CN218106826U - Degassing device for liquid precursor conveying - Google Patents
Degassing device for liquid precursor conveying Download PDFInfo
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- CN218106826U CN218106826U CN202221454959.9U CN202221454959U CN218106826U CN 218106826 U CN218106826 U CN 218106826U CN 202221454959 U CN202221454959 U CN 202221454959U CN 218106826 U CN218106826 U CN 218106826U
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- degassing
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Abstract
The utility model discloses a degassing device for conveying liquid precursors, which comprises a degassing cavity and a degassing membrane, wherein the degassing membrane is arranged in the degassing cavity; one end of the degassing membrane is connected with a liquid inlet valve, and the other end of the degassing membrane is connected with a liquid outlet valve; the degassing cavity is connected with a vacuum tube. The utility model provides a pair of liquid precursor is carried and is carried liquid through feed liquor valve to degasification membrane with degasser, utilize the vacuum pump to carry out the evacuation processing through the vacuum tube to the degasification chamber, the helium that thoughtlessly appears in the liquid precursor under the effect of atmospheric pressure in the degasification membrane to separate helium from the liquid precursor, the liquid precursor after the separation flows out the degasification membrane through going out the liquid valve, thereby get rid of the helium bubble that dissolves in the precursor, make the liquid precursor flow that remains stable.
Description
Technical Field
The application relates to the field of degassers, in particular to a degasser for conveying liquid precursors.
Background
The high-purity ALD/CVD precursor product is one of the core raw materials of the whole electronic industry system, is widely applied to various aspects of manufacturing electronic devices such as computer chips, solar cells, mobile communication, satellite navigation, spacecrafts and the like, and plays a great role in the fields of aerospace, novel solar cells, electronic products and the like.
At present, because the process requirement of a process machine table is that only helium pressure can be used for conveying a liquid precursor to an equipment use point, but helium bubbles dissolved in the liquid precursor can affect the reading value jump of a liquid flowmeter to cause unstable flow or flow alarm, so that the helium dissolved in the precursor can be conveyed to the process machine table use point after being removed.
SUMMERY OF THE UTILITY MODEL
In order to remove helium bubbles dissolved in a precursor and keep the flow of a liquid precursor stable, the application provides a degasser for conveying the liquid precursor.
The application provides a liquid precursor carries uses degasser adopts following technical scheme:
a degassing device for conveying a liquid precursor comprises a degassing cavity and a degassing film, wherein the degassing film is arranged in the degassing cavity;
one end of the degassing membrane is connected with a liquid inlet valve, and the other end of the degassing membrane is connected with a liquid outlet valve;
the degassing cavity is connected with a vacuum tube.
By adopting the technical scheme, liquid is conveyed into the degassing film through the liquid inlet valve, the vacuum pump is used for vacuumizing the degassing cavity through the vacuum tube, helium mixed in the liquid precursor is separated out from the degassing film under the action of air pressure, so that the helium is separated from the liquid precursor, and the separated liquid precursor flows out of the degassing film through the liquid outlet valve, so that helium bubbles dissolved in the precursor are removed, and the liquid precursor is kept at a stable flow.
Optionally, the degassing chamber is connected to a leakage sensor for detecting whether the liquid precursor leaks into the degassing chamber.
By adopting the technical scheme, the leakage sensor is electrically connected with the external controller, and after the liquid precursor leaks from the degassing film, the leakage sensor detects the liquid precursor, sends a signal to the controller and gives an alarm.
Optionally, the degassing membrane includes more than two coil pipes, the liquid inlet valve and the liquid outlet valve are two-way valves, one end of each coil pipe is connected with an outlet of the liquid inlet valve, and the other end of each coil pipe is connected with an inlet of the liquid outlet valve.
By adopting the technical scheme, the space in the degassing cavity is fully utilized, and meanwhile, more liquid precursors can pass through the coil pipe in unit time, so that the degassing efficiency is improved.
Optionally, the two coils are spirally wound.
By adopting the technical scheme, the length of the coil pipe is increased, so that the time for the precursor dissolved with the helium to pass through the degassing device is increased, and the degassing efficiency of the helium is ensured.
Optionally, the degassing cavity includes a cavity and two flange plates, blind flange plates are integrally arranged at two ends of the cavity, the two flange plates are respectively attached to the two blind flange plates, a sealing ring is arranged between the flange plates and the blind flange plates, and the flange plates and the blind flange plates are fixed together through a fixing member.
By adopting the technical scheme, the flange plate and the blind flange plate are tightly fixed together by the fixing part, so that the sealing performance of the device is improved.
Optionally, the fixing member is a plurality of flange latches.
Through adopting above-mentioned technical scheme, flange lock catch closely fixes ring flange and the blind dish of flange together to the leakproofness of device has been improved.
Optionally, the vacuum tube is connected to a vacuum detector, and the vacuum detector is used for detecting the vacuum degree in the cavity.
Through adopting above-mentioned technical scheme, vacuum detector detects the vacuum in the cavity, ensures that helium can be by effectual permeation coil pipe under the environment that has pressure differential.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses a set up coil pipe, feed liquor valve, vacuum tube and play liquid valve, liquid precursor enters into two coil pipes through the feed liquor valve, utilizes the vacuum pump to carry out the evacuation processing through the vacuum tube to the degasification chamber, and the helium that mixes in the liquid precursor is appeared from the coil pipe under the effect of atmospheric pressure to separate helium from the liquid precursor, the liquid precursor after the separation flows out cavity 11 through going out the liquid valve, thereby gets rid of the helium bubble of dissolving in the liquid precursor, makes the liquid precursor keep stable flow;
the utility model discloses a set up double helix coil pipe and can fully utilize the space of degasification intracavity, simultaneously, ensure in the unit interval, have more liquid precursors and can pass through the coil pipe to improved degasification efficiency, thereby two coil pipes are double helix winding and set up and increase coil pipe length, thereby increase the time that the precursor that has dissolved the helium passes through gas removal equipment, ensure the degasification efficiency of helium.
Drawings
FIG. 1 is a schematic structural view of a degasser for transporting liquid precursors according to the present invention;
fig. 2 is a schematic structural diagram of a coil pipe in the degasser for conveying liquid precursor according to the present invention.
In the figure: 1. a degassing chamber; 11. a cavity; 12. a flange plate; 13. a flange blind disc; 14. locking the flange; 2. degassing a membrane; 21. a coil pipe; 3. a liquid inlet valve; 4. a liquid outlet valve; 5. a vacuum tube; 6. a leak sensor.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1 and 2, the present invention provides an embodiment of a degasser for liquid precursor transportation, the degasser for liquid precursor transportation includes a degassing chamber 1 and a degassing membrane 2, the degassing membrane 2 is disposed in the degassing chamber 1, and helium gas can be separated out from the degassing membrane 2. One end of the degassing membrane 2 is connected with a liquid inlet valve 3, the other end of the degassing membrane 2 is connected with a liquid outlet valve 4, the liquid inlet valve 3 and the liquid outlet valve 4 are both fixed on the degassing cavity 1, the degassing cavity 1 is connected with a vacuum tube 5, the vacuum tube 5 is connected with a vacuum pump, and the vacuum pump carries out vacuum-pumping treatment on the degassing cavity 1.
A leak sensor 6 is connected to the degassing chamber 1, the leak sensor 6 being adapted to detect whether liquid precursor leaks into the degassing chamber 1. The leak sensor 6 is electrically connected to an external controller, and when liquid precursor leaks from the degassing membrane 2, the leak sensor 6 detects the liquid precursor and sends a signal to the controller and gives an alarm.
The two coils 21 are wound in a double spiral shape. The length of the coil 21 is increased, so that the time for the precursor dissolved with the helium to pass through the degassing device is increased, and the degassing efficiency of the helium is ensured. The two coils 21 form a spiral with different diameters, the coil 21 with the smaller spiral diameter is arranged in the coil 21 with the larger spiral diameter, and the two coils 21 are arranged in parallel.
The degassing cavity 1 comprises a cavity 11 and two flange plates 12, blind flange plates 13 are integrally arranged at two ends of the cavity 11, the two flange plates 12 are respectively attached to the two blind flange plates 13, a sealing ring is arranged between the flange plates 12 and the blind flange plates 13, the flange plates 12 and the blind flange plates 13 are fixed together through fixing parts, and the fixing parts are flange lock catches 14. The number of the flange lock catches 14 is four, and the flange lock catches 14 are uniformly arranged on the flange blind disc 13 and the flange disc 12. The flange lock 14 tightly fixes the flange plate 12 and the blind flange plate 13 together, thereby improving the sealing performance of the device.
The vacuum tube 5 is connected with a vacuum degree detector which is used for detecting the vacuum degree in the cavity 11. The vacuum detector detects the vacuum degree in the cavity 11, and ensures that helium can effectively permeate the coil 21 in the environment with pressure difference.
The working principle is as follows: liquid precursor enters the two coil pipes 21 through the liquid inlet valve 3, the degassing cavity 1 is vacuumized through the vacuum pipe 5 by using the vacuum pump, helium mixed in the liquid precursor is separated out from the coil pipes 21 under the action of air pressure, so that the helium is separated from the liquid precursor, and the separated liquid precursor flows out of the cavity 11 through the liquid outlet valve 4, so that helium bubbles dissolved in the liquid precursor are removed, and the liquid precursor is kept at a stable flow.
The double coil 21 can fully utilize the space in the degassing chamber 1, and at the same time, ensure that more liquid precursors can pass through the coil 21 in unit time, thereby improving the degassing efficiency. The two coil pipes 21 are arranged in a double-spiral winding mode, so that the length of the coil pipes 21 is increased, the time for a precursor with dissolved helium to pass through a degassing device is prolonged, and the degassing efficiency of the helium is ensured.
It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Claims (7)
1. A degasser for liquid precursor delivery, characterized in that: comprises a degassing cavity (1) and a degassing membrane (2), wherein the degassing membrane (2) is arranged in the degassing cavity (1);
one end of the degassing membrane (2) is connected with a liquid inlet valve (3), and the other end of the degassing membrane (2) is connected with a liquid outlet valve (4);
the degassing cavity (1) is connected with a vacuum tube (5).
2. The degasser of claim 1, wherein: the degassing chamber (1) is connected with a leakage sensor (6), and the leakage sensor (6) is used for detecting whether the liquid precursor leaks in the degassing chamber (1).
3. The degasser of claim 1, wherein: degassing membrane (2) include coil pipe (21) more than two, feed liquor valve (3) and play liquid valve (4) are the two-way valve, the one end of coil pipe (21) respectively with the exit linkage of feed liquor valve (3), the other end of coil pipe (21) respectively with go out the access connection of liquid valve (4).
4. A liquid precursor delivery degasser as claimed in claim 3, wherein: the coil pipe (21) is spirally wound.
5. The degasser of claim 1, wherein: degassing chamber (1) includes cavity (11) and two ring flanges (12), the both ends of cavity (11) are all integrative to be provided with blind dish of flange (13), two ring flange (12) respectively with two blind dish of flange (13) laminating, be provided with the sealing washer between ring flange (12) and the blind dish of flange (13), ring flange (12) and blind dish of flange (13) are together fixed through the mounting.
6. The degasser of claim 5, wherein: the fixing piece is a flange lock catch (14), and the flange lock catch (14) is provided with a plurality of parts.
7. The degasser of claim 6, wherein: the vacuum tube (5) is connected with a vacuum degree detector, and the vacuum degree detector is used for detecting the vacuum degree in the cavity (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221454959.9U CN218106826U (en) | 2022-06-09 | 2022-06-09 | Degassing device for liquid precursor conveying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221454959.9U CN218106826U (en) | 2022-06-09 | 2022-06-09 | Degassing device for liquid precursor conveying |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218106826U true CN218106826U (en) | 2022-12-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221454959.9U Active CN218106826U (en) | 2022-06-09 | 2022-06-09 | Degassing device for liquid precursor conveying |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218106826U (en) |
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2022
- 2022-06-09 CN CN202221454959.9U patent/CN218106826U/en active Active
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