CN217948339U - Single crystal furnace and single crystal growth system - Google Patents
Single crystal furnace and single crystal growth system Download PDFInfo
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- CN217948339U CN217948339U CN202222347889.3U CN202222347889U CN217948339U CN 217948339 U CN217948339 U CN 217948339U CN 202222347889 U CN202222347889 U CN 202222347889U CN 217948339 U CN217948339 U CN 217948339U
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- 239000013078 crystal Substances 0.000 title claims abstract description 76
- 230000007246 mechanism Effects 0.000 claims abstract description 36
- 238000009413 insulation Methods 0.000 claims abstract description 25
- 238000003780 insertion Methods 0.000 claims description 27
- 230000037431 insertion Effects 0.000 claims description 27
- 230000005540 biological transmission Effects 0.000 claims description 20
- 238000004321 preservation Methods 0.000 claims description 16
- 238000007789 sealing Methods 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000000034 method Methods 0.000 abstract description 11
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 5
- 238000010276 construction Methods 0.000 abstract description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 description 23
- 230000008569 process Effects 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000002210 silicon-based material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 239000011553 magnetic fluid Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model relates to a monocrystalline silicon production technical field provides a single crystal growing furnace and single crystal growing system. Wherein, single crystal growing furnace includes: the side wall of the furnace body is provided with a charging hole; the crucible is arranged inside the furnace body; the heat insulation assembly is arranged above the crucible and is of an annular structure, the heat insulation assembly comprises a fixing part and a rotating part, a through hole is formed in the position, opposite to the charging opening, of the fixing part, and the rotating part is rotatably connected with the fixing part around the center of the annular structure and used for opening and closing the through hole; and the driving mechanism is arranged on the furnace body, is connected with the rotating part and is used for driving the rotating part to rotate. So set up, accessible actuating mechanism drive rotation portion pivoted mode opens and close the perforating hole on the insulation component, and at reinforced in-process, actuating mechanism drive rotation portion opens the perforating hole, and after reinforced finishing, the actuating mechanism drive rotation closes the perforating hole, makes the insulation component form complete insulation construction, can not produce the problem of leaking heat.
Description
Technical Field
The utility model relates to a monocrystalline silicon production technical field especially relates to a single crystal growing furnace and single crystal growing system.
Background
The Czochralski method for growing monocrystalline silicon is the most widely applied technology in monocrystalline silicon production at present. In the process of producing monocrystalline silicon, silicon materials are periodically added into a crucible in a monocrystalline furnace to meet the requirements in the crystal pulling process.
The single crystal furnace generally includes a furnace body, a crucible, and a heat insulating layer, which are disposed inside the furnace body. The side wall of the furnace body is provided with a feeding port for the feeding device to extend into and feed materials to a crucible in the furnace body. The number of the heat preservation layers is multiple, and the heat preservation layers are sequentially arranged along the height direction of the single crystal furnace. Wherein the position of the insulating layer arranged above the crucible, which is opposite to the charging opening, is provided with a through hole for the charging device to pass through. During crystal pulling, the through holes on the heat insulation layer can generate the problem of heat leakage, so that the power consumption of the single crystal furnace is increased.
SUMMERY OF THE UTILITY MODEL
The utility model provides a single crystal growing furnace and single crystal growing system for solve the single crystal growing furnace among the prior art at crystal pulling in-process, the perforating hole on the heat preservation can produce the heat leak, leads to the defect of the consumption increase of single crystal growing furnace, realizes avoiding the effect that the perforating hole on crystal pulling in-process heat preservation leaks heat.
The utility model provides a single crystal furnace, include:
the side wall of the furnace body is provided with a charging hole;
the crucible is arranged inside the furnace body;
the heat insulation assembly is arranged above the crucible and is of an annular structure, the heat insulation assembly comprises a fixed part and a rotating part, a through hole is formed in the position, opposite to the charging opening, of the fixed part, and the rotating part is rotatably connected with the fixed part around the center of the annular structure and used for opening and closing the through hole;
and the driving mechanism is arranged on the furnace body, is connected with the rotating part and is used for driving the rotating part to rotate.
According to the utility model provides a pair of single crystal growing furnace, the fixed part with rotation portion is the semi-annular structure, the both ends of fixed part respectively with the both ends of rotation portion are connected, the fixed part with rotation portion encloses into the annular structure, in hookup location department, the fixed part with one in the rotation portion is equipped with the grafting piece, and another is equipped with the confession the inserting groove that the grafting piece put into, the perforating hole sets up the fixed part with the position department that rotation portion connects.
According to the utility model provides a pair of single crystal growing furnace, the thermal insulation component still includes tubular structure, the fixed part with the portion of rotating all suit in tubular structure's outside, tubular structure with the position that the perforating hole is relative is equipped with dodges the hole.
According to the utility model provides a pair of single crystal growing furnace, the fixed part with the rotation portion is the annular structure, the rotation portion suit in the outside of fixed part, be equipped with the connecting hole in the rotation portion, be used for with the perforating hole communicates each other or staggers each other.
According to the utility model provides a pair of single crystal growing furnace, actuating mechanism includes power component, driving gear and arc rack, the arc rack install in the rotation portion, power component install in on the furnace body and with the driving gear is connected, is used for the drive the driving gear rotates, the driving gear with the arc rack meshes mutually.
According to the utility model provides a pair of single crystal growing furnace, actuating mechanism still includes the transmission shaft, the one end of transmission shaft stretches into in the furnace body, be used for the installation the driving gear, the other end of transmission shaft stretches out outside the furnace body, power component sets up outside the furnace body and with the transmission shaft is connected, is used for the drive the transmission shaft rotates.
According to the utility model provides a pair of single crystal furnace, the transmission shaft with be equipped with seal structure between the furnace body.
According to the utility model provides a pair of single crystal growing furnace, actuating mechanism includes power component, worm and worm wheel rim, the worm wheel rim is installed in the portion of rotating, the worm meshes with the worm wheel rim mutually, power component install on the furnace body and with the worm is connected, is used for the drive the worm rotates.
According to the utility model provides a pair of single crystal growing furnace, power component sets up the outside of furnace body, stretching out of worm the furnace body external with power component connects.
The utility model also provides a single crystal growing system, including feeding device and as above the single crystal growing furnace, feeding device includes the telescopic passage, the passage is used for stretching into the charge door.
The utility model provides a single crystal furnace, after the crystal pulling, be connected feeding device and the charge door on the furnace body, the valve of charge door is opened. The driving mechanism drives the rotating part to rotate, so that the rotating part opens the through hole. The material guide pipe of the feeding device sequentially passes through the feeding port and the through hole and extends to the upper part of the crucible to execute the feeding action. After feeding, the guide pipe is retracted into the feeding device, the driving mechanism drives the rotating part to rotate reversely, so that the rotating part closes the through hole, the heat insulation assembly forms a closed heat insulation structure, and heat is prevented from dissipating from the through hole in the crystal pulling process. And finally, closing the valve of the feed inlet and continuously executing the crystal pulling action.
So set up, the perforating hole on the heat preservation subassembly is opened and close to accessible actuating mechanism drive rotation portion pivoted mode, and at reinforced in-process, actuating mechanism drive rotation portion opens the perforating hole, and after reinforced finishing, the actuating mechanism drive rotation closes the perforating hole, makes the heat preservation subassembly form complete insulation construction, can not produce the problem of leaking heat.
Meanwhile, after the charging is finished, the driving mechanism can immediately drive the rotating part to close the through hole, so that the temperature uniformity of the thermal field can be effectively ensured, and the power loss is reduced.
The utility model provides a single crystal growing system, owing to contained the utility model provides a single crystal growing furnace, consequently contained all the above-mentioned advantages of single crystal growing furnace simultaneously.
Drawings
In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural view of a single crystal furnace provided in an embodiment of the present invention;
fig. 2 is a schematic structural view of a first heat-insulating assembly provided in an embodiment of the present invention;
FIG. 3 is an exploded view of the insulating assembly shown in FIG. 2;
fig. 4 is a schematic structural view of a second heat-insulating assembly provided in an embodiment of the present invention;
FIG. 5 is a schematic diagram of a single crystal growth system provided in an embodiment of the present invention;
fig. 6 is a schematic structural diagram of a feeding device provided in an embodiment of the present invention.
Reference numerals are as follows:
1. a furnace body; 2. a crucible; 3. a fixed part; 4. a rotating part; 5. a through hole; 6. an insertion block; 7. inserting grooves; 8. a cylinder structure; 9. avoiding holes; 10. connecting holes; 11. a power assembly; 12. a driving gear; 13. an arc-shaped rack; 14. a drive shaft; 15. a feeding device; 16. a material guide pipe; 17. a housing; 18. a storage bin; 19. a vibrator; 20. a heat preservation assembly; 21. a translation drive mechanism.
Detailed Description
To make the objects, technical solutions and advantages of the present invention clearer, the drawings of the present invention are combined to clearly and completely describe the technical solutions of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without making creative efforts belong to the protection scope of the present invention.
The single crystal furnace in the prior art generally comprises a furnace body, a crucible and a heat insulation layer, wherein the crucible and the heat insulation layer are arranged inside the furnace body. The side wall of the furnace body is provided with a feeding port for the feeding device to extend into and feed materials to a crucible in the furnace body. The number of the heat preservation layers is multiple, and the heat preservation layers are sequentially arranged along the height direction of the single crystal furnace. Wherein the position of the insulating layer arranged above the crucible, which is opposite to the charging opening, is provided with a through hole for the charging device to pass through. During crystal pulling, the through holes on the heat insulation layer can generate the problem of heat leakage, so that the power consumption of the single crystal furnace is increased. In order to solve the problem that the through hole of the heat preservation layer leaks heat in the crystal pulling process, the embodiment of the utility model provides a single crystal furnace and single crystal growth system.
A single crystal furnace provided in an embodiment of the present invention will be described below with reference to fig. 1 to 6.
Specifically, the single crystal furnace includes a furnace body 1, a crucible 2, a heat insulating assembly 20, and a driving mechanism.
Wherein, the lateral wall of the furnace body 1 is provided with a feed inlet. Specifically, the furnace body 1 is a closed cavity structure, and the feeding port is arranged to be through for the feeding pipe 16 of the feeding device 15 to extend into.
The crucible 2 is arranged in the protective body and used for containing silicon materials, and the silicon materials comprise powdery silicon materials and silicon materials in a molten state.
The insulating assembly 20 is disposed above the crucible 2. The heat preservation assembly 20 is of an annular structure, and the heat preservation assembly 20 comprises a fixing part 3 and a rotating part 4. The fixing part 3 is provided with a through hole 5 at a position opposite to the charging opening, and the rotating part 4 is rotatably connected with the fixing part 3 around the center of the annular structure and is used for opening and closing the through hole 5. For example, the rotating portion 4 can be rotationally switched between an open state in which the rotating portion 4 opens the through-hole 5 and a closed state in which the rotating portion 4 closes the through-hole 5. It should be noted that the single crystal furnace further includes a lower insulating layer disposed below the crucible 2 and an intermediate insulating layer disposed outside the crucible 2, and this is not described in detail since the present application does not relate to the improvement herein.
The embodiment of the utility model provides a single crystal furnace, after the crystal pulling, is connected feeding device 15 with the charge door on the furnace body 1, the valve of charge door is opened. The driving mechanism drives the rotating portion 4 to rotate, so that the rotating portion 4 opens the through hole 5. The material guide pipe 16 of the feeding device 15 extends above the crucible 2 through the feeding port and the through hole 5 in sequence to perform feeding action. After feeding is finished, the material guide pipe 16 is retracted into the feeding device 15, and the driving mechanism drives the rotating part 4 to rotate reversely, so that the rotating part 4 closes the through hole 5, and the heat insulation assembly 20 forms a closed heat insulation structure, thereby avoiding heat loss from the through hole 5 in the crystal pulling process. And finally, closing the valve of the feed inlet and continuously executing the crystal pulling action.
With the arrangement, the through hole 5 on the heat preservation assembly 20 can be opened and closed in a mode that the driving mechanism drives the rotating part 4 to rotate. In the charging process, the driving mechanism drives the rotating part 4 to open the through hole 5, and after charging is finished, the driving mechanism drives the rotating part to close the through hole 5, so that the heat insulation assembly 20 forms a complete heat insulation structure, and the problem of heat leakage cannot be caused.
Meanwhile, after the charging is finished, the driving mechanism can immediately drive the rotating part 4 to close the through hole 5, so that the temperature uniformity of the thermal field can be effectively ensured, and the power loss is reduced.
Referring to fig. 2 and 3, in some embodiments provided by the present invention, the fixing portion 3 and the rotating portion 4 are both semi-annular structures, two ends of the fixing portion 3 are respectively connected to two ends of the rotating portion 4, and the fixing portion 3 and the rotating portion 4 enclose an annular structure. At the connecting position of the fixed part 3 and the rotating part 4, one of the fixed part 3 and the rotating part 4 is provided with an insertion block 6, and the other is provided with an insertion groove 7 for the insertion block 6 to be inserted. The through hole 5 is provided at a position where the fixed portion 3 and the rotating portion 4 are connected. When the insertion block 6 is inserted into the insertion groove 7, the through hole 5 is closed, and when the insertion block 6 is removed from the insertion groove 7, the through hole 5 is opened.
Optionally, the two ends of the rotating portion 4 are both provided with an insertion block 6, the two ends of the fixing portion 3 are both provided with an insertion groove 7, and the through hole 5 is disposed at the insertion groove 7 at one end of the fixing portion 3. When the rotating part 4 rotates to open the through hole 5, the insertion block 6 at the first end of the rotating part 4 gradually comes off from the corresponding insertion groove 7 to open the through hole 5 at the insertion groove 7, and simultaneously, the insertion block 6 at the second end of the rotating part 4 is gradually inserted into the corresponding insertion groove 7. When the rotating part 4 rotates to close the through hole 5, the insertion block 6 at the first end of the rotating part 4 is gradually inserted into the corresponding insertion groove 7 to close the through hole 5 at the insertion groove 7, and simultaneously, the insertion block 6 at the second end of the rotating part 4 is gradually pulled out from the corresponding insertion groove 7.
Of course, the insertion grooves 7 may be provided at both ends of the rotating portion 4, the insertion blocks 6 may be provided at both ends of the fixed portion 3, and the through-hole 5 may be provided in the insertion block 6 at one end of the fixed portion 3. Or, one end of the rotating part 4 is provided with the inserting block 6, and the other end is provided with the inserting groove 7, then the two ends of the fixing part 3 are respectively provided with the corresponding inserting groove 7 and the inserting block 6, and the through hole 5 can be arranged at the inserting groove 7 of the fixing part 3 or on the inserting block 6.
The utility model provides an in some embodiments, heat preservation subassembly 20 still includes tubular structure 8, and fixed part 3 and rotating part 4 all suit are in tubular structure 8's outside, and tubular structure 8 and perforating hole 5 relative position are equipped with dodges hole 9. Through fixed part 3 and 4 suit in the 8 outsides of tubular structure of rotation portion for thermal insulation component 20 forms double-deck insulation construction, thereby can improve better heat preservation effect. Through setting up tubular structure 8 and can also play the effect of support and direction to rotation portion 4 for rotation of rotation portion 4 is more reliable and more stable.
Referring to fig. 4, in some embodiments provided by the present invention, the fixing portion 3 and the rotating portion 4 are both of a ring structure, the rotating portion 4 is sleeved outside the fixing portion 3, and the rotating portion 4 is provided with a connecting hole 10 for communicating with the through hole 5 or staggering each other. When the rotation part 4 rotates to open the through hole 5, the rotation part 4 rotates until the connection hole 10 is opposite to the through hole 5 so that the guide tube 16 of the charging device 15 can be extended above the crucible 2 through the connection hole 10 and the through hole 5 in sequence. When the rotating part 4 rotates to close the through hole 5, the rotating part 4 rotates until the connecting hole 10 and the through hole 5 are shifted from each other, so that the side wall of the rotating part 4 blocks the through hole 5.
In some embodiments provided herein, the driving mechanism includes a power assembly 11, a driving gear 12 and an arc-shaped rack 13. The arc-shaped rack 13 is installed on the rotating portion 4, and the center of the arc-shaped rack 13 falls on the rotation axis of the rotating portion 4. The driving gear 12 is meshed with the arc-shaped rack 13, and the power assembly 11 is mounted on the furnace body 1 and connected with the driving gear 12 and used for driving the driving gear 12 to rotate. Like this, when the perforating hole 5 is opened and close to needs, can drive driving gear 12 through power component 11 and rotate, driving gear 12 and arc rack 13 meshing transmission to rotate 4 through arc rack 13 drive rotating part.
Alternatively, the power assembly 11 is an electric motor. For example, the power assembly 11 may be a servo motor.
In some implementations provided herein, the drive mechanism further includes a drive shaft 14. For example, the drive shaft 14 is rotatably connected to the furnace body 1. One end of the transmission shaft 14 extends into the furnace body 1 and is used for installing the driving gear 12. For example, the drive gear 12 is sleeved on the drive shaft 14. The other end of the transmission shaft 14 extends out of the furnace body 1, and the power assembly 11 is arranged outside the furnace body 1 and connected with the transmission shaft 14 and used for driving the transmission shaft 14 to rotate. Like this, when the perforating hole 5 needs to be opened and close, drive shaft 14 through power component 11 drive and rotate, and drive shaft 14 drive driving gear 12 rotates, and driving gear 12 and arc rack 13 meshing transmission to rotate 4 through arc rack 13 drive rotating part.
So set up, can set up power component 11 and provide power for rotation portion 4 outside furnace body 1, avoid power component 11 to receive the inside high temperature's of furnace body 1 influence.
In some implementations provided by the utility model, a sealing structure is arranged between the transmission shaft 14 and the furnace body 1. Through setting up seal structure, can avoid furnace body 1 inside and external production air current exchange, guarantee the airtight effect of furnace body 1. Alternatively, the sealing structure may be provided as a magnetic fluid sealing device. It should be noted that the magnetic fluid sealing device belongs to the products in the prior art, and the construction principle thereof is not the focus of the discussion herein, and is not described herein again.
In some embodiments provided herein, the drive mechanism includes a power assembly 11, a worm and a worm gear rim. The worm wheel rim is installed on the rotating part 4, and the worm is meshed with the worm wheel rim. The power assembly 11 is arranged on the furnace body 1 and connected with the worm for driving the worm to rotate. Thus, when the through hole 5 needs to be opened and closed, the worm can be driven to rotate through the power assembly 11, and the worm is in meshing transmission with the worm wheel rim so as to drive the rotating part 4 to rotate through the worm wheel rim.
Alternatively, the power assembly 11 is an electric motor. For example, the power assembly 11 may be a servo motor.
In some embodiments provided by the utility model, the power component 11 is arranged outside the furnace body 1, and the worm extends out of the furnace body 1 and is connected with the power component 11. So set up, can set up power component 11 and provide power for rotation portion 4 outside furnace body 1, avoid power component 11 to receive the inside high temperature's of furnace body 1 influence.
The embodiment of the utility model provides an embodiment still provides a single crystal growth system.
Specifically, the single crystal growing system includes the charging device 15 and the single crystal furnace as described above. The charging device 15 comprises a telescopic guide tube 16, and the guide tube 16 is used for extending into the charging opening.
It should be noted that, since the single crystal growing system includes the single crystal furnace, the single crystal growing system also includes all the advantages of the single crystal furnace, and the details are not described herein.
Optionally, the charging device 15 further comprises a housing 17, a silo 18, a vibrator 19 and a translation drive mechanism 21.
Wherein, a discharge hole which is used for being butted with a feed inlet of the furnace body 1 is arranged on the shell 17. The bin 18 is arranged in the machine shell 17, and a discharge opening is formed in the bottom of the bin 18. The material guide pipe 16 is arranged below the material discharge opening, and the side wall of the material guide pipe 16 is provided with a material inlet for butting against the material discharge opening of the storage bin 18. The vibrator 19 is slidably disposed in the housing 17, and a translation drive mechanism 21 is used to drive the vibrator 19 to displace. The material guide pipe 16 is installed on the vibrator 19, and performs material conveyance by the vibration action of the vibrator 19.
When feeding is needed, the discharge port of the casing 17 is butted with the feeding port of the furnace body 1, the translation driving mechanism 21 drives the vibrator 19 to move towards the direction close to the single crystal furnace, and the vibrator 19 drives the material guide pipe 16 to extend out of the discharge port. A material guide pipe 16 extends into the single crystal furnace, and a material inlet of the material guide pipe 16 is butted with a material outlet of a storage bin 18. The storage bin 18 discharges materials to the material guide pipe 16, and the vibrator 19 generates a vibration effect to enable the material guide pipe 16 to feed materials into the single crystal furnace. After the feeding is finished, the translation driving mechanism 21 drives the vibrator 19 to move in the direction away from the single crystal furnace, and the vibrator 19 drives the material guide pipe 16 to retract into the machine shell 17.
Alternatively, the translation drive mechanism 21 includes, but is not limited to, a lead screw nut drive mechanism, a rack and pinion drive mechanism, an air cylinder, an oil cylinder, and an electric cylinder.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.
Claims (10)
1. A single crystal furnace, comprising:
the furnace body (1) is provided with a feeding port on the side wall;
a crucible (2) disposed inside the furnace body (1);
the crucible heating device comprises a crucible (2), a heat insulation assembly (20) and a heating device, wherein the heat insulation assembly (20) is arranged above the crucible (2), the heat insulation assembly (20) is of an annular structure, the heat insulation assembly (20) comprises a fixing part (3) and a rotating part (4), a through hole (5) is formed in the position, opposite to the charging opening, of the fixing part (3), and the rotating part (4) is rotatably connected with the fixing part (3) around the center of the annular structure and is used for opening and closing the through hole (5);
and the driving mechanism is arranged on the furnace body (1), is connected with the rotating part (4) and is used for driving the rotating part (4) to rotate.
2. The single crystal furnace according to claim 1, characterized in that the fixed part (3) and the rotating part (4) are both semi-annular structures, both ends of the fixed part (3) are respectively connected with both ends of the rotating part (4), the fixed part (3) and the rotating part (4) enclose the annular structure, at the connecting position, one of the fixed part (3) and the rotating part (4) is provided with an insertion block (6), the other one is provided with an insertion groove (7) for the insertion block (6) to be placed in, and the through hole (5) is arranged at the connecting position of the fixed part (3) and the rotating part (4).
3. The single crystal furnace according to claim 2, wherein the heat preservation assembly (20) further comprises a cylindrical structure (8), the fixed portion (3) and the rotating portion (4) are sleeved outside the cylindrical structure (8), and a relief hole (9) is formed in the cylindrical structure (8) at a position opposite to the through hole (5).
4. The single crystal furnace according to claim 1, wherein the fixed part (3) and the rotating part (4) are both of an annular structure, the rotating part (4) is sleeved outside the fixed part (3), and the rotating part (4) is provided with a connecting hole (10) for communicating with the through hole (5) or being staggered with the through hole.
5. The single crystal furnace according to any one of claims 1 to 4, wherein the driving mechanism comprises a power assembly (11), a driving gear (12) and an arc-shaped rack (13), the arc-shaped rack (13) is mounted on the rotating part (4), the power assembly (11) is mounted on the furnace body (1) and connected with the driving gear (12) for driving the driving gear (12) to rotate, and the driving gear (12) is meshed with the arc-shaped rack (13).
6. The single crystal furnace according to claim 5, wherein the driving mechanism further comprises a transmission shaft (14), one end of the transmission shaft (14) extends into the furnace body (1) and is used for mounting the driving gear (12), the other end of the transmission shaft (14) extends out of the furnace body (1), and the power assembly (11) is arranged outside the furnace body (1) and is connected with the transmission shaft (14) and is used for driving the transmission shaft (14) to rotate.
7. The single crystal furnace according to claim 6, characterized in that a sealing structure is arranged between the transmission shaft (14) and the furnace body (1).
8. The single crystal furnace according to any one of claims 1 to 4, wherein the driving mechanism comprises a power assembly (11), a worm and a worm wheel rim, the worm wheel rim is installed on the rotating part (4), the worm is meshed with the worm wheel rim, and the power assembly (11) is installed on the furnace body (1) and connected with the worm for driving the worm to rotate.
9. The single crystal furnace according to claim 8, characterized in that the power assembly (11) is arranged outside the furnace body (1), and the worm extends out of the furnace body (1) and is connected with the power assembly (11).
10. A single crystal growing system, characterized by comprising a feeding device (15) and a single crystal furnace according to any one of claims 1 to 9, said feeding device (15) comprising a retractable guide tube (16), said guide tube (16) being adapted to extend into said feeding opening.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222347889.3U CN217948339U (en) | 2022-09-02 | 2022-09-02 | Single crystal furnace and single crystal growth system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222347889.3U CN217948339U (en) | 2022-09-02 | 2022-09-02 | Single crystal furnace and single crystal growth system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217948339U true CN217948339U (en) | 2022-12-02 |
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ID=84210776
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222347889.3U Active CN217948339U (en) | 2022-09-02 | 2022-09-02 | Single crystal furnace and single crystal growth system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217948339U (en) |
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2022
- 2022-09-02 CN CN202222347889.3U patent/CN217948339U/en active Active
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Effective date of registration: 20221206 Address after: 412000 Room 518-50, Building 1, Longxin International, No. 255, Tongxia Road, Tongtangwan Street, Shifeng District, Zhuzhou City, Hunan Province Patentee after: Sany Silicon Energy (Zhuzhou) Co.,Ltd. Address before: 3rd Floor, Sany Administration Center, Sanyi Industrial City, Sanyi Road, Economic Development Zone, Changsha City, Hunan Province, 410100 Patentee before: SANY GROUP Co.,Ltd. |
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| TR01 | Transfer of patent right |
Effective date of registration: 20231203 Address after: 412000 South 1st span factory building on the southwest side of the intersection of Qingxia Road and Old Industrial Road, Tongtangwan Street, Shifeng District, Zhuzhou City, Hunan Province Patentee after: Zhuzhou Sany Silicon Energy Technology Co.,Ltd. Address before: 412000 Room 518-50, Building 1, Longxin International, No. 255, Tongxia Road, Tongtangwan Street, Shifeng District, Zhuzhou City, Hunan Province Patentee before: Sany Silicon Energy (Zhuzhou) Co.,Ltd. |