CN218004801U - Silicon chip inserting mechanism - Google Patents
Silicon chip inserting mechanism Download PDFInfo
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- CN218004801U CN218004801U CN202221492343.0U CN202221492343U CN218004801U CN 218004801 U CN218004801 U CN 218004801U CN 202221492343 U CN202221492343 U CN 202221492343U CN 218004801 U CN218004801 U CN 218004801U
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- sheet
- basket
- piece
- inserted sheet
- bottom plate
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Abstract
The utility model provides a silicon wafer inserting mechanism, which comprises an inserting sheet bottom plate; the sheet basket can be placed on the sheet inserting bottom plate and is used for sheet inserting and circulating operation; the sheet inserting mechanism is arranged on one side of the sheet inserting bottom plate and is used for performing sheet inserting operation on the sheet basket; the piece basket grabbing mechanism is arranged above the inserting piece bottom plate and used for grabbing and moving the piece basket; and the inserting piece detection mechanism is arranged on the inserting piece bottom plate and is positioned at the adjacent position of the placing position of the piece basket, and is used for detecting the inserting piece condition of the piece basket. The beneficial effects of the utility model are that effectively solve and carry out the inserted sheet to the silicon chip at present and many by artifical manual completion, consume the labour, efficiency is lower, and the error is great, the higher problem of cost of labor, a silicon chip inserted sheet mechanism is provided, can realize the automatic inserted sheet of piece basket, and can realize empty blue full basket is got and is put, full basket functions such as keeping in, the labour demand has been reduced, the efficiency is improved, the error is reduced, the cost of labor has been saved, automation, informatization, intellectuality have been realized.
Description
Technical Field
The utility model belongs to the technical field of silicon chip preparation equipment, concretely relates to silicon chip inserted sheet mechanism.
Background
In the silicon wafer preparation process, the silicon wafer needs to be inserted, the silicon wafer is inserted manually at present, labor is consumed, the efficiency is low, the error is large, and the labor cost is high.
Therefore, based on above demand, the utility model provides a silicon chip inserted sheet mechanism can realize the automatic inserted sheet of piece basket, and can realize empty blue full basket and get and put, full basket function such as keep in, has reduced the labour demand, raises the efficiency, reduces the error, has saved the cost of labor, has realized automation, informationization, intellectuality.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the present that proposes among the above-mentioned background art and carrying out the inserted sheet to the silicon chip and many being accomplished by artifical manual, consume the labour, efficiency is lower, and the error is great, the higher problem of cost of labor, a silicon chip inserted sheet mechanism is provided, can realize the automatic inserted sheet of piece basket, and can realize empty blue full basket and get and put, full basket functions such as keeping in, the labour demand has been reduced, the efficiency is improved, the error is reduced, the cost of labor has been saved, automation, informationization, intellectuality have been realized.
In order to solve the technical problem, the utility model discloses a technical scheme is:
the utility model provides a silicon chip inserted sheet mechanism, includes:
the insert bottom plate;
a sheet basket which can be placed on the sheet insertion base plate and performs sheet insertion and circulation operations;
the sheet inserting mechanism is arranged on one side of the sheet inserting bottom plate and is used for performing sheet inserting operation on the sheet basket;
the sheet basket grabbing mechanism is arranged above the insert sheet bottom plate and used for grabbing and moving the sheet basket;
inserted sheet detection mechanism, inserted sheet detection mechanism set up in on the inserted sheet bottom plate, be located the adjacent position of position is placed to the piece basket, it is right to be used for the piece basket inserted sheet condition detects.
Further, the tab substrate comprises:
insert piece district and circulation district, the inserted sheet district is used for placing and carries out the inserted sheet operation piece basket, the circulation district is used for placing the inserted sheet and ends piece basket with treat the inserted sheet piece basket, the inserted sheet district with the circulation district all is provided with and is used for holding piece basket position of piece basket, every piece basket position can hold one piece basket.
Further, still include first sensor, first sensor set up in the piece basket position, be used for detecting whether exist on the piece basket position piece basket and the piece basket is full-load, every be provided with one in the piece basket position first sensor.
Further, the sheet basket grasping mechanism includes:
triaxial manipulator, triaxial manipulator by a root be on a parallel with the cross axle on inserted sheet bottom plate long limit and two vertical axes that are parallel to each other who is connected with it constitute, the cross axle with vertical axis all can be followed and controlled the three direction removal of front and back from top to bottom, triaxial manipulator lower extreme fixed set up in on the inserted sheet bottom plate.
Further, the horizontal shaft or the vertical shaft comprises a servo motor and a speed reducing motor, and each of the servo motor and the speed reducing motor is used for controlling the operation and the movement of the horizontal shaft or the vertical shaft.
Further, still include the clamping jaw, the clamping jaw set up in vertical axis lower extreme, the clamping jaw is used for pressing from both sides and gets the piece basket.
Further, the inserted sheet detection mechanism includes:
the single-shaft mechanical arm is provided with a second sensor, the second sensor is used for detecting the state of the silicon wafer and feeding back the state of the silicon wafer, and the single-shaft mechanical arm can drive the second sensor to move up and down to detect the state of the silicon wafer.
Further, the tab mechanism comprises:
the four-axis robot, the four-axis robot is used for right the piece basket carries out the inserted sheet operation.
Further, each of the wafer baskets can hold a maximum number of 25 wafers.
Compared with the prior art, the utility model has the advantages and positive effect be: the utility model discloses a silicon chip inserted sheet mechanism can realize the automatic inserted sheet of piece basket, and can realize empty blue full basket and get put, full basket function such as keep in, has reduced the labour demand, raises the efficiency, reduces the error, has saved the cost of labor, has realized automation, informationization, intellectuality.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a silicon wafer inserting mechanism according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a three-axis manipulator of a silicon wafer inserting mechanism according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a single-axis manipulator of a silicon wafer inserting mechanism according to an embodiment of the present invention.
In the figure:
1-chip insertion base plate, 2-chip basket, 11-chip insertion area, 12-circulation area, 13-chip basket position, 14-first sensor, 3-three-axis manipulator, 31-horizontal axis, 32-vertical axis, 33-servo motor, 34-speed reducing motor, 35-clamping jaw, 4-single-axis manipulator, 41-second sensor and 5-four-axis robot.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings. It should be understood that the description is intended to be illustrative only and is not intended to limit the scope of the present invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description of the present invention and simplification of description, and are relative positions, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Referring to fig. 1-3, in an embodiment of the present invention, the present invention provides a silicon wafer inserting mechanism, including:
an insert bottom plate 1;
the sheet basket 2 is arranged on the sheet inserting bottom plate 1 and performs sheet inserting and circulating operation;
the sheet inserting mechanism is arranged on one side of the sheet inserting bottom plate 1 and is used for performing sheet inserting operation on the sheet basket 2;
the sheet basket grabbing mechanism is arranged above the insert sheet bottom plate 1 and used for grabbing and moving the sheet basket 2;
inserted sheet detection mechanism, inserted sheet detection mechanism set up on inserted sheet bottom plate 1, are located the adjacent position that 2 positions were placed to piece basket for 2 inserted sheet circumstances to piece basket detect.
Specifically, the insert base plate 1 includes:
insert piece district 11 and circulation district 12, insert piece district 11 is used for placing the piece basket 2 that carries out the inserted sheet operation, and circulation district 12 is used for placing piece basket 2 that the inserted sheet ended and the piece basket 2 of treating the inserted sheet, and inserted sheet district 11 and circulation district 12 all are provided with the piece basket position 13 that is used for holding piece basket 2, and every piece basket position 13 can hold a piece basket 2.
Specifically, still include first sensor 14, first sensor 14 sets up in piece basket position 13 for whether the piece basket 2 that detects exists on piece basket position 13 and piece basket 2 is full load, is provided with a first sensor 14 in each piece basket position 13.
Specifically, the mechanism is grabbed to piece basket includes:
the three-axis manipulator 3 comprises a transverse shaft 31 parallel to the long edge of the inserting sheet bottom plate 1 and two parallel vertical shafts 32 connected with the transverse shaft 31 and the vertical shafts 32, the transverse shaft 31 and the vertical shafts 32 can move in the vertical, left, right, front and back directions, and the lower end of the three-axis manipulator 3 is fixedly arranged on the inserting sheet bottom plate 1.
Specifically, a servo motor 33 and a speed reducing motor 34 are further included, each horizontal shaft 31 or vertical shaft 32 includes a servo motor 33 and a speed reducing motor 34, and the servo motor 33 and the speed reducing motor 34 are used for controlling the operation and movement of the horizontal shaft 31 or vertical shaft 32.
Specifically, the clamping jaw 35 is further included, the clamping jaw 35 is arranged at the lower end of the vertical shaft 32, and the clamping jaw 35 is used for clamping the sheet basket 2. Specifically, a plurality of clamping jaws 35 may be provided at the lower end of one vertical shaft 32.
Specifically, inserted sheet detection mechanism includes:
the single-shaft mechanical arm 4 is provided with a second sensor 41 on the single-shaft mechanical arm 4, the second sensor 41 is used for detecting the state of the silicon wafer and feeding back the state, and the single-shaft mechanical arm 4 can drive the second sensor 41 to move up and down to detect the state of the silicon wafer. Specifically, the single-axis robot 4 is also provided with a servo motor and a reduction motor.
Specifically, the tab mechanism includes: four-axis robot 5, four-axis robot 5 are used for carrying out the inserted sheet operation to piece basket 2.
Specifically, each wafer basket 2 can hold a maximum number of 25 wafers.
When the sheet inserting mechanism is used, taking 3 sheet baskets 2 as an example, firstly, 3 empty sheet baskets 2 are manually placed on a sheet basket position 13 of a circulation area 12, then the sheet inserting mechanism is started, a first sensor 14 detects that the sheet basket position 13 has the sheet basket 2 placed thereon and feeds back the sheet basket position, a three-axis manipulator 3 starts to move, a clamping jaw 35 captures the sheet baskets 2, a transverse shaft 31 and a vertical shaft 32 move, the sheet baskets 2 are placed on the sheet basket position 13 of the sheet inserting area 11, and a servo motor 33 and a speed reducing motor 34 are used for controlling the movement and the rotation of the transverse shaft 31 and the vertical shaft 32. After the placement, the single-shaft manipulator 4 drives the second sensor 41 to detect and confirm the wafer basket 2 in the wafer insertion area 11, and the four-shaft robot 5 grabs the silicon wafer and moves to the wafer basket position 13 to perform the wafer insertion operation. A maximum of 25 silicon wafers can be placed in one wafer basket 2. Specifically, before carrying out the inserted sheet operation at every turn, unipolar manipulator 4 all need detect and confirm, prevents that conditions such as lamination, roll-off from influencing the inserted sheet quality, and this time inserted sheet is accomplished the back, and triaxial manipulator 3 snatchs and places the piece basket 2 that is full-load at circulation district 12, and after 3 piece baskets 2 were full-load, first sensor 14 sent the feedback, took away full-load piece basket 2 by the manual work.
Specifically, in the circulation area 12, after the initial sheet basket 3 is taken away for sheet insertion operation, the three-axis manipulator 3 grabs a new empty sheet basket 3 and places the new empty sheet basket 3 in the circulation area 12, and after the sheet insertion of the initial sheet basket 3 in the sheet insertion area 11 is completed, the new empty sheet basket 3 is grabbed and placed in the circulation area 12 and waits for being taken away, and the sheet insertion operation is continued.
The utility model discloses the advantage and the positive effect that produce are:
the utility model discloses a silicon chip inserted sheet mechanism can realize the automatic inserted sheet of piece basket, and can realize empty blue full basket and get put, full basket function such as keep in, has reduced the labour demand, raises the efficiency, reduces the error, has saved the cost of labor, has realized automation, informationization, intellectuality.
It is to be understood that the above-described embodiments of the present invention are merely illustrative of or explaining the principles of the invention and are not to be construed as limiting the invention. Therefore, any modification, equivalent replacement, improvement and the like made without departing from the spirit and scope of the present invention should be included in the protection scope of the present invention. Further, it is intended that the appended claims cover all such variations and modifications as fall within the scope and boundaries of the appended claims or the equivalents of such scope and boundaries.
Claims (9)
1. The utility model provides a silicon chip inserted sheet mechanism which characterized in that includes:
the insert bottom plate;
a sheet basket which can be placed on the sheet insertion base plate and performs sheet insertion and circulation operations;
the sheet inserting mechanism is arranged on one side of the sheet inserting bottom plate and is used for performing sheet inserting operation on the sheet basket;
the sheet basket grabbing mechanism is arranged above the insert sheet bottom plate and used for grabbing and moving the sheet basket;
inserted sheet detection mechanism, inserted sheet detection mechanism set up in on the inserted sheet bottom plate, be located the adjacent position of position is placed to the piece basket, be used for right piece basket inserted sheet condition detects.
2. The silicon wafer inserting mechanism according to claim 1, wherein the inserting sheet bottom plate comprises:
insert piece district and circulation district, the inserted sheet district is used for placing and carries out the inserted sheet operation piece basket, the circulation district is used for placing the inserted sheet and ends piece basket with treat the inserted sheet piece basket, the inserted sheet district with the circulation district all is provided with and is used for holding piece basket position of piece basket, every piece basket position can hold one piece basket.
3. The silicon wafer inserting mechanism according to claim 2, characterized in that:
still include first sensor, first sensor set up in the piece basket position, be used for detecting whether exist on the piece basket position piece basket and the piece basket is full-load, every be provided with one in the piece basket position first sensor.
4. The silicon wafer inserting mechanism according to any one of claims 1 to 3, wherein the wafer basket grabbing mechanism comprises:
triaxial manipulator, triaxial manipulator by a root be on a parallel with the cross axle on inserted sheet bottom plate long limit and two vertical axes that are parallel to each other who is connected with it constitute, the cross axle with vertical axis all can be followed and controlled the three direction removal of front and back from top to bottom, triaxial manipulator lower extreme fixed set up in on the inserted sheet bottom plate.
5. The silicon wafer inserting mechanism according to claim 4, wherein:
the horizontal shaft or the vertical shaft comprises one servo motor and one speed reducing motor, and the servo motor and the speed reducing motor are used for controlling the operation and the movement of the horizontal shaft or the vertical shaft.
6. The silicon wafer inserting mechanism according to claim 5, wherein:
still include the clamping jaw, the clamping jaw set up in the vertical axis lower extreme, the clamping jaw is used for pressing from both sides and gets piece basket.
7. The silicon wafer inserting mechanism according to any one of claims 1-3 or 5-6, wherein the inserting detection mechanism comprises:
the single-shaft mechanical arm is provided with a second sensor, the second sensor is used for detecting the state of the silicon wafer and feeding back the state of the silicon wafer, and the single-shaft mechanical arm can drive the second sensor to move up and down to detect the state of the silicon wafer.
8. The silicon wafer inserting mechanism according to claim 7, wherein the inserting mechanism comprises:
the four-axis robot, the four-axis robot is used for right the piece basket carries out the inserted sheet operation.
9. The silicon wafer inserting mechanism according to claim 8, wherein:
each of the wafer baskets can hold a maximum number of 25 wafers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221492343.0U CN218004801U (en) | 2022-06-15 | 2022-06-15 | Silicon chip inserting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221492343.0U CN218004801U (en) | 2022-06-15 | 2022-06-15 | Silicon chip inserting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218004801U true CN218004801U (en) | 2022-12-09 |
Family
ID=84300351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221492343.0U Active CN218004801U (en) | 2022-06-15 | 2022-06-15 | Silicon chip inserting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218004801U (en) |
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2022
- 2022-06-15 CN CN202221492343.0U patent/CN218004801U/en active Active
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