CN218089218U - Ultrapure water purification system - Google Patents

Ultrapure water purification system Download PDF

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Publication number
CN218089218U
CN218089218U CN202220338058.7U CN202220338058U CN218089218U CN 218089218 U CN218089218 U CN 218089218U CN 202220338058 U CN202220338058 U CN 202220338058U CN 218089218 U CN218089218 U CN 218089218U
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filter
reverse osmosis
ultrapure water
water tank
edi
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袁曙光
万荣群
刘书琴
沈娟
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Shenzhen Hengtongyuan Environmental Protection and Energy Conservation Technology Co.,Ltd.
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Shenzhen Headwater Environmental Technologies Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A20/00Water conservation; Efficient water supply; Efficient water use
    • Y02A20/124Water desalination
    • Y02A20/131Reverse-osmosis

Abstract

The embodiment of the utility model discloses ultrapure water purification system relates to aqueous cleaning technical field. In the ultrapure water purification system, the raw water tank is connected with the front end filtration system, the front end filtration system is connected with the reverse osmosis system, the reverse osmosis system is connected with the EDI system, the EDI system is connected with the ultrapure water tank, and the ultrapure water tank is connected with the terminal filtration system. The front end filtration system is mainly used for filtering particle impurities in raw water. The reverse osmosis system is mainly used for removing ions in water. The EDI system is used for further removing ions in the water to enable the water to meet the requirements of ultrapure water. The ultrapure water tank is used for storing ultrapure water. The terminal filtering system is used for being connected with a water consumption point, and possible impurities introduced in the storage process can be removed through further filtering before use, so that the water quality can meet the requirement. Therefore, through the utility model provides an ultrapure water purification system can purify the running water into ultrapure water to satisfy the demand of people to ultrapure water.

Description

Ultrapure water purification system
Technical Field
The utility model relates to a water purification technology field especially relates to an ultrapure water purification system.
Background
The municipal tap water has the conductivity of less than or equal to 400 mu s/cm, and the water quality of the municipal tap water generally meets the requirements of GB 5749-2006 sanitary Standard for Drinking Water. Municipal tap water is a common water source used by people today.
In some industrial settings, however, higher purity water sources are required and municipal tap water is not satisfactory.
Therefore, how to prepare ultrapure water through municipal tap water becomes a technical problem to be solved urgently in the field.
SUMMERY OF THE UTILITY MODEL
The embodiment of the utility model provides a technical problem that will solve is how to prepare ultrapure water through municipal tap water.
In order to solve the above problems, an embodiment of the present invention provides an ultrapure water purification system, which includes a raw water tank, a front-end filtration system, a reverse osmosis system, an EDI system, an ultrapure water tank, and a terminal filtration system; the raw water tank is connected with the front-end filtering system, the front-end filtering system is connected with the reverse osmosis system, the reverse osmosis system is connected with the EDI system, the EDI system is connected with the ultrapure water tank, and the ultrapure water tank is connected with the terminal filtering system.
The front-end filtering system comprises a first plate heat exchanger, a multi-medium filter, an activated carbon filter and a security filter; the first plate heat exchanger is connected with the multi-medium filter, the multi-medium filter is connected with the activated carbon filter, and the activated carbon filter is connected with the cartridge filter.
The front end filtering system also comprises a first dosing system, a second dosing system and a third dosing system; the first dosing system is connected with the multi-media filter, the second dosing system is connected with the activated carbon filter, and the third dosing system is connected with the cartridge filter.
The front-end filtering system also comprises a backwashing pump and a raw water pump; the raw water pump is respectively connected with the raw water tank and the first plate heat exchanger; the backwashing pump is respectively connected with the raw water tank, the multi-media filter and the activated carbon filter.
The reverse osmosis system comprises a primary reverse osmosis device, a primary RO water tank, a secondary reverse osmosis device and a secondary RO water tank, wherein the primary reverse osmosis device is respectively connected with a security filter and the primary RO water tank, the primary RO water tank is connected with the secondary reverse osmosis device, and the secondary reverse osmosis device is connected with the secondary RO water tank.
The reverse osmosis system further comprises a first high-pressure pump and a second high-pressure pump, wherein the first high-pressure pump is respectively connected with the cartridge filter and the first-stage reverse osmosis device, and the second high-pressure pump is respectively connected with the first-stage RO water tank and the second-stage reverse osmosis device.
The further technical proposal is that the reverse osmosis system also comprises a fourth dosing system which is connected with the second-level reverse osmosis device.
The further technical scheme is that the EDI system comprises an EDI water supply pump, an ultraviolet sterilizer, a precision filter and an EDI device; EDI feed pump is connected with second grade RO water tank and ultraviolet sterilizer respectively, and ultraviolet sterilizer is connected with the precision filter, and the precision filter is connected with the EDI device, and the EDI device is connected with super pure water tank.
The further technical scheme is that the terminal filtering system comprises a pure water booster pump, a second plate heat exchanger, a TOC remover, a polishing mixing bed, an ultra-pure water pump, a first terminal filter and a second terminal filter; the pure water booster pump is respectively connected with the ultrapure water tank and the second plate heat exchanger, the second plate heat exchanger is connected with the TOC remover, the TOC remover is connected with the polishing mixed bed, the polishing mixed bed is connected with the ultrapure water pump, the ultrapure water pump is connected with the first terminal filter, and the first terminal filter is connected with the second terminal filter.
The technical scheme is that the ultrapure water purification system further comprises a PLC (programmable logic controller) and an industrial personal computer, the PLC is respectively connected with the front-end filtration system, the reverse osmosis system, the EDI (electronic data interchange) system and the terminal filtration system, and the industrial personal computer is connected with the PLC.
Compared with the prior art, the embodiment of the utility model provides a technical effect that can reach includes:
the raw water tank is a water tank for storing raw water (tap water) to be treated. The front end filtration system is mainly used for filtering particle impurities in raw water. Reverse osmosis systems are used primarily to remove ions from water. The EDI system is used for further removing ions in water to enable the water to meet the requirements of ultrapure water. The ultrapure water tank is used for storing ultrapure water. The terminal filtering system is used for being connected with a water consumption point, and possible impurities introduced in the storage process can be removed through further filtering before use, so that the water quality can meet the requirement. Therefore, through the utility model provides an ultrapure water purification system can purify the running water into ultrapure water to satisfy the demand of people to ultrapure water.
Drawings
In order to more clearly illustrate the technical solution of the embodiments of the present invention, the drawings required to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the description below are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic view of an ultrapure water purification system according to the present invention;
fig. 2 is a block diagram of an ultrapure water purification system according to the present invention.
Reference numerals
The system comprises a raw water tank 10, a front-end filtration system 20, a reverse osmosis system 30, an EDI system 40, an ultrapure water tank 50, a terminal filtration system 60, a PLC controller 70, an industrial personal computer 80, a first plate heat exchanger 21, a multimedia filter 22, an activated carbon filter 23, a security filter 24, a first dosing system 25, a second dosing system 26, a third dosing system 27, a backwashing pump 28, a raw water pump 29, a primary reverse osmosis device 31, a primary RO water tank 32, a secondary reverse osmosis device 33, a secondary RO water tank 34, a first high-pressure pump 35, a second high-pressure pump 36, a fourth dosing system 37, an EDI water supply pump 41, an ultraviolet sterilizer 42, a precision filter 43, an EDI device 44, a pure water booster pump 61, a second plate heat exchanger 62, a TOC remover 63, a polishing mixer bed 64, an ultrapure water pump 65, a first terminal filter 66, a second terminal filter 67 and a water using device 68.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, wherein like component numbers represent like components. It is obvious that the embodiments to be described below are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It will be understood that the terms "comprises" and/or "comprising," when used in this specification and the appended claims, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
It is also to be understood that the terminology used in the description of the embodiments of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the embodiments of the invention. As used in the description of the embodiments of the present invention and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.
Referring to fig. 1-2, the present invention provides an ultrapure water purification system, which comprises a raw water tank 10, a front-end filtration system 20, a reverse osmosis system 30, an EDI system 40, an ultrapure water tank 50 and a terminal filtration system 60. The specific introduction of each part is as follows:
the raw water tank 10 is connected with the front-end filtration system 20, the front-end filtration system 20 is connected with the reverse osmosis system 30, the reverse osmosis system 30 is connected with the EDI system 40, the EDI system 40 is connected with the ultrapure water tank 50, and the ultrapure water tank 50 is connected with the terminal filtration system 60.
The raw water tank 10 is a tank for storing raw water (tap water) to be treated. The front end filter system 20 is primarily used to filter particulate impurities in raw water. The reverse osmosis system 30 is primarily used to remove ions from water. The EDI system 40 is used for further removing ions in the water to make the water meet the requirement of ultrapure water. The ultrapure water tank 50 is used for storing ultrapure water. The terminal filtration system 60 is used in conjunction with a water point to further filter and remove possible impurities introduced during storage prior to use, ensuring that the water quality is satisfactory. Therefore, through the utility model provides an ultrapure water purification system can purify the running water into ultrapure water to satisfy the demand of people to ultrapure water.
Further, in certain embodiments, such as the present embodiment, the front end filtration system 20 includes a first plate heat exchanger 21, a multimedia filter 22, an activated carbon filter 23, and a cartridge filter 24; the first plate heat exchanger 21 is connected to a multimedia filter 22, the multimedia filter 22 is connected to an activated carbon filter 23, and the activated carbon filter 23 is connected to a canister filter 24.
The first plate heat exchanger 21 is used to regulate the water temperature. Particulate impurities in the water can be filtered by the multimedia filter 22, the activated carbon filter 23 and the cartridge filter 24.
After passing through the front end filtration system 20, the water quality can meet the following requirements.
Figure BDA0003509944240000041
Figure BDA0003509944240000051
Further, the front end filtration system 20 further comprises a first dosing system 25, a second dosing system 26 and a third dosing system 27; the first dosing system 25 is connected with the multimedia filter 22, the second dosing system 26 is connected with the activated carbon filter 23, and the third dosing system 27 is connected with the cartridge filter 24.
The first dosing system 25 is used to add a flocculating agent and a biocide to the water. Second dosing system 26 is used to add a reducing agent to the water. The third dosing system 27 is used to add scale inhibitors to the water.
Further, the front-end filtration system 20 further includes a backwash pump 28 and a raw water pump 29; the raw water pump 29 is respectively connected with the raw water tank 10 and the first plate heat exchanger 21; the backwash pump 28 is connected to the raw water tank 10, the multimedia filter 22, and the activated carbon filter 23.
The raw water pump 29 is used to feed raw water to the multimedia filter 22. The backwash pump 28 is used to supply water for cleaning the filter element to the multimedia filter 22 and the activated carbon filter 23.
Further, the reverse osmosis system 30 comprises a first reverse osmosis device 31, a first RO water tank 32, a second reverse osmosis device 33 and a second RO water tank 34, wherein the first reverse osmosis device 31 is connected with the cartridge filter 24 and the first RO water tank 32, the first RO water tank 32 is connected with the second reverse osmosis device 33, and the second reverse osmosis device 33 is connected with the second RO water tank 34. The total two-stage reverse osmosis device is adopted, and the ion removal effect is good.
After passing through the first-stage reverse osmosis device 31, the following requirements can be met:
Figure BDA0003509944240000052
after passing through the secondary reverse osmosis device 33, the following requirements can be met:
Figure BDA0003509944240000053
further, the reverse osmosis system 30 further comprises a first high pressure pump 35 and a second high pressure pump 36, the first high pressure pump 35 is connected to the cartridge filter 24 and the first-stage reverse osmosis device 31, respectively, and the second high pressure pump 36 is connected to the first-stage RO water tank 32 and the second-stage reverse osmosis device 33, respectively.
The first high pressure pump 35 is used to deliver water to the primary reverse osmosis unit 31. The second high pressure pump 36 is used to deliver water to the secondary reverse osmosis device 33.
Further, the reverse osmosis system 30 further comprises a fourth dosing system 37, and the fourth dosing system 37 is connected with the second-stage reverse osmosis device 33. A fourth dosing system 37 is used to add sodium hydroxide to the water.
Further, the EDI system 40 includes an EDI water supply pump 41, an ultraviolet sterilizer 42, a precision filter 43, and an EDI device 44; the EDI water supply pump 41 is connected to the two-stage RO water tank 34 and the ultraviolet sterilizer 42, respectively, the ultraviolet sterilizer 42 is connected to the ultrafilter 43, the ultrafilter 43 is connected to the EDI device 44, and the EDI device 44 is connected to the ultrapure water tank 50. The EDI water supply pump 41 is used to supply water to the ultraviolet sterilizer 42. The ultraviolet sterilizer 42 is used for sterilization. The precision filter 43 is used for precision filtration. The EDI device 44 is used to further remove ions.
After passing through the EDI device 44, the following requirements can be met:
Figure BDA0003509944240000061
further, the end filtration system 60 includes a pure water booster pump 61, a second plate heat exchanger 62, a TOC remover 63, a polishing mixed bed 64, an ultrapure water pump 65, a first end filter 66, and a second end filter 67; the pure water booster pump 61 is respectively connected with the ultrapure water tank 50 and the second plate heat exchanger 62, the second plate heat exchanger 62 is connected with the TOC remover 63, the TOC remover 63 is connected with the polishing mixed bed 64, the polishing mixed bed 64 is connected with the ultrapure water pump 65, the ultrapure water pump 65 is connected with the first terminal filter 66, and the first terminal filter 66 is connected with the second terminal filter 67.
The pure water booster pump 61 is used to deliver water to the second plate heat exchanger 62. The second plate heat exchanger 62 is used to regulate the water temperature. The TOC remover 63 is used to kill bacteria, viruses, yeasts, molds and algae in the water. The polishing mixed bed 64 is used for ensuring that the water quality of the ultrapure water reaches the standard. An ultrapure water pump 65 is used to deliver water to a delivery first end filter 66. The first and second end filters 66 and 67 are used to further purify the water. The second end filter 67 serves to feed water to the water usage device 68.
After passing through the EDI device 44, the following requirements can be met:
resistivity: 18 M.OMEGA.cm (25 ℃ C.)
Force is exerted: not less than 10.4m 3 H (with 30% circulation)
Further, the ultrapure water purification system further comprises a PLC (programmable logic controller) 70 and an industrial personal computer 80, wherein the PLC 70 is respectively connected with the front-end filtration system 20, the reverse osmosis system 30, the EDI system 40 and the terminal filtration system 60, and the industrial personal computer 80 is connected with the PLC 70.
Specifically, the PLC controller 70 is connected to all the electronic control devices in the front-end filtration system 20, the reverse osmosis system 30, the EDI system 40, and the terminal filtration system 60, respectively, to implement centralized control.
The industrial personal computer 80 is connected with the PLC controller 70 through a communication bus. The user realizes centralized control through the industrial personal computer 80.
In order to better explain the technical proposal of the utility model, the ultrapure water purification system provided by the utility model is further explained below.
Process flow
The whole ultrapure water purification system can achieve the automatic operation capability after being debugged normally, and provides the functions of fault and abnormity alarming and self-monitoring. The pure water system starts from a raw water tank water inlet pipe and ends at a position 1m away from a terminal filter water outlet pipe. Including all process equipment and connecting piping, valves, plumbing within the boundary, as well as instrumentation and control systems, electrical systems for the process equipment.
Main equipment technological process
Municipal tap water → raw water tank → raw water pump → multimedia filter → activated carbon filter → scale inhibitor → cartridge filter → first-stage high-pressure pump → first-stage reverse osmosis device → first-stage RO water tank → PH adjustment → second-stage high-pressure pump → second-stage reverse osmosis device → second-stage RO water tank → EDI water supply pump → ultraviolet sterilizer → ultrafilter → EDI device → ultrapure water tank → ultrapure water pump → TOC remover → polishing mixed bed → terminal filter → water consumption point.
Cleaning process of chemical cleaning equipment
Cleaning water tank → cleaning pump → cleaning filter → RO/EDI
Description of the control System
The pretreatment part, the reverse osmosis part and the EDI part of the whole system run automatically and are controlled by the control system in the whole process. Under the condition of normal operation of the equipment, the automatic operation level can be achieved, and meanwhile, the functions of manual operation and manual control can also be realized. The logic principle of interlocking control is adopted for each control point in the system, and the operation or the stop of the single equipment or the single action point is monitored by a plurality of parts to ensure the stability of the system.
Reverse osmosis system control
The system adopts an electric cabinet to complete control. The operation or standby of the reverse osmosis device is mainly realized by controlling the starting or stopping of the high-pressure pump, and the starting or stopping of the high-pressure pump is determined by the liquid level change of the water tank. In the system, the operation of the reverse osmosis device can be controlled by the liquid level change of the water tank.
Conversely, when the liquid level in the water tank goes from high to low, the reverse osmosis is put into operation in reverse order at the same time. By adopting the control mode, not only can the water be saved, but also the cost can be saved, because the running cost of the reverse osmosis is mainly from the power consumption of the high-pressure pump.
Control of EDI system
The EDI system is designed as an automatic control system and is automatically controlled by a PLC, and meanwhile, semi-automatic and manual operation, debugging and maintenance can be carried out on the equipment.
EDI systems are relatively expensive devices in the system, and therefore, need to be relatively comprehensive and safe in terms of automation and system configuration. The water pump and the power supply are connected with pressure and flow signals of all parts together to complete the operation of the EDI system together, so that when a problem occurs in a certain link, the system can alarm and stop in time, and the damage to the system, which cannot be repaired, is prevented.
Aiming at protecting the convenient chain, the main performance is as follows:
when the power supply fails, the operation and the alarm are stopped, and a single power supply is adopted by a single membrane block;
when the flow of the concentrated water is low, the operation is stopped and the alarm is given;
when the discharge amount of the concentrated water is low, the operation is stopped and the alarm is given;
when the resistivity of the pure water is low, alarming is carried out, and produced water is discharged or backflow is carried out; (configuration according to actual conditions)
When the water inlet conductivity is high, alarming is carried out, and produced water is discharged or reflows; (configuration according to actual conditions)
Total control requirement of system
Control function
(1) The control system adopts a Programmable Logic Controller (PLC) to carry out data acquisition and system control, and the power supply adopts the same-grade product. The control system can perform centralized monitoring, management and automatic program control on the whole process system. The steps of the whole system are automatically carried out by a PLC program. The whole set of process requires centralized monitoring in an industrial personal computer.
The whole set of control system is divided into local control and remote control. The local control can realize the local control and automatic control of the equipment. The industrial control machine can realize the full-automatic control of the equipment and has the functions of manual operation, automatic operation, stepping, jumping, stepping and the like. The industrial personal computer can realize the functions of forcing the process control logic quantity, modifying the time constant on line and automatically reporting.
The system is divided into two layers: control center, on-the-spot various instruments and controls.
(2) The pump and pneumatic valve are remotely controlled at the operation station of the water treatment control room, and are provided with local control switches. For pneumatic valves, control can be performed on a solenoid valve box on site, and the necessary interlocking can be maintained manually, but remote/local switching is realized in the PLC. The solenoid valves on each process tank or tank are placed in an in-situ solenoid valve box, on which a simulated flow chart of the plant is plotted, the operating switches of the solenoid valves being arranged in phase with the one shown in the flow chart.
Control requirements
(1) The fault alarm of the system and the running state and process parameters of some important equipment are fed into the control system.
(2) The control system adopts a control mode combining automatic program control, remote manual operation and local operation. The program control must be provided with means such as stepping operation, grouping operation or individual operation, and has operation functions such as jumping, interruption or bypass, and necessary step time and state indication, selection and locking functions.
(3) The pump is remote controlled in the water treatment control room; the pneumatic valve can be controlled by a button on the electromagnetic valve box. The necessary interlocks are controlled locally and the remote/local switching is done within the PLC.
(4) The control of the water pump is interlocked by the level of the liquid level of the water tank.
(5) All the devices such as measuring elements, valves, logic switches, transmitters, local instruments and the like which are in contact with acid and alkali solutions meet the corrosion prevention requirement of phase media.
(6) The tank and pool for storing liquid have liquid level meter and liquid level switch or remote transmission continuous liquid level transducer. The liquid level signal of the water tank is required to be displayed in the industrial personal computer.
In the above embodiments, the descriptions of the respective embodiments have respective emphasis, and for parts that are not described in detail in a certain embodiment, reference may be made to related descriptions of other embodiments.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "secured" are to be construed broadly and can, for example, be connected or detachably connected or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature "on," "above" and "over" the second feature may include the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above should not be understood to necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples described in this specification can be combined and combined by one skilled in the art.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, while the present invention has been described with respect to the above-described embodiments, it will be apparent to those skilled in the art that various changes and modifications can be made herein without departing from the scope of the invention.
The above description is for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of various equivalent modifications or replacements within the technical scope of the present invention, and these modifications or replacements should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (7)

1. An ultrapure water purification system is characterized by comprising a raw water tank, a front-end filtration system, a reverse osmosis system, an EDI system, an ultrapure water tank and a terminal filtration system; the raw water tank is connected with the front-end filtering system, the front-end filtering system is connected with the reverse osmosis system, the reverse osmosis system is connected with the EDI system, the EDI system is connected with the ultrapure water tank, and the ultrapure water tank is connected with the terminal filtering system;
the front-end filtering system comprises a first plate heat exchanger, a multi-media filter, an activated carbon filter and a cartridge filter; the first plate heat exchanger is connected with a multi-medium filter, the multi-medium filter is connected with an activated carbon filter, and the activated carbon filter is connected with a security filter;
the front-end filtering system also comprises a first dosing system, a second dosing system and a third dosing system; the first dosing system is connected with the multi-medium filter, the second dosing system is connected with the activated carbon filter, and the third dosing system is connected with the security filter;
the front-end filtering system also comprises a backwashing pump and a raw water pump; the raw water pump is respectively connected with the raw water tank and the first plate heat exchanger; the backwashing pump is respectively connected with the raw water tank, the multi-media filter and the activated carbon filter.
2. The ultrapure water purification system of claim 1 wherein the reverse osmosis system comprises a primary reverse osmosis unit, a primary RO water tank, a secondary reverse osmosis unit and a secondary RO water tank, the primary reverse osmosis unit being connected to the cartridge filter and the primary RO water tank, respectively, the primary RO water tank being connected to the secondary reverse osmosis unit, the secondary reverse osmosis unit being connected to the secondary RO water tank.
3. The ultrapure water purification system of claim 2, wherein the reverse osmosis system further comprises a first high pressure pump and a second high pressure pump, the first high pressure pump being connected to the cartridge filter and the primary reverse osmosis unit, respectively, and the second high pressure pump being connected to the primary RO water tank and the secondary reverse osmosis unit, respectively.
4. The ultrapure water purification system of claim 3, wherein the reverse osmosis system further comprises a fourth dosing system, the fourth dosing system being connected to the secondary reverse osmosis device.
5. The ultrapure water purification system of claim 4, wherein the EDI system comprises an EDI water supply pump, an ultraviolet sterilizer, a precision filter and an EDI device; EDI feed pump is connected with second grade RO water tank and ultraviolet sterilizer respectively, and ultraviolet sterilizer is connected with the precision filter, and the precision filter is connected with the EDI device, and the EDI device is connected with super pure water tank.
6. The ultrapure water purification system as recited in claim 5 wherein the end filter system comprises a pure water booster pump, a second plate heat exchanger, a TOC remover, a polishing mixer bed, an ultrapure water pump, a first end filter and a second end filter; the pure water booster pump is respectively connected with the ultrapure water tank and the second plate heat exchanger, the second plate heat exchanger is connected with the TOC remover, the TOC remover is connected with the polishing mixed bed, the polishing mixed bed is connected with the ultrapure water pump, the ultrapure water pump is connected with the first terminal filter, and the first terminal filter is connected with the second terminal filter.
7. The ultrapure water purification system of any one of claims 1-6, wherein the ultrapure water purification system further comprises a PLC controller and an industrial personal computer, the PLC controller is connected with the front-end filtration system, the reverse osmosis system, the EDI system and the terminal filtration system respectively, and the industrial personal computer is connected with the PLC controller.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116119880A (en) * 2023-03-06 2023-05-16 上海传芯半导体有限公司 Parallel feedback water purification system and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116119880A (en) * 2023-03-06 2023-05-16 上海传芯半导体有限公司 Parallel feedback water purification system and method

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