CN217980183U

CN217980183U - Micropore check out test set

Info

Publication number: CN217980183U
Application number: CN202221330218.XU
Authority: CN
Inventors: 袁佳汝; 霍哲
Original assignee: Dier Laser Technology Wuxi Co ltd
Current assignee: Dier Laser Technology Wuxi Co ltd
Priority date: 2022-05-30
Filing date: 2022-05-30
Publication date: 2022-12-06
Anticipated expiration: 2032-05-30

Abstract

The technical scheme of this application discloses micropore check out test set includes: a light source device for emitting detection light; a parallel light device for converting the detection light into parallel light; the sample to be detected is positioned between the reflection assembly and the image acquisition device; the reflection assembly is used for reflecting the parallel light to the surface of the sample to be detected, which deviates from the image acquisition device, so that the parallel light enters the image acquisition device after passing through the sample to be detected; the image acquisition device is at least used for imaging based on parallel light passing through the micropores. Micropore check out test set system simple structure will detect light conversion through the parallel light device and be the better parallel light of depth of parallelism, and can reflect the detection light of parallel light device outgoing through reflection component, if can set up light source device and image acquisition device in waiting to detect the same one side of sample, for conventional structure, reduced the system volume.

Description

Micropore check out test set

Technical Field

The application relates to the technical field of optical detection equipment, in particular to micropore detection equipment.

Background

With the continuous progress of science and technology, more and more electronic devices are widely applied to daily life and work of people, bring great convenience to the daily life and work of people, and become an indispensable important tool for people at present.

In order to implement the preset functions of the electronic device, through holes need to be formed in the structural member of the electronic device. The lightness, thinness and miniaturization of electronic devices are a mainstream trend, and based on this trend, the size of through holes of structural members in electronic devices is also getting smaller and smaller, and the electronic devices are moving toward micro holes with a hole diameter of tens of μm.

In order to ensure the performance stability and reliability of the electronic device, the quality of the micropores needs to be detected by the micropore detection device. The existing micropore detection equipment has a complex system structure and a large volume.

Since the detection object is made of glass material, light parallel to the height of the camera lens must be used to be vertically incident from the back surface in order to achieve a good detection effect. The aperture of the glass micropore is about 30um generally, and as long as illumination has a point divergence angle, the micropore is not parallel, and the micropore can be integrated with the surrounding glass and cannot be seen clearly. In order to provide such illumination, a highly parallel backlight is typically mounted on the back of the material. However, this approach has a number of drawbacks: 1. the price of the light source is high, and the higher the requirement on the parallelism is, the more expensive the price is; 2. the collimation degree of light rays provided by the conventional backlight source erected on the back of the material in the market is still insufficient, and the light rays generate halation on micropores with the aperture of 30 mu m due to the reasons of divergence angle, diffraction and the like, interfere imaging and cannot illuminate the pore details of the micropores, namely the requirement of high collimation cannot be met; 3. because the backlight source is erected on the back of the material, a large amount of space is needed for arranging the light source, the lens and the like, and the light source which is equivalent to the detection range needs to be arranged, the cost is higher, the occupied space is also reduced, and the flexibility of the system is improved.

SUMMERY OF THE UTILITY MODEL

In view of this, the present application provides a micropore detection apparatus, the scheme is as follows:

a micropore detecting apparatus for detecting a sample to be detected having micropores, the micropore detecting apparatus comprising:

a light source device for emitting detection light;

a parallel light device for converting the detection light into parallel light;

the sample to be detected is positioned between the reflecting component and the image acquisition device; the reflecting component is used for reflecting the parallel light to the surface of the sample to be detected, which deviates from the image acquisition device, so that the parallel light is incident to the image acquisition device after passing through the sample to be detected; the image acquisition device is at least used for imaging based on parallel light passing through the micropores.

Preferably, in the micropore detecting apparatus, a light incident side of the image collecting device is provided with a lens assembly;

the transmission direction of the parallel light reflected by the reflection assembly after passing through the sample to be detected is parallel to the optical axis of the lens assembly, and the parallel light is incident to the image acquisition device through the lens assembly.

Preferably, in the micropore detecting device, the sample to be detected has a first surface and a second surface which are opposite and parallel, and the micropores penetrate through the first surface and the second surface;

the reflecting component is arranged opposite to the first surface, and at least partially overlaps with the sample to be detected in a first direction;

the image acquisition device is arranged opposite to the second surface, and at least partially overlaps with the sample to be detected in the first direction;

the light source device and the image acquisition device are positioned on the same side of the sample to be detected;

wherein the first direction is perpendicular to the first and second surfaces.

Preferably, in the micropore detecting apparatus, a light incident side of the image collecting device has a lens assembly, and the lens assembly includes the parallel light device.

Preferably, in the above micropore detecting apparatus, the reflecting member includes a first reflecting surface parallel to the second surface; the sample to be detected is arranged above the reflecting component;

the parallel light emitted by the parallel light device vertically enters the second surface, penetrates through the sample to be detected to enter the first reflecting surface, is reflected by the first reflecting surface, and then enters the image acquisition device through the sample to be detected.

Preferably, in the micropore detecting device, a half-reflecting and half-transmitting mirror is arranged between the sample to be detected and the image acquisition device;

and part of detection light emitted by the light source device is reflected by the semi-reflecting and semi-transmitting mirror, enters the parallel light device, is converted into parallel light by the parallel light device, vertically enters the second surface, penetrates through the sample to be detected to enter the first reflecting surface, is reflected by the first reflecting surface, sequentially passes through the sample to be detected and the semi-reflecting and semi-transmitting mirror, and enters the image acquisition device.

Preferably, in the micropore detecting apparatus, a display screen is disposed on a side of the reflection assembly away from the sample to be detected, the display screen is used for emitting a preset color light, and the preset color light and the parallel light have no overlapping wavelength;

the reflecting component is a reflecting type optical filter, and the first reflecting surface can reflect the parallel light and transmit the preset color light.

Preferably, in the above micropore detecting apparatus, the reflecting member comprises: a first mirror and a second mirror;

in the first direction, the first reflecting mirror is at least partially overlapped with the light source device, and the second reflecting mirror is at least partially overlapped with the sample to be detected;

the parallel light emitted by the parallel light device is reflected to the second reflector through the first reflector, and vertically enters the first surface of the sample to be detected after being reflected by the second reflector;

wherein the first reflector has a second reflective surface; the second reflector has a third reflective surface; the second reflecting surface and the transmission direction of the parallel light emitted by the parallel light device form an included angle of 45 degrees, so that the parallel light is transmitted to the third reflecting surface in parallel to the first surface; the third reflecting surface and the incident parallel light form an included angle of 45 degrees, so that the parallel light is perpendicularly incident to the first surface.

Preferably, in the above-mentioned micro-pore detection apparatus, further comprising: the leveling device is provided with a fixed table top and a leveling table top positioned above the fixed table top;

wherein, four corners of fixed mesa have a leveling screw respectively, leveling screw upper end with leveling mesa butt.

Preferably, in the above micropore detecting apparatus, the micropore detecting apparatus includes at least one of:

the driving device is used for driving at least one of the sample to be detected, the light source device, the reflecting assembly and the image acquisition device to move, so that the detection light moves relative to the sample to be detected;

the reflecting component is any one of a total reflector, a half reflector or a reflection type optical filter; the parallel light device is any one of a telecentric lens, a machine vision lens, a microscope and a single-chip Fresnel lens.

As can be seen from the above description, in the micropore detecting apparatus provided in the present technical solution, the micropore detecting apparatus includes: a light source device for emitting detection light; a parallel light device for converting the detection light into parallel light; the sample to be detected is positioned between the reflecting component and the image acquisition device; the reflecting component is used for reflecting the parallel light to the surface of the sample to be detected, which deviates from the image acquisition device, so that the parallel light is incident to the image acquisition device after passing through the sample to be detected; the image acquisition device is at least used for imaging based on parallel light passing through the micropores.

The utility model provides a micropore check out test set, light source device and the parallel light device with image acquisition device is located wait to detect same one side of sample, all be located the front of waiting to detect the sample promptly, and the parallel light device provides the parallel light from the front, utilizes reflection component forms the incidence wait to detect the parallel light of sample back as being shaded. Compared with the mode of arranging the light source device on the back of the sample to be detected, the technical scheme of the application utilizes the parallel light device to provide the front parallel light and the reflection characteristic of the light reflection device, can provide the parallel backlight which is low in manufacturing cost and enables the image acquisition device to acquire good image effect (clear in outline, no halo and the like), can clearly observe the details of the micropores in the sample to be detected, and can accurately obtain the appearance, size information and the like of each hole on the sample.

In addition, the micropore detection equipment system is simple in structure, detection light is converted into parallel light with good parallelism through a parallel light device, the parallel light emitted by the parallel light device can be reflected through the reflection assembly, if the light source device and the image acquisition device can be arranged on the same side of the sample to be detected, and the system volume is reduced compared with a conventional structure that the light source device and the image acquisition device are respectively arranged on two sides of the sample to be detected.

Drawings

In order to more clearly illustrate the embodiments of the present application or technical solutions in related arts, the drawings used in the description of the embodiments or prior arts will be briefly introduced below, it is obvious that the drawings in the following description are only embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

The structures, proportions, and dimensions shown in the drawings and described in the specification are for illustrative purposes only and are not intended to limit the scope of the present disclosure, which is defined by the claims, but rather by the claims, it is understood that these drawings and their equivalents are merely illustrative and not intended to limit the scope of the present disclosure.

FIG. 1 is a schematic structural diagram of a micropore detection apparatus provided in an embodiment of the present application;

FIG. 2 is a schematic structural diagram of another micropore detecting apparatus provided in the embodiments of the present application;

FIG. 3 is a schematic structural diagram of another micropore detection apparatus provided in the embodiments of the present application;

fig. 4 is a schematic structural diagram of a leveling device according to an embodiment of the present application.

Detailed Description

Embodiments of the present application will now be described more fully hereinafter with reference to the accompanying drawings, in which embodiments of the application are shown, and in which it is to be understood that the embodiments described are merely illustrative of some, but not all, of the embodiments of the application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

With the development of the electronic communication industry, a Through Silicon Via (TSV) technology and a Through Glass Via (TGV) technology become one of the popular research directions for vertical 3D packaging. Among them, the glass material has become an ideal three-dimensional integrated solution due to various advantages of TGV technology. The glass through hole core process is a deep hole forming process, and the through hole effect detection becomes one of the indispensable links. The existing method of erecting a high-parallelism backlight source on the back of the material has some defects.

In view of this, the embodiment of the present application provides a micropore detection apparatus, which uses a parallel light device to provide front parallel light and the reflection characteristics of a light reflection device, can provide parallel backlight with low manufacturing cost and good effect, can clearly observe details of micropores in a sample to be detected, and can accurately obtain the shape, size information, and the like of each pore on the sample.

The micropore detection equipment system is simple in structure, detection light is converted into parallel light with good parallelism through the parallel light device, the cost is low relative to a backlight source with high parallelism requirement, the parallel light emitted by the parallel light device can be reflected through the reflection assembly, if the light source device and the image acquisition device can be arranged on the same side of a sample to be detected, and the system volume is reduced relative to a conventional structure that the light source device and the image acquisition device are respectively arranged on two sides of the sample to be detected.

Furthermore, a driving device can be arranged and used for driving at least one of the sample to be detected, the light source device, the reflection assembly and the image acquisition device to move, so that the detection light moves relative to the sample to be detected, the light source device does not need a large illumination range, and energy consumption is reduced. And need not a large amount of spaces and be used for arranging light source, lens etc. and can satisfy the detection demand through the light source device of less illumination scope, reduce equipment occupation space, promoted the flexibility of system.

Furthermore, a lens assembly is arranged on the light incident side of the image acquisition device; the transmission direction of the parallel light reflected by the reflection component after passing through the sample to be detected can be set to be parallel to the optical axis of the lens component, and the parallel light is incident to the image acquisition device through the lens component. Therefore, the requirements of high collimation of parallel light and coaxiality of the parallel light and the lens can be met.

In order to make the aforementioned objects, features and advantages of the present application more comprehensible, the present application is described in further detail with reference to the accompanying drawings and the detailed description.

Referring to fig. 1, fig. 1 is a schematic structural diagram of a micropore detecting apparatus provided in an embodiment of the present application, the micropore detecting apparatus is used for detecting a sample to be detected 11 having micropores, and the micropore detecting apparatus includes:

a light source device 12, the light source device 12 emitting detection light;

a parallel light device 17 for converting the detection light into parallel light;

the sample 11 to be detected is positioned between the reflecting component 13 and the image acquisition device 14; the reflection assembly 13 is configured to reflect the parallel light that has passed through the sample 11 to be detected to a surface of the sample 11 to be detected that is away from the image acquisition device 14, so that the parallel light enters the image acquisition device 14 after passing through the sample 11 to be detected; the image capture device 14 is at least used for imaging based on parallel light passing through the microwells.

In the embodiment of the present application, the parallel light is parallel light having a set wavelength range, and the wavelength range of the parallel light is the same as the wavelength range of the detection light emitted from the light source device 12. That is, the detection light emitted from the light source device 12 is incident on the collimator 17 and converted into parallel light, and the wavelength range of the light is not changed.

In fig. 1, a solid line with double arrows indicates a path of a light ray emitted from the light source device 12 in a propagation path of the incident parallel light device 17, a solid line with single arrows indicates a propagation path of a parallel light emitted from the parallel light device 17 in the sample 11 to be detected, and a dashed line with single arrows indicates a path of a parallel light reflected by the reflection assembly 13 in the image acquisition device 14. In the embodiment of the present application, the image capturing device 14 may be a CCD camera or a CMOS imaging device. The image acquisition device 14 is capable of imaging according to the energy gradient change of the incident parallel light.

In this embodiment, the sample 11 to be detected may be a material that can transmit the parallel light, if the parallel light is visible light, the sample 11 to be detected may be a glass plate, or may also be a material that does not transmit visible light, and if the parallel light is visible light, the sample 11 to be detected may be a semiconductor substrate such as a silicon substrate. When the sample 11 to be detected is made of a material which does not penetrate through the parallel light, the image acquisition device 14 is used for detecting the parallel light reflected by the reflection component 13 at the position of the micropore, so that the outline of the micropore in the sample 11 to be detected can be detected, and the image acquisition device 14 is used for acquiring the reflected light of the sample 11 to be detected after the parallel light which vertically enters the sample 11 to be detected is reflected by the sample 11 to be detected, so that the condition of the material surface of the sample 11 to be detected can be detected.

In the embodiment of the present application, the parallel light is not limited to visible light, and may also be invisible light, such as infrared light.

When the sample 11 to be detected is a material capable of transmitting parallel light, the properties of the turbine traveling light of the micropore region and the region outside the micropore in the sample 11 to be detected are different, the image acquisition device 14 can perform imaging based on the parallel light transmitting through the micropore region and the region outside the micropore, and the micropore quality can be identified based on the image due to the fact that the light transmission properties of the micropore region and the region outside the micropore are different.

When the sample 11 to be detected is a material incapable of transmitting parallel light, the micropore region in the sample 11 to be detected transmits parallel light, the region outside the micropore does not transmit parallel light, and the image acquisition device 14 can image through the parallel light in the micropore region and can recognize the micropore quality based on an image. The parallel light reflected by the reflection assembly 13 from the micro-holes is used for detecting the hole profile, and the parallel light perpendicularly incident to the surface of the sample 11 to be detected outside the micro-hole area is reflected by the area and then enters the image acquisition device 14, and the reflected light of the areas is detected by the image acquisition device 14, so that the condition of the surface of the material can be detected.

In the micropore detecting apparatus according to the embodiment of the present application, the sample 11 to be detected has a first surface S1 and a second surface S2 which are opposite and parallel, and the micropores penetrate through the first surface S1 and the second surface S2. The pore diameter of the micropores may be set based on the requirement, and the pore diameter of the micropores is not particularly limited in the embodiments of the present application.

In the sample 11 to be detected, the sample 11 to be detected may be provided with a plurality of the micropores arranged in an array. The arrangement and number of the micro holes may also be set based on the requirement, and the arrangement and number of the micro holes in the sample 11 to be detected are not specifically limited in the embodiment of the present application.

The reflective member 13 is disposed opposite to the first surface S1, and in the first direction (vertical direction in fig. 1), the reflective member 13 at least partially overlaps the sample 11 to be detected. Wherein the first direction is perpendicular to the first surface S1 and the second surface S2. That is, in the first direction, the light reflected by the reflection assembly 13 can be incident on the first surface S1 along the first direction.

The image capturing device 14 is disposed opposite to the second surface S2, and in the first direction, the image capturing device 14 at least partially overlaps the sample 11 to be detected. That is, light rays of the micro-holes appearing in the first direction can be incident on the image pickup device 14.

The light source device 12 and the image acquisition device 14 are located on the same side of the sample 11 to be detected. Through the reflection component 13, the light source device 12 and the image acquisition device 14 can be located on the same side of the sample 11 to be detected, so that the length of the light path is shortened, and the volume of the system is reduced.

The micropore check out test set of this application embodiment will detect light conversion through parallel light device 17 and be the better parallel light of depth of parallelism, rethread reflection component 13 reflects the parallel light of parallel light device 17 outgoing can provide low in cost and effectual parallel and be shaded. And the light source device 12 and the image acquisition device 14 are arranged on the same side of the sample 11 to be detected, and compared with the conventional structure that the light source device 12 and the image acquisition device 14 are respectively arranged on two sides of the sample 11 to be detected, the system volume is reduced.

The light inlet side of the image acquisition device 14 is provided with a lens assembly; the propagation direction of the parallel light reflected by the reflection component 13 after passing through the sample 11 to be detected is parallel to the optical axis of the lens component, and the parallel light is incident to the image acquisition device 14 through the lens component. Therefore, the requirements of high collimation of parallel light and coaxiality of the parallel light and the lens can be met. Optionally, the lens assembly may be configured to include the parallel light device 17, so that the equipment cost may be further reduced.

Wherein, the lens assembly comprises any one of a telecentric lens (comprising a lens group), a machine vision lens, a microscope or a common single-chip Fresnel lens. The lens assembly comprises the parallel light device 17, and is used for converting divergent light emitted by the light source 121 into parallel light, and the telecentric lens can be used in reverse to provide a beam of parallel light emitted outwards and form coaxial parallel light based on reflection of the reflection assembly 13.

Optionally, in the embodiment of the present application, the sample 11 to be detected is a glass plate. In the manner shown in fig. 1, the glass material does not block the parallel light which is incident downwards to the reflection assembly 13 and reflected back by the reflection assembly 13, wherein the parallel light device 17 provides forward coaxial light, and the coaxial here means that the parallel light which is incident to the sample 11 to be detected from the second surface S2 is coaxial with the optical axis of the lens assembly of the camera.

In the manner shown in fig. 1, the reflecting assembly 13 comprises a first reflecting surface F1 parallel to the second surface S2; the parallel light emitted from the parallel light device 17 perpendicularly enters the second surface S2, passes through the sample to be detected 11 to enter the first reflecting surface F1, is reflected by the first reflecting surface F1, and then enters the image acquisition device 14 through the sample to be detected 11. The sample 11 to be detected is arranged above the reflection assembly 12, and the light source device 12 and the image acquisition device 14 are arranged above the sample 11 to be detected.

Specifically, the reflection assembly 13 includes a flat plate mirror, and the flat plate mirror includes a first reflection surface F1; the sample 11 to be detected is arranged on the surface of the flat reflector; a half-reflecting and half-transmitting mirror 15 is arranged between the sample 11 to be detected and the image acquisition device 14. A part of the detection light emitted by the light source device 12 is reflected by the half-reflecting and half-transmitting mirror 15, enters the parallel light device 17, is converted into parallel light by the parallel light device 17, enters the second surface S2, penetrates the sample 11 to be detected, enters the first reflecting surface F1, is reflected by the first reflecting surface F1, sequentially passes through the sample 11 to be detected, the parallel light device 17 and the half-reflecting and half-transmitting mirror 15, and enters the image acquisition device 14.

In the mode shown in fig. 1, the light incident side of the image capturing device has a lens assembly, and the lens assembly is multiplexed as the parallel light device 17. The device is provided with a half-reflecting and half-transmitting mirror 15 which is positioned between the light source 12 and the parallel light device 17, a half-reflecting and half-transmitting surface of the half-reflecting and half-transmitting mirror 15 forms an included angle of 45 degrees with the emergent light direction of the light source 121 and forms an included angle of 45 degrees with the optical axis of the lens component, the emergent light of the light source device 12 can be incident to a sample 11 to be detected through the lens component after rotating in the direction of 90 degrees, and equivalently, a light source is arranged above the parallel light device 17, so that the parallel light device 17 provides forward coaxial light.

Optionally, the half-reflecting and half-transmitting mirror 15 includes: a right triangular prism, the right triangular prism comprising: a first right-angled side surface, a second right-angled side surface, and an angled side surface; the first right-angle side faces towards the image acquisition device 14 and is parallel to the second surface S2; the inclined side surface is provided with a semi-reflecting and semi-permeable membrane 151; the inclined side surface and the normal direction of the second surface (i.e. the first direction) and the optical axis direction of the light source device 14 both have an included angle of 45 °; the second right-angled side faces away from the light source device 12. The optical axis of the light source device 12 is perpendicular to the first direction, that is, the direction from left to right in fig. 1 is the direction of the optical axis of the light source device 12.

Because a part of the light emitted from the light source device 12 is reflected by the half-reflecting and half-transmitting mirror 15 to the sample 11 to be detected, and the other part of the light passes through the half-reflecting and half-transmitting mirror 15, in order to avoid the interference to the detection result caused by the light passing through the half-reflecting and half-transmitting mirror 15 being reflected and/or refracted by other structures and then entering the image acquisition device 14, the second right-angle side surface is provided with a light absorption coating 152. The light absorbing coating 152 is capable of absorbing the parallel light. A material capable of absorbing the parallel light may be selected as the light absorbing coating 152 based on the wavelength interval of the parallel light, for example, when the parallel light is visible light, the light absorbing coating may be provided as a black ink layer.

The micropore detection device is provided with a lens barrel, and a closed space is formed through the lens barrel so as to avoid the interference of the environment. The lens assembly is mounted in the lens barrel. In the first direction, the lens barrel has a first opening and a second opening that are opposite. The second opening is provided with the lens component, and the first opening is fixed with the image acquisition 14 in a gapless contact manner, so that external ambient light is prevented from being incident to the image acquisition device 14 along with parallel light, and the interference to an imaging result is avoided. The half-reflecting and half-transmitting mirror 15 is arranged in the lens barrel to avoid interference caused by external ambient light entering the half-reflecting and half-transmitting mirror 15. Meanwhile, the space in the lens cone is multiplexed with the half-reflecting and half-transmitting lens 15, so that the system space can be saved, and the system volume is further reduced. The side wall of the lens cone is provided with a side opening, and the side opening is fixed with the light source device 12 in a gapless contact manner so as to avoid interference caused by incidence of external ambient light into the half-reflecting and half-transmitting lens 15 along with parallel light.

In the manner shown in fig. 1, the reflecting member 13 and the collimator 17 are arranged in parallel in the plane to form a collimated beam having an extremely high degree of parallelism and being highly parallel to the optical axis of the lens unit.

When the sample 11 to be detected is detected, a plurality of samples 11 to be detected may be simultaneously disposed above the reflection assembly 13 to simultaneously detect a plurality of samples 11 to be detected. In this case, in order to facilitate the user to visually determine which of the plurality of samples 11 to be detected is a sample with quality problem currently on the reflection assembly 13, the structure of the micropore detecting apparatus can be as shown in fig. 2.

Referring to fig. 2, fig. 2 is a schematic structural diagram of another micropore detecting apparatus provided in an embodiment of the present application, and based on the manner shown in fig. 1, the manner shown in fig. 2 is different from the manner shown in fig. 1 in that a side of the reflecting component facing away from the sample to be detected is provided with a surface light source 16, the surface light source 16 is used for emitting visible light of a preset color, and the preset color light has no overlapping with the wavelength of the parallel light. The reflective assembly 13 is a reflective filter, and the first reflective surface F1 can reflect the parallel light and transmit the visible light of the predetermined color.

The detection equipment is provided with an upper computer which is not shown in the attached drawings of the embodiment of the application and is connected with the image acquisition device 15, and whether the sample 11 to be detected has defects can be determined based on the image formed by the image acquisition device, wherein the defects comprise micropore defects, surface defects of the sample 11 to be detected and the like. The upper computer is connected with the surface light source 16, and can control the surface light source to emit the visible light with the preset color in the area corresponding to the defect sample so as to illuminate the defect sample, so that a user can visually position the defect sample.

The surface light source 16 may be an LED light source board or an LED display screen. The detection light emitted from the light source device 12 may be blue light, and the parallel light emitted from the parallel light device 17 is also blue light, and the visible light with a predetermined color emitted from the surface light source 16 includes red light and/or green light. The first reflective surface may reflect blue light and transmit red and green light.

In the manner shown in fig. 1 and 2, in order to make the parallel light device 17 provide forward coaxial light, no matter which lens assembly is used, a half-reflecting and half-transmitting mirror 15 needs to be arranged above the sample 11 to be detected, so as to achieve the purpose that the parallel light incident to the lens assembly is coaxial with the optical axis of the lens assembly. Obviously, in order to achieve the above coaxial purpose, the micropore detecting device according to the embodiment of the present application is not limited to the mode shown in fig. 1, and in other embodiments, the micropore detecting device may also be as shown in fig. 3, in which the first mirror 21 and the second mirror 22 are used to achieve the coaxial parallel light and the lens assembly.

Referring to fig. 3, fig. 3 is a schematic structural diagram of another micropore detecting apparatus provided in the embodiment of the present application, based on the mode shown in fig. 1, in the mode shown in fig. 3, the reflecting assembly 13 includes: a first mirror 21 and a second mirror 22;

in the first direction, the first reflecting mirror 21 at least partially overlaps with the light source device 12, and the second reflecting mirror 22 at least partially overlaps with the sample 11 to be detected;

the detection light emitted from the light source device 12 is converted into parallel light by the parallel light device 17, the parallel light is reflected to the second reflecting mirror 22 by the first reflecting mirror 21, and after being reflected by the second reflecting mirror 22, the parallel light vertically enters the first surface S1 of the sample 11 to be detected. In the embodiment of the present application, the light source device 12 and the parallel light device 17 may be integrated to form a parallel light source device, thereby reducing the system volume.

Wherein the first reflector 21 has a second reflective surface; the second reflector 22 has a third reflective surface; the second reflecting surface and the transmission direction of the parallel light emitted by the parallel light device 17 form an included angle of 45 degrees, so that the parallel light is transmitted to the third reflecting surface in parallel with the first surface; the third reflecting surface and the incident parallel light form an included angle of 45 degrees, so that the parallel light is perpendicularly incident to the first surface S1.

Specifically, the first reflector 21 is a first right-angle total reflection prism, and the second reflector 22 is a second right-angle total reflection prism; the first right-angle total reflection prism and the second right-angle total reflection prism are respectively provided with two right-angle side surfaces and an inclined side surface; and the inclined side surface of the first right-angle total reflection triangular prism is used as a second reflecting surface, and the inclined side surface of the second right-angle total reflection triangular prism is used as a third reflecting surface.

A right-angle side surface Z211 of the first right-angle total reflection triangular prism and a right-angle side surface Z221 of the second right-angle total reflection triangular prism are oppositely arranged in parallel and are parallel to the first direction; the other right-angle side surface Z212 of the first right-angle total reflection prism is arranged opposite to the light emitting direction of the light source device 12, and the inclined side surface X213 thereof forms an included angle of 45 degrees with the light emitting direction, so that the incident parallel light is incident on the inclined side surface X223 of the second right-angle total reflection prism along the direction parallel to the first surface S1 after being totally reflected; the other right-angle side surface Z222 of the second right-angle total reflection prism is arranged opposite to the first surface S1, and an inclined side surface X223 thereof forms an included angle of 45 degrees with the first surface S1, so that parallel light incident along the first surface S1 is totally reflected and then enters the first surface S1.

In the embodiment shown in fig. 3, the first reflecting mirror 21 and the second reflecting mirror 22 are not limited to a right-angle total reflection triangular prism, and may be two plane reflecting mirrors having an inclination angle of 45 ° with respect to the first surface S1. In the mode of fig. 3, the lens assembly of the image capturing device 14 cannot be multiplexed as the parallel light device 17, and therefore, the parallel light device 17 needs to be separately disposed on the light emitting side of the light source device 12 to ensure the parallelism of the parallel light rays.

In the manner shown in fig. 3, it is also possible to position the light source device 12 on the same side of the sample 11 to be examined as the image acquisition device 14. Moreover, the first reflector 21 and the second reflector 22 enable the light source device 12 to enter the first reflector 21 along the first direction, and reflect the light to the sample 11 to be detected through the second reflector 22, and the parallel light device provides the front parallel light characteristic and the reflection characteristic of the reflection component, so that the parallel backlight with low cost and good effect is provided.

In the embodiment of the present application, the micropore detecting apparatus further comprises a driving device, and the driving device is not shown in the drawings of the embodiment of the present application. The driving device is configured to drive at least one of the sample to be detected 11, the light source device 12, the reflection assembly 13, and the image acquisition device 14 to move, so that the parallel light moves relative to the sample to be detected 11, and the parallel light is used to omnidirectionally scan the sample to be detected 11 and the image acquisition device 14 is used to omnidirectionally image and detect the sample to be detected 11.

By arranging the driving device for driving at least one of the sample to be detected 11, the light source device 12, the reflection assembly 13 and the image acquisition device 14 to move, the parallel light moves relative to the sample to be detected 11, so that the light source device 12 does not need a large illumination range, and the energy consumption is reduced. And need not a large amount of spaces and be used for arranging light source, lens etc. and can satisfy the detection demand through the light source device of less illumination scope, reduce equipment occupation space, promoted the flexibility of system.

For the mode shown in fig. 1 and 2, the micropore detection device further comprises a leveling device, wherein the leveling device is used for adjusting the flatness of the plane where the reflection assembly 13 is located, so that the movement axes where the reflection assembly 13 and the driving device are located are kept parallel enough, and parallel light with extremely high parallelism can be guaranteed in all movement ranges when the driving device is used for adjusting the structural member in the micropore detection device to move.

As shown in fig. 4, fig. 4 is a schematic structural diagram of a leveling device provided in an embodiment of the present application, where the leveling device includes: having a fixed table top 33 and a leveling table top 31 above said fixed table top 33. Four corners of the fixed table surface 33 are respectively provided with a leveling screw 32, and the upper end of the leveling screw 32 is abutted to the leveling table surface 31. The lower part of the leveling screw 32 penetrates the whole fixed table surface 33, the bottom end of the leveling screw is exposed out of the lower surface of the fixed table surface 33, and the upper end of the leveling screw 32 can abut against the lower surface of the leveling table surface 31. The leveling table 31 is connected with a fixed table 33 below by four leveling screws 32. The heights of the four corners of the leveling table 31 can be adjusted by rotating the leveling screws 32 to level the angle of the table 31. The reflection assembly 13 is placed on the leveling device, and when leveling is needed, the leveling screw 32 is rotated. The leveling device is located below the reflection assembly 13.

In one mode, the sample 11 to be detected is disposed above the reflection assembly 13, and the driving device can drive the reflection assembly 13 and the image acquisition device 14 to synchronously translate relative to the light source device, so that the sample 11 to be detected and the image acquisition device 14 synchronously move relative to the light source device 12, and thus a detection image of the whole width of the sample 11 to be detected can be obtained.

In another mode, the sample 11 to be detected is fixed on a sample support frame, and the driving device is configured to drive the sample support frame, the reflection assembly 13, and the image acquisition device 14 to move synchronously, so that the sample 11 to be detected, the reflection assembly 13, and the image acquisition device 14 move synchronously relative to the light source device 12, and thus a detection image of the entire width of the sample 11 to be detected can be obtained. In this way, the sample support frame and the reflection assembly 13 may be fixed on the same test platform, and then the driving device is connected to the test platform, so that when the test platform is driven by the driving device to move, the sample support frame and the reflection assembly 13 may move synchronously.

It should be noted that, in the embodiment of the present application, based on the light spot size of the parallel light, the size of the sample to be detected 11, and the imaging range of the image acquisition device 14, the driving device can selectively control the movement of the set objects in the sample to be detected 11, the light source device 12, the reflection assembly 13, and the image acquisition device 14, and the relative movement manner is not limited to the above implementation manner. When the sample 11 to be detected is large in size, a large-size backlight source is not needed, and the driving device drives at least one of the sample 11 to be detected, the light source device 12, the reflection assembly 13 and the image acquisition device 14 to move, so that the sample 11 to be detected is scanned omnidirectionally by parallel light and the image acquisition device 14 can omnidirectionally detect the image of the sample 11 to be detected, the whole detection of the sample 11 to be detected in large size can be realized by the light source device 12 with small-size light spots, and the energy consumption is reduced.

In the micropore detection equipment, through drive arrangement can realize only waiting to detect sample 11 and image acquisition device 14 relative motion, only need guarantee that reflection component 13 and lens subassembly place plane be enough parallel can, at this moment, mechanical design is simple, and the back space of saving can leave and do other work.

It should be noted that, in the embodiment of the present application, the implementation manner of the reflection assembly 13 is not limited to the manner shown in fig. 1 and fig. 3, and the reflection assembly 13 may be any one of a total reflection mirror, a half reflection mirror, a reflection filter, and the like, or other optical devices capable of achieving equivalent effects, based on requirements, and is not limited to the example illustrated in the embodiment of the present application. The parallel light device 17 is any one of a telecentric lens, a machine vision lens, a microscope and a single-chip Fresnel lens.

In the micropore detection device according to the embodiment of the present application, the light source device 12 is provided with the parallel light device 17, so that the parallel light has a good parallelism, and in the manner shown in fig. 1, the lens assembly of the image acquisition device 14 can be multiplexed as the parallel light device 17, so as to reduce the device cost. The micropore detection equipment can provide a backlight source with low manufacturing cost, extremely high parallelism and good effect, and can clearly observe detailed characteristics in micropores.

In the mode shown in fig. 1, the lens assembly required by the multiplexing image acquisition device 14 serves as the parallel light device 17 to provide parallel light incident from the front, and the parallel light backlight incident from the back to the sample 11 to be detected is formed by reflection of the reflection assembly 13.

Meanwhile, compared with conventional detection equipment with the light source device 12 and the image acquisition device 14 positioned at two sides of the sample 11 to be detected, the technical scheme of the application sets the light source device 12 and the image acquisition device 14 positioned at the same side of the sample 11 to be detected, so that the length space is shortened, the equipment volume is reduced, and a large amount of space is not needed for arranging a backlight source, a lens and the like. The parallel light device provides the front parallel light and the reflection component provides the parallel backlight with low cost and good effect.

In the embodiment of the present application, the sample 11 to be detected may be directly attached to the surface of the reflection assembly 13. In other manners, the micropore detecting device may further include a sample holder for holding the sample 11 to be detected, and the sample 11 to be detected is fixed above the position at a certain height from the reflecting component 13 by the sample holder, so that the sample 11 to be detected can be prevented from being contaminated by dust on the reflecting component 31. The parallel light is reflected by a reflection member 13 disposed below the sample holder to form a backlight incident to the first surface S1 of the sample 11 to be detected.

As can be seen from the above description, the present application provides a micropore detecting apparatus in which the light source device 12 and the image collecting device 14 are located on the same side of the sample 11 to be detected, and the back of the sample 11 to be detected can be polished to form an image, so that a clear micropore image can be obtained, the micropore quality can be clearly determined, and meanwhile, the micropore detecting apparatus is not interfered by stray light.

The following describes the imaging effect of the micropore detecting device according to the embodiment of the present application with reference to the micropore detecting device shown in FIG. 1.

Taking a sample 11 to be detected with a micropore diameter of 25 μm as an example, the parallel light device 17 adopts a telecentric lens (provided with a half-reflecting and half-transmitting lens) with coaxial light, the sample 11 to be detected is placed and fixed on a sample support, the reflection assembly 13 is positioned on the back of the sample, the sample support and the reflection assembly 13 are positioned on the same table top, and the table top is connected with a driving device.

Adopt this application embodiment micropore check out test set gathers the image of micropore sample to be detected, shoots the effect: the profile is clear, the hole and the hole wall can be clearly distinguished, the blocked hole and the through hole can be distinguished, and things on the hole wall can be clearly seen.

For the same sample 11 to be tested, imaging was performed using conventional micropore inspection equipment (a backlight was set on the back of the sample).

For the image of the sample to be detected, which is acquired by adopting the conventional micropore detection equipment, the absolute uniform light cannot be generated based on the common backlight effect, a large amount of noise is generated, and the image is blurred.

The micropore detecting device of the embodiment of the application utilizes the characteristic that the parallel light device 17 provides the front parallel light and the reflection characteristic of the reflection component 13 to provide the parallel backlight with low manufacturing cost and good effect. Specifically, coaxial backlight is provided by using a high collimation lens, a half-reflecting mirror and a full-reflecting mirror, so that the details of the glass micropore can be clearly observed, and the morphology, size information and the like of each detection hole on the micropore sample can be accurately obtained.

The embodiments in the present description are described in a progressive manner, or in a parallel manner, or in a combination of a progressive manner and a parallel manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments can be referred to each other.

It is to be understood that in the description of the present application, the drawings and the description of the embodiments are to be regarded as illustrative in nature and not as restrictive. Like numerals refer to like structures throughout the description of the embodiments. Additionally, the figures may exaggerate the thicknesses of some layers, films, panels, regions, etc. for ease of understanding and ease of description. It will also be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. Further, "on …" means to position an element on or under another element, but does not essentially mean to position on the upper side of another element in terms of the direction of gravity.

The terms "upper," "lower," "top," "bottom," "inner," "outer," and the like refer to an orientation or positional relationship relative to an orientation or positional relationship shown in the drawings for ease of description and simplicity of description, but do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present application. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present.

It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such article or apparatus. Without further limitation, an element defined by the phrase "comprising a … …" does not exclude the presence of another identical element in an article or apparatus that comprises the element.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A micropore detecting apparatus for detecting a sample to be detected having micropores, the micropore detecting apparatus comprising:

a light source device for emitting detection light;

a parallel light device for converting the detection light into parallel light;

2. The micropore detection apparatus of claim 1, wherein the light incident side of the image capture device has a lens assembly;

3. The microwell detection apparatus of claim 1, wherein the sample to be detected has a first surface and a second surface that are opposite and parallel, and the microwell penetrates through the first surface and the second surface;

the reflecting component is arranged opposite to the first surface, and in a first direction, the reflecting component and the sample to be detected are at least partially overlapped;

wherein the first direction is perpendicular to the first and second surfaces.

4. The apparatus according to claim 1, wherein the light incident side of the image capturing device has a lens assembly, and the lens assembly includes the parallel light device.

5. The microwell detection apparatus of claim 3, wherein the reflective assembly comprises a first reflective surface parallel to the second surface; the sample to be detected is arranged above the reflecting component;

6. The micropore detection apparatus according to claim 5, wherein a half-reflecting and half-transmitting mirror is provided between the sample to be detected and the image acquisition device;

and part of detection light emitted by the light source device is reflected by the semi-reflective and semi-transparent mirror, enters the parallel light device, is converted into parallel light by the parallel light device, vertically enters the second surface, penetrates through the sample to be detected to enter the first reflecting surface, is reflected by the first reflecting surface, sequentially passes through the sample to be detected, the parallel light device and the semi-reflective and semi-transparent mirror, and enters the image acquisition device.

7. The micropore detection apparatus according to claim 5, wherein a side of the reflection component facing away from the sample to be detected is provided with a surface light source for emitting visible light of a preset color, and the visible light of the preset color has no overlap with the wavelength of the parallel light;

the reflecting component is a reflecting type optical filter, and the first reflecting surface can reflect the parallel light and transmit the visible light with the preset color.

8. The microwell detection apparatus of claim 3, wherein the reflective assembly comprises: a first mirror and a second mirror;

the parallel light emitted by the parallel light device is reflected to the second reflecting mirror through the first reflecting mirror, and is vertically incident to the first surface of the sample to be detected after being reflected by the second reflecting mirror;

wherein the first reflector has a second reflective surface; the second reflector has a third reflective surface; the second reflecting surface and the transmission direction of the parallel light emitted by the parallel light device form an included angle of 45 degrees, so that the parallel light is parallel to the first surface and is transmitted to the third reflecting surface; the third reflecting surface and the incident parallel light form an included angle of 45 degrees, so that the parallel light is perpendicularly incident to the first surface.

9. The microwell detection apparatus of claim 5, further comprising: the leveling device is provided with a fixed table top and a leveling table top positioned above the fixed table top;

10. The microwell detection apparatus of any of claims 1-9, wherein the microwell detection apparatus comprises at least one of:

the driving device is used for driving at least one of the sample to be detected, the light source device, the reflecting assembly and the image acquisition device to move, so that the parallel light moves relative to the sample to be detected;

the reflecting component is any one of a total reflector, a half reflector or a reflection type optical filter;

the parallel light device is any one of a telecentric lens, a machine vision lens, a microscope or a single-chip Fresnel lens.