CN218101181U

CN218101181U - Environment-friendly silicon polishing piece intelligence cleaning equipment

Info

Publication number: CN218101181U
Application number: CN202220321184.1U
Authority: CN
Inventors: 李长坤; 谢永奕
Original assignee: Guangdong Sifeng Semiconductor Co ltd
Current assignee: Guangdong Sifeng Semiconductor Co ltd
Priority date: 2022-02-17
Filing date: 2022-02-17
Publication date: 2022-12-20
Anticipated expiration: 2032-02-17

Abstract

The utility model relates to a cleaning equipment technical field just discloses an environment-friendly silicon polishing piece intelligence cleaning equipment, comprising a base plate, the top fixed mounting of bottom plate has the support frame, the top fixed mounting of support frame has the lift cylinder. This environment-friendly silicon polished section intelligence cleaning equipment, start through servo motor, drive the rotation of threaded rod, under the threaded connection of set casing and threaded rod, can let servo motor remove, the pulling connecting block removes, make the folding support of shear force can stretch out and draw back, under the connection of column, it removes to drive movable rod and clamp splice, thereby let a plurality of clamp splices can give fixedly to silicon polished section of different batches, adjusting the extension of lift cylinder, let silicon polished section can stretch into in the washing tank, abluent efficiency has been improved, the condition that cleaning efficiency is low that single washing silicon polished section brought has been avoided as far as possible, the problem of being not convenient for carry out fixedly to silicon polished section of different batches has been solved.

Description

Environment-friendly silicon polishing piece intelligence cleaning equipment

Technical Field

The utility model relates to a cleaning equipment technical field specifically is an environment-friendly silicon polishing piece intelligence cleaning equipment.

Background

The polishing sheet is prepared by mixing nano-scale silicon dioxide particles and a high-efficiency adhesive, uniformly coating the mixture on the surface of a polyester film, drying and curing, wherein the original polishing particles are fine and have the granularity smaller than the wavelength of visible light, so that the original polishing particles are uniformly distributed to form a transparent or semitransparent polishing film, the optical polishing sheet belongs to one type of polishing sheets, and is a tool specially used for polishing optical lenses, and the optical polishing sheet needs to be cleaned during production and processing.

When the existing environment-friendly intelligent cleaning equipment for the silicon polished section cleans the silicon polished section, the used cleaning equipment can not fix the silicon polished sections in different batches, but needs one cleaning equipment to fix, so that the cleaning efficiency is low, and the practicability of the cleaning equipment is reduced, thus the environment-friendly intelligent cleaning equipment for the silicon polished section is provided.

SUMMERY OF THE UTILITY MODEL

The utility model provides a not enough to prior art, the utility model provides an environment-friendly silicon polished section intelligence cleaning equipment possesses the advantage that can carry out the fixing to silicon polished section of different batches, has solved and has not been convenient for carry out the problem fixed to silicon polished section of different batches.

In order to realize the above-mentioned purpose that can fix the silicon polished wafer of different batches, the utility model provides a following technical scheme: the utility model provides an environment-friendly silicon polishing piece intelligence cleaning equipment, includes the bottom plate, the top fixed mounting of bottom plate has the support frame, the top fixed mounting of support frame has the lift cylinder, the output fixed mounting of lift cylinder has the set casing, fixed mounting has the dead lever between the left side arm of set casing and the right side wall, the left side fixed mounting of set casing has the mounting bracket, the top of mounting bracket is provided with carries out the fixed establishment of centre gripping to the silicon polishing piece of different batches, fixed establishment includes servo motor, threaded rod, connecting block, the folding support of shear force, spliced pole, movable rod and clamp splice, the top sliding connection of mounting bracket has servo motor, the left wall threaded connection of set casing has the threaded rod, servo motor's output and threaded rod fixed connection, the right side of threaded rod is rotated and is connected with the connecting block, the right side wall of set casing is rotated and is connected with the folding support of shear force, the folding support of shear force rotates with the connecting block and is connected, the back of the folding support of shear force is connected with the spliced pole, the surface sliding connection of dead lever has the movable rod, spliced pole and movable rod sliding connection, the bottom fixed mounting of movable rod has the clamp splice.

Further, the top of bottom plate and the inboard fixed mounting that is located the support frame have the transducer, the top fixed mounting of transducer has the washing tank, the left side fixed mounting of washing tank has the power.

Further, the right side fixed mounting of washing tank has the drain pipe, the surface fixed mounting of drain pipe has the ooff valve.

Furthermore, the equal fixed mounting in top both sides of set casing has the guide bar, the guide bar is with the roof sliding connection of support frame, the top fixed mounting of guide bar has the dog.

Furthermore, the spout has been seted up at the top of mounting bracket, the inner wall sliding connection of spout has the mount pad, and servo motor fixed mounting is at the top of mount pad, the right side wall fixed mounting of set casing has the support of being connected with the folding support rotation of shear force.

Further, the left side fixed mounting of connecting block has the rotating seat of being connected with the threaded rod rotation, the left side of connecting block and the top fixed mounting that is located the rotating seat have with the left wall sliding connection's of set casing gag lever post.

Furthermore, the front of the movable rod is provided with a driving hole movably connected with the connecting column, and the left side and the right side of the clamping block are fixedly provided with anti-skidding blocks.

Compared with the prior art, the utility model provides an environment-friendly silicon polished wafer intelligence cleaning equipment possesses following beneficial effect:

this environment-friendly silicon polished section intelligence cleaning equipment, through servo motor, the threaded rod, the connecting block, the folding support of shear force, the spliced pole, the cooperation of movable rod and clamp splice is used, servo motor starts, drive the rotation of threaded rod, under the threaded connection of set casing and threaded rod, can let servo motor remove, the pulling connecting block removes, make the folding support of shear force can stretch out and draw back, under the connection of spliced pole, it controls to remove about drive movable rod and clamp splice, thereby let a plurality of clamp splices can give fixed to different batches of silicon polished section, adjusting the extension of lift cylinder, let silicon polished section can stretch into in the washing tank, abluent efficiency has been improved, the condition that cleaning efficiency is low that single washing silicon polished section brought has been avoided as far as possible, through setting up transducer and washing tank, make the water in the washing tank receive vibrations, thereby give the sanitization to the surface of silicon polished section, the problem of being not convenient for fixing different batches of silicon polished section has been solved.

Drawings

FIG. 1 is a front sectional view of the structure of the present invention;

FIG. 2 is a front view of the movable rod of the present invention;

fig. 3 is an enlarged view of a in the structure diagram 1 of the present invention.

In the figure: the device comprises a base plate 1, a transducer 2, a cleaning tank 3, a power supply 4, a support frame 5, a lifting cylinder 6, a fixed shell 7, a support 8, a shear force folding support 9, a connecting column 10, a fixed rod 11, a movable rod 12, a clamping block 13, a driving hole 14, a mounting frame 15, a sliding groove 16, a mounting seat 17, a servo motor 18, a threaded rod 19 and a connecting block 20.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Referring to fig. 1, an environment-friendly intelligent cleaning device for silicon polished wafers comprises a base plate 1, a transducer 2 is fixedly mounted at the top of the base plate 1 and on the inner side of a support frame 5, a cleaning tank 3 is fixedly mounted at the top of the transducer 2, a power source 4 is fixedly mounted on the left side of the cleaning tank 3, the power source 4 is electrically connected with the transducer 2, a drain pipe is fixedly mounted on the right side of the cleaning tank 3, a switch valve is fixedly mounted on the outer surface of the drain pipe, the switch valve is opened, cleaning liquid in the cleaning tank 3 can be discharged, a support frame 5 is fixedly mounted at the top of the base plate 1, a lifting cylinder 6 is fixedly mounted at the top of the support frame 5, a fixed shell 7 is fixedly mounted at the output end of the lifting cylinder 6, guide rods are fixedly mounted on both sides of the top of the fixed shell 7, the guide rods are slidably connected with the top wall of the support frame 5 and have a guiding function, so that the fixed shell 7 can vertically move up and down, a side arm is fixedly mounted at the top of the guide rods, a fixed rod 11 is fixedly mounted between the left side wall and a right side wall of the fixed shell 7, and a mounting rack 15 is fixedly mounted on the left side of the fixed shell 7.

Please refer to fig. 1-3, a fixing mechanism for clamping different batches of silicon polished wafers is arranged at the top of the mounting frame 15, the fixing mechanism includes a servo motor 18, a threaded rod 19, a connecting block 20, a shear folding support 9, a connecting column 10, a movable rod 12 and a clamping block 13, the top of the mounting frame 15 is slidably connected with the servo motor 18, a chute 16 is formed at the top of the mounting frame 15, an inner wall of the chute 16 is slidably connected with a mounting seat 17, the servo motor 18 is fixedly installed at the top of the mounting seat 17, a power supply 4 is in point connection with the servo motor 18, the chute 16 is arranged, the degree of freedom of the rotation direction of the servo motor 18 can be limited, and therefore the connecting block 20 is driven to move.

Wherein, the left wall threaded connection of set casing 7 has threaded rod 19, servo motor 18's output and 19 fixed connection of threaded rod, threaded rod 19's right side is rotated and is connected with connecting block 20, connecting block 20's left side fixed mounting have with threaded rod 19 rotate the rotating seat of being connected, connecting block 20's left side and the top fixed mounting that is located the rotating seat have with the left wall sliding connection's of set casing 7 gag lever post, the gag lever post can restrict the degree of freedom of connecting block 20 direction of rotation, make connecting block 20 only can remove.

In this embodiment, the right side wall of the fixed casing 7 is rotatably connected with the shear folding support 9, the right side wall of the fixed casing 7 is fixedly provided with the support 8 rotatably connected with the shear folding support 9, the shear folding support 9 is rotatably connected with the connecting block 20, the back of the shear folding support 9 is rotatably connected with the connecting column 10, the outer surface of the fixing rod 11 is slidably connected with the movable rod 12, the shear folding support 9 is provided, when the shear folding support 9 is telescopically folded, the distances between the movable rods 12 are all equal, so that silicon polished wafers of different batches can be clamped and fixed, batch cleaning can be performed, the cleaning efficiency is improved, the connecting column 10 is slidably connected with the movable rods 12, the bottom of the movable rod 12 is fixedly provided with the clamping blocks 13, the left side and the right side of the clamping blocks 13 are fixedly provided with the anti-slip blocks, slip resistance can be realized, the silicon polished wafers are prevented from falling as much as possible, see fig. 2, and the front of the movable rod 12 is provided with the driving hole 14 movably connected with the connecting column 10.

The beneficial effects of the embodiment are as follows:

this environment-friendly silicon polished section intelligence cleaning equipment, through servo motor 18, threaded rod 19, connecting block 20, the folding support of shear force 9, spliced pole 10, movable rod 12 and clamp splice 13's cooperation is used, servo motor 18 starts, drive the rotation of threaded rod 19, under the threaded connection of set casing 7 and threaded rod 19, can let servo motor 18 remove, pulling connecting block 20 removes, make the folding support of shear force 9 can stretch out and draw back, under the connection of spliced pole 10, it controls about removal to drive movable rod 12 and clamp splice 13, thereby let a plurality of clamp splices 13 give fixedly to different batches of silicon polished section, adjusting the extension of lift cylinder 6, let the silicon polished section can stretch into washing tank 3, abluent efficiency has been improved, the low circumstances of cleaning efficiency that single washing silicon polished section brought has been avoided as far as possible, through setting up transducer 2 and washing tank 3, after transducer 2 starts, make the water in washing tank 3 receive vibrations, thereby give the sanitization to the surface of silicon polished section, the problem that is not convenient for fixing different batches of silicon polished section is solved.

The electrical components present in the document are all electrically connected to a main controller and a power supply, the main controller may be a conventional known device for controlling a computer, and the conventional power connection technology disclosed in the prior art is not described herein.

It should be noted that, in this document, relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrases "comprising one of 8230; \8230;" 8230; "does not exclude the presence of additional like elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides an environment-friendly silicon polishing piece intelligence cleaning equipment, includes bottom plate (1), the top fixed mounting of bottom plate (1) has support frame (5), the top fixed mounting of support frame (5) has lift cylinder (6), the output fixed mounting of lift cylinder (6) has set casing (7), fixed mounting has dead lever (11) between the left side arm of set casing (7) and the right side wall, the left side fixed mounting of set casing (7) has mounting bracket (15), its characterized in that: the top of the mounting rack (15) is provided with a fixing mechanism for clamping silicon polishing sheets of different batches;

fixed establishment includes servo motor (18), threaded rod (19), connecting block (20), the folding support of shear force (9), spliced pole (10), movable rod (12) and clamp splice (13), the top sliding connection of mounting bracket (15) has servo motor (18), the left side wall threaded connection of set casing (7) has threaded rod (19), the output and the threaded rod (19) fixed connection of servo motor (18), the right side of threaded rod (19) is rotated and is connected with connecting block (20), the right side wall of set casing (7) is rotated and is connected with the folding support of shear force (9), the folding support of shear force (9) rotates with connecting block (20) and is connected, the back rotation of the folding support of shear force (9) is connected with spliced pole (10), the surface sliding connection of dead lever (11) has movable rod (12), spliced pole (10) and movable rod (12) sliding connection, the bottom fixed mounting of movable rod (12) has clamp splice (13).

2. The intelligent cleaning equipment for the environment-friendly silicon polished wafers as claimed in claim 1, wherein: the top of bottom plate (1) and the inboard fixed mounting that is located support frame (5) have transducer (2), the top fixed mounting of transducer (2) has washing tank (3), the left side fixed mounting of washing tank (3) has power (4).

3. The environment-friendly intelligent cleaning equipment for silicon polishing sheets as recited in claim 2, wherein: the right side fixed mounting of washing tank (3) has the drain pipe, the surface fixed mounting of drain pipe has the ooff valve.

4. The intelligent cleaning equipment for the environment-friendly silicon polished wafers as claimed in claim 1, wherein: the guide rod is fixedly mounted on two sides of the top of the fixed shell (7), the guide rod is connected with the top wall of the support frame (5) in a sliding mode, and a stop block is fixedly mounted on the top of the guide rod.

5. The environment-friendly intelligent cleaning equipment for silicon polishing sheets as recited in claim 1, wherein: spout (16) have been seted up at the top of mounting bracket (15), the inner wall sliding connection of spout (16) has mount pad (17), and servo motor (18) fixed mounting is at the top of mount pad (17), the right side wall fixed mounting of set casing (7) has support (8) of being connected with shear force folding support (9) rotation.

6. The environment-friendly intelligent cleaning equipment for silicon polishing sheets as recited in claim 1, wherein: the left side fixed mounting of connecting block (20) has the rotating seat of being connected with threaded rod (19) rotation, the top fixed mounting that just is located the rotating seat in the left side of connecting block (20) has the gag lever post with the left wall sliding connection of set casing (7).

7. The intelligent cleaning equipment for the environment-friendly silicon polished wafers as claimed in claim 1, wherein: the front of the movable rod (12) is provided with a driving hole (14) movably connected with the connecting column (10), and the left side and the right side of the clamping block (13) are fixedly provided with anti-skidding blocks.