CN218023219U

CN218023219U - Heat preservation device and optical equipment

Info

Publication number: CN218023219U
Application number: CN202222185275.XU
Authority: CN
Inventors: 李宗杰
Original assignee: Bennett Optical Technology Kunshan Co ltd
Current assignee: Bennett Optical Technology (Suzhou) Co.,Ltd.
Priority date: 2022-08-19
Filing date: 2022-08-19
Publication date: 2022-12-13
Anticipated expiration: 2032-08-19

Abstract

The application relates to a heat preservation device and optical equipment, and belongs to the technical field of optics. Wherein, heat preservation device includes: a heat-insulating shell; the sealing heating mechanism is arranged in the protective layer Wen Waike and is suitable for heating the target object; the sealing heating mechanism comprises a sealing member and a heating member, wherein a closed space is formed for placing a target object, and the heating member is arranged on the outer side of the sealing member; wherein, there is the interval between sealed heating mechanism and the heat preservation shell, is suitable for the filling gas in the interval. Through being provided with the lagging casing, and set up in the lagging casing and form the sealed heating mechanism of interval with the lagging casing, sealed heating mechanism is including the sealing member that is formed with airtight space and the heating member of setting in the sealing member outside, the thermal conductivity of sealing member is higher, be far above the air in the interval, make the temperature difference everywhere of sealing member less, so that the temperature that transmits to the target object of setting in the sealing member in is even, thereby make the target object be heated evenly, in order to guarantee the optical property of target object.

Description

Heat preservation device and optical equipment

[ technical field ] A method for producing a semiconductor device

The application relates to a heat preservation device and optical equipment, and belongs to the technical field of optics.

[ background of the invention ]

In the prior art, when the optical device needs to be heated, a heating element is generally directly arranged at the bottom of the optical platform, and the heating element can transfer heat to the optical platform and air, and then the heat is transferred to the optical device by the optical platform and the air. However, the difference between the thermal conductivity of the optical platform and air is large, and the thermal conductivity of the optical device itself is not high, and in the process of temperature rise, one end of the optical device in contact with the optical platform is heated first, so that the whole optical device is heated unevenly. Since the optical device is very sensitive to temperature, the optical performance of the optical device is directly unstable.

Accordingly, there is a need for improvements in the art that overcome the deficiencies in the prior art.

[ Utility model ] content

An object of the application is to provide a heat preservation device and optical equipment, it can guarantee that optical equipment's optical performance is stable at the intensification in-process.

The purpose of the application is realized by the following technical scheme: an insulation device comprising:

a heat-insulating shell; and

the sealing heating mechanism is arranged in the heat-insulating shell and is suitable for heating a target object; the sealing heating mechanism comprises a sealing member and a heating member, wherein a closed space is formed for placing a target object, and the heating member is arranged on the outer side of the sealing member;

and a space is formed between the sealing heating mechanism and the heat-insulating shell, and the space is suitable for filling gas.

In one embodiment, a plurality of supporting members are arranged on the inner surface of the heat-insulating inner shell, and the sealing heating mechanism is connected with the heat-insulating outer shell through the supporting members so as to form the interval.

In one embodiment, the sealing member has a first side portion and a second side portion disposed opposite to each other, and the heating member is disposed on the first side portion and the second side portion.

In one embodiment, the heating element has a thickness of 0.3mm or less.

In one embodiment, the material of the seal is a high thermal conductivity material.

In one embodiment, the enclosed space is further filled with an inert gas.

In one embodiment, the target includes an optics assembly disposed within the enclosed space, and a shock absorbing insulation disposed between the optics assembly and an inner wall of the seal.

The present application also provides an optical device comprising:

a heat preservation device;

an optical assembly disposed within the thermal insulation device;

wherein, the heat preservation device is as above.

Compared with the prior art, the method has the following beneficial effects: this application is through being provided with the lagging casing, and set up in the lagging casing and form the sealed heating mechanism of interval with the lagging casing, sealed heating mechanism is including the sealing member that is formed with airtight space and the heating member of setting in the sealing member outside, the thermal conductivity of sealing member is higher, be far above the air in the interval, make the temperature difference everywhere of sealing member less, so that the temperature that transmits to the target object of setting in the sealing member in is even, thereby make the target object be heated evenly, in order to guarantee that the optical property of target object is stable.

[ description of the drawings ]

Fig. 1 is a schematic structural view of the heat retention device of the present application.

[ detailed description ] embodiments

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, embodiments accompanying the present application are described in detail below with reference to the accompanying drawings. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting of the application. It should be further noted that, for the convenience of description, only some of the structures associated with the present application are shown in the drawings, not all of them. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

The terms "comprising" and "having," as well as any variations thereof, in this application are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not limited to only those steps or elements listed, but may alternatively include other steps or elements not listed, or inherent to such process, method, article, or apparatus.

Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of the application. The appearances of the phrase in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by one skilled in the art that the embodiments described herein can be combined with other embodiments.

Referring to fig. 1, an insulation apparatus according to a preferred embodiment of the present application includes an insulation housing 1, and a sealing heating mechanism 2 disposed in the insulation housing 1, the sealing mechanism being adapted to heat an object 100. Wherein, there is interval 3 between sealed heating mechanism 2 and the heat preservation shell 1, is suitable for the filling gas in interval 3. In this embodiment, the gas is conventional air.

A plurality of supporting pieces are arranged on the inner surface of the heat-preservation inner shell, and the sealing heating mechanism 2 is connected with the heat-preservation outer shell 1 through the supporting pieces to form a space 3. The support may be a support post or the like.

The sealing heating mechanism 2 comprises a sealing member 22 forming a closed space for placing the object 100, and a heating member 21 arranged outside the sealing member 22, wherein the heating member 21 is suitable for heating the sealing member 22 so that the sealing member 22 transmits the temperature to the object 100 in the closed space.

Therefore, in the present embodiment, the sealing member 22 is made of a high thermal conductivity material, which may be diamond, ceramic, etc., and is not particularly limited herein, depending on the actual situation.

Specifically, the sealing member 22 has a first side portion and a second side portion which are oppositely disposed, and the heating member 21 is disposed on the first side portion and the second side portion. In other embodiments, the heating member 21 may be disposed at other positions of the sealing member 22, and it is only necessary to ensure that the heating member 21 is disposed at the outer side of the sealing member 22, which is not particularly limited herein, depending on the actual situation.

Also, in the present embodiment, the thickness of the heating member 21 is 0.3mm or less. Within this range, the overall structure of the optical apparatus can be made more compact without affecting the thickness of the optical apparatus.

Meanwhile, the enclosed space is also filled with inert gas, which can be helium, neon and the like, and is not particularly limited herein, depending on the actual situation. The purpose of this is to: the heating element 21 heats the sealing element 22, the thermal conductivity of the sealing element 22 is higher and far higher than that of the air in the space 3, so that the temperature difference of all parts of the sealing element 22 is smaller; meanwhile, the enclosed space is filled with inert gas, and the gas itself has thermal convection, so that the temperature transferred to the target object 100 in the sealing member 22 is uniform, the target object 100 is uniformly heated, the optical performance of the target object 100 is more stable, and performance cracking is not generated in the temperature rise process.

The object 100 includes an optics assembly disposed within the enclosed space, and a shock absorbing thermal insulator 103 disposed between the optics assembly and the inner wall of the seal 22. The damping and heat insulating member 103 is made of a material with low thermal conductivity and low hardness, so as to achieve the purposes of heat insulation and shock absorption. For example, the material of the shock absorbing and heat insulating material 103 is silica gel or the like. In this embodiment, the optical device assembly includes an optical device 101 and an optical platform 102 carrying the optical device 101, wherein the optical device 101 is a grating. The optical platform 102 is made of a material having a thermal conductivity similar to that of the optical devices 101, and plays a role of carrying the optical devices 101, so that the position of each optical device 101 is relatively fixed.

The application also provides optical equipment, which comprises a heat preservation device and an optical assembly arranged in the heat preservation device, wherein the heat preservation device is the heat preservation device.

In summary, the following steps: this application is through being provided with lagging casing 1, and set up in lagging casing 1 and with lagging casing 1 formation interval 3's sealed heating mechanism 2, sealed heating mechanism 2 is including being formed with airtight space's sealing member 22 and the heating member 21 of setting in the sealing member 22 outside, sealing member 22's thermal conductivity is higher, be far above the air in interval 3, make sealing member 22 temperature everywhere differ less, so that the temperature that transmits to the target 100 that sets up in sealing member 22 in is even, thereby make target 100 be heated evenly, in order to guarantee target 100's optical property.

The above is only one specific embodiment of the present application, and any other modifications based on the concept of the present application are considered as the protection scope of the present application.

Claims

1. An insulation device, comprising:

a heat-insulating shell; and

2. The thermal insulating apparatus according to claim 1, wherein a plurality of supporting members are provided on an inner surface of the thermal insulating case, and the sealing heating means is connected to the thermal insulating case through the supporting members to form the interval.

3. The insulating device according to claim 1, wherein the sealing member has first and second oppositely disposed side portions, the heating element being disposed on the first and second side portions.

4. A heat retaining apparatus as claimed in claim 3, wherein the heating element has a thickness of 0.3mm or less.

5. The insulating device of claim 3, wherein the material of the sealing member is a high thermal conductivity material.

6. The insulating device according to claim 3, wherein the closed space is further filled with an inert gas.

7. The thermal device of claim 1, wherein said target includes an optics assembly disposed within said enclosed space, and a shock absorbing thermal shield disposed between said optics assembly and an inner wall of said seal.

8. An optical device, comprising:

a heat preservation device;

an optical assembly disposed within the thermal enclosure;

wherein the heat retaining device is the heat retaining device according to any one of claims 1 to 7.