CN212062407U - Full-automatic loading and unloading machine for silicon wafers - Google Patents
Full-automatic loading and unloading machine for silicon wafers Download PDFInfo
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- CN212062407U CN212062407U CN202021135796.9U CN202021135796U CN212062407U CN 212062407 U CN212062407 U CN 212062407U CN 202021135796 U CN202021135796 U CN 202021135796U CN 212062407 U CN212062407 U CN 212062407U
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Abstract
The utility model discloses a full-automatic silicon wafer feeding and discharging machine, which comprises a basket circulation mechanism, a sheet reversing mechanism and a boat conveying mechanism which are arranged in sequence, wherein the basket circulation mechanism conveys a full-load basket/an empty basket to the sheet reversing mechanism, the boat conveying mechanism conveys an empty boat/a full-load boat to the sheet reversing mechanism, and the sheet reversing mechanism carries out feeding and discharging of silicon wafers; the flower basket circulation mechanism is provided with a flower basket conveying station, a flower basket overturning station, a flower basket rotating station and a flower basket transferring station which are sequentially butted; the boat conveying mechanism is provided with a boat rotating station and a boat overturning station which are sequentially butted; the rewinding mechanism comprises a rewinding gantry, a first top plate assembly, a first regulating assembly, a second top plate assembly and a second regulating assembly. This full-automatic material loading and unloading machine of silicon chip has realized bearing the automatic unloading of going up between basket of flowers and the metal boat, and whole process need not manual operation, has reduced intensity of labour, has improved work efficiency.
Description
Technical Field
The utility model belongs to the solar photovoltaic field, concretely relates to full-automatic material loading and unloading machine of silicon chip.
Background
In recent years, with the improvement of environmental awareness, renewable energy is increasingly utilized, and the application of solar cells tends to be wide. The silicon chip is a carrier of the solar cell, and the quality of the silicon chip directly determines the conversion efficiency of the solar cell.
In the novel Atomic Layer Deposition (ALD) process of solar cell production process, the last unloading operation of silicon chip needs to be carried out, silicon chip in being about to bear basket of flowers and the metal boat is mutually led, specifically including leading out the silicon chip in the metal boat behind the ALD process to empty basket of flowers to and lead in the silicon chip that bears in the basket of flowers before the ALD process to empty metal boat. At present, the loading and unloading operation of silicon wafers is usually manually completed, and a part of manufacturers adopt semi-automatic loading and unloading, so that the defects of high labor intensity and low efficiency in the loading and unloading operation of the silicon wafers exist, the fragment rate of manual operation is high, and the quality of the silicon wafers cannot be guaranteed.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a full-automatic material loading and unloading machine of silicon chip to overcome the above-mentioned not enough that prior art exists.
The utility model adopts the technical proposal that: the full-automatic silicon wafer loading and unloading machine comprises a basket circulation mechanism, a sheet reversing mechanism and a boat conveying mechanism which are sequentially arranged, wherein the basket circulation mechanism conveys a fully-loaded basket/empty basket to the sheet reversing mechanism, the boat conveying mechanism conveys an empty boat/a fully-loaded boat to the sheet reversing mechanism, and the sheet reversing mechanism is used for loading and unloading silicon wafers;
the flower basket circulation mechanism is provided with a flower basket conveying station, a flower basket overturning station, a flower basket rotating station and a flower basket transferring station which are sequentially butted; the boat conveying mechanism is provided with a boat rotating station and a boat overturning station which are sequentially butted; the rewinding mechanism comprises a rewinding gantry, a first top plate assembly, a first regulating assembly, a second top plate assembly and a second regulating assembly.
As an improvement to the scheme, the basket circulation mechanism comprises an upper layer circulation mechanism and a lower layer circulation mechanism, the full-load basket/empty basket flows into the rewinding mechanism through the lower layer circulation mechanism, and the empty basket/full-load basket which finishes feeding and discharging on the rewinding mechanism flows out through the upper layer circulation mechanism.
As an improvement to the scheme, a basket lifting mechanism is arranged on the basket transferring station and used for lifting the empty baskets/full-load baskets which are loaded and unloaded on the rewinding mechanism to be in butt joint with the upper layer flow rotating mechanism.
As an improvement to the above scheme, the two sets of basket circulation mechanisms are respectively arranged on two sides of the rewinding mechanism; two sets of the inverted gantry, the first top plate assembly and the first regular assembly are arranged.
As an improvement to the scheme, a clamping assembly and a turnover assembly are arranged on the flower basket turnover station, and a gripping assembly and a rotating assembly are arranged on the flower basket rotating station.
As an improvement to the above scheme, the clamping assemblies are arranged on two sides of the overturning station, the overturning assembly comprises a first servo motor, and the clamping assemblies are connected with the first servo motor; the gripping assembly is disposed above the rotation station, the rotation assembly including a second servo motor to which the gripping assembly is connected.
As an improvement to the scheme, a servo motor and a basket conveyer belt are arranged on the basket transfer station.
As an improvement to the above scheme, a positioning component and a boat rotating component are arranged on the boat rotating station, and the boat rotating component is connected with the positioning component; and a boat overturning component is arranged on the boat overturning station and connected with the boat rotating component.
As an improvement to the above scheme, the positioning assembly comprises a positioning plate, the boat rotating assembly comprises a third servo motor, the boat overturning assembly comprises a fourth servo motor, and a screw nut translation assembly is arranged on the boat overturning station.
As an improvement to the above scheme, the first top plate assembly and the second top plate assembly comprise a plurality of silicon wafer supporting teeth, the first regular assembly and the second regular assembly comprise a plurality of regular side teeth, and the silicon wafer supporting teeth and the regular side teeth are zirconia ceramic columnar teeth.
Has the advantages that: be different from prior art, the utility model provides a full-automatic material loading and unloading machine of silicon chip, full-load basket of flowers/empty basket of flowers process basket circulation mechanism is conveyed to in the mechanism of rewinding, empty metal boat/full-load metal boat process the boat transport mechanism moves extremely in the mechanism of rewinding carry out the last unloading of silicon chip in the mechanism of rewinding. This full-automatic material loading and unloading machine of silicon chip has realized bearing the automatic unloading of going up between basket of flowers and the metal boat, and whole process need not manual operation, has reduced intensity of labour, has improved work efficiency, has avoided the damage that manual work probably caused the battery piece simultaneously, has reduced the piece rate, has improved the stability of quality of silicon chip.
Drawings
FIG. 1 is a schematic structural diagram of a full-automatic silicon wafer loading and unloading machine in an embodiment of the present application in a front view;
FIG. 2 is a schematic top view of an automatic silicon wafer loading and unloading machine according to an embodiment of the present disclosure;
fig. 3 is a left side view structural schematic diagram of a full-automatic silicon wafer loading and unloading machine in the embodiment of the present application.
Detailed Description
In the description of the present invention, it is to be understood that the terms "upper", "lower", "left", "right", "top", "bottom", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless otherwise specified. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.
The utility model provides a full-automatic material loading and unloading machine of silicon chip is applied to the solar photovoltaic field for the automatic last unloading operation of accomplishing the silicon chip.
Please refer to fig. 1-3, fig. 1, 2, and 3 respectively show the main view structure, the overlook structure, and the side view structure of the full-automatic silicon wafer feeding and discharging machine according to the embodiment of the present invention, the full-automatic silicon wafer feeding and discharging machine includes a basket circulation mechanism 10, a sheet reversing mechanism 20, and a boat transfer mechanism 30, which are sequentially disposed, the basket circulation mechanism 10 transports a full-load basket/empty basket 100 to the sheet reversing mechanism 20, the boat transfer mechanism 30 transfers an empty boat/a full-load boat 200 to the sheet reversing mechanism 20, and the loading and unloading of the silicon wafer are performed on the sheet reversing mechanism 20.
Specifically, on the sheet-reversing mechanism 20, the silicon wafers in the full-load basket 100 are transferred to the empty metal boat 200, or the silicon wafers on the full-load metal boat 200 are transferred to the empty basket 100.
The basket circulation mechanism 10 is provided with a basket conveying station 101, a basket turning station 102, a basket rotating station 103 and a basket transferring station 104 which are sequentially butted. Full-load basket of flowers/empty basket of flowers 100 passes through the AGV dolly and shifts to on the basket of flowers conveying station 101, can hold a plurality ofly on the basket of flowers conveying station 101 full-load basket of flowers/empty basket of flowers 100 on this station, full-load basket of flowers/empty basket of flowers 100 is vertical be provided with conveyer on the basket of flowers conveying station 101, by conveyer transports this full-load basket of flowers/empty basket of flowers 100 extremely on the basket of flowers upset station 102.
On the basket turning station 102, the full-load basket/empty basket 100 is turned over for 90 degrees and is turned over from a vertical state to a horizontal state, so that the rear-section silicon wafer is convenient to transfer; and then the full-load/empty basket 100 reaches the rotating station 103, and at the station, the full-load/empty basket 100 rotates 180 degrees in a horizontal state to adjust the opening direction of the full-load/empty basket 100, so that the front and back of the silicon wafer meet the process requirements.
Further, a clamping component 11 and a turning component are arranged on the basket turning station 102, the clamping component 11 clamps and fixes the full-load basket/empty basket 100, and the turning component operates to turn the full-load basket/empty basket 100 by 90 °.
Furthermore, the clamping assemblies 11 are disposed at two sides of the turning station 102, the turning assembly includes a first servo motor, the clamping assembly 11 is connected to the first servo motor, and the first servo motor drives the clamping assembly 11 to turn 90 °, so as to drive the full-load basket/empty basket 100 to turn 90 °.
Further, a gripping assembly 12 and a rotating assembly are arranged on the basket rotating station 103, the full-load basket/empty basket 100 is gripped and fixed by the gripping assembly 12, and the rotating assembly operates to horizontally rotate the full-load basket/empty basket 100 by 180 degrees.
Furthermore, the gripping assembly 12 is disposed above the rotating station 103, the rotating assembly includes a second servo motor, the gripping assembly 12 is connected to the second servo motor, and after the gripping assembly 12 descends to grip the full/empty basket 100, the second servo motor drives the gripping assembly 12 to rotate horizontally by 180 °, so as to drive the full/empty basket 100 to rotate horizontally by 180 °.
The full-load flower basket/empty flower basket 100 in a horizontal state on the flower basket rotating station 103 runs to the flower basket transferring station 104, a servo motor 13 and a flower basket conveying belt are arranged on the flower basket transferring station 104, the full-load flower basket/empty flower basket 100 runs to the flower basket conveying belt, the servo motor 13 drives the flower basket conveying belt to run, and the full-load flower basket/empty flower basket 100 is conveyed to a corresponding bearing flower basket station on the rewinding mechanism 20.
The boat conveying mechanism 30 is provided with a boat rotating station 301 and a boat overturning station 302 which are sequentially butted, the empty metal boat/full metal boat 200 in a vertical state is sequentially fed onto the boat rotating station 301 and the boat overturning station 302, and on the boat rotating station 301, the empty metal boat/full metal boat 200 is rotated 180 degrees in a vertical state, so that the opening direction of the empty metal boat/full metal boat 200 meets the process requirement; then, at the boat turning station 302, the empty/full metal boat 200 is turned from the vertical state to the horizontal state, which facilitates the transfer of the rear silicon wafer.
Further, a positioning component 31 and a boat rotating component are arranged on the boat rotating station 301, the boat rotating component is connected with the positioning component 31, a boat overturning component is arranged on the boat overturning station 302, and the boat overturning component is connected with the boat rotating component. The positioning component 31 fixes the empty/full-load metal boat 200, and the boat rotating component operates to make the positioning component 31 drive the empty/full-load metal boat 200 to rotate 180 degrees in a vertical state, and then the boat overturning component operates to overturn the empty/full-load metal boat 200 by 90 degrees.
Furthermore, the positioning assembly 13 includes a positioning plate, the boat rotating assembly includes a third servo motor, the boat overturning assembly includes a fourth servo motor, the third servo motor is connected to the positioning plate, and the fourth servo motor is connected to the third servo motor.
A screw nut translation assembly is arranged on the boat turnover station 302, and the empty metal boat/full-load metal boat 200 turned over by the boat turnover assembly is conveyed to a corresponding metal boat station on the wafer reversing mechanism 20 by the translation assembly.
Referring to fig. 1 and 3, the rewinding mechanism 20 includes a rewinding gantry 21, a first top plate assembly 22, a first regulating assembly 23, a second top plate assembly 24, and a second regulating assembly 25, the first top plate assembly 22 and the first regulating assembly 23 are disposed on the basket carrying station, and the second top plate assembly 24 and the second regulating assembly 25 are disposed on the boat carrying station.
During silicon wafer loading and unloading operation, the first top plate assembly 22/the second top plate assembly 24 operate to jack up the silicon wafers in the fully loaded flower basket 100/the fully loaded metal boat 200, the first regular assembly 23/the second regular assembly 25 operate to regular the pushed silicon wafers, the inverted gantry 21 captures the regular silicon wafers, and the silicon wafers are transferred to the empty metal boat 200/the empty flower basket 100.
With reference to fig. 2, in the present embodiment, two sets of the basket circulation mechanisms 10 are respectively disposed on two sides of the sheet rewinding mechanism 20, and the two sets of the basket circulation mechanisms 10 have the same structure, and can synchronously operate to improve the efficiency of feeding silicon wafers and improve the productivity; correspondingly, the reverse gantry 21, the first top plate assembly 22 and the first structured assembly 23 are provided with two sets.
Further, each set of the basket circulation mechanism 10 can simultaneously circulate two full-load baskets/empty baskets 100, and the boat transfer mechanism 30 can simultaneously transfer two empty/full-load metal boats 200.
In this embodiment, first top piece subassembly 22, second top piece subassembly 24 include that a plurality of silicon chips hold in the palm the tooth, a plurality of silicon chips hold in the palm the vertical side by side setting of tooth, first regular subassembly 23, the regular subassembly 25 of second include a plurality of regular side teeth, a plurality of regular side tooth levels set up side by side, a plurality of silicon chips hold in the palm the tooth and bear the silicon chip in full-load basket of flowers 100/full-load metal boat 200 and upward movement in order to hold up the silicon chip, a plurality of regular side teeth are close to each other and are acted on the position of silicon chip lateral part normal silicon chip to the unloading of silicon chip is convenient for.
Furthermore, the silicon wafer supporting teeth and the regular side teeth are zirconia ceramic columnar teeth, and the silicon wafer is in line contact with the arc surfaces of the columnar side teeth, so that the scratching probability of the silicon wafer is reduced, and the quality of the silicon wafer is improved.
With continued reference to fig. 1, in a preferred embodiment, the basket circulation mechanism 10 includes an upper circulation mechanism 10-1 and a lower circulation mechanism 10-2, the full-load baskets/empty baskets 100 transferred from the AGV to the basket circulation mechanism 10 flow into the reversing mechanism 20 through the lower circulation mechanism 10-2, and the empty baskets/full-load baskets 100-1 that have completed loading and unloading on the reversing mechanism 20 flow out of the basket circulation mechanism 10 through the upper circulation mechanism 10-1 in a direction opposite to the inflow direction of the full-load baskets/empty baskets 100.
It can be understood that the upper layer rotation mechanism 10-1 and the lower layer rotation mechanism 10-2 have the same structure, and each include a basket conveying station 101, a basket overturning station 102, a basket rotating station 103, and a basket transferring station 104, which are sequentially arranged.
Further, a basket lifting mechanism (not shown in the figure) is arranged on the basket transferring station 104, and is used for lifting the empty baskets/full baskets which are loaded and unloaded on the sheet reversing mechanism to be in butt joint with the upper layer flow rotating mechanism 10-1. The basket lifting mechanism comprises a servo motor and a screw nut lifting assembly.
According to the full-automatic silicon wafer loading and unloading machine provided by the embodiment, the basket conveying station 101 can automatically receive a bearing basket of an AGV, and the bearing basket can automatically flow among the basket overturning station 102, the basket rotating station 103, the basket transferring station 104 and the rewinding mechanism 20; the orientation of the bearing flower basket is automatically adjusted in place according to process requirements on the flower basket overturning station 102 and the flower basket rotating station 103, the orientation of the metal boat is automatically adjusted according to the process requirements by the boat conveying mechanism 30, so that the silicon wafer can be conveniently loaded and unloaded by the wafer rewinding mechanism 20, and the full-automatic loading and unloading machine for the silicon wafer realizes automatic loading and unloading between the bearing flower basket and the metal boat, does not need manual operation in the whole process, reduces the labor intensity and improves the working efficiency.
The above only is the embodiment of the present invention, not limiting the patent scope of the present invention, all the equivalent structures or equivalent processes that are used in the specification and the attached drawings or directly or indirectly applied to other related technical fields are included in the patent protection scope of the present invention.
Claims (10)
1. A full-automatic silicon wafer loading and unloading machine is characterized by comprising a basket circulation mechanism, a sheet reversing mechanism and a boat conveying mechanism which are sequentially arranged, wherein the basket circulation mechanism conveys full-load baskets/empty baskets to the sheet reversing mechanism, the boat conveying mechanism conveys empty metal boats/full-load metal boats to the sheet reversing mechanism, and the sheet reversing mechanism is used for loading and unloading silicon wafers;
the flower basket circulation mechanism is provided with a flower basket conveying station, a flower basket overturning station, a flower basket rotating station and a flower basket transferring station which are sequentially butted; the boat conveying mechanism is provided with a boat rotating station and a boat overturning station which are sequentially butted; the rewinding mechanism comprises a rewinding gantry, a first top plate assembly, a first regulating assembly, a second top plate assembly and a second regulating assembly.
2. The automatic silicon wafer feeding and discharging machine according to claim 1, wherein the basket circulation mechanism comprises an upper circulation mechanism and a lower circulation mechanism, the full-load baskets/empty baskets flow into the inverting mechanism through the lower circulation mechanism, and the empty baskets/full-load baskets that have completed feeding and discharging on the inverting mechanism flow out through the upper circulation mechanism.
3. The automatic silicon wafer feeding and discharging machine according to claim 2, wherein a basket lifting mechanism is arranged on the basket transferring station and used for lifting an empty basket/a full basket which is loaded and unloaded on the reversing mechanism to be in butt joint with the upper layer flow rotating mechanism.
4. The full-automatic silicon wafer feeding and discharging machine according to claim 1, wherein two sets of basket circulation mechanisms are arranged on two sides of the rewinding mechanism respectively; two sets of the inverted gantry, the first top plate assembly and the first regular assembly are arranged.
5. The full-automatic silicon wafer feeding and discharging machine according to claim 1, wherein a clamping assembly and a turning assembly are arranged on the basket turning station, and a gripping assembly and a rotating assembly are arranged on the basket rotating station.
6. The full-automatic silicon wafer feeding and discharging machine according to claim 5, wherein the clamping assemblies are arranged on two sides of the overturning station, the overturning assembly comprises a first servo motor, and the clamping assemblies are connected with the first servo motor; the gripping assembly is disposed above the rotation station, the rotation assembly including a second servo motor to which the gripping assembly is connected.
7. The full-automatic silicon wafer feeding and discharging machine according to claim 1, wherein a servo motor and a basket conveyer belt are arranged on the basket transfer station.
8. The full-automatic silicon wafer feeding and discharging machine according to claim 1, wherein a positioning assembly and a boat rotating assembly are arranged on the boat rotating station, and the boat rotating assembly is connected with the positioning assembly; and a boat overturning component is arranged on the boat overturning station and connected with the boat rotating component.
9. The full-automatic silicon wafer feeding and discharging machine according to claim 8, wherein the positioning assembly comprises a positioning plate, the boat rotating assembly comprises a third servo motor, the boat overturning assembly comprises a fourth servo motor, and a screw nut translation assembly is arranged on the boat overturning station.
10. The full-automatic silicon wafer feeding and discharging machine according to any one of claims 1 to 9, wherein the first top plate assembly and the second top plate assembly comprise a plurality of silicon wafer support teeth, the first regular assembly and the second regular assembly comprise a plurality of regular side teeth, and the silicon wafer support teeth and the regular side teeth are zirconia ceramic columnar teeth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021135796.9U CN212062407U (en) | 2020-06-18 | 2020-06-18 | Full-automatic loading and unloading machine for silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021135796.9U CN212062407U (en) | 2020-06-18 | 2020-06-18 | Full-automatic loading and unloading machine for silicon wafers |
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| Publication Number | Publication Date |
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| CN212062407U true CN212062407U (en) | 2020-12-01 |
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| CN202021135796.9U Active CN212062407U (en) | 2020-06-18 | 2020-06-18 | Full-automatic loading and unloading machine for silicon wafers |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114203611A (en) * | 2022-01-12 | 2022-03-18 | 湖南红太阳光电科技有限公司 | Automatic feeding and discharging system for vertical furnace and vertical furnace body |
| CN118073167A (en) * | 2024-04-19 | 2024-05-24 | 南京原磊纳米材料有限公司 | A multi-piece anti-skid automatic pick-and-place cavity mechanism |
-
2020
- 2020-06-18 CN CN202021135796.9U patent/CN212062407U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114203611A (en) * | 2022-01-12 | 2022-03-18 | 湖南红太阳光电科技有限公司 | Automatic feeding and discharging system for vertical furnace and vertical furnace body |
| CN118073167A (en) * | 2024-04-19 | 2024-05-24 | 南京原磊纳米材料有限公司 | A multi-piece anti-skid automatic pick-and-place cavity mechanism |
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