CN102976318B - Reel-to-reel graphene preparation apparatus - Google Patents
Reel-to-reel graphene preparation apparatus Download PDFInfo
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- CN102976318B CN102976318B CN201210561455.1A CN201210561455A CN102976318B CN 102976318 B CN102976318 B CN 102976318B CN 201210561455 A CN201210561455 A CN 201210561455A CN 102976318 B CN102976318 B CN 102976318B
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Abstract
The invention discloses a reel-to-reel graphene preparation apparatus which comprises a closed vacuum chamber, wherein a roll system for driving a graphene growing foil belt to move is arranged in the vacuum chamber; the roll system comprises a driving roll for guiding the graphene growing foil belt, a growing roll for growing graphene on the graphene growing foil belt and a winding roll for winding the graphene growing foil belt after the graphene preparation is finished; a heating device for heating the graphene growing foil belt, corresponding to the growing roll, is arranged in the vacuum chamber; a quick cooling device for cooling the graphene growing foil belt on which the graphene is grown is arranged behind the growing roll along the moving direction of the graphene growing foil belt; a gas path system for introducing gas required for graphene preparation is arranged in the vacuum chamber; and a vacuum pump set for vacuumizing the vacuum chamber is arranged outside the vacuum chamber. The reel-to-reel graphene preparation apparatus disclosed by the invention can realize the quick, continuous and large-scale industrial production of graphene.
Description
Technical field
The present invention relates to a kind of Graphene production unit, concrete is a kind of volume to volume Graphene Preparation equipment can preparing Graphene rapidly, continuously with extensive industrialization.
Background technology
Graphene is the hexagonal honey comb structure that carbon atom forms based on sp2 hydridization, and the two dimensional crystal of an only atomic layers thick.Although single-layer graphene is just obtained by mechanically peel graphite in an experiment first for 2004, the character due to its uniqueness causes the research interest of countless researcher, and obtains in a few years in the past and study widely.And Andre Geim and Konstantin Novoselov also obtains Nobel Prize in physics in 2010 because of the initiative work in Graphene.
Graphene is the thinnest in the world at present is also the hardest nano material, and it is almost completely transparent, only absorbs the light of about 2.3% in all wave band; Thermal conductivity up to 5300W/mK, higher than carbon nanotube and diamond; Under normal temperature, its electronic mobility is more than 15000cm
2/ Vs, exceedes carbon nanotube and silicon crystal, and resistivity only about 10
-6Ω cm, lower than copper or silver is the material that resistivity is minimum in the world at present.Because Graphene is the type material integrating the excellent properties such as superelevation physical strength, thermal conductive resin, high optical transparency and superpower electroconductibility, it is not only applicable to basic physics research, as integer quantum Hall effect under fractional quantum hall effect, room temperature etc., and have broad application prospects, as molecular detector, thermal conductance/heat interfacial material, field emission source, ultracapacitor, solar cell, Graphene lithium cell, field-effect transistor and unicircuit, transparency conductive electrode etc. in fields such as display, the energy, detection, photoelectrons.The applied research of Graphene has great market outlook, it will bring revolutionary transformation to numerous research field, as: the lithium cell made with Graphene super capacitor can realize rapid charge in 1 minute, and high-power, high efficiency electric discharge can be realized, this has not only broken the charging of traditional lithium electricity and has limited slowly, also will be the popularization of electromobile industry and development, but also the protection to environment, the development of green energy resource provides new opportunity; The performance of graphene field effect transistor far will exceed silicon transistor, because Graphene resistivity is extremely low, the speed that electronics runs is exceedingly fast, therefore be expected to for developing thinner, conduction speed electronic component of new generation or transistor faster, because Graphene and silicon have good compatibility, so be expected to alternative whole silica-based industry in the future; Graphene transparency conductive electrode not only has good conduction property and high light transmission, also show good snappiness and physical strength, performance is better than the indium tin oxide transparency electrode commonly used in the market, and cost is low, environmentally safe, in addition, flexible and transparent conductive electrode is also the development trend of transparency electrode of future generation.
How to prepare big area, high-quality Graphene on a large scale fast, be the crucial science and technology problem faced in numerous Application Areas industrialization.Through extensive research in recent years, some methods preparing Graphene are developed at present, as mechanically peel method, epitaxial growth method, chemical reduction graphite oxide method, chemical Vapor deposition process (CVD) etc., these graphene preparation methods can obtain greatly the Graphene sample of use for laboratory under given conditions, but, prepare big area fast, the method for high-quality graphene never makes a breakthrough, significantly limit efficiency, output and cost prepared by Graphene, hinder its further industrialized development.
Although Korea S adopts large-scale CVD equipment to prepare the graphene film of 30 inches (diagonal lines is about 76cm) at present, but by the restriction of equipment, preparation technology is still preparation terminate once after more again fill sample preparation next time, also cannot realize big area, high-quality graphene continuous, prepare fast.
Given this, the present invention is directed to the technical barrier of current continuous production big area, high-quality graphene, and explore the equipment of a kind of volume to volume continuous production big area, high-quality graphene.This equipment is adopted to prepare Graphene; relative to existing method, there is advantage rapidly, continuously; the mass-producing growth of big area, high-quality graphene can be carried out; this plays great prograding by numerous application of Graphene and industrialization thereof, produces far-reaching influence to the strategic field such as novel nano-material, nanometer integrated-optic device, information, the energy.
Summary of the invention
The technical problem to be solved in the present invention be propose a kind of volume to volume Graphene Preparation equipment, this volume to volume Graphene Preparation equipment can realize Graphene rapidly, continuously and large-scale industrialized production.
Realize above-mentioned technical purpose, volume to volume Graphene Preparation equipment of the present invention, comprises airtight vacuum chamber;
Be provided with the roller system for driving graphene growth foil to move in described vacuum chamber, described roller system comprise for the driving roll of graphene growth foil guiding, after prepared by the growth roller of growing graphene in graphene growth foil and Graphene for the wind-up roll of rolling graphene growth foil;
Correspondingly with described growth roller in described vacuum chamber be provided with the heating unit growing foil for heated graphite alkene, along described graphene growth foil direction of motion, after described growth roller, be provided with the quickly cooling device having the graphene growth foil of Graphene for cooling growth;
Be provided with the air-channel system preparing desired gas for passing into Graphene in described vacuum chamber, and vacuum chamber peripheral hardware has for the vacuum pump group to described vacuum chamber.
Further, be provided with protective layer pressing unit after described quickly cooling device, described protective layer pressing unit comprises at least one pair of and to cooperatively interact and for the pressure roller to described graphene growth foil karbate impervious graphite alkene protective layer.
Further, described growth roller adopts quartz material to make, and described driving roll, wind-up roll and pressure roller are the bright finished metallic roll of periphery wall or ganoid glue Kun.
Further, described graphene growth foil is Copper Foil, and described driving Kun, growth roller and wind-up roll are provided with for the driving mechanism driving Kun, growth roller rotates with identical cutting speed degree with wind-up roll.
Further, described protective layer pressing unit is provided with for measuring between described pressure roller the pressure transmitter of pressure pressure and pressure controller.
Further, described Graphene protective layer is that heat releases adhesive tape layer.
Further, described roller system adopts braking or pulsed mode of braking continuously to drive described graphene growth foil to move.
Further, described heating unit is the arc heating unit coaxially arranged with described growth roller, and described quickly cooling device is cooled with liquid nitrogen device or water-chilling plant, and described heating unit and quickly cooling device are equipped with temperature sensor.
Further, described vacuum pump group is made up of mechanical pump and molecular pump.
Further, the vacuumometer for measurement of vacuum is provided with in described vacuum chamber.
Beneficial effect of the present invention is:
Volume to volume Graphene Preparation equipment of the present invention provides required vacuum environment by arranging airtight vacuum chamber for graphene growth, the air-channel system arranged in vacuum chamber can pass into the gas needed for graphene growth in vacuum chamber, the motion of graphene growth foil is driven by arranging roller system, the graphene growth foil be positioned on growth roller is temperature required to graphene growth by heating devices heat, and in this section of graphene growth foil growing graphene, normal temperature is cooled to by roller system actuation movement to quickly cooling device place after graphene growth completes, finally complete Graphene by wind-up roll rolling to prepare,
Therefore, under the driving effect of roller system, graphene growth foil successively can move to growth roller place heat growth Graphene, then through rolling after cooling, can meet Graphene rapidly, continuously with large-scale industrialized production demand.
2, by arranging protective layer pressing unit; before the rolling of graphene growth foil; can grow in graphene growth foil has the side of Graphene to suppress a layer graphene protective layer, is conducive to protecting the Graphene grown, prevents Graphene from sustaining damage in rolling and transportation.
3, graphene growth foil is Copper Foil, and the growth conditions of Graphene is about 1000 DEG C, if directly adopt external force to hale the motion of dynamic Copper Foil, then may cause Copper Foil fracture at high temperature, continuous seepage cannot be realized, the present invention, by arranging the driving mechanism driving Kun, growth roller and wind-up roll to move with identical cutting speed degree on driving Kun, growth roller and wind-up roll, effectively can drive Copper Foil move and Copper Foil can not be caused to rupture, and then realize Graphene continuous seepage.
Accompanying drawing explanation
Fig. 1 is the structural representation of volume to volume Graphene Preparation equipment embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is elaborated.
As shown in Figure 1, be the structural representation of volume to volume Graphene Preparation equipment embodiment of the present invention.The volume to volume Graphene Preparation equipment of the present embodiment, comprise airtight vacuum chamber 1, be provided with the roller system for driving graphene growth foil 2 to move in vacuum chamber 1, roller system comprise lead for graphene growth foil 2 driving roll 3, prepared for the growth roller 4 of growing graphene in graphene growth foil 2 and Graphene after for the wind-up roll 5 of rolling graphene growth foil 2.Driving roll 3 can be set to many according to actual needs, and in graphene growth foil 3 moving process, play guiding and driving effect, the driving roll 3 of the present embodiment is set to 2.Wind-up roll 5 is provided with the drive unit for driving wind-up roll 5 to rotate, and provides power for the motion of graphene growth foil 2.Be provided with in vacuum chamber 1 for install volume have graphene growth foil 2 coil 11 installation shaft, certainly, driving roll 3 also can be arranged drive unit and drive graphene growth foil 2 to move.
In vacuum chamber 1 with grow that roller 4 is corresponding is provided with the heating unit 6 growing foil 2 for heated graphite alkene, along graphene growth foil 2 direction of motion, the quickly cooling device 7 having the graphene growth foil 2 of Graphene for cooling growth is provided with after growth roller 4, by arranging quickly cooling device 7, graphene growth foil 2 instantaneous cooling of high temperature can be made to normal temperature, contribute to the raising of Graphene quality of forming film, and follow-up preparation process is in extremely rapid succession carried out.
The air-channel system 8 preparing desired gas for passing into Graphene is provided with in vacuum chamber 1, and vacuum chamber 1 peripheral hardware has the vacuum pump group 9 for vacuumizing vacuum chamber 1, vacuum pump group 9 can vacuumize vacuum chamber 1, and makes vacuum chamber 1 keep constant vacuum tightness in Graphene preparation process.
The volume to volume Graphene Preparation equipment of the present embodiment provides required vacuum environment by arranging airtight vacuum chamber 1 for graphene growth, the air-channel system 8 arranged in vacuum chamber 1 can pass into the gas needed for graphene growth in vacuum chamber 1, graphene growth foil 2 is driven to move by arranging roller system, it is temperature required that the graphene growth foil 2 be positioned on growth roller 4 is heated to graphene growth by heating unit 6, and in this section of graphene growth foil 2 growing graphene, normal temperature is cooled to by roller system actuation movement to quickly cooling device 7 place after graphene growth completes, finally complete Graphene by wind-up roll 5 rolling to prepare.Therefore, under the driving effect of roller system, graphene growth foil 2 successively can move to growth roller 4 place heat growth Graphene, then through rolling after cooling, can meet Graphene rapidly, continuously with large-scale industrialized production demand.
Further, protective layer pressing unit 10 is provided with after quickly cooling device 7, protective layer pressing unit 10 comprises at least one pair of and to cooperatively interact and for the pressure roller to graphene growth foil 2 karbate impervious graphite alkene protective layer, the protective layer pressing unit 10 of the present embodiment is provided with a pair pressure roller, by arranging protective layer pressing unit 10, before graphene growth foil 2 rolling, can grow in graphene growth foil 2 has the side of Graphene to suppress a layer graphene protective layer, be conducive to protecting the Graphene grown, prevent Graphene from sustaining damage in rolling and transportation, in two pressure rollers of protective layer pressing unit 10, wherein pressure roller is provided with the drive unit for driving it to rotate, for Graphene protective layer is compressed on graphene growth foil 2.The Graphene protective layer of the present embodiment is that heat releases adhesive tape layer, can be compressed on easily and fast in graphene growth foil 2, and protect Graphene not sustain damage, and being provided with volume in vacuum chamber 1 has heat to release the spool 12 of adhesive tape.Preferably; protective layer pressing unit 10 is provided with for being measured between pressure roller the pressure transmitter of pressure pressure and pressure controller; fed back by pressure transmitter; can monitor in real time and regulate between pressure roller to pressure pressure; while ensureing that Graphene protective layer is compressed on graphene growth foil 2, also Graphene can not be damaged.
Further, growth roller 4 adopts quartz material to make, driving roll 3, wind-up roll 5 and pressure roller are the bright finished metallic roll of periphery wall or ganoid glue Kun, the growth roller 4 adopting quartz material to make can bear the high temperature needed for graphene growth, by driving roll 3, the roll shaft that wind-up roll 5 and pressure roller adopt the bright finished metal of periphery wall etc. to make or smooth surface rubber roll, graphene growth foil 2 can be protected not sustain damage in roller system moving process, and keep graphene growth foil 2 smooth surface smooth, improve quality prepared by Graphene, the driving roll 3 of the present embodiment, wind-up roll 5 and pressure roller are the bright finished metallic roll of periphery wall.Preferably, the graphene growth foil 2 of the present embodiment is Copper Foil, drive Kun 3, growth roller 4 and wind-up roll 5 are provided with for driving Kun 3, the driving mechanism that growth roller 4 rotates with identical cutting speed degree with wind-up roll 5, graphene growth foil 2 is Copper Foil, and the growth conditions of Graphene is about 1000 DEG C, if directly adopt external force to hale the motion of dynamic Copper Foil, then may cause Copper Foil fracture at high temperature, continuous seepage cannot be realized, as grown at low temperature, then can not prepare high-quality Graphene, the present embodiment is by driving Kun 3, growth roller 4 drives Kun 3 with wind-up roll 5 is arranged with identical cutting speed degree, the driving mechanism that growth roller 4 and wind-up roll 5 move, Copper Foil can be effectively driven to move and Copper Foil can not be caused to rupture, and then realize Graphene continuous seepage.
Further, roller system adopts braking continuously or pulsed mode of braking to drive graphene growth foil 2 to move, when employing is braked continuously, need the movement rate regulating graphene growth foil 2, make the growth that can complete Graphene in the time of its motion on growth roller 4, when adopting pulsed mode of braking, when graphene growth foil 2 moves to after on growth roller 4, stop graphene growth foil 2 until graphene growth completes, then the graphene growth foil 2 of non-growing graphene is driven into growing graphene on growth roller 4; Adopt braking or pulsed continuously to brake two kinds of type of drive and all can realize continuous growing graphene in graphene growth foil 2, the roller system of the present embodiment adopts the mode of braking continuously to drive graphene growth foil 2 to move.
Further, heating unit 6 is and the coaxial arc heating unit arranged of growth roller 4, quickly cooling device 7 is cooled with liquid nitrogen device or water-chilling plant, heating unit 6 and quickly cooling device 7 are equipped with temperature sensor, by heating unit 6 being set to and growing the coaxial arc heating unit arranged of roller 4, homogeneous heating can be carried out to the graphene growth foil 2 be positioned on growth roller 4, graphene uniform is grown, by quickly cooling device 7 is set to cooled with liquid nitrogen device or water-chilling plant, can cool fast graphene growth complete after graphene growth foil 2, contribute to the raising of Graphene quality of forming film, and follow-up preparation process is in extremely rapid succession carried out, the quickly cooling device 7 of the present embodiment is cooled with liquid nitrogen device.By set temperature sensor on heating unit 6 and quickly cooling device 7, can Real-time Feedback and monitoring heating unit 6 and the temperature of quickly cooling device 7, work under making heating unit 6 and quickly cooling device 7 remain at the steady temperature of setting.
Further, vacuum pump group 9 is made up of mechanical pump and molecular pump, is provided with valve 13 between vacuum pump group 9 and vacuum chamber 1, effectively can improve the vacuum tightness vacuumizing efficiency and keep in Graphene manufacture process in vacuum chamber 1.Preferably, in vacuum chamber 1, be provided with the vacuumometer 14 for measurement of vacuum, for the vacuum tightness in Real-time Feedback and monitoring vacuum chamber 1, and keep the vacuum tightness in vacuum chamber 1 constant.
Below the method adopting the present embodiment volume to volume Graphene Preparation equipment to prepare Graphene is described.
Adopt the volume to volume Graphene Preparation equipment of the present embodiment to prepare the method for Graphene, comprise the steps:
1) after getting rid of the foreign gas in vacuum chamber 1, in vacuum chamber 1, catalytic gas is passed into by air-channel system 8, also need the inert dilution gas simultaneously passed into for regulating pressure in vacuum chamber 1 under condition of normal pressure, inert dilution gas can be argon gas, and catalytic gas is hydrogen; And the method for despumation gas is as follows: after vacuum chamber 1 is evacuated to background vacuum, background vacuum approximates 0.1Pa greatly, each gas circuit respectively in clean vacuum chambers 1; After repeated washing twice, then vacuum chamber 1 is evacuated to background vacuum, also directly first can pass into the foreign gas in a large amount of rare gas element eliminating vacuum chamber for growing graphene in normal pressure situation, this example adopts low-pressure growth Graphene.
2) one section corresponding with heating unit 6 in graphene growth foil 2 is heated to the graphene growth temperature set, the graphene growth temperature of the present embodiment is 700-1050 DEG C.
3) in vacuum chamber 1, pass into carbon-source gas by air-channel system 8, and the pressure controlled in vacuum chamber 1 is the graphene growth pressure of setting, carbon-source gas can adopt methane, ethene or acetylene, and the growth pressure of Graphene is set as 1-10
3pa, the flow of carbon-source gas is 1-500sccm, and the flow of hydrogen is 1-500sccm, and the volume ratio of carbon-source gas shared by vacuum chamber 1 is 1/1501-10/11.
4) drive between heating unit 6 and graphene growth foil 2 and produce relative movement, heating unit 6 is along its direction of relative movement relative to graphene growth foil 2 heated graphite alkene growth foil gradually, after the graphene growth of graphene growth foil 2 completes and shifts out heating unit 6, utilize quickly cooling device 7 that graphene growth foil 2 is cooled to normal temperature, and graphene growth foil 2 time be cooled to needed for normal temperature is less than 2 seconds by quickly cooling device 7, roller system drives graphene growth foil 2 to move relative to heating unit 6, heating unit 6 and quickly cooling device 7 are fixedly mounted in vacuum chamber 1, between heating unit 6 and graphene growth foil 2, the mode of relative movement can be continous way and to move or pulsed moves, the graphene growth foil 2 of the present embodiment under the drive of roller system relative to heating unit 6 relative movement continuously, and the speed of heating unit 6 and graphene growth foil 2 relative movement equals the length of heating unit 6 on graphene growth foil 2 bearing of trend and the ratio of graphene growth required time, namely ensure that the graphene growth foil 2 corresponding with heating unit 6 shifts out heating unit 6 after graphene growth completes, realize the Graphene manufacture of continuous mass-producing.
5) in graphene growth foil 2 after growing graphene and by rolling before; graphene growth foil 2 covers the protective layer of Graphene; Graphene protective layer is that heat releases adhesive tape layer, can be compressed on easily and fast in graphene growth foil 2, and protect Graphene not sustain damage.
What finally illustrate is, above embodiment is only in order to illustrate technical scheme of the present invention and unrestricted, although with reference to preferred embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that, can modify to technical scheme of the present invention or equivalent replacement, and not departing from aim and the scope of technical solution of the present invention, it all should be encompassed in the middle of right of the present invention.
Claims (1)
1. a volume to volume Graphene Preparation equipment, is characterized in that:
Comprise airtight vacuum chamber;
Be provided with the roller system for driving graphene growth foil to move in described vacuum chamber, described roller system comprise for the driving roll of graphene growth foil guiding, after prepared by the growth roller of growing graphene in graphene growth foil and Graphene for the wind-up roll of rolling graphene growth foil; Described graphene growth foil is Copper Foil, and described driving Kun, growth roller and wind-up roll are provided with for the driving mechanism driving Kun, growth roller rotates with identical cutting speed degree with wind-up roll;
Correspondingly with described growth roller in described vacuum chamber be provided with the heating unit growing foil for heated graphite alkene, along described graphene growth foil direction of motion, after described growth roller, be provided with the quickly cooling device having the graphene growth foil of Graphene for cooling growth; Described heating unit is the arc heating unit coaxially arranged with described growth roller, and described quickly cooling device is cooled with liquid nitrogen device or water-chilling plant, and described heating unit and quickly cooling device are equipped with temperature sensor;
Be provided with the air-channel system preparing desired gas for passing into Graphene in described vacuum chamber, and vacuum chamber peripheral hardware has for the vacuum pump group to described vacuum chamber; Described vacuum pump group is made up of mechanical pump and molecular pump; The vacuumometer for measurement of vacuum is provided with in described vacuum chamber;
Be provided with protective layer pressing unit after described quickly cooling device, described protective layer pressing unit comprises at least one pair of and to cooperatively interact and for the pressure roller to described graphene growth foil karbate impervious graphite alkene protective layer; Described protective layer pressing unit is provided with for being measured between described pressure roller the pressure transmitter of pressure pressure and pressure controller; Described Graphene protective layer is that heat releases adhesive tape layer;
Described growth roller adopts quartz material to make, and described driving roll, wind-up roll and pressure roller are the bright finished metallic roll of periphery wall or ganoid rubber roll;
Described roller system adopts braking or pulsed mode of braking continuously to drive described graphene growth foil to move.
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| CN201210561455.1A CN102976318B (en) | 2012-12-21 | 2012-12-21 | Reel-to-reel graphene preparation apparatus |
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| CN102976318B true CN102976318B (en) | 2015-04-15 |
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Families Citing this family (16)
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| KR102083961B1 (en) * | 2013-05-10 | 2020-03-03 | 엘지전자 주식회사 | Apparatus for manufacturing graphene, the manufacturing method using the same and the graphene manufactured by the same |
| CN104060240A (en) * | 2014-07-11 | 2014-09-24 | 无锡格菲电子薄膜科技有限公司 | Horizontal reel-to-reel device for producing two-dimensional nanometer material |
| TWI498206B (en) * | 2014-09-04 | 2015-09-01 | Univ Nat Central | Apparatus and method for continuous synthesis of carbon film or inorganic material film |
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| CN104495822B (en) * | 2014-12-16 | 2016-06-15 | 重庆墨希科技有限公司 | The preparation method of a kind of graphene film coiled material and device |
| CN104495823B (en) * | 2014-12-16 | 2016-08-17 | 中国科学院重庆绿色智能技术研究院 | The preparation method of a kind of monolayer continuous graphite alkene film coil and device |
| CN104495821B (en) * | 2014-12-16 | 2016-06-15 | 重庆墨希科技有限公司 | The preparation method of a kind of monolayer continuous graphite alkene film coil and device |
| CN104692371B (en) * | 2015-02-25 | 2016-11-09 | 王干 | A kind of pressure-fired produces the method and device of graphene film continuously |
| CN106291991B (en) * | 2015-05-26 | 2019-06-21 | 江苏天贯碳纳米材料有限公司 | A kind of roll-to-roll preparation method of whole process of intelligent light modulation film |
| KR101938874B1 (en) * | 2016-07-20 | 2019-01-15 | 주식회사 참트론 | The heat-treatment device for synthesis of high quality graphene |
| CN106542525B (en) * | 2016-10-27 | 2018-09-11 | 董兰田 | Continuous adhesive tape legal system takes stripping degumming and the packing method of graphene |
| CN106865531B (en) * | 2017-03-15 | 2020-01-17 | 重庆新颜达机电设备有限公司 | Graphene rolling machine, graphene roll and graphene magnetor |
| CN110759648A (en) * | 2018-07-25 | 2020-02-07 | 张文跃 | Graphene wire-plated coiled material preparation device and production process |
| CN109336096B (en) | 2018-10-19 | 2023-09-26 | 深圳市纳设智能装备有限公司 | Equipment for open type continuous growth of carbon nano material and preparation method |
| CN110983302A (en) * | 2019-12-30 | 2020-04-10 | 宁波柔碳电子科技有限公司 | Roll-to-roll graphene film growth equipment and roll-to-roll graphene film growth method |
| CN113684464B (en) * | 2021-08-27 | 2023-06-02 | 辽宁分子流科技有限公司 | Winding type equipment for preparing graphene composite film |
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| CN102828161A (en) * | 2012-08-21 | 2012-12-19 | 许子寒 | Graphene production method and continuous production device of graphene |
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| CN102828161A (en) * | 2012-08-21 | 2012-12-19 | 许子寒 | Graphene production method and continuous production device of graphene |
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