CN103056473B - A kind of continuous vacuum welding stove and welding method thereof - Google Patents
A kind of continuous vacuum welding stove and welding method thereof Download PDFInfo
- Publication number
- CN103056473B CN103056473B CN201310003958.1A CN201310003958A CN103056473B CN 103056473 B CN103056473 B CN 103056473B CN 201310003958 A CN201310003958 A CN 201310003958A CN 103056473 B CN103056473 B CN 103056473B
- Authority
- CN
- China
- Prior art keywords
- vacuum
- vacuum cavity
- cavity parts
- parts
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The invention discloses a kind of continuous vacuum welding stove, this vacuum brazing stove comprises operating room, charging aperture, discharging opening, in operating room, be provided with four vacuum cavity parts successively side by side, have independently temperature regulation system, transmission system, measuring system, regulator control system separately; In vacuum brazing stove, form preheating zone, weld zone, pre-cooled district, four, cooling zone independently system, thus realize different processing procedures and warm-up phase, heating period, precooling stage and cooling stage.The invention also discloses the using method of this vacuum brazing stove.Advantage of the present invention can carry out non-interfering heating and cooling process under vacuum or protective atmosphere, without the need to repeatedly heating up and cooling, can save weld interval thus and save power consumption and can increase work efficiency and welding quality.
Description
Technical field
The present invention relates to a kind of welding equipment and welding method thereof, particularly a kind of continuous vacuum welding stove and welding method thereof.
Background technology
Along with electronic devices and components package dimension day by day reduces, power grade day by day increases, and arises at the historic moment to the demand without cavity welding.Owing to welding under the environment of few oxygen or anaerobic, can reducing in welding process the generation in cavity and then improve the quality of welding, people wish that welding process can be carried out under the environment of few oxygen or anaerobic always.And current soldering furnace welds mostly under atmospheric environment, the generation in cavity is uncontrollable, and the quality of welding is not high.
In addition, for vacuum brazing stove of the prior art, be generally in a cavity space, realize the whole process of welding.Each welding job all needs to be heated to welding temperature from room temperature, then is reduced to room temperature from welding temperature.Carry out multiple welding, repeatedly temperature thermal shock will be carried out.First, frequent intensification and cooling can cause a large amount of losses of energy; Secondly, frequent heating, cooling can cause temperature stress fatigue damage to welding equipment itself; Moreover heating up and lowering the temperature to spend many time, reduces welding efficiency.
Summary of the invention
The present invention seeks to the defect for existing in prior art, providing a kind of continuous vacuum to weld stove and welding method thereof.
The technical scheme that continuous vacuum welding stove of the present invention adopts is:
A kind of continuous vacuum welding stove, comprise frame and be positioned at vacuum chamber parts, the control device in frame, described control device comprises electric apparatus control apparatus, air control unit, human-computer interaction device, it is characterized in that: the operating room being provided with cuboid in frame, the first vacuum cavity parts, the second vacuum cavity parts, the 3rd vacuum cavity parts, the 4th vacuum cavity parts are provided with successively side by side in operating room, above-mentioned vacuum cavity parts two ends are equipped with high vacuum push-pull valve, and the valve port of adjacent high vacuum push-pull valve is interconnected; The thermal insulative board separated between two by above-mentioned four vacuum cavity parts is provided with in operating room, operating room is divided into two separate parts by thermal insulative board, wherein the first vacuum cavity parts, the second vacuum cavity parts place part are the thermal treatment zone, and the 3rd vacuum cavity parts, the 4th vacuum cavity parts place part are cooling zone; The wall of operating room near side, the thermal treatment zone is provided with charging aperture, and charging aperture is connected with feed pieces; The wall of operating room near side, cooling zone is provided with discharging opening, and discharging opening is connected with outlet member; The valve port of high vacuum push-pull valve of the first vacuum cavity member outside is connected with the charging aperture of operating room; Valve port outside the high vacuum push-pull valve of the 4th vacuum cavity parts is connected with discharging opening; Vacuum cavity parts in the thermal treatment zone comprise vacuum chamber, vacuum plant, heater, conveying device; Vacuum cavity parts in cooling zone comprise vacuum chamber, vacuum plant, cooling device, conveying device; Described control device controls the work of vacuum plant, heater, cooling device, conveying device, high vacuum push-pull valve.
Further, described vacuum plant is vavuum pump, and vavuum pump is connected by the vacuum-pumping valve of pipeline with vacuum cavity parts; Described feed pieces is provided with idler wheel mechanism, and idler wheel mechanism is provided with the delivery wheel for delivery tray; Described outlet member is provided with idler wheel mechanism, and idler wheel mechanism is provided with the delivery wheel for delivery tray; Described high vacuum push-pull valve is provided with the drive unit controlling high vacuum push-pull valve and open or close; Described human-computer interaction device is programmable logic controller (PLC).
Further, described conveying device comprises the bearing (setting) plate being positioned at vacuum cavity parts sidepiece, bearing (setting) plate is fixed with driving shaft and driven shaft, and driving shaft and driven shaft are provided with roller, is provided with the linkage gear cooperatively interacted between driving shaft and driven shaft; A driving shaft part is positioned at beyond vacuum cavity parts sidepiece, is positioned at part beyond vacuum cavity parts sidepiece and is provided with magnetic fluid seal; The part that driving shaft stretches out beyond vacuum cavity parts sidepiece is connected with the shaft coupling of servomotor, drives driving shaft to rotate by servomotor running.
Further, described heater comprises heating plate, and heating plate is arranged in the below of vacuum chamber roller, and heating plate is heated by Resistant heating or electrothermal tube; The bottom being positioned at the vacuum cavity parts of the thermal treatment zone is connected with base, base is provided with the linear slide rail be parallel to each other for a pair, and linear slide rail is perpendicular to the bottom of vacuum cavity parts; The slide block of linear slide rail is provided with vertically moving base plate, and the middle part of base plate is connected with ball-screw by feed screw nut; Ball-screw top is connected by ball-screw bearing block with the bottom of vacuum cavity parts; Between the bottom of base plate and vacuum cavity parts, vertical direction is sealedly connected with two metal bellows; Be provided with inner prop in metal bellows, inner prop is through the bottom of vacuum cavity parts, and interior column top is connected with heating plate, and the bottom of inner prop is connected with base plate; Base is provided with servomotor, and ball-screw is connected by shaft coupling with servomotor; Drive the rotation of ball-screw regulate the distance between the pallet being mounted with object to be welded in heating plate and vacuum cavity parts on roller thus realize the accurate control being mounted with the pallet radiation temperature of object to be welded to being positioned in vacuum cavity parts on roller by servomotor, or realized the accurate control being mounted with the pallet radiation temperature of object to be welded be positioned in vacuum cavity parts on roller by the size of current of adjusting resistance silk or electrothermal tube.When heating plate and pallet are close to, reach maximum cooling effect.
Further, described cooling device is coldplate, and coldplate is arranged in the below of vacuum chamber roller, is provided with the passage for cooling fluid circulation in coldplate; Described cooling fluid is water or liquid nitrogen, realizes circulation by cooling fluid delivery pump; The bottom being positioned at the vacuum cavity parts of cooling zone is connected with base, base is provided with the linear slide rail be parallel to each other for a pair, and linear slide rail is perpendicular to the bottom of vacuum cavity parts; The slide block of linear slide rail is provided with vertically moving base plate, and the middle part of base plate is connected with ball-screw by feed screw nut; Ball-screw top is connected by ball-screw bearing block with the bottom of vacuum cavity parts; Between the bottom of base plate and vacuum cavity parts, vertical direction is sealedly connected with two metal bellows; Be provided with inner prop in metal bellows, inner prop is through the bottom of vacuum cavity parts, and interior column top is connected with coldplate, and the bottom of inner prop is connected with base plate; Base is provided with servomotor, and ball-screw is connected by shaft coupling with servomotor; Drive the rotation of ball-screw regulate the distance between the pallet being mounted with object to be welded in coldplate and vacuum cavity parts on roller thus realize the accurate control being mounted with the temperature of the pallet of object to be welded to being positioned in vacuum cavity parts on roller by servomotor, or realized the accurate control being mounted with the temperature of the pallet of object to be welded be positioned in vacuum cavity parts on roller by the flow of adjustment cooling fluid.When coldplate and pallet are close to, reach maximum cooling effect.
Further, vacuum cavity parts are provided with temperature measuring equipment, and described temperature measuring equipment comprises temperature sensor, and temperature measuring equipment is connected with control device; Vacuum cavity parts are provided with device for pressure measurement, and described device for pressure measurement comprises pressure sensor, and device for pressure measurement is connected with control device.The vacuum of vacuum chamber can be measured by device for pressure measurement.
Further, the first vacuum cavity parts are for preheating vacuum cavity parts, and its heating and temperature control is at 150 ~ 200 DEG C; Second vacuum cavity parts are heating, vacuum capsule components, and its heating and temperature control is at 390 ~ 410 DEG C; 3rd vacuum cavity parts are pre-cooled vacuum cavity parts, and its chilling temperature controls at 110 ~ 130 DEG C; 4th vacuum cavity parts are cooling vacuum capsule components, and its chilling temperature controls at 60 ~ 70 DEG C.
Further, described vacuum cavity parts are provided with two reserved valves.Can for inserting assisted heating device or inserting cavity temperature sensor in application afterwards.Also have better expansion effect, if the flange by UNICOM is to vacuum cavity components interior supplying nitrogen or inert gas, reduce solder oxidation.
Further, the vacuum cover being positioned at the vacuum cavity parts of the thermal treatment zone is provided with the cooling duct passed through for cooling fluid; Described cooling fluid is water or liquid nitrogen.
Further, described vacuum chamber is provided with seal cover, and one end and the vacuum chamber of seal cover are hinged, are connected between seal cover with vacuum chamber by bracing frame, bracing frame is connected with cylinder, drives opening of bracing frame to realize opening and closedown of seal cover with closing by cylinder; Seal cover is provided with rapid escape valve; Seal cover is provided with the vacuum observation window for observing the welding of workpiece and the ruuning situation of equipment in cavity, so that control warming and cooling rate, reaches desirable welding effect.
The welding method of continuous vacuum welding stove comprises the following steps:
A) open the valve port of the high vacuum push-pull valve of the first vacuum cavity parts, the pallet loading object to be welded is put into feed pieces, the delivery wheel of feed pieces drives pallet to enter in these vacuum cavity parts by charging aperture, close port; Vacuumize the first vacuum cavity parts, vacuum degree control is at 1 millibar; With 1 DEG C/sec of speed, pallet is heated to 150 ~ 200 DEG C;
B) open the valve port of the high vacuum push-pull valve of the first vacuum cavity parts and the second vacuum cavity parts, by the conveying device of the first vacuum cavity parts, pallet is sent in the second vacuum cavity parts, close port; Vacuumize the second vacuum cavity parts, vacuum degree control is at 1 millibar; With 1 DEG C/sec of speed, pallet is heated to 390 ~ 410 DEG C, workpiece is welded;
C) open the valve port of the high vacuum push-pull valve of the second vacuum cavity parts and the 3rd vacuum cavity parts, by the conveying device of the second vacuum cavity parts, pallet is sent in the 3rd vacuum cavity parts, close port; Vacuumize the 3rd vacuum cavity parts, vacuum degree control is at 1 millibar; With 3 DEG C/sec of speed, pallet is cooled to 110 ~ 130 DEG C;
D) open the valve port of the high vacuum push-pull valve of the 3rd vacuum cavity parts and the 4th vacuum cavity parts, by the conveying device of the 3rd vacuum cavity parts, pallet is sent in the 4th vacuum cavity parts, close port; Vacuumize the 4th vacuum cavity parts, vacuum degree control is at 1 millibar; With 3 DEG C/sec of speed, pallet is cooled to 60 ~ 70 DEG C;
E) open the valve port of the high vacuum push-pull valve of the 4th vacuum cavity parts, pallet is sent into outlet member, close port by the conveying device of the 4th vacuum cavity parts; Pallet is sent by the delivery wheel of outlet member, and now object to be welded has welded.
Advantage of the present invention is that operating room is separated into four isolated areas, has independently heating system or cooling system.Under the effect of conveying device, can successively through preheating zone, weld zone, pre-cooled district, cooling zone, thus realize different processing procedures and warm-up phase, heating period, precooling stage and cooling stage.The temperature of welding divides and completes in two regions, and programming rate is slow, can play solder and not seethe with excitement, splashes, prevents electronic devices and components due to the too fast phenomenon causing fracture, be out of shape that heats up, avoids because surface tension of liquid causes solder joint not prison welding; The cooling of welding also completes in two regions, and cooling is slow, can avoid causing electronic devices and components internal stress to strengthen too soon due to cooling thus causing not prison welding solid.Compared with the furnace binding of prior art, the present invention possesses independently heating system and cooling system, is namely provided with thermal insulative board between the thermal treatment zone and cooling zone, and avoiding air can influence each other or mix, and decreases energy loss; Heating and cooling do not interfere with each other, and without the need to repeatedly heating up and cooling, saving weld interval, also saving the energy.The thermal treatment zone and cooling zone are divided into two isolated areas, and only arrange heating and cooling two regions compared to existing technology, each region is less consuming time, therefore, during pipelining, be equivalent to the time of heating and cooling all to shorten half, also save weld interval.Between vacuum cavity parts, a word arranges successively, and input and output material route is the shortest, and input and output material is convenient each other, also compares and saves time.Separate between vacuum cavity parts, be convenient to realize different temperature, pressure in individual vacuum cavity parts, realize different intensifications or cooling rate.Loading between the pallet of object to be welded and the conveying device of vacuum cavity parts is rolling friction, little to the wearing and tearing of pallet.Heating plate or coldplate are positioned at below pallet, ensure that pallet is first heated than material to be welded or first lowers the temperature, effectively prevent the generation in cavity.Drive the motion of ball-screw to regulate the distance between the pallet of the loading electronic devices and components to be welded in heating plate or coldplate and vacuum cavity parts on roller by servomotor thus can realize heating vacuum cavity parts or the accurate control of cooling rate.Continous way soldering furnace of the present invention can carry out the continuous welding of pile line operation, and can also ensure the work under vacuum or protective atmosphere, and prior art is welded under cannot accomplishing can also to remain on vacuum and protective atmosphere while streamline welding.This not only reduces the generation in cavity and improve the quality of welding, and continuously can also carry out welding operation.This device can be applied in the various welding production such as large-scale, medium-sized and small-sized, and the scope of application is large.Solder flux temperature raises and produces evaporation is that cavity produces main cause.Welding intraventricular pressure is the vacuum environment of 1 millibar, and make empty inside and outside formation pressure reduction, pressure reduction can overcome solder viscosity, release cavity.In traditional welding stove, all parts of assembly are exposed in high temperature simultaneously, cause solder just to start to melt before pallet to heating-up temperature.Bottom the first heated tray of radiant type mode of heating of the present invention, after pallet to heating-up temperature, electronic devices and components to be welded just start welding, avoid the generation in cavity.Cooling is also same reason, and first lower the temperature tray bottom, and after pallet cooling, electronic devices and components to be welded just start progressively to cool.Because the factors such as vacuum level, viscosity, time also can have an impact to the elimination factor in cavity, therefore continuous vacuum welding stove of the present invention can by controlling the factors such as vacuum, firing rate, heat time, effectively can prevent the generation in cavity, realize without cavity welding.
Accompanying drawing explanation
Fig. 1 is the structural representation of continuous vacuum of the present invention welding stove.
Fig. 2 is the front view of Fig. 1.
Fig. 3 is the left view of Fig. 1.
Fig. 4 is the structural representation of vacuum cavity parts.
Fig. 5 is the structural representation of the temperature control equipment of vacuum cavity parts when being arranged on vacuum cavity parts.
Fig. 6 is the stereogram of the temperature control equipment of Fig. 5 vacuum cavity parts.
Fig. 7 is the structural representation of the conveying device of vacuum cavity parts.
Fig. 8 is the structural representation of the seal cover of vacuum cavity parts.
Fig. 9 is the left view of Fig. 8.
Figure 10 is the front view of Fig. 9.
Wherein: 1-feed pieces; 2-push-and-pull protective door; 3-frame; 4-insulating layer; 5-first vacuum cavity parts; 6-vavuum pump; 7-programmable logic controller (PLC); 8-outlet member; 9-pallet; 10-Electric Appliance Cabinet; 11-Pneumatic cabinet; 12-operating room; 13-thermal insulative board; 14-high vacuum push-pull valve; 15-preheating zone; 16-weld zone; The pre-cooled district of 17-; 18-cooling zone; 19-delivery wheel; 20-temperature control equipment; 21-conveying device; 22-second vacuum cavity parts; 23-the 3rd vacuum cavity parts; The true capsule components of 24-the 4th; 201-seal cover; 202-vacuum-pumping valve; The import of 203-high vacuum push-pull valve; 204-reserves valve one; 205-vacuum chamber; 206-sensor interface; 207-screw rod; 208-reserves valve two; 301-heat-conducting plate; 302-linear slide rail; The heat insulation pallet of 303-; 304-bearing; 305-ball-screw; 306-ball-screw bearing block; 307-supporting plate; 308-base; 309-feed screw nut; 310-shaft coupling; 311-servomotor Connection Block; 312-servomotor; 313-linear slide rail slide block; 314-metal bellows; 315-base plate; 316-passage; 317-pallet; 318-vacuum cavity parts; The bottom of 319-vacuum cavity parts; 320-inner prop; 401-vacuum cavity; 402-bearing (setting) plate; 403-driving shaft; 404-magnetic fluid seal; 405-servomotor; 406-shaft coupling; 407-linkage gear; 408-roller; 409-driven shaft; 501-backplate; 502-vacuum observation window; 503-bracing frame; 504-pressure sensor; 505-rapid escape valve; 506-sealing plate; 507-coldplate; 508-handle; 509-connecting hinge; 510-hold down gag; 511-cooling duct.
Detailed description of the invention
Below, embodiments of the invention are further illustrated by reference to the accompanying drawings.
Fig. 1, Fig. 2, Fig. 3 show the structural representation of continuous vacuum welding stove principal functional components.The present invention is primarily of compositions such as feed pieces 1, frame 3, insulating layer 4, first vacuum cavity parts 5, second vacuum cavity parts 22, the 3rd vacuum cavity parts 23, the 4th vacuum cavity parts 24, vavuum pump 6, programmable logic controller (PLC) 7, outlet member 8, Electric Appliance Cabinet 10, Pneumatic cabinet 11, operating rooms 12.Operating room 12 is rectangular structure, is provided with the first vacuum cavity parts 5, second vacuum cavity parts 22, the 3rd vacuum cavity parts 23, the 4th vacuum cavity parts 24 in operating room from left to right successively.Be provided with electrical control gear in Electric Appliance Cabinet 10, be provided with air control unit in Pneumatic cabinet 11, electrical control gear, air control unit are all connected with programmable logic controller (PLC) 7.The pallet 9 that electronic devices and components to be welded are housed enters continuous vacuum welding stove from feed pieces 1, after having welded, exports from outlet member 8.
Above-mentioned vacuum cavity parts two ends are equipped with high vacuum push-pull valve 14, and the valve port of the high vacuum push-pull valve at vacuum cavity parts two ends is interconnected successively; The thermal insulative board 13 separated between two by above-mentioned four vacuum cavity parts is provided with in operating room 12, operating room is divided into two separate and airtight parts by thermal insulative board 13, wherein the first vacuum cavity parts 5, second vacuum cavity parts 22 place part is the thermal treatment zone, is positioned on the left of operating room 12; 3rd vacuum cavity parts 23, the 4th vacuum cavity parts 24 place part are cooling zone, are positioned on the right side of operating room 12.Operating room's left side wall is provided with charging aperture, charging aperture is connected with feed pieces 1; Operating room 12 right side wall is provided with discharging opening, charging aperture is connected with outlet member 8; The valve port of high vacuum push-pull valve on the left of first vacuum cavity parts 5 is connected with the charging aperture of operating room; The valve port of the right side high vacuum push-pull valve of the 4th vacuum cavity parts 24 is connected with discharging opening.Above-mentioned four vacuum chamber bodies, high vacuum push-pull valve 14, charging aperture, discharging opening are on the same axis.Vacuum cavity parts in the thermal treatment zone comprise vacuum chamber, vacuum plant, heater, and the bottom of vacuum chamber is provided with conveying device; Vacuum cavity parts in cooling zone comprise vacuum chamber, vacuum plant, cooling device, and the bottom of vacuum chamber is provided with conveying device; Described control device controls the work of vacuum plant, heater, cooling device, conveying device, high vacuum push-pull valve.
Described vacuum plant is vavuum pump 6, is arranged in Pneumatic cabinet 11, and vavuum pump 6 is connected by the vacuum-pumping valve of pipeline with vacuum cavity parts; The bottom of feed pieces 1 is provided with the delivery wheel 19 for carrying the pallet that electronic devices and components to be welded are housed; The bottom of outlet member 8 is provided with the delivery wheel for delivery tray 9; Described high vacuum push-pull valve 14 is provided with the drive unit controlling high vacuum push-pull valve and open or close; Described control device is programmable logic controller (PLC) 7.The ruuning situation of real-time reflection equipment is responsible for by programmable logic controller (PLC) 7, so that the running status of timely adjustment equipment.Support body is also provided with Electric Appliance Cabinet 10, for placing various electric elements, as testing temperature, pressure apparatus, servo motor power supply etc.Insulating layer 4 is provided with, to reduce the impact of operating room's temperature on electric system between Electric Appliance Cabinet 10 and operating room 12.
Fig. 4 is the structural representation of vacuum cavity parts.Described vacuum cavity parts comprise a rectangular vacuum chamber 205, and vacuum chamber 205 is provided with seal cover 201.Vacuum chamber 205 both sides are provided with high vacuum push-pull valve 14, and high vacuum push-pull valve 14 is provided with high vacuum push-pull valve valve port 203.Vacuum chamber being also provided with the vacuum-pumping valve 202 for vacuumizing, being also provided with for measuring tempeature, pressure, the isoparametric sensor interface 206 of pallet situation of movement.Vacuum cavity parts are provided with reserved valve 1, reserved valve 2 208, use time after the object arranging reserved valve is mainly convenient as required from the valve these reserved valves to supplying nitrogen in vacuum cavity parts or inert gas or other purposes.To vacuum cavity component feed nitrogen or inert gas, effectively can reduce solder oxidation, improve welding quality.Conveying device 21 is arranged on the front end of vacuum cavity parts, and conveying device drives the roller of vacuum cavity feature bottom to rotate by servomotor, realizes the transport to pallet.Temperature control equipment 20 is arranged on the bottom of vacuum cavity parts.
Fig. 5, Fig. 6 illustrate the structure of vacuum cavity part temperatures control device.Described temperature control equipment comprises base 308, and base 308 is arranged on the bottom 319 of vacuum cavity parts.The both sides of base 308 are provided with horizontal direction between linear slide rail 302, the two linear slide rail slide block 313 that is parallel to each other for a pair in the vertical direction and are provided with base plate 315.Ball-screw 305 is vertically being erected and through the middle part of base plate 315 and base 308, is being fixed on base plate 315 by feed screw nut 309.The both sides of base plate 315 are provided with supporting plate 307, supporting plate 307 is equipped with two metal bellows 314, inner prop 320 is provided with in metal bellows 314, inner prop 320 passes the bottom 319 of vacuum cavity parts and top is provided with heat insulation pallet 303, heat insulation pallet 303 is connected with heat-conducting plate 301, and inner prop 320 is connected with base plate 315.Bottom 319, the base plate 315 of metal bellows and vacuum cavity parts are tightly connected.The bottom of base 308 is connected with servomotor Connection Block 311, and servomotor Connection Block 311 is provided with servomotor 312, and servomotor 312 is connected with ball-screw 305 by shaft coupling 310.The top of ball-screw 305 is provided with ball-screw bearing block 306, and ball-screw bearing block 306 is provided with bearing 304, and ball-screw bearing block 306 is connected to the bottom 319 of vacuum cavity parts.Heat-conducting plate 301 is provided with passage 316.During work, under the effect of servomotor 312, ball-screw 305 rotates, and drives base plate 315 to move along the linear slide rail 302 on base 308, drive the heat insulation pallet 303 in the metal bellows 314 on base plate 315 on pipe to move relative to base 308, realize heat-conducting plate 301 and move in the vertical direction.Because base plate 315 is fixed on vacuum cavity feature bottom, just can be controlled the distance of pallet in heat-conducting plate 301 and vacuum cavity parts by the motion of servomotor, thus realize the adjustment to temperature of tray in vacuum cavity parts.。Metal bellows has certain flexibility, and can stretch and seal with the bottom 319 of vacuum cavity parts, therefore inner prop 320 moves both vertically can not affect the vacuum of vacuum cavity parts.
First vacuum cavity parts, the second vacuum cavity parts, adopt heater.Arrange resistive heater in passage 316, by radiation with to flowing to the heating of vacuum cavity parts, heat-conducting plate plays thermogenic action, and now heat-conducting plate is heating plate.When the bottom of the pallet 317 in vacuum cavity parts is close to by heating plate, reach maximum temperature rise effect.
3rd vacuum cavity parts, the 4th vacuum cavity parts, adopt cooling device.Passage 316 Inner eycle has cooling fluid, and heat-conducting plate plays cooling effect, and now heat-conducting plate is coldplate.When coldplate is close to the bottom of the pallet 317 in vacuum cavity parts, reach maximum cooling-down effect.Described cooling fluid is water or liquid nitrogen, realizes circulation by cooling fluid delivery pump.
Fig. 7 illustrates the structure of the conveying device of vacuum cavity parts.Described conveying device comprises the bearing (setting) plate 402 being positioned at vacuum cavity 401 sidepiece, bearing (setting) plate 402 is fixed with driving shaft 403 and driven shaft 409, driving shaft 403 and driven shaft 409 are provided with roller 408, are provided with the linkage gear 407 cooperatively interacted between driving shaft 403 and driven shaft 409; Driving shaft 403 part is positioned at beyond vacuum cavity 401 sidepiece, is positioned at part beyond vacuum cavity 401 sidepiece and is provided with magnetic fluid seal 404; Driving shaft 403 stretches out the part beyond vacuum cavity 401 sidepiece and is connected with the shaft coupling 406 of servomotor 405, and being operated by servomotor 405 drives driving shaft 403 to rotate.Driving shaft 403 drives the roller 408 on driven shaft 409 to rotate by linkage gear 407 after rotating, thus the tray motion that realization is placed on roller 408.The effect of magnetic fluid seal 404 is the vacuum kept under motion state in vacuum cavity parts.
The seal cover of vacuum cavity parts is mainly used in opening vacuum cavity parts.As shown in Fig. 8 to Figure 10, one end of seal cover is hinged with vacuum chamber by connecting strand 509, and the other end is provided with handle 508, hold down gag 510.Described hold down gag 510 is shown in Fig. 4 with screw rod 207() coordinate, seal cover can be locked, improve the vacuum of vacuum chamber.Handle 508 is set, facilitates manual unlocking seal cover.The outside of seal cover is provided with bracing frame 503, after the output shaft of bracing frame and cylinder is hinged, can realize opening of seal cover and closed by the motion of the output shaft of cylinder.After seal cover is set, conveniently need in maintenance, test or other reason the seal cover opening vacuum chamber.Seal cover is provided with rapid escape valve 505, conveniently injects air when opening the seal cover of vacuum chamber, eliminates the vacuum of vacuum chamber.Seal cover is provided with vacuum observation window 502.Convenient situation of observing vacuum cavity components interior, so that control warming and cooling rate.Seal cover is sandwich construction, and outermost layer is backplate 501, makes with the material with certain heat insulation effect; Intermediate layer is sealing plate 506, adopts soft material to make; Innermost layer is coldplate 507, and coldplate 507 is provided with the cooling duct 511 flow through for cooling fluid.The object arranging coldplate 507 is in order to the further temperature accurately controlled in vacuum cavity parts, can also lower the temperature, prevent the operator that burns to rice sealing lid.Seal cover is provided with pressure sensor 504, can measure the vacuum of vacuum chamber.
The welding method of continuous vacuum welding stove comprises the following steps:
A) open the valve port of the high vacuum push-pull valve of the first vacuum cavity parts, the pallet loading object to be welded is put into feed pieces, the delivery wheel of feed pieces drives pallet to enter in these vacuum cavity parts by charging aperture, close port; Vacuumize the first vacuum cavity parts, vacuum degree control is at 1 millibar; With 1 DEG C/sec of speed, pallet is heated to 150 ~ 200 DEG C;
B) open the valve port of the high vacuum push-pull valve of the first vacuum cavity parts and the second vacuum cavity parts, by the conveying device of the first vacuum cavity parts, pallet is sent in the second vacuum cavity parts, close port; Vacuumize the second vacuum cavity parts, vacuum degree control is at 1 millibar; With 1 DEG C/sec of speed, pallet is heated to 390 ~ 410 DEG C, workpiece is welded;
C) open the valve port of the high vacuum push-pull valve of the second vacuum cavity parts and the 3rd vacuum cavity parts, by the conveying device of the second vacuum cavity parts, pallet is sent in the 3rd vacuum cavity parts, close port; Vacuumize the 3rd vacuum cavity parts, vacuum degree control is at 1 millibar; With 3 DEG C/sec of speed, pallet is cooled to 110 ~ 130 DEG C;
D) open the valve port of the high vacuum push-pull valve of the 3rd vacuum cavity parts and the 4th vacuum cavity parts, by the conveying device of the 3rd vacuum cavity parts, pallet is sent in the 4th vacuum cavity parts, close port; Vacuumize the 4th vacuum cavity parts, vacuum degree control is at 1 millibar; With 3 DEG C/sec of speed, pallet is cooled to 60 ~ 70 DEG C;
E) open the valve port of the high vacuum push-pull valve of the 4th vacuum cavity parts, pallet is sent into outlet member, close port by the conveying device of the 4th vacuum cavity parts; Pallet is sent by the delivery wheel of outlet member, and now object to be welded has welded.
General soldering furnace, owing to being in the state of colding and heat succeed each other always, is easy to distortion, and many parts need periodic replacement.In the soldering furnace of the present embodiment, need the tray portion of just loading electronic devices and components to be welded of variations in temperature, avoid whole heating system and all will carry out cold cycling change at every turn, not only protect equipment, also significantly reduce power consumption.In addition, vacuum cavity parts can be opened at any time due to pallet and change, operation can be repaired or replaced easily like this.
Soldering furnace has independently preheating zone 15, weld zone 16, pre-cooled district 17, cooling zone 18, does not interfere with each other, and can lay in heat energy and cold energy respectively, without the need to all carrying out the operation that heats up and lower the temperature in each welding.Such special construction design can bring a lot of advantage: it can reduce weld interval, economize energy, avoids temperature thermal shock to damage equipment.In addition, owing to having independently preheating zone 15, weld zone 16, pre-cooled district 17, cooling zone 18, not carry out heating and cooling in same cavity, scaling powder gas can be avoided to meet condensation knot, the quality of welding can not be affected, also can not cause the secondary pollution of product.When using weld tabs technique and formic acid (HCOOH) or nitrogen and hydrogen mixture (N2/H2) can being used when adopting protective atmosphere to carry out helping weldering; face of weld activation capacity can be strengthened thus; improve wellability, and welding without cavity of fluxless can be realized.
Four cavity body parts, have independently temperature regulation system, transmission system, measuring system, regulator control system separately; In vacuum brazing stove, form preheating zone, weld zone, pre-cooled district, four, cooling zone independently system, thus realize different processing procedures and warm-up phase, heating period, precooling stage and cooling stage.Temperature in stove is by temperature transducer perception, pressure is by pressure sensor senses, the motion conditions of pallet is by position sensor perception, the signal of all sensors is all connected with programmable logic controller (PLC), by programmable logic controller (PLC) according to circumstances, regulate heating power, the current strength of resistance wire or coolant rate on heat-conducting plate, heat-conducting plate and vacuum cavity feature bottom distance, coolant rate on seal cover, the movement velocity of conveying device, the speed that temperature rises or declines, dead time, the folding of high vacuum push-pull valve valve port, vacuum of vacuum chamber etc.For improving welding quality further, in the present embodiment, each vacuum cavity parts are provided with seal cover, at any time as required, can open seal cover, check, improve the controllability of quality to welding situation.And, welding situation can also be observed by observation window, these parameters be thought and regulates, substantially increase the quality of welding.General single cavity welding equipment does not possess pipeline system production capacity, and large-scale welding equipment often exists complex structure, the shortcoming that floor space is large.This implements to connect closely between each vacuum cavity parts, adopts linear structure, decreases transportation range to greatest extent, save the time, can realize pile line operation in an operating room.Whole device good seal, ensures that welding whole technological process is carry out welding under the environment of vacuum in preheating, heating, pre-cold-peace cooling procedure; Intensification cooling rate is low, can reduce the cavity produced in welding process as far as possible.Each vacuum cavity parts are independent of each other, and ensure that seal and independence.In heat-conducting plate and vacuum cavity parts, the area of pallet adapts, heat-conducting area is large, the product on whole pallet can be made to be heated equably, ensure that the temperature of pallet in welding process first reaches fusing point than the temperature of solder, eliminate the condition that cavity produces, the assembly temperature traditional current flow heats can being avoided to cause quality light thus rises fast shortcoming.
Claims (2)
1. a continuous vacuum welding stove, comprise frame and be positioned at vacuum chamber parts, the control device in frame, described control device comprises electric apparatus control apparatus, air control unit, human-computer interaction device, it is characterized in that: the operating room being provided with cuboid in frame, the first vacuum cavity parts, the second vacuum cavity parts, the 3rd vacuum cavity parts, the 4th vacuum cavity parts are provided with successively side by side in operating room, above-mentioned vacuum cavity parts two ends are equipped with high vacuum push-pull valve, and the valve port of adjacent high vacuum push-pull valve is interconnected; The thermal insulative board separated between two by above-mentioned four vacuum cavity parts is provided with in operating room, operating room is divided into two separate parts by thermal insulative board, wherein the first vacuum cavity parts, the second vacuum cavity parts place part are the thermal treatment zone, and the 3rd vacuum cavity parts, the 4th vacuum cavity parts place part are cooling zone; The wall of operating room near side, the thermal treatment zone is provided with charging aperture, and charging aperture is connected with feed pieces; The wall of operating room near side, cooling zone is provided with discharging opening, and discharging opening is connected with outlet member; The valve port of high vacuum push-pull valve of the first vacuum cavity member outside is connected with the charging aperture of operating room; Valve port outside the high vacuum push-pull valve of the 4th vacuum cavity parts is connected with discharging opening; Vacuum cavity parts in the thermal treatment zone comprise vacuum chamber, vacuum plant, heater, conveying device; Vacuum cavity parts in cooling zone comprise vacuum chamber, vacuum plant, cooling device, conveying device; Described control device controls the work of vacuum plant, heater, cooling device, conveying device, high vacuum push-pull valve;
Described vacuum plant is vavuum pump, and vavuum pump is connected by the vacuum-pumping valve of pipeline with vacuum cavity parts; Described feed pieces is provided with idler wheel mechanism, and idler wheel mechanism is provided with the delivery wheel for delivery tray; Described outlet member is provided with idler wheel mechanism, and idler wheel mechanism is provided with the delivery wheel for delivery tray; Described high vacuum push-pull valve is provided with the drive unit controlling high vacuum push-pull valve and open or close; Described human-computer interaction device is programmable logic controller (PLC);
Described conveying device comprises the bearing (setting) plate being positioned at vacuum cavity parts sidepiece, bearing (setting) plate is fixed with driving shaft and driven shaft, and driving shaft and driven shaft are provided with roller, is provided with the linkage gear cooperatively interacted between driving shaft and driven shaft; A driving shaft part is positioned at beyond vacuum cavity parts sidepiece, is positioned at part beyond vacuum cavity parts sidepiece and is provided with magnetic fluid seal; The part that driving shaft stretches out beyond vacuum cavity parts sidepiece is connected with the shaft coupling of servomotor, drives driving shaft to rotate by servomotor running;
Described heater comprises heating plate, and heating plate is arranged in the below of vacuum chamber roller, and heating plate is heated by Resistant heating or electrothermal tube; The bottom being positioned at the vacuum cavity parts of the thermal treatment zone is connected with base, base is provided with the linear slide rail be parallel to each other for a pair, and linear slide rail is perpendicular to the bottom of vacuum cavity parts; The slide block of linear slide rail is provided with vertically moving base plate, and the middle part of base plate is connected with ball-screw by feed screw nut; Ball-screw top is connected by ball-screw bearing block with the bottom of vacuum cavity parts; Between the bottom of base plate and vacuum cavity parts, vertical direction is sealedly connected with two metal bellows; Be provided with inner prop in metal bellows, inner prop is through the bottom of vacuum cavity parts, and interior column top is connected with heating plate, and the bottom of inner prop is connected with base plate; Base is provided with servomotor, and ball-screw is connected by shaft coupling with servomotor; Drive the rotation of ball-screw regulate the distance between the pallet being mounted with object to be welded in heating plate and vacuum cavity parts on roller thus realize the accurate control being mounted with the pallet radiation temperature of object to be welded to being positioned in vacuum cavity parts on roller by servomotor, or realized the accurate control being mounted with the pallet radiation temperature of object to be welded be positioned in vacuum cavity parts on roller by the size of current of adjusting resistance silk or electrothermal tube.
2. a kind of continuous vacuum welding stove as claimed in claim 1, is characterized in that: described cooling device is coldplate, and coldplate is arranged in the below of vacuum chamber roller, is provided with the passage for cooling fluid circulation in coldplate; Described cooling fluid is water or liquid nitrogen, realizes circulation by cooling fluid delivery pump; The bottom being positioned at the vacuum cavity parts of cooling zone is connected with base, base is provided with the linear slide rail be parallel to each other for a pair, and linear slide rail is perpendicular to the bottom of vacuum cavity parts; The slide block of linear slide rail is provided with vertically moving base plate, and the middle part of base plate is connected with ball-screw by feed screw nut; Ball-screw top is connected by ball-screw bearing block with the bottom of vacuum cavity parts; Between the bottom of base plate and vacuum cavity parts, vertical direction is sealedly connected with two metal bellows; Be provided with inner prop in metal bellows, inner prop is through the bottom of vacuum cavity parts, and interior column top is connected with coldplate, and the bottom of inner prop is connected with base plate; Base is provided with servomotor, and ball-screw is connected by shaft coupling with servomotor; Drive the rotation of ball-screw regulate the distance between the pallet being mounted with object to be welded in coldplate and vacuum cavity parts on roller thus realize the accurate control being mounted with the temperature of the pallet of object to be welded to being positioned in vacuum cavity parts on roller by servomotor, or realized the accurate control being mounted with the temperature of the pallet of object to be welded be positioned in vacuum cavity parts on roller by the flow of adjustment cooling fluid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310003958.1A CN103056473B (en) | 2013-01-07 | 2013-01-07 | A kind of continuous vacuum welding stove and welding method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310003958.1A CN103056473B (en) | 2013-01-07 | 2013-01-07 | A kind of continuous vacuum welding stove and welding method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103056473A CN103056473A (en) | 2013-04-24 |
| CN103056473B true CN103056473B (en) | 2015-08-26 |
Family
ID=48099520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310003958.1A Active CN103056473B (en) | 2013-01-07 | 2013-01-07 | A kind of continuous vacuum welding stove and welding method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103056473B (en) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9161459B2 (en) * | 2014-02-25 | 2015-10-13 | Illinois Tool Works Inc. | Pre-heater latch and seal mechanism for wave solder machine and related method |
| CN104807308B (en) * | 2015-05-12 | 2017-05-17 | 芜湖三花自控元器件有限公司 | System and technology for drying cross valve and tray movement mechanism for system |
| CN107931768B (en) * | 2017-12-29 | 2023-05-16 | 山东才聚电子科技有限公司 | Vacuum welding furnace and welding process |
| CN107855623B (en) * | 2017-12-29 | 2023-07-18 | 山东才聚电子科技有限公司 | Vacuum welding furnace control system and control method thereof |
| CN107855622B (en) * | 2017-12-29 | 2023-05-23 | 山东才聚电子科技有限公司 | Vacuum welding furnace with wide application range |
| CN107838516B (en) * | 2017-12-29 | 2023-10-03 | 山东才聚电子科技有限公司 | Welding mechanism of vacuum welding furnace |
| CN108296622A (en) * | 2018-02-24 | 2018-07-20 | 沈阳富创精密设备有限公司 | A kind of more vacuum chamber electron-beam welding equipments |
| CN108608681B (en) * | 2018-04-04 | 2019-07-05 | 安徽安缆模具有限公司 | A kind of self-heating mold welder |
| CN110394570A (en) * | 2018-04-24 | 2019-11-01 | 君泰创新（北京）科技有限公司 | Welding method and system |
| CN110744208A (en) * | 2018-07-23 | 2020-02-04 | 杭州纤纳光电科技有限公司 | Production line laser marking device and using method thereof |
| CN108994411B (en) * | 2018-08-06 | 2021-07-02 | 北京新雷能科技股份有限公司 | Negative pressure controllable atmosphere welding system |
| CN109128475B (en) * | 2018-11-06 | 2021-02-19 | 宁波瑞曼特新材料有限公司 | Welding structure and welding method of water cooling system |
| CN109570722B (en) * | 2018-11-21 | 2021-05-07 | 广西南宁胜祺安科技开发有限公司 | Vacuum welding equipment and using method thereof |
| CN111761158A (en) * | 2019-04-01 | 2020-10-13 | 江苏希诺实业有限公司 | Vacuum chamber for continuously vacuumizing vacuum cup and continuous vacuumizing process |
| CN111805039B (en) * | 2019-04-11 | 2022-02-08 | 中科同帜半导体(江苏)有限公司 | Online positive pressure welding furnace system and operation method thereof |
| CN110744166A (en) * | 2019-11-29 | 2020-02-04 | 昆山市嘉源昊泽光电科技有限公司 | Vacuum welding furnace |
| CN111302299B (en) * | 2020-02-20 | 2023-08-22 | 北京晨晶电子有限公司 | Welding sealing system and welding sealing process |
| CN111570998A (en) * | 2020-06-09 | 2020-08-25 | 深圳市劲拓自动化设备股份有限公司 | Vacuum welding equipment for circuit board |
| CN112589308A (en) * | 2020-12-18 | 2021-04-02 | 芜湖德纳美半导体有限公司 | Diode vacuum welding device |
| CN113770608A (en) * | 2021-10-26 | 2021-12-10 | 诚联恺达科技有限公司 | Channel type vacuum welding furnace |
| CN113953719A (en) * | 2021-10-26 | 2022-01-21 | 诚联恺达科技有限公司 | Online channel type vacuum welding furnace |
| CN114234630B (en) * | 2022-02-24 | 2022-06-24 | 泰姆瑞（北京）精密技术有限公司 | Online type partition vacuum furnace with cleaning function and welding method thereof |
| CN115070150A (en) * | 2022-07-01 | 2022-09-20 | 福导智能科技(苏州)有限公司 | Online three-cavity vacuum welding furnace and vacuum welding process |
| CN115156659B (en) * | 2022-07-25 | 2023-12-29 | 科威尔技术股份有限公司 | Conveying device for vacuum welding furnace |
| CN115178823B (en) * | 2022-08-15 | 2023-08-29 | 遂川平泰电路板有限公司 | Circuit board tin spraying device |
| CN115213578B (en) * | 2022-08-30 | 2023-10-31 | 科威尔技术股份有限公司 | Vacuum welding equipment and control method thereof |
| CN115815731B (en) * | 2023-01-06 | 2023-04-25 | 江苏省海洋资源开发研究院(连云港) | Environment-friendly high-sealing brazing device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3106562B2 (en) * | 1991-06-28 | 2000-11-06 | 日本電気株式会社 | Base fixed semi-custom LSI |
| CN2625092Y (en) * | 2003-03-18 | 2004-07-14 | 劲茂科技有限公司 | Four-cabin continuous vacuum braze welding furnace |
| CN1907895A (en) * | 2005-08-02 | 2007-02-07 | 王世忠 | Vacuum welding furnace for producing building vacuum glass plate |
| CN101454107A (en) * | 2006-05-29 | 2009-06-10 | 平克有限公司 | Method and device for heat treatment, especially connection by soldering |
| CN203003297U (en) * | 2013-01-07 | 2013-06-19 | 山东高唐杰盛半导体科技有限公司 | Continuous vacuum welding furnace |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2750747B2 (en) * | 1989-09-20 | 1998-05-13 | 日本真空技術株式会社 | Continuous vacuum brazing furnace |
| JP2008078510A (en) * | 2006-09-22 | 2008-04-03 | Sharp Corp | Reflow device |
-
2013
- 2013-01-07 CN CN201310003958.1A patent/CN103056473B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3106562B2 (en) * | 1991-06-28 | 2000-11-06 | 日本電気株式会社 | Base fixed semi-custom LSI |
| CN2625092Y (en) * | 2003-03-18 | 2004-07-14 | 劲茂科技有限公司 | Four-cabin continuous vacuum braze welding furnace |
| CN1907895A (en) * | 2005-08-02 | 2007-02-07 | 王世忠 | Vacuum welding furnace for producing building vacuum glass plate |
| CN101454107A (en) * | 2006-05-29 | 2009-06-10 | 平克有限公司 | Method and device for heat treatment, especially connection by soldering |
| CN203003297U (en) * | 2013-01-07 | 2013-06-19 | 山东高唐杰盛半导体科技有限公司 | Continuous vacuum welding furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103056473A (en) | 2013-04-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103056473B (en) | A kind of continuous vacuum welding stove and welding method thereof | |
| CN103623439B (en) | Edible fungi automatic agitating type autoclave | |
| CN201889573U (en) | Multidegree-freedom welding workbench for cooler | |
| CN102896391B (en) | A kind of chain type vacuum furnace | |
| CN106141375B (en) | A kind of operating method of large-scale supporting roller built-up welding work station | |
| CN203003297U (en) | Continuous vacuum welding furnace | |
| CN105537591B (en) | A kind of metal 3D printing device and Method of printing | |
| CN211595729U (en) | Supercritical nitrogen quenching circulating cooling system for vacuum furnace | |
| CN111059895A (en) | High-temperature tunnel type electro-thermal dynamic sintering furnace | |
| CN104894343A (en) | Pit-type tempering furnace with pressure control function | |
| CN113979651B (en) | Full-flow continuous automatic production line for vacuum glass | |
| CN107815531A (en) | A kind of large-sized structural parts heat treatment equipment | |
| CN102641924A (en) | Manufacturing device and method for bimetal composite hot bend | |
| JP6776214B2 (en) | Heat treatment equipment | |
| CN106766880A (en) | A kind of continuous sintering device | |
| CN101011690B (en) | Thermal rotational molding technique and device for inner wall and outer wall of metal pipe | |
| CN218662925U (en) | Hermetic cultural relic storage facility with low oxygen content | |
| CN218139335U (en) | Infrared radiation auxiliary heating autoclave | |
| CN207738837U (en) | A kind of low temperature salt-bath carbo-nitriding processing unit of restricting orifice | |
| CN206683389U (en) | A kind of double tank pusher-tray type powder reduction furnaces | |
| CN113201639B (en) | Device for annealing pipe and using method | |
| CN203049017U (en) | Rolling-type medium frequency carburizing furnace | |
| CN207207162U (en) | A kind of equipment for coating film overlay film roller roll surface temperature control device | |
| CN202099187U (en) | Electric heating lifting type annealing furnace | |
| CN108931450A (en) | A kind of high/low temperature original position qualimeter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180604 Address after: 252800 Gaotang County Economic and Technological Development Zone, Liaocheng, Shandong Province Patentee after: Shandong Liansheng Electronic Equipment Co., Ltd. Address before: 252800 Gaotang County Economic Development Zone, Liaocheng, Shandong Province Patentee before: Shandong Gaotang Jiesheng Semiconductor Technology Co., Ltd. |
|
| TR01 | Transfer of patent right |