CN218094030U - Double-freedom vibration isolation device for precision instrument - Google Patents
Double-freedom vibration isolation device for precision instrument Download PDFInfo
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- CN218094030U CN218094030U CN202222210874.2U CN202222210874U CN218094030U CN 218094030 U CN218094030 U CN 218094030U CN 202222210874 U CN202222210874 U CN 202222210874U CN 218094030 U CN218094030 U CN 218094030U
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- 238000002955 isolation Methods 0.000 title claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 16
- 125000006850 spacer group Chemical group 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 5
- 238000005452 bending Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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Abstract
The utility model provides a two degree of freedom vibration isolation devices for precision instruments, including roof, movable block, air spring and base, be connected with the movable block in the middle of the roof, the movable block both sides are the convex, movable block both sides sliding connection gyro wheel, the gyro wheel other end and metal spring are connected, the metal spring other end is connected with the stand, the stand is installed perpendicularly in the base both sides, the movable block bottom is connected with flexible pendulum rod top, flexible pendulum rod bottom and piston connection, the piston is installed at the air spring top, be connected through the air film between piston and the air spring, additional air chamber is still installed at the base top, additional air chamber passes through the intake pipe and is connected with air spring, the roof bottom still is connected with position sensor and speedtransmitter, the controller is still installed at the base top. The utility model discloses can export linear acting force, have better vibration isolation effect to 0.5Hz to 150Hz vibration interference.
Description
Technical Field
The utility model relates to a vibration isolation mounting technical field specifically is a two degree of freedom vibration isolation mounting for precision instruments.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The common vibration isolation system can effectively filter out environmental vibration interference above the natural frequency of the common vibration isolation system, but the suppression effect on the vibration interference near the natural frequency of the common vibration isolation system is weak, and even the phenomenon that the vibration amplitude is amplified due to the resonance phenomenon sometimes occurs. Therefore, in order to obtain better vibration isolation effect of the system in the low frequency band, it is generally adopted to reduce the rigidity thereof, thereby avoiding resonance at certain frequencies. But the contradiction of the reduction of the bearing capacity occurs. In order to solve the contradiction, a system with a negative stiffness device and a positive stiffness element connected in parallel is provided, so that the bearing capacity of the system is ensured, and the natural frequency of the system is reduced. However, the device has the problems of non-linear negative rigidity and poor positioning accuracy of the system.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a two degree of freedom vibration isolation mounting for precision instruments to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized like this:
the utility model provides a two degree of freedom vibration isolation devices for precision instruments, includes roof, movable block, air spring and base, be connected with the movable block in the middle of the roof, the movable block both sides are the convex, movable block both sides sliding connection gyro wheel, the gyro wheel other end and metal spring connection, the metal spring other end is connected with the stand, the stand is installed perpendicularly in the base both sides, the movable block bottom is connected with flexible pendulum rod top, flexible pendulum rod bottom and piston connection, the piston is installed at the air spring top, be connected through the gas film between piston and the air spring, additional air chamber is still installed at the base top, additional air chamber passes through the intake pipe and is connected with air spring, the roof bottom still is connected with position sensor and speedtransmitter, the controller is still installed at the base top.
Furthermore, a rubber cushion block is further arranged between the moving block and the top plate.
Further, the air spring is mounted in the middle of the top of the base.
Further, a pneumatic valve is mounted on the air inlet pipe.
Further, the metal spring is a pre-compressed spring.
Further, the controller is connected with the additional air chamber, the position sensor and the speed sensor through cables.
The utility model has the advantages that:
the utility model forms a series structure with the air spring through the moving block, the flexible swing rod and the moving block in the vertical direction, when vertical vibration occurs, the moving block moves up and down, the metal spring pushes the roller to move horizontally, the horizontal force of the roller acting on the moving block is self-balanced, the rigidity of the flexible swing rod in the vertical direction is high, the air spring pushes the piston and then acts on the flexible swing rod to move in the vertical direction, and the whole forming body has a linear negative rigidity effect, thereby keeping the position stability of the whole system and improving the positioning accuracy; the flexible swing rod can generate bending deformation in the direction perpendicular to the rod, and meanwhile, the horizontal passive vibration isolation can be realized by combining the metal spring. The utility model discloses simple structure can export linear acting force, and the vibration isolation bandwidth has better vibration isolation effect to 0.5Hz-150Hz vibration interference, and can realize the level to with the vertical vibration isolation to two degrees of freedom, application scope is wider.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the figure, 1-a top plate, 2-a moving block, 3-an air spring, 4-a base, 5-a roller, 6-a metal spring, 7-a vertical column, 8-a rubber cushion block, 9-a flexible swing rod, 10-a piston, 11-an air film, 12-an additional air chamber, 13-an air inlet pipe, 14-a pneumatic valve, 15-a position sensor, 16-a speed sensor and 17-a controller.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1, the two-degree-of-freedom vibration isolation device for the precision instrument comprises a top plate 1, a moving block 2, an air spring 3 and a base 4, wherein the middle of the top plate 1 is connected with the moving block 2, two sides of the moving block 2 are convex, two sides of the moving block 2 are slidably connected with idler wheels 5, the other ends of the idler wheels 5 are connected with metal springs 6, the other ends of the metal springs 6 are connected with upright columns 7, the upright columns 7 are vertically installed on two sides of the base 3, the bottom of the moving block 2 is connected with the top of a flexible oscillating bar 9, the bottom of the flexible oscillating bar 9 is connected with a piston 10, the piston 10 is installed on the top of the air spring 3, the piston 10 is connected with the air spring 3 through an air film 11, an additional air chamber 12 is further installed on the top of the base 4, the additional air chamber 12 is connected with the air spring 3 through an air inlet pipe 13, the bottom of the top plate 1 is further connected with a position sensor 15 and a speed sensor 16, and the top of the base 4 is further provided with a controller 17.
And a rubber cushion block 8 is also arranged between the moving block 2 and the top plate 1.
The air spring 3 is arranged in the middle of the top of the base 4.
An air-operated valve 14 is mounted on the air intake pipe 13.
The metal spring 6 is a pre-compressed spring.
The controller 17 is connected with the additional air chamber 12, the position sensor 15 and the speed sensor 16 through cables, the position sensor 15 and the speed sensor 16 collect vibration signals and transmit the vibration signals to the controller 17, the controller 17 controls the additional air chamber 12 to inflate and deflate the air spring 3 to enable the piston 10 to move up and down, then the flexible swing rod 9 is pushed to move up and down, and the moving block 2 is driven to move up and down through the movement of the flexible swing rod 9, so that vertical vibration isolation is achieved.
When the device works, a precision instrument is placed on the top plate 1, vertical vibration signals are acquired through the position sensor 15 and the speed sensor 16 and then transmitted to the controller 17, the controller 17 controls the additional air chamber 12 to inflate and deflate the air spring 3 to realize the up-and-down movement of the piston 10, so as to further push the flexible swing rod 9 to move up and down, and the movement of the flexible swing rod 9 can drive the moving block 2 to move up and down to realize vertical vibration isolation; meanwhile, when the moving block 2 moves up and down, the metal spring 6 can push the roller 5 to move horizontally, the horizontal force of the roller 5 acting on the moving block 2 is balanced by itself, and a linear negative stiffness effect is integrally formed, so that the position stability of the whole system is kept, and the positioning accuracy is improved.
When vibrating in the horizontal direction, the flexible swing rod 9 can generate bending deformation in the direction vertical to the rod, and meanwhile, the metal spring 6 is combined, so that the passive vibration isolation in the horizontal direction can be realized.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides a two degree of freedom vibration isolation devices for precision instruments, includes roof, movable block, air spring and base, its characterized in that, be connected with the movable block in the middle of the roof, the movable block both sides are the convex, movable block both sides sliding connection gyro wheel, the gyro wheel other end is connected with metal spring, the metal spring other end is connected with the stand, the stand is installed perpendicularly in the base both sides, the movable block bottom is connected with flexible pendulum rod top, flexible pendulum rod bottom and piston connection, the piston is installed at the air spring top, be connected through the air film between piston and the air spring, additional air chamber is still installed at the base top, additional air chamber passes through the intake pipe and is connected with air spring, the roof bottom still is connected with position sensor and speedtransmitter, the controller is still installed at the base top.
2. The two-degree-of-freedom vibration isolation device for the precision instrument as claimed in claim 1, wherein a rubber spacer is further installed between the moving block and the top plate.
3. A two degree of freedom vibration isolation mounting for a precision instrument as claimed in claim 1 wherein said air spring is mounted intermediate the top of the base.
4. The two-degree-of-freedom vibration isolation apparatus for a precision instrument as claimed in claim 1, wherein a pneumatic valve is installed on the air intake pipe.
5. The two-degree-of-freedom vibration isolation apparatus for a precision instrument of claim 1, wherein the metal spring is a pre-compressed spring.
6. The two-degree-of-freedom vibration isolation apparatus for a precision instrument as claimed in claim 1, wherein the controller is connected to the additional air chamber, the position sensor and the velocity sensor through cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222210874.2U CN218094030U (en) | 2022-08-23 | 2022-08-23 | Double-freedom vibration isolation device for precision instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222210874.2U CN218094030U (en) | 2022-08-23 | 2022-08-23 | Double-freedom vibration isolation device for precision instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218094030U true CN218094030U (en) | 2022-12-20 |
Family
ID=84447983
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222210874.2U Active CN218094030U (en) | 2022-08-23 | 2022-08-23 | Double-freedom vibration isolation device for precision instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218094030U (en) |
-
2022
- 2022-08-23 CN CN202222210874.2U patent/CN218094030U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230601 Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Electronic Engineering Technology Co.,Ltd. Address before: 116000 16 Zhenxing street, Haiwan Industrial Zone, Pulandian District, Dalian, Liaoning Province Patentee before: DALIAN DEETOP HEAVY INDUSTRY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |