 and is provided with otic placode 3 along the outside in end to end bilateral symmetry, adjacent arc supports section 1 and connects fixedly along otic placode 3 position construction bolt 4 and nut 7, through setting up otic placode 3, trompil on otic placode 3, be used for bolt 4 to pass, adopt bolt 4 and nut 7 to lock simultaneously, in the meantime, can be according to the deformation condition of a heat preservation section of thick bamboo, tighten up or loosen the interval between the two otic placodes 3, adjust suitable position, can guarantee to connect simultaneously again firmly, avoid producing the gap and influence the heat preservation nature in heat field.
In this embodiment, install flexible seal ring 10 through the connection of screw 11 on the arc supports section 1, flexible seal ring 10 surface has seted up round recess 13, sealed rubber ring 12 has been cup jointed on recess 13, through setting up flexible seal ring 10, can wrap up the hookup location of arc supports section 1 and a heat preservation section of thick bamboo, prevent to produce the gap and influence thermal field heat insulating ability, as shown in fig. 5, along vertical position, flexible seal ring 10 and arc support section 1 set up the through-hole and the screw hole that correspond each other, the through-hole on the flexible seal ring 10 adopts the heavy groove structure, make the screw 11 of installation can not bulge flexible seal ring 10 position, adopt the detachable mode, make installation process adaptability better, be convenient for change when arc supports section 1 or flexible seal ring 10 appears damaging simultaneously, flexible seal ring 10 adopts thermal-insulated silica gel to make, can be in the connection arc supports section 1, wrap up the heat preservation section of thick bamboo. In addition, the flexible sealing ring 10 is of an L-shaped structure as shown in the figure, a circle of groove 13 is formed in the outer surface of the flexible sealing ring 10, the groove 13 is used for installing a sealing rubber ring 12, when the sealing rubber ring 12 is installed, the sealing rubber ring 12 is firstly sleeved on a circular support ring formed by the arc-shaped support section 1, the flexible sealing ring 10 is sleeved on a corresponding heat preservation cylinder, then the flexible sealing ring 10 is correspondingly installed by adopting a screw 11 and is connected with the circular support ring formed by the arc-shaped support section 1, and then the sealing rubber ring 12 is pulled to move to the groove 13 for fastening; during the period, if the heat preservation cylinder is deformed due to long-term use, the sealing rubber ring 12 is elastically restored, the flexible sealing ring 10 can be tightened on the heat preservation cylinder all the time, gaps are prevented from being generated, and the heat preservation performance of a thermal field is further guaranteed. After the installation, the round supporting ring formed by the heat-insulating cylinder and the arc-shaped supporting section 1 is wrapped with a heat-insulating felt.
The utility model discloses a concatenation mode that two at least arcs supported the section and formed circular support ring structure can reduce support ring purchasing cost, when the installation, can be according to the deformation condition of a heat preservation section of thick bamboo, actually adjusts the erection space for a heat preservation section of thick bamboo can be intact fall into in the support ring, has ensured the centering in thermal field, and the drawing of single crystal.
Finally, the above preferred embodiments are only intended to illustrate the technical solution of the invention and not to limit it, while the invention has been described in detail by the above preferred embodiments, it should be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention defined by the claims.

Claims (5)

1. The utility model provides a heat preservation section of thick bamboo support ring which characterized in that: a heat preservation section of thick bamboo support ring includes arc support section (1), otic placode (3), bolt (4), nut (7), arc support section (1) is provided with two at least, and at least two arcs support section (1) butt joint each other and form circular support ring structure, and both sides all are provided with draw-in groove (2) of butt joint adjacent heat preservation section of thick bamboo about arc support section (1), and arc support section (1) has insulating layer (8) along draw-in groove (2) position cover, and insulating layer (8) coats and is stamped heat preservation (9), and arc support section (1) is provided with otic placode (3) along the outside in head and the tail bilateral symmetry, and adjacent arc support section (1) is connected fixedly along otic placode (3) position construction bolt (4) and nut (7).
2. The insulating cylinder support ring according to claim 1, characterized in that: the three arc-shaped supporting sections (1) are arranged, and the three arc-shaped supporting sections (1) are butted end to form a circular supporting ring structure.
3. The insulating cylinder support ring according to claim 1 or 2, characterized in that: and the heat insulation layer (8) is a heat insulation silica gel layer.
4. The insulating cylinder support ring according to claim 3, characterized in that: the heat-insulating layer (9) is a silica gel hydrochloric acid layer.
5. The insulating cylinder support ring according to claim 2 or 4, characterized in that: the arc-shaped supporting section (1) is connected and installed with a flexible sealing ring (10) through a screw (11), a circle of groove (13) is formed in the surface of the flexible sealing ring (10), and a sealing rubber ring (12) is sleeved on the groove (13).
CN202222672459.9U 2022-10-11 2022-10-11 Heat preservation section of thick bamboo support ring Active CN218115665U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222672459.9U CN218115665U (en) 2022-10-11 2022-10-11 Heat preservation section of thick bamboo support ring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222672459.9U CN218115665U (en) 2022-10-11 2022-10-11 Heat preservation section of thick bamboo support ring

Publications (1)

Publication Number Publication Date
CN218115665U true CN218115665U (en) 2022-12-23

Family

ID=84496646

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222672459.9U Active CN218115665U (en) 2022-10-11 2022-10-11 Heat preservation section of thick bamboo support ring

Country Status (1)

Country Link
CN (1) CN218115665U (en)

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Address after: No. 888-19, Dongsheng Road, Lucheng Town, Chuxiong Yi Autonomous Prefecture, Yunnan Province, 675000

Patentee after: Yunnan Yuze Semiconductor Co.,Ltd.

Address before: No. 888-19, Dongsheng Road, Lucheng Town, Chuxiong Yi Autonomous Prefecture, Yunnan Province, 675000

Patentee before: Yuze semiconductor (Yunnan) Co.,Ltd.