CN218026334U

CN218026334U - Manipulator and continuous large-scale deposition equipment for graphene film

Info

Publication number: CN218026334U
Application number: CN202123197176.5U
Authority: CN
Inventors: 谢实洋
Original assignee: Beijing Technol Science Co ltd
Current assignee: Beijing Technol Science Co ltd
Priority date: 2021-12-18
Filing date: 2021-12-18
Publication date: 2022-12-13
Anticipated expiration: 2031-12-18

Abstract

The application relates to a manipulator and graphene film continuous large-scale deposition equipment, which comprises a sample chamber, a deposition chamber, a cooling chamber and the manipulator, wherein the sample chamber, the deposition chamber, the cooling chamber and the manipulator are sequentially arranged; the manipulator comprises a driving device, a screw rod and a push rod; one end of the screw rod is installed on the driving device, the other end of the screw rod extends horizontally, and the push rod is installed on the screw rod in a sliding mode along the length direction of the screw rod; and a trolley is arranged in the sampling chamber, and the manipulator pushes the trolley to the cooling chamber from the sampling chamber. The application has the effects of protecting the service life of the deposition chamber from being damaged and saving energy.

Description

Manipulator and continuous large-scale deposition equipment for graphene film

Technical Field

The application relates to the field of graphene deposition, in particular to a manipulator and graphene film continuous large-scale deposition equipment.

Background

Graphene (Graphene) is a new material formed by tightly stacking sp hybridized and connected carbon atoms into a single-layer two-dimensional honeycomb lattice structure, and a common powder production method of Graphene is Chemical Vapor Deposition (CVD). Chemical Vapor Deposition (CVD), which refers to a process in which chemical gases or vapors react to synthesize coatings or nanomaterials on the surface of a substrate, is the most widely used technique in the semiconductor industry for depositing a variety of materials, including a wide range of insulating materials, most metallic materials and metal alloy materials.

At present, graphite alkene sedimentation furnace is periodic deposit, and the sedimentation furnace need heat up to the deposition temperature, and the sample can only be sampled to the room temperature along with the furnace cooling after the deposit, when carrying out the next deposit, heaies up again, cools down, and the furnace body is heated up and down the temperature fast for a long time and can cause certain damage to the heating system and the temperature control system of furnace body, shortens life, extravagant energy.

In view of the above-mentioned related art, the inventors consider that there is a defect that the conventional graphene deposition apparatus is a periodic deposition, which results in a shortened service life of the deposition apparatus.

SUMMERY OF THE UTILITY MODEL

In order to improve the technical problem that the service life of deposition equipment is shortened because the existing graphene deposition equipment is periodic deposition, the application provides a manipulator and graphene film continuous large-scale deposition equipment.

The application provides a manipulator and continuous large-scale deposition equipment of graphite alkene film adopts following technical scheme:

a manipulator comprises a driving device, a screw rod and a push rod; one end of the screw rod is installed on the driving device, the other end of the screw rod extends horizontally, and the push rod is installed on the screw rod in a sliding mode along the length direction of the screw rod.

Through adopting above-mentioned technical scheme, the lead screw rotates under drive arrangement's effect to drive the push rod along the length direction motion of lead screw, make this manipulator convenient to use, and simple structure.

Optionally, the driving device includes a first motor, one end of the screw rod is connected to the first motor, a sliding plate is slidably mounted on the screw rod, and one end of the push rod is mounted on the sliding plate.

Through adopting above-mentioned technical scheme for when the lead screw rotates under the effect of first motor, the sliding plate moves along the length direction of lead screw, thereby drives the push rod and also moves along the length direction of lead screw, makes connection structure simple, the simple operation of push rod and lead screw, simple manufacture.

Optionally, the driving device further includes a second motor, the second motor is fixedly disposed on the sliding plate, the sliding plate is further provided with a driving wheel and a driven wheel, the second motor is connected with the driving wheel, the push rod is connected with the driven wheel, and the driven wheel and the driving wheel are matched with each other.

Through adopting above-mentioned technical scheme for the push rod can carry out the rotation under the effect of second motor, thereby makes things convenient for the push rod to promote.

Optionally, the motor further comprises a base, the first motor is fixedly mounted on the base, a guide rod is further fixedly arranged on the base, a guide hole is formed in the sliding plate, and the guide rod penetrates through the guide hole.

Through adopting above-mentioned technical scheme, the setting up of guide bar makes the sliding plate remove along the length direction of guide bar all the time in sliding and chopping to guarantee that the push rod also moves along the length direction of guide bar, the accuracy of direction of advance when improving the push rod motion.

A continuous large-scale deposition device for a graphene film comprises a sample chamber, a deposition chamber, a cooling chamber and the manipulator of any one of claims 1 to 4, which are arranged in sequence; and a trolley is arranged in the sampling chamber, and the manipulator pushes the trolley to the cooling chamber from the sampling chamber.

Through adopting above-mentioned technical scheme, push the deposit room through the dolly in the manipulator will advance the kind room in, treat the material in the dolly and accomplish the back at the deposit room reaction, drop the temperature in drawing the cooling chamber from the deposit room with the dolly by the manipulator again, make the production process serialization of graphite alkene film from this, avoided graphite alkene only to go up and down the temperature in the deposit room when generating, protected the life of deposit room not receive the breakage, the energy can be saved.

Optionally, the trolley comprises two bearing units, and a plurality of material boxes are arranged in each bearing unit.

Through adopting above-mentioned technical scheme, the magazine is used for placing the material, sets up a plurality of magazines and can generate more graphite alkene films in setting unit interval, realizes the rational utilization in limited space, improves production efficiency.

Optionally, copper powder is arranged at the bottom of the material box.

By adopting the technical scheme, copper powder is used as a substrate, so that the copper-based graphene composite material obtained by growing graphene on the copper powder through a chemical vapor deposition method has high tensile strength, high conductivity and high elongation.

Optionally, a valve device is disposed between the sample chamber and the deposition chamber, and the valve device includes a first valve disposed near the sample chamber and a second valve disposed near the deposition chamber.

By adopting the technical scheme, the sampling chamber and the deposition chamber are isolated by the arrangement of the valve device, and high-temperature isolation is carried out.

In summary, the present application includes at least one of the following beneficial technical effects:

1. the trolley in the sample injection chamber is pushed into the deposition chamber through the manipulator, and after the materials in the trolley react in the deposition chamber, the trolley is pulled into the cooling chamber from the deposition chamber by the manipulator to be cooled, so that the production process of the graphene film is continuous, the phenomenon that the temperature of the graphene is only increased or decreased in the deposition chamber when the graphene is generated is avoided, the service life of the deposition chamber is protected from being damaged, and energy is saved;

2. the lead screw rotates under drive arrangement's effect to drive the push rod along the length direction motion of lead screw, make this manipulator convenient to use, and simple structure.

Drawings

Fig. 1 is a schematic structural diagram of a robot in an embodiment of the present application.

Fig. 2 is a schematic diagram of an embodiment of the present application.

FIG. 3 is a schematic view of a cart in an embodiment of the present application.

Fig. 4 is a schematic structural diagram of the cart in the embodiment of the application.

Description of the reference numerals: 1. a base; 11. a fixing plate; 111. a through hole; 12. a bearing; 2. a drive device; 21. a first motor; 22. a second motor; 3. a screw rod; 31. a sliding plate; 311. a threaded hole; 312. a jack; 313. a driving wheel; 314. a driven wheel; 315. a guide hole; 316. a guide bar; 317. a guide cylinder; 4. a push rod; 41. pushing a block; 5. a wire rope; 6. a sample introduction chamber; 61. a box body; 611. a door; 62. a control device; 63. a support frame; 631. a support plate; 632. supporting legs; 633. mounting holes; 64. a slideway; 7. a deposition chamber; 8. a cooling chamber; 9. a trolley; 91. a side plate; 911. a circular hole; 92. a support plate; 93. a carrying unit; 931. a connecting assembly; 9311. a connecting rod; 932. a magazine; 94. a handle; 95. a wheel; 10. a valve device; 101. a first valve; 102. a second valve; 20. and a manipulator.

Detailed Description

The present application is described in further detail below with reference to figures 1-4.

The embodiment of the application discloses a manipulator and graphene film continuous large-scale deposition equipment. Referring to fig. 1, a manipulator includes a base 1, a driving device 2 mounted on the base 1, a lead screw 3 fixedly connected to the driving device 2, and a push rod 4 slidably mounted on the lead screw 3 along a length direction of the lead screw 3; one end of the screw rod 3, which is far away from the driving device 2, is connected with the graphene film continuous large-scale deposition equipment, and the push rod 4 extends into the graphene film continuous large-scale deposition equipment along the length direction of the screw rod 3 under the action of the driving device 2 and is used for pushing the device in the graphene film continuous large-scale deposition equipment.

Referring to fig. 1, the driving device 2 includes a first motor 21 and a second motor 22; first motor 21 fixed mounting is in one side of base 1, one side that base 1 deviates from first motor 21 has set firmly fixed plate 11, the perforation (do not mark in the picture) has been seted up to base 1's upper end, through-hole 111 has been seted up to fixed plate 11's upper end, the central axis coincidence of perforation and through-hole 111, first motor 21's axle passes perforation and through-hole 111 in proper order, and first motor 21's axle and perforation, be provided with bearing 12 between the through-hole 111, first motor 21's axle and lead screw 3's one end fixed connection, make lead screw 3 rotate along with first motor 21's axle.

Referring to fig. 1, a sliding plate 31 is slidably mounted on the screw rod 3, a threaded hole 311 is formed in a middle position of one end of the sliding plate 31, and internal threads of the threaded hole 311 are in threaded engagement with external threads on the screw rod 3, so that the sliding plate 31 can slide along the length direction of the screw rod 3. The middle position of one end of the sliding plate 31 far away from the threaded hole 311 is further provided with an insertion hole 312, the second motor 22 is positioned on one side of the sliding plate 31 close to the fixed plate 11, a driving wheel 313 is connected to the shaft of the second motor 22 after passing through the insertion hole 312, a driven wheel 314 which is matched with the driving wheel 313 to rotate is arranged above the driving wheel 313, the driven wheel 314 is fixedly connected with one end of the push rod 4, one end of the push rod 4 far away from the driven wheel 314 is further fixedly provided with a push block 41, the push block 41 is cuboid, and one end of the push block 41 is vertically and fixedly arranged on the push rod 4, so that the push block 41 can rotate under the action of the second motor 22.

Referring to fig. 1, wherein, still be provided with wire rope 5 between fixed plate 11 upper end and the continuous scale deposition equipment of graphite alkene film, when push rod 4 is promoting the inside device of the continuous scale deposition equipment of graphite alkene film, push rod 4 can receive the reverse driving force of above-mentioned in-equipment device to make base 1 receive the power that deviates from push rod 4, then at this moment through wire rope 5 production pulling force between fixed plate 11 and above-mentioned equipment, pulling force and reverse driving force are balanced each other, thereby guarantee that base 1 is firm.

Referring to fig. 1, two guide holes 315 are respectively formed in two sides of the sliding plate 31, guide rods 316 penetrate through the guide holes 315, one ends of the guide rods 316 penetrate through the guide holes 315 and then are fixedly connected with one side of the fixed plate 11 close to the sliding plate 31, and the other ends of the guide rods 316 are fixedly connected with the graphene film continuous large-scale deposition equipment; a guide cylinder 317 is further arranged at the guide hole 315, the guide cylinder 317 is positioned at a side of the sliding plate 31 facing away from the fixed plate 11, a central axis of the guide cylinder 317 coincides with a central axis of the guide hole 315, and the guide hole 315 is arranged such that the guide rod 316 is kept horizontal.

The implementation principle of the manipulator is as follows: starting the first motor 21 to rotate the screw rod 3, so that the sliding plate 31 slides along the length direction of the screw rod 3, and the push rod 4 is driven to move along the length direction of the screw rod 3; when the second motor 22 is activated, the push rod 4 is rotated to rotate the push block 41.

The application also discloses continuous large-scale deposition equipment for the graphene film, and the equipment comprises a sample chamber 6, a deposition chamber 7 and a cooling chamber 8 which are sequentially arranged, and also comprises the manipulator 20, wherein the manipulator 20 is provided with two parts, one part is arranged at one end of the sample chamber 6, which is far away from the deposition chamber 7, and the other part is arranged at one end of the cooling chamber 8, which is far away from the deposition chamber 7; the trolley 9 is arranged in the sampling chamber 6, the trolley 9 is used for containing materials, the trolley 9 slides from the sampling chamber 6 to the deposition chamber 7 under the action of the manipulator 20 close to the sampling chamber 6, so that the materials are made into graphene in the deposition chamber 7 through a vapor deposition method, wherein a high-temperature environment of 1000 ℃ is kept in the deposition chamber 7, and after the graphene is finished, the trolley 9 is pulled into the cooling chamber 8 to be cooled through the manipulator 20 close to the cooling chamber 8.

Referring to fig. 2, the sample introduction chamber 6 includes a case 61 and a control device 62 fixed above the case 61; box 61 is the cuboid, the one end and the manipulator 20 fixed connection of box 61, the other end and deposition chamber 7 fixed connection, one side of box 61 is provided with door 611, it is positive to set up this side, the side of going up of box 61 has set firmly support frame 63, support frame 63 includes backup pad 631 and supporting leg 632, each vertically in both ends of support frame 63 has set firmly two supporting legs 632, one side vertically of support frame 63 has set firmly many supporting legs 632, many supporting legs 632 evenly set up along the length direction interval of support frame 63, supporting leg 632 all sets up on the same side of backup pad 631, and be parallel to each other between the supporting leg 632.

Referring to fig. 2, two mounting holes 633 are opened on the other side of the supporting frame 63, the two mounting holes 633 are respectively located at two ends of the side, the control device 62 is fixedly arranged on a side surface of the supporting plate 631 away from the supporting leg 632, the control device 62 is provided with two electric cylinders, the two electric cylinders and the two mounting holes 633 are arranged in a one-to-one correspondence manner, shafts of the electric cylinders penetrate through the mounting holes 633 and are fixedly connected with one side of the door 611 close to the supporting plate 631, and therefore the opening and closing of the door 611 are controlled through the electric cylinders.

Referring to fig. 3 and 4, a slide 64 is provided inside the box 61, the slide 64 extends along the length direction of the box 61, and the trolley 9 is slidably mounted on the slide 64; dolly 9 includes two curb plates 91 and a extension board 92, and extension board 92 sets up between two curb plates 91, and two curb plates 91 and extension board 92 are all just to setting up for form installation space between curb plate 91 and the extension board 92, set up this installation space and be the load-carrying unit 93, thereby make dolly 9 include two load-carrying units 93. Round holes 911 are formed in the middle positions of the side plate 91 and the support plate 92, and the central axis of the round hole 911 in the side plate 91 is overlapped with the central axis of the round hole 911 in the support plate 92; a handle 94 and wheels 95 are fixedly arranged on one side of the side plate 91, which is far away from the support plate 92, and the trolley 9 can be placed inside the box body 61 through the handle 94, so that the trolley 9 slides on the slide way 64 under the action of the push rod 4.

Referring to fig. 4, each of the bearing units 93 includes a plurality of sets of connecting assemblies 931 therein, the plurality of sets of connecting assemblies 931 are horizontally disposed between the side plate 91 and the support plate 92, the plurality of sets of connecting assemblies 931 are uniformly disposed along the length direction of the side plate 91 at intervals, each set of connecting assemblies 931 includes two connecting rods 9311, the two connecting rods 9311 are respectively disposed on two sides of the side plate 91, one end of each connecting rod 9311 is vertically fixed on the side plate 91, and the other end of each connecting rod 9311 is vertically fixed on the support plate 92.

Referring to fig. 4, a material box 932 is placed on each group of connecting assemblies 931, two sides of the material box 932 are clamped on the connecting rods 9311, so that the material box 932 is installed in the bearing unit 93, copper powder is laid at the bottom of the material box 932, and the copper powder is used as a substrate, so that the copper-based graphene composite material obtained by growing graphene on the copper powder through a chemical vapor deposition method has high tensile strength, high conductivity and high elongation.

Referring to fig. 2 and 3, a valve device 10 is provided between the sampling chamber 6 and the deposition chamber 7, the sampling chamber 6 and the deposition chamber 7 are isolated by the valve device 10, when the cart 9 is about to enter the deposition chamber 7, the valve device 10 is opened, and the cart 9 is pushed into the deposition chamber 7 by a robot 20 close to the sampling chamber 6; the valve device 10 comprises a first valve 101 and a second valve 102, the second valve 102 is arranged close to the deposition chamber 7, so that the high temperature in the deposition chamber 7 is isolated through the second valve 102, the first valve 101 is arranged close to the sampling chamber 6, and a sealing ring (not marked in the figure) is further arranged on one side of the first valve 101 close to the sampling chamber 6, so that the sealing performance of the first valve 101 is improved through the sealing ring, and meanwhile, the sealing ring can be guaranteed not to be affected by the high temperature of the deposition chamber 7 and melt.

Referring to fig. 2 and 3, a valve device 10 is also arranged between the deposition chamber 7 and the cooling chamber 8, wherein a first valve 101 is arranged near the cooling chamber 8, a second valve 102 is arranged near the deposition chamber 7, and after the material in the trolley 9 is reacted in the deposition chamber 7, the valve device 10 is opened to pull the trolley 9 into the cooling chamber 8 for cooling through a manipulator 20 near the cooling chamber 8. The cooling chamber 8 also includes a case 61 and a control device 62 fixed above the case 61, a door 611 is also provided at one side of the case 61, and the control device 62 is connected to the door 611 such that opening and closing of the door 611 is controlled by the control device 62.

The implementation principle of the application is as follows: firstly, the door 611 on the sampling chamber 6 is opened through the control device 62, the trolley 9 is placed in the sampling chamber 6, the valve device 10 between the sampling chamber 6 and the deposition chamber 7 is opened, the first motor 21 is started to enable the push rod 4 to move along the length direction of the screw rod 3, the second motor 22 is started to enable the push block 41 to be in contact with the side plate 91 of the trolley 9, so that the trolley 9 is pushed into the deposition chamber 7, the valve device 10 is closed, materials in the trolley 9 are enabled to react in the deposition chamber 7, after the reaction is completed, the valve device 10 between the deposition chamber 7 and the cooling chamber 8 is opened, the manipulator 20 close to the cooling chamber 8 pulls the trolley 9 into the cooling chamber 8 to reduce the temperature, the temperature rise and fall in the deposition chamber 7 are avoided, the service life of the deposition chamber 7 is protected from being damaged, in addition, the trolley 9 can be further provided with a plurality of material boxes 932, and the production efficiency of the graphene film is improved.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: equivalent changes in structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. A manipulator, its characterized in that: comprises a driving device (2), a screw rod (3) and a push rod (4); one end of the screw rod (3) is installed on the driving device (2), the other end of the screw rod horizontally extends, and the push rod (4) is installed on the screw rod (3) in a sliding mode along the length direction of the screw rod (3).

2. A manipulator according to claim 1, wherein: the driving device (2) comprises a first motor (21), one end of the screw rod (3) is connected with the first motor (21), a sliding plate (31) is installed on the screw rod (3) in a sliding mode, and one end of the push rod (4) is installed on the sliding plate (31).

3. A manipulator according to claim 2, wherein: the driving device (2) further comprises a second motor (22), the second motor (22) is fixedly arranged on the sliding plate (31), a driving wheel (313) and a driven wheel (314) are further arranged on the sliding plate (31), the second motor (22) is connected with the driving wheel (313), the push rod (4) is connected with the driven wheel (314), and the driven wheel (314) is matched with the driving wheel (313).

4. A manipulator according to claim 3, wherein: the motor is characterized by further comprising a base (1), the first motor (21) is fixedly installed on the base (1), a guide rod (316) is fixedly arranged on the base (1), a guide hole (315) is formed in the sliding plate (31), and the guide rod (316) penetrates through the guide hole (315).

5. The utility model provides a manipulator and continuous scale deposition apparatus of graphite alkene film which characterized in that: comprises a sample chamber (6), a deposition chamber (7), a cooling chamber (8) and the manipulator (20) of any one of claims 1-4 which are arranged in sequence; a trolley (9) is arranged in the sample chamber (6), and the manipulator (20) pushes the trolley (9) to the cooling chamber (8) from the sample chamber (6).

6. The manipulator and the equipment for continuously depositing the graphene film on a large scale according to claim 5 are characterized in that: the trolley (9) comprises two bearing units (93), and a plurality of material boxes (932) are arranged in each bearing unit (93).

7. The manipulator and the equipment for continuously depositing the graphene film on a large scale according to claim 6 are characterized in that: copper powder is arranged at the bottom of the material box (932).

8. The manipulator and the equipment for continuously depositing the graphene film on a large scale according to claim 5 are characterized in that: the sampling chamber (6) with be provided with valve gear (10) between deposition chamber (7), valve gear (10) are including being close to first valve (101) that sampling chamber (6) set up and being close to second valve (102) that deposition chamber (7) set up.