CN218004796U - Magnetic field vacuum heat treatment device with cantilever structure - Google Patents
Magnetic field vacuum heat treatment device with cantilever structure Download PDFInfo
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- CN218004796U CN218004796U CN202222300738.2U CN202222300738U CN218004796U CN 218004796 U CN218004796 U CN 218004796U CN 202222300738 U CN202222300738 U CN 202222300738U CN 218004796 U CN218004796 U CN 218004796U
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 103
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 31
- 238000001816 cooling Methods 0.000 claims abstract description 29
- 238000007669 thermal treatment Methods 0.000 claims abstract description 11
- 230000007246 mechanism Effects 0.000 claims description 14
- 238000007789 sealing Methods 0.000 claims description 14
- 230000005540 biological transmission Effects 0.000 claims description 12
- 239000010453 quartz Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 10
- 239000004065 semiconductor Substances 0.000 abstract description 9
- 230000036760 body temperature Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
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- 230000008569 process Effects 0.000 description 5
- 239000000306 component Substances 0.000 description 4
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- 235000012431 wafers Nutrition 0.000 description 3
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- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004321 preservation Methods 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
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- 230000005489 elastic deformation Effects 0.000 description 1
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- 239000007789 gas Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Abstract
The utility model discloses a magnetic field vacuum heat treatment device with a cantilever structure, which comprises a bracket, wherein a superconducting magnet is arranged on one side of the bracket, a guide rail is arranged on the surface on the other side, a heat treatment furnace is arranged in the superconducting magnet, one end of the heat treatment furnace is connected with a vacuum system, the other end of the heat treatment furnace is in an open shape, and a cantilever assembly is arranged on one side of the opening; the cantilever assembly consists of a horizontal conveying part and a vertical supporting part, the bottom end of the vertical supporting part is fixedly connected with a sliding block arranged on a guide rail, and the horizontal conveying part is provided with a storage cavity for placing a workpiece to be heat-treated and a check ring matched with an opening of the heat treatment furnace; in addition, the device also comprises an air cooling structure on the heat treatment furnace and a water cooling structure on the cantilever assembly and a temperature control element in the storage cavity. The utility model discloses the device has that magnetic field homogeneity is high, the furnace body temperature uniformity is good, the vacuum is high, cooling rate is steerable, the cantilever subassembly warp little, cooling efficiency is high, cost of manufacture low grade advantage, can be applicable to semiconductor material thermal treatment better.
Description
Technical Field
The utility model belongs to the technical field of magnetic field vacuum heat treatment equipment, concretely relates to magnetic field vacuum heat treatment device with cantilever structure for carry out the heat treatment to semiconductor material (like wafer, film etc.).
Background
As is well known, magnetic field heat treatment refers to a heat treatment process in which a material is cooled after being kept warm for a certain period of time in a magnetic field environment or is cooled in a magnetic field at a certain speed. The magnetic field heat treatment can release the internal stress of the material sample internal or surface film material, stabilize the material performance, and obtain the oriented magnetic field for the magnetic material, so as to convert the material performance in the clean environment and realize the special function.
At present, magnetic field heat treatment is generally carried out in a room temperature environment or a low vacuum environment, but the room temperature or the low vacuum condition can not meet the treatment of workpieces with requirements on a strong magnetic field and a high vacuum environment, such as semiconductor wafers, thin films and semiconductor materials thereof.
The uniformity of all directions of semiconductor materials processed in a magnetic field vacuum heat treatment device needs to be strictly controlled, but in the prior art, a fixed sample frame is generally arranged in a cavity and is difficult to guarantee, and in addition, parameters such as cooling time, cooling speed, cooling temperature and the like cannot be accurately controlled, so that the product effect after heat treatment is not ideal, and the requirement of people on the high performance of the semiconductor is difficult to meet.
In view of the above, the present inventors propose a magnetic field vacuum heat treatment apparatus with a cantilever structure to solve the above technical problems.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome above-mentioned prior art's shortcoming, provide a magnetic field vacuum heat treatment device with cantilever structure, mainly used heats annealing to semiconductor wafer, film and other samples etc. under strong magnetic field, high vacuum environment, through the vacuum furnace cooling down or let in inert gas and cool off fast, accomplish the required heat treatment process of work piece.
The utility model aims at solving through the following technical scheme:
a magnetic field vacuum heat treatment device with a cantilever structure comprises a bracket, wherein a superconducting magnet for generating a magnetic field is installed on one longitudinal side of the bracket, a guide rail is paved on the surface of the other longitudinal side of the bracket, a heat treatment furnace for heating is arranged in the superconducting magnet, one end of the heat treatment furnace is connected with a vacuum system, the other end of the heat treatment furnace is in an open shape, and a cantilever assembly for loading and taking a workpiece to be heat treated is arranged on one side of the open end;
wherein the cantilever assembly consists of a horizontal conveying part and a vertical supporting part which form "
The structure is characterized in that the central line of the horizontal conveying part coincides with the central line of the heat treatment furnace, the bottom end of the vertical supporting part is fixedly connected with a sliding block arranged on the guide rail, and one end of the horizontal conveying part, which is close to the opening of the heat treatment furnace, is provided with a part for placing to-be-heatedAnd a retainer ring matched with one end of the opening of the heat treatment furnace is arranged at the position of the horizontal conveying part close to the vertical supporting part and is used for sealing the cavity of the heat treatment furnace.
Further, the heat treatment furnace is longitudinally arranged in the superconducting magnet central hole, and the axis of the heat treatment furnace is overlapped with the axis of the superconducting magnet central hole.
Further, the heat treatment furnace comprises a quartz tube layer, a heating body layer, a heat preservation layer and a double-layer water-cooling non-magnetic water cooling jacket from inside to outside in sequence, a first reflecting screen is arranged at one end, close to a vacuum system, in the chamber of the heat treatment furnace, and an O-shaped sealing ring is arranged at the other end of the heat treatment furnace and outside the quartz tube layer.
Furthermore, a compressed air inlet and an air outlet for cooling the workpiece are respectively arranged at two ends of the heat treatment furnace, the air inlet is communicated with compressed air output equipment through a pipeline, and a compressed air flow meter is arranged on the pipeline.
Furthermore, the storage cavity is positioned at the front end of the horizontal conveying part, the top of the storage cavity is provided with an opening and is hinged with a box cover, a rotating disc for supporting and rotating a workpiece to be heat-treated is arranged at the bottom in the storage cavity, the vertical bottom end of the rotating disc is in meshing transmission with one end of a horizontally arranged transmission rod through a bevel gear, and the other end of the transmission rod penetrates through a check ring and then is connected with a first motor fixedly arranged on the outer side of the check ring;
and sealing parts are arranged on the outer side wall of the retainer ring and at the joint of the transmission rod and the first motor.
Furthermore, a water cooling coil is wound on the outer wall of the horizontal conveying part and positioned at the storage cavity, a water inlet and a water outlet of the water cooling coil are both arranged on the outer side of the check ring, the water outlet is positioned below the water inlet, and a water flow meter is arranged at the water inlet;
and a temperature measuring element is arranged in the storage cavity and positioned at the periphery of the rotating disk.
Furthermore, a second reflecting screen is arranged on the outer wall of the horizontal conveying part and between the storage cavity and the retainer ring.
Furthermore, a driving mechanism is arranged on the support and above the guide rail, and the driving mechanism is used for driving the sliding block and the cantilever assembly to move linearly along the direction of the guide rail.
Furthermore, the driving mechanism comprises a lead screw horizontally arranged above the guide rail, bearing seats are arranged at two ends of the lead screw, the bearing seats are fixedly arranged on the surface of the support, the bearing seats are movably connected with the lead screw through installed bearings, the lead screw is in threaded connection with the sliding block, and one end, far away from the heat treatment furnace, of the lead screw extends out of the bearing seats and then is connected with an output shaft of the second motor through a coupler.
Furthermore, the device also comprises a detachable complete machine protective cover, the complete machine protective cover completely covers the superconducting magnet, the guide rail, the heat treatment furnace, the vacuum system and the cantilever assembly, and an operation window is arranged at the position of the cantilever assembly.
Compared with the prior art, the utility model discloses following effect has:
the invention relates to a magnetic field vacuum heat treatment device with a cantilever structure, which comprises superconducting magnets, a heat treatment furnace, a vacuum system, a cantilever assembly, a driving mechanism and other core components; wherein, set up the storage chamber that is used for placing the work piece of treating heat treatment on the cantilever subassembly, and be provided with the rotary disk in the storage intracavity, not only conveniently get and put the work piece, can make work piece all directions be heated evenly moreover, in addition through the compressed air flow's to business turn over furnace body subassembly control and the cantilever subassembly on the discharge control of water cooling coil, realize heat treatment cooling rate's accurate control to improve heat treatment's effect, satisfy people's requirement to semiconductor high performance.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description, serve to explain the principles of the invention.
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without inventive labor.
FIG. 1 is a schematic view of the overall structure of a magnetic field vacuum heat treatment apparatus with a cantilever conveying structure according to the present invention;
FIG. 2 is a schematic view of the heat treatment furnace of the present invention;
fig. 3 is a schematic structural diagram of the cantilever assembly of the present invention.
Wherein: 1 is a bracket; 2 is a superconducting magnet; 3 is a guide rail; 4, a heat treatment furnace; 5 is a vacuum system; 6 is a cantilever assembly; 7 is a slide block; 8 is a driving mechanism; 9 is a whole machine protective cover; 41 is a quartz tube layer; 42 is a heater layer; 43 is a heat-insulating layer; 44 is a double-layer water-cooling non-magnetic water-cooling jacket; 45 is a first reflecting screen; 46 is an O-shaped sealing ring; 47 is an air inlet; 48 is an air outlet; 61 is a horizontal conveying part; 62 is a vertical support; 611 is a storage chamber; 612 is a retainer ring; 613 is a rotating disk; 614 is a transmission rod; 615 is a first motor; 616 is a seal; 617 is a water-cooling coil pipe; 618 is a second reflective screen; 6171 as water inlet; 6172 is a water outlet; 81 is a lead screw; 82 is a bearing seat; 83 is a second motor; and 84 is a coupler.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus consistent with certain aspects of the invention, as detailed in the following claims.
In order to make those skilled in the art better understand the technical solution of the present invention, the present invention will be further described in detail with reference to the accompanying drawings and the embodiments.
Referring to fig. 1-3, the utility model relates to a magnetic field vacuum heat treatment device with cantilever structure, which comprises a bracket 1, support 1 is installed along vertical (or length direction) one side and is used for producing the superconducting magnet 2 of high-intensity magnetic field, the opposite side surface upper berth is equipped with guide rail 3, be provided with the heat treatment furnace 4 that is used for the heating in the 2 centre holes of superconducting magnet, the axis of heat treatment furnace 4 coincides with the axis of 1 centre holes of superconducting magnet, the one end and the vacuum system 5 of heat treatment furnace 4 are connected, the other end of heat treatment furnace 4 is the opening form, and it is provided with and is used for adorning the cantilever subassembly 6 of getting the work piece of treating heat treatment to be located opening one side, the mobilizable setting of cantilever subassembly 6 is on guide rail 3. With the arrangement, when a workpiece (such as a semiconductor material) needs to be subjected to vacuum heat treatment, the workpiece is only required to be loaded into the cantilever assembly 6, then the part containing the workpiece is driven into the heat treatment furnace 4, and parameters such as time, temperature and the like are set, so that the workpiece can be subjected to the heat treatment process.
Preferably, the utility model discloses superconducting magnet 2 centre bore department level is provided with cryostat, and the cryostat outside is provided with superconducting coil, and the superconducting coil outside is provided with the refrigerator, through external power source excitation, produces the high-intensity magnetic field in center department. Vacuum system 5 comprises multistage roots pump of combined type and molecular pump, and vacuum degree is high, and vacuum system 5 is located 4 left ends of heat treatment furnace, directly links with furnace body vacuum cavity, and vacuum measurement component all is provided with the magnetic shielding field structure, prevents that components and parts from losing efficacy or damaging under the high-intensity magnetic field environment.
As shown in FIG. 3, the cantilever assembly 6 of the embodiment of the present invention is composed of a horizontal conveying part 61 and a vertical supporting part 62, which are formed "
The structure is characterized in that the horizontal conveying part 61 is conveniently extended into the heat treatment furnace 4, the central line of the horizontal conveying part 61 is superposed with the central line of the heat treatment furnace 4, the outer diameter of the horizontal conveying part 61 is smaller than the inner diameter of the heat treatment furnace 4, a storage cavity 611 for placing a workpiece to be heat treated is arranged at one end, close to the opening, of the heat treatment furnace 4, of the horizontal conveying part 61, a retainer ring 612 matched with one end, close to the vertical supporting part 62, of the opening, of the heat treatment furnace 4 is arranged at the position, close to the vertical supporting part 62, the retainer ring 612 is used for sealing the cavity of the heat treatment furnace 4, and the bottom end of the vertical supporting part 62 is fixedly connected with the sliding block 7 mounted on the guide rail 3. In the embodiment, all parts on the cantilever assembly 6 do not adopt a welding process, and the welding process cannot be generatedResulting in deformation of the cantilever assembly 6 due to welding.
The storage cavity 611 is located at the front end of the horizontal conveying part 61, the top of the storage cavity 611 is open and is hinged with a box cover, a rotating disc 613 for supporting and rotating a workpiece to be heat-treated is arranged at the bottom in the storage cavity 611, the vertical bottom end of the rotating disc 613 is in meshing transmission with one end of a horizontally arranged driving rod 614 through a bevel gear, the bevel gear transmission saves space, the transmission precision is high, the other end of the driving rod 614 penetrates through a retainer ring 612 and then is connected with a first motor 615 fixedly arranged outside the retainer ring 612, a sealing member 616 is arranged on the outer side wall of the retainer ring 612 and at the connection position of the driving rod 614 and the first motor 615, and the sealing member 616 is used for preventing the sealing effect of the heat treatment furnace 4 from being influenced by a gap generated between the driving rod 614 and the retainer ring 612.
In addition, a water cooling coil 617 is wound on the outer wall of the horizontal conveying part 61 and located at the storage cavity 611, a water inlet 6171 and a water outlet 6172 of the water cooling coil 617 are both arranged on the outer side of the retainer ring 612, the water outlet 6172 is located below the water inlet 6171, a water flow meter is arranged at the water inlet 6171, and a temperature measuring element is arranged in the storage cavity 611 and located on the periphery of the rotating disc 613 and used for accurately controlling the temperature of heat treatment required by the workpiece.
The embodiment of the utility model provides an on the support 1, be located 3 tops of guide rail and install actuating mechanism 8, actuating mechanism 8 is used for drive slider 7 and cantilever subassembly 6 to be linear movement along 3 directions of guide rail jointly, realizes on the one hand that the automation of work piece when thermal treatment gets into or leaves thermal treatment furnace 4, and on the other hand makes retaining ring 612 hug closely the open end of thermal treatment furnace 4 through the thrust that 8 mechanisms of drive were applyed.
Specifically, actuating mechanism 8 sets up the lead screw 81 in guide rail 3 top including the level, the both ends of lead screw 81 all are provided with bearing frame 82, bearing frame 82 is fixed to be set up on support 1 surface, and be located guide rail 3's both sides, bearing frame 82 is through the bearing of installation and lead screw 81 swing joint, lead screw 81 and slider 7 threaded connection (being equivalent to ball), the one end that heat treatment furnace 4 was kept away from to lead screw 81 stretches out bearing frame 82 after and is connected through shaft coupling 84 with the output shaft of second motor 83, preferably, second motor 83 is step motor, can control cantilever assembly 6 through the positive and negative rotation of control second motor 83 and stretch into or keep away from heat treatment furnace 4.
As shown in fig. 2, the heat treatment furnace 4 of the embodiment of the present invention sequentially includes a quartz tube layer 41, a heater layer 42 (adopting a multi-stage body), a heat preservation layer 43 and a double-layer water-cooling non-magnetic water cooling jacket 44 from inside to outside; a first reflecting screen 45 is arranged at one end, close to the vacuum system 5, in the cavity of the heat treatment furnace 4, a second reflecting screen 618 is arranged on the outer wall of the horizontal conveying part 61 and between the storage cavity 611 and the retainer ring 612, the workpiece to be heat treated is positioned between the first reflecting screen 45 and the second reflecting screen 618, the two reflecting screens are of a multilayer structure, and a heat source can be gathered through the two reflecting screens, so that the heat treatment efficiency is improved; an O-shaped sealing ring 46 is arranged at the other end of the heat treatment furnace 4 and positioned outside the quartz tube layer 41, when a workpiece is subjected to heat treatment, the O-shaped sealing ring 46 is extruded by a retaining ring 612 on the cantilever assembly 6 to be subjected to elastic deformation, so that the opening end of the heat treatment furnace 4 is sealed, and during extrusion, the cantilever assembly 6 is tensioned by thrust of the driving mechanism 8 and double actions of a plurality of rotary clamping cylinders on one side of the heat treatment furnace 4, so that the purpose of sealing vacuum is achieved.
In addition, the embodiment of the utility model provides a be provided with compressed air inlet 47 and gas outlet 48 that the cooling work piece was used respectively at the both ends of heat treatment furnace 4, air inlet 47 is linked together through pipeline and output compressed air equipment, and is provided with the compressed air flowmeter on the connecting tube.
Preferably, the utility model discloses the device still includes detachable complete machine protection casing 9, complete machine protection casing 9 passes through the screw connection with support 1, and complete machine protection casing 9 wraps superconducting magnet 2, guide rail 3, heat treatment furnace 4, vacuum system 5 and cantilever subassembly 6 completely, and is located cantilever subassembly 6 department and sets up the operation window that can open and close, guarantees the security of thermal treatment operation.
The utility model discloses still include control system, control system is connected with the components and parts in superconducting magnet 2, heat treatment furnace 4, vacuum system 5, cantilever subassembly 6 and the actuating mechanism 8 respectively for each component part collaborative work of control.
In summary, the cantilever assembly 6 is arranged, so that the workpiece to be heat-treated can be conveniently taken and placed, and the rotating disc 613 can rotate the workpiece to be heat-treated, so that the heat treatment of the workpiece in all directions is uniform; secondly, a first reflecting screen 45 is arranged on the left side of the heat treatment furnace, a second reflecting screen 618 is arranged on the outer wall of the horizontal conveying part 61 and between the storage cavity 611 and the retainer ring 612, and a workpiece to be heat treated is arranged between the two reflecting screens, so that a heat source can be gathered, and the heat treatment efficiency is accelerated; the control of the cooling rate in the heat treatment is also realized by controlling the flow rate of the compressed air flowing into and out of the heat treatment furnace 4 and the flow rate of the water-cooled coil 617 in the cantilever assembly 6.
The above description is merely illustrative of the invention and is provided to enable any person skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention.
It is to be understood that the present invention is not limited to what has been described above, and that various modifications and changes may be made without departing from the scope thereof. The scope of the present invention is limited only by the appended claims.
Claims (10)
1. The magnetic field vacuum heat treatment device with the cantilever structure is characterized by comprising a support (1), wherein a superconducting magnet (2) used for generating a magnetic field is installed on one longitudinal side of the support (1), a guide rail (3) is paved on the surface of the other longitudinal side of the support, a heat treatment furnace (4) used for heating is arranged inside the superconducting magnet (2), one end of the heat treatment furnace (4) is connected with a vacuum system (5), the other end of the heat treatment furnace (4) is in an open shape, and a cantilever assembly (6) used for loading and taking a workpiece to be heat treated is arranged on one side of the opening;
wherein the cantilever assembly (6) consists of a horizontal conveying part (61) and a vertical supporting part (62) which are formed "
A structure of a mold, the center line of the horizontal conveying part (61) is superposed with the center line of the heat treatment furnace (4), and the vertical conveying part is arranged on the bottom of the heat treatment furnaceThe bottom end of the straight supporting part (62) is fixedly connected with a sliding block (7) arranged on the guide rail (3), a storage cavity (611) for placing a workpiece to be thermally treated is arranged at one end, close to the opening of the thermal treatment furnace (4), of the horizontal conveying part (61), and a check ring (612) matched with one end, close to the opening of the thermal treatment furnace (4), of the horizontal conveying part (61) is arranged at the position, close to the vertical supporting part (62), of the horizontal conveying part for sealing the cavity of the thermal treatment furnace (4).
2. The magnetic field vacuum thermal treatment device with the cantilever structure according to claim 1, wherein the thermal treatment furnace (4) is longitudinally arranged in a central hole of the superconducting magnet (2), and the axis of the thermal treatment furnace (4) is coincident with the axis of the central hole of the superconducting magnet (2).
3. The magnetic field vacuum heat treatment device with the cantilever structure according to claim 1 or 2, wherein the heat treatment furnace (4) comprises a quartz tube layer (41), a heater layer (42), an insulating layer (43) and a double-layer water-cooling non-magnetic water cooling jacket (44) from inside to outside in sequence, a first reflecting screen (45) is arranged at one end of the heat treatment furnace (4) in the cavity close to the vacuum system (5), and an O-shaped sealing ring (46) is arranged at the other end of the heat treatment furnace (4) and outside the quartz tube layer (41).
4. The magnetic field vacuum heat treatment device with the cantilever structure according to claim 3, wherein the two ends of the heat treatment furnace (4) are respectively provided with a compressed air inlet (47) and an air outlet (48) for cooling the workpiece, the air inlet (47) is communicated with an output compressed air device through a pipeline, and the pipeline is provided with a compressed air flow meter.
5. The magnetic field vacuum heat treatment device with the cantilever structure according to claim 1, wherein the storage chamber (611) is located at the front end of the horizontal conveying part (61), the top of the storage chamber (611) is open and is hinged with a box cover, a rotating disc (613) for supporting and rotating the workpiece to be heat treated is arranged at the bottom in the storage chamber (611), the vertical bottom end of the rotating disc (613) is in meshing transmission with one end of a horizontally arranged transmission rod (614) through a bevel gear, and the other end of the transmission rod (614) passes through a retainer ring (612) and is connected with a first motor (615) fixedly arranged outside the retainer ring (612);
and a sealing piece (616) is arranged on the outer side wall of the retainer ring (612) and at the joint of the transmission rod (614) and the first motor (615).
6. The magnetic field vacuum heat treatment device with the cantilever structure according to claim 5, wherein a water cooling coil (617) is wound on the outer wall of the horizontal conveying part (61) at the storage cavity (611), a water inlet (6171) and a water outlet (6172) of the water cooling coil (617) are both arranged outside the retainer ring (612), the water outlet (6172) is located below the water inlet (6171), and a water flow meter is arranged at the water inlet (6171);
temperature measuring elements are arranged in the storage cavity (611) and positioned on the periphery of the rotating disk (613).
7. The magnetic field vacuum heat treatment apparatus having a cantilever structure according to claim 5, wherein a second reflecting screen (618) is provided on the outer wall of the horizontal conveyance section (61) between the storage chamber (611) and the retainer ring (612).
8. The magnetic field vacuum heat treatment device with the cantilever structure according to claim 1, wherein the driving mechanism (8) is installed on the bracket (1) above the guide rail (3), and the driving mechanism (8) is used for driving the slider (7) and the cantilever assembly (6) to move linearly together along the direction of the guide rail (3).
9. The magnetic field vacuum heat treatment device with the cantilever structure according to claim 8, wherein the driving mechanism (8) comprises a lead screw (81) horizontally arranged above the guide rail (3), bearing seats (82) are arranged at both ends of the lead screw (81), the bearing seats (82) are fixedly arranged on the surface of the bracket (1), the bearing seats (82) are movably connected with the lead screw (81) through installed bearings, the lead screw (81) is in threaded connection with the sliding block (7), and one end of the lead screw (81), which is far away from the heat treatment furnace (4), extends out of the bearing seats (82) and then is connected with an output shaft of the second motor (83) through a coupler (84).
10. The magnetic field vacuum heat treatment device with the cantilever structure according to any one of claims 1 to 9, further comprising a detachable complete machine protective cover (9), wherein the complete machine protective cover (9) completely covers the superconducting magnet (2), the guide rail (3), the heat treatment furnace (4), the vacuum system (5) and the cantilever assembly (6), and an operation window is opened at the cantilever assembly (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222300738.2U CN218004796U (en) | 2022-08-31 | 2022-08-31 | Magnetic field vacuum heat treatment device with cantilever structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222300738.2U CN218004796U (en) | 2022-08-31 | 2022-08-31 | Magnetic field vacuum heat treatment device with cantilever structure |
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| CN218004796U true CN218004796U (en) | 2022-12-09 |
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| CN202222300738.2U Active CN218004796U (en) | 2022-08-31 | 2022-08-31 | Magnetic field vacuum heat treatment device with cantilever structure |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117431387A (en) * | 2023-12-22 | 2024-01-23 | 新疆坤隆石油装备有限公司 | Processing production line for heat treatment of tubing pump assembly |
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2022
- 2022-08-31 CN CN202222300738.2U patent/CN218004796U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117431387A (en) * | 2023-12-22 | 2024-01-23 | 新疆坤隆石油装备有限公司 | Processing production line for heat treatment of tubing pump assembly |
| CN117431387B (en) * | 2023-12-22 | 2024-04-02 | 新疆坤隆石油装备有限公司 | Processing production line for heat treatment of tubing pump assembly |
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