CN218115589U

CN218115589U - PEVCD equipment for coating film on coiled material

Info

Publication number: CN218115589U
Application number: CN202221887253.1U
Authority: CN
Inventors: 谭健; 杨福年; 方石胜
Original assignee: Shenzhen Jigaomei Nano Technology Co ltd
Current assignee: Shenzhen Jigaomei Nano Technology Co ltd
Priority date: 2022-07-21
Filing date: 2022-07-21
Publication date: 2022-12-23
Anticipated expiration: 2032-07-21

Abstract

The utility model is suitable for a water repellent equipment technical field provides a PEVCD equipment for coiled material coating film. The cabin body, charge device and vacuum pump, charge device pass through the pipeline with the top and the bottom of the cabin body link to each other, the vacuum pump with the cabin body is linked together through the pipeline, still including setting up in the inside plasma radio frequency structure of the cabin body, the internal portion of cabin is provided with rotatable unreeling roller, a plurality of tensioning roller and wind-up roll. The utility model provides a be provided with in the cabin body that is used for PEVCD equipment of coiled material coating film and unreel roller, a plurality of tensioning roller and wind-up roll, the during operation can make the coiled material wind on each roller and expand fully, so can make plasma evenly deposited on the coiled material and the coating film to it is poor often to have plasma homogeneity when plasma treatment to the coiled material to have solved current equipment, and the treatment effect is poor, problem that the treatment effeciency is low.

Description

PEVCD equipment for coating film on coiled material

Technical Field

The utility model belongs to the technical field of coiled material treatment facility, a PEVCD equipment for coiled material coating film is related to.

Background

The PECVD apparatus is an apparatus for performing a PECVD process, and a PECVD (Plasma Enhanced Chemical Vapor Deposition) refers to a Plasma Enhanced Chemical Vapor Deposition process, which can be used to form a thin film on a workpiece to achieve a desired purpose, and has a principle of ionizing a gas containing atoms of a thin film component by means of microwave or radio frequency, etc., forming a Plasma having a strong Chemical activity locally, easily reacting, and depositing a desired thin film on a substrate. Most of the existing PEVCD equipment is suitable for coating film on a sheet-shaped base material, and when the coiled material is subjected to plasma treatment, the problems of poor plasma uniformity, poor treatment effect and low treatment efficiency exist.

SUMMERY OF THE UTILITY MODEL

In view of the foregoing disadvantages of the prior art, an object of the present invention is to provide a PEVCD apparatus for coating a film on a coiled material, which aims to solve the problems of poor plasma uniformity, poor treatment effect and low treatment efficiency when the plasma treatment is performed on the coiled material by the existing apparatus.

The utility model discloses a realize like this, a PEVCD equipment for coiled material coating film, including the cabin body, charge device and vacuum pump, charge device pass through the pipeline with the top and the bottom of the cabin body link to each other, the vacuum pump with the cabin body is linked together through the pipeline, still including setting up in the inside plasma radio frequency structure of the cabin body, the internal portion of cabin is provided with rotatable unreeling roller, a plurality of tensioning roller and wind-up roll.

Further, the tensioning roller is provided with four, four the tensioning roller is including being located unreel the roller with two of wind-up roll top are gone up the roller and are located unreel the roller with two lower rolls of wind-up roll below.

Further, a rotatable feedback roller is arranged in the cabin body.

Further, two go up roller projection, two in vertical direction the projection of lower roll in vertical direction all is located the both sides of feedback roller projection in vertical direction, the height of feedback roller is less than go up the height of roller and be higher than the height of lower roll, plasma radio frequency structure includes that radio frequency power supply and two sets of are in the plate electrode that the projection in the axle center place of feedback roller orientation was arranged is the splayed, and is two sets of the plate electrode is located the both sides of feedback roller, two sets of the top of plate electrode is located two go up between the roller, two sets of the top of plate electrode is located two the top of lower roll, two sets of every group the plate electrode is including relative positive plate and the negative plate that sets up.

Further, the cabin body is cylindrical, and the longitudinal section of the cabin body is circular.

Further, still including set up in two of cabin body outside portion rotate the motor, two the output shaft that rotates the motor respectively with unreel the roller with the axle center of wind-up roll links to each other, the tensioning roller the both sides of feedback roller with the inside relative both sides of the cabin body are rotated and are connected.

Further, the feedback roller is connected with a temperature measuring device.

Compared with the prior art, the beneficial effect of this application lies in:

the utility model provides a be provided with in the cabin body that is used for PEVCD equipment of coiled material coating film and unreel roller, a plurality of tensioning roller and wind-up roll, the during operation can make the coiled material wind on each roller and expand fully, so can make plasma evenly deposited on the coiled material and the coating film to it is poor often to have plasma homogeneity when plasma treatment to the coiled material to have solved current equipment, and the treatment effect is poor, problem that the treatment effeciency is low.

Drawings

FIG. 1 is a schematic view of a PEVCD device for coil coating provided by the present invention;

in the figure, 1, a cabin body; 2. a dosing device; 3. a vacuum pump; 4. a plasma radio frequency structure; 4a, an electrode plate; 4a1, a positive plate; 4a2, a negative plate; 5. unwinding the roller; 6. a tension roller; 6a, an upper roller; 6b, a lower roller; 7. a wind-up roll; 8. a feedback roller; 9. and (4) rolling the material into a roll.

Detailed Description

In order to make the technical problem, technical scheme and the beneficial effect that the utility model discloses solve clearer, it is right to combine figure and embodiment below to go on further the detailed description of the utility model. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.

The embodiment of the utility model provides a PEVCD equipment for coiled material coating film please refer to fig. 1, and fig. 1 is the schematic diagram only, is not actual structure, including the cabin body 1, charge device 2 and vacuum pump 3, charge device 2 pass through the pipeline (show with the line segment in the figure) with the top and the bottom of the cabin body 1 link to each other, vacuum pump 3 with the cabin body 1 is linked together through the pipeline, still including setting up in the inside plasma radio frequency structure 4 of the cabin body, 1 inside rotatable unreeling roller 5, a plurality of tensioning roller 6 and wind-up roll 7 of being provided with of the cabin body.

Tensioning roller 6 is provided with four, four tensioning roller 6 is including being located unreeling roller 5 with roll 6a and being located on two of wind-up roll 7 top unreeling roller 5 with two lower rolls 6b of wind-up roll 7 below, coiled material 9 comes out by unreeling roller 5, winds to last roll 6a and lower roll 6b in proper order, receives wind-up roll 7 at last, and the setting of tensioning roller 6 makes coiled material 9 keep suitable tension on the one hand, and on the other hand a plurality of tensioning rollers 6 can make the length extension of the part that coiled material 9 contacted the plasma in the cabin body 1, and the time that coiled material 9 contacted plasma becomes long to guarantee the effect of deposit coating film.

The tension adjusting mechanism is mainly used for adjusting the tension of the coiled material 9 by adjusting the height of the upper roller 6a or the lower roller 6b, wherein the adjustment of the height of the upper roller 6a or the lower roller 6b can be realized by a common automatic lifting or manual lifting structure such as a screw rod, a sliding block and the like, and the common existing structure is not described in detail herein.

The cabin body 1 is also internally provided with a rotatable feedback roller 8, and the feedback roller 8 can be connected with a sensing device, so that the environment in the cabin body 1 can be measured and fed back in real time, and corresponding adjustment of an operator according to data of the feedback roller 8 is facilitated.

The two projections of the upper roller 6a in the vertical direction and the two projections of the lower roller 6b in the vertical direction are both located on two sides of the projection of the feedback roller 8 in the vertical direction, the height of the feedback roller 8 is lower than that of the upper roller 6a and higher than that of the lower roller 6b, the plasma radio-frequency structure 4 comprises a radio-frequency power source (not shown in the figure) and two groups of electrode plates 4a which are arranged in a splayed manner in the projection in the direction of the axis of the feedback roller 8, the two groups of electrode plates 4a are located on two sides of the feedback roller 8, the tops of the two groups of electrode plates 4a are located between the two upper rollers 6a, and the tops of the two groups of electrode plates 4a are located above the two lower rollers 6b, two sets of every group the electrode plate 4a is including relative positive plate 4a1 and the negative plate 4a2 that sets up, the plasma that its ionization of the electrode plate 4a that so set up produced is pressed close to with coiled material 9, be favorable to improving the efficiency of deposit coating film, feedback roller 8 can be directly through contacting coiled material 9 on the one hand simultaneously, can measure the relevant parameter of coiled material more accurately, on the other hand coiled material 9 is around in feedback roller 8, further increase the length of the expansion part of coiled material 9, and each roller (unreel roller 5, two go up roller 6a, feedback roller 8, two spaces that can make full use of cabin body 1 of arranging of lower roll 6b and wind-up roller 7), thereby reduce the volume of cabin body 1 and reduce its occupation space.

The cabin body 1 is cylindrical, and the longitudinal section of the cabin body 1 is circular, so that useless space can be reduced, and the time for vacuumizing can be reduced.

Still including set up in two of the 1 outside portion of cabin body rotate the motor (not drawn in the picture), two the output shaft that rotates the motor respectively with unreel the roller 5 with the axle center of wind-up roll 7 links to each other, the tensioning roller 6 the both sides of feedback roller 8 with the relative both sides of the 1 inside of cabin body are rotated and are connected, so realized wind-up roll 7 and unreel the rotation of roller 5, and tensioning roller 6 and feedback roller 8 can rotate along with the motion of coiled material 9 when the coating film of coiled material 9 simultaneously.

Wherein, the rotation of tensioning roller 6 and feedback roller 8 and cabin body 1 is connected the axis of rotation that the accessible links to each other with tensioning roller 6 and feedback roller 8 both ends and is realized, and the axis of rotation is connected with cabin body 1 or rotates with tensioning roller 6 and feedback roller 8.

The feedback roller 8 is connected with a temperature measuring device (not shown in the figure), a temperature sensing part of the temperature measuring device is in contact with the feedback roller 8, so that the temperature measuring device can measure the temperature of the feedback roller 8, the temperature of the cabin body 1 can be obtained, a temperature adjusting system is arranged in the cabin body 1, and the temperature adjusting system can correspondingly adjust the temperature of the cabin body 1 according to the measured temperature.

The temperature measuring device is a thermometer, is a common device in the market, is the prior art, and is not described herein in detail.

When the film coating device is used, a coiled material 9 is wound to an unwinding roller 5 in advance, then the coiled material is wound to the position above an upper roller 6a close to the unwinding roller 5, the position below the upper roller 6a, the position above a feedback roller 8, the position above an upper roller 6a close to a winding roller 7 and the position below a lower roller 6b close to the winding roller 7 in sequence, finally the coiled material is wound to the winding roller 7, after the coiled material 9 is wound by the method, a cabin door is closed, then a vacuum pump 3, a medicine adding device 2 and a plasma radio frequency structure are started (the starting sequence is carried out according to the actual use condition, the sequencing is not the actual starting sequence), the vacuum pump 3 vacuumizes the cabin body 1, the medicine adding device 2 adds monomer liquid medicine to be ionized into the cabin body 1, a positive plate 4a1 and a negative plate 4a2 in the plasma radio frequency structure ionizes the monomer liquid medicine to generate plasma, a rotating motor is started, the unwinding roller 5 and the winding roller 7 rotate, the coiled material 9 is contacted with the plasma, the coiled material is adsorbed into the coiled material 9 and is wound by the coiling roller 7, and the coiled material is wound to the winding roller 7, and then the coiled material is wound from the winding roller 9.

Wherein, wind-up roll 7 and unreel roller 5 and 1 inside detachable connections in cabin body, so conveniently around rolling up and the rolling, can dismantle common structures such as connection accessible buckle and realize, do not do too much repeated here.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not intended to limit the present invention, and all modifications, equivalents, improvements and the like that are made within the principles of the present invention are intended to be included within the scope of the present invention.

Claims

1. The utility model provides a PEVCD equipment for coiled material coating film, a serial communication port, includes the cabin body (1), charge device (2) and vacuum pump (3), charge device (2) through the pipeline with the top and the bottom of the cabin body (1) link to each other, vacuum pump (3) with the cabin body (1) is linked together through the pipeline, still including setting up in the inside plasma radio frequency structure (4) of the cabin body (1), cabin body (1) inside is provided with rotatable unreel roller (5), a plurality of tensioning roller (6) and wind-up roll (7).

2. The PEVCD apparatus for coil coating according to claim 1, wherein four tensioning rollers (6) are provided, four tensioning rollers (6) comprising two upper rollers (6 a) above the unwinding roller (5) and the winding roller (7) and two lower rollers (6 b) below the unwinding roller (5) and the winding roller (7).

3. PEVCD device for coil coating according to claim 2, characterized in that a rotatable feed-back roller (8) is arranged inside the housing (1).

4. The PEVCD apparatus for coil coating according to claim 3, wherein the projections of the two upper rolls (6 a) and the two lower rolls (6 b) in the vertical direction are located on two sides of the projection of the feedback roll (8), the height of the feedback roll (8) is lower than the height of the upper rolls (6 a) and higher than the height of the lower rolls (6 b), the plasma rf structure (4) comprises an rf power source and two sets of electrode plates (4 a) arranged in a splayed shape in the projection direction of the axis of the feedback roll (8), the two sets of electrode plates (4 a) are located on two sides of the feedback roll (8), the top of the two sets of electrode plates (4 a) is located between the two upper rolls (6 a), the top of the two sets of electrode plates (4 a) is located above the two lower rolls (6 b), and each set of electrode plates (4 a) comprises a positive electrode plate (4 a 1) and a negative electrode plate (4 a 2) which are oppositely located.

5. The PEVCD equipment for coating a coil as claimed in any one of claims 1 to 4, wherein said chamber (1) has a cylindrical shape and said chamber (1) has a circular longitudinal section.

6. The PEVCD equipment for coating the coiled material according to claim 3, further comprising two rotating motors arranged at the outer side part of the cabin body (1), wherein output shafts of the two rotating motors are respectively connected with the axial centers of the unwinding roller (5) and the winding roller (7), and two sides of the tensioning roller (6) and the feedback roller (8) are rotatably connected with two opposite sides in the cabin body (1).

7. PEVCD unit for the coating of rolls according to claim 3, characterized in that said feedback roller (8) is connected to a temperature measuring device.