CN217945224U - Target transfer device for manufacturing semiconductor chip - Google Patents

Target transfer device for manufacturing semiconductor chip Download PDF

Info

Publication number
CN217945224U
CN217945224U CN202221846887.2U CN202221846887U CN217945224U CN 217945224 U CN217945224 U CN 217945224U CN 202221846887 U CN202221846887 U CN 202221846887U CN 217945224 U CN217945224 U CN 217945224U
Authority
CN
China
Prior art keywords
fixedly connected
sliding
supporting plate
supporting
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202221846887.2U
Other languages
Chinese (zh)
Inventor
陈箫箫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaxin Electronic Technology Changzhou Co ltd
Yaxin Semiconductor Materials Jiangsu Co ltd
Original Assignee
Yaxin Electronic Technology Changzhou Co ltd
Yaxin Semiconductor Materials Jiangsu Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaxin Electronic Technology Changzhou Co ltd, Yaxin Semiconductor Materials Jiangsu Co ltd filed Critical Yaxin Electronic Technology Changzhou Co ltd
Priority to CN202221846887.2U priority Critical patent/CN217945224U/en
Application granted granted Critical
Publication of CN217945224U publication Critical patent/CN217945224U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The utility model discloses a semiconductor chip makes and uses target transfer device relates to target production facility technical field. The utility model comprises a supporting plate, wherein both ends of the bottom of the supporting plate are fixedly provided with vertical plates, a screw rod is rotatably connected between the two vertical plates, the outer circular surface of the screw rod is in threaded connection with a connecting plate, the top of the supporting plate is provided with a sliding channel, the top of the supporting plate is provided with a through channel communicated with the sliding channel, the sliding channel is internally and slidably connected with a plurality of stoppers, and the connecting plate is in sliding fit with the through channel and extends into the sliding channel to be fixedly connected with a stopper positioned at the leftmost end of the supporting plate; and a connecting rope is fixedly connected between two adjacent limiting blocks. The utility model discloses an adjust the lift adjustment post and make each first arc seat be in same horizontal position to under reset spring's pulling force effect, drive second arc seat and push down and carry out the centre gripping with the target and fix, drive each stopper slip and make the connection rope taut, carry out stable support everywhere to the target.

Description

Target transfer device for manufacturing semiconductor chip
Technical Field
The utility model belongs to the technical field of target production facility, especially, relate to a semiconductor chip makes and uses target transfer device.
Background
The semiconductor chip industry is one of the main application fields of metal sputtering targets, and is also the field with the highest requirements on the components, the structure and the performance of the targets. Specifically, the manufacturing process of the semiconductor chip can be divided into three major links, namely, silicon wafer manufacturing, chip packaging and the like, wherein a metal sputtering target material is required in both the links of the wafer manufacturing and the chip packaging. Through retrieval, the existing chinese patent application No. CN201820309923.9 discloses a moving trolley for a rotary target, which can conveniently replace a foam pad and ensure that the rotary target to be transported has good adaptability. However, this solution still has some disadvantages when in use: the utility model discloses a when using, can only support the both ends of target, lead to target middle part position to be in unsettled state, and then receive the dead weight flagging easily, lead to the bending deformation of target, influence subsequent production, fail effectually to fix the target moreover, cause the target to drop from the travelling car easily.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a semiconductor chip makes and uses target transfer device, make each first arc seat be in same horizontal position through adjusting the lift adjustment post, with target one end butt to the baffle, and under reset spring's pulling force effect, it carries out the centre gripping with the target to drive second arc seat and push down fixedly, it is taut to drive each stopper slip and make the connection rope between the adjacent stopper, make first arc seat carry out stable support to each department of target, current target has been solved in the transfer process, target middle part position is in unsettled state, it is flagging to receive the dead weight easily, the bending deformation who leads to the target, and fail effectually to fix the target, cause the target to follow the travelling car problem that drops easily.
In order to solve the technical problem, the utility model discloses a realize through following technical scheme:
the utility model relates to a target material transfer device for manufacturing a semiconductor chip, which comprises a supporting plate, wherein both ends of the bottom of the supporting plate are fixedly provided with vertical plates, a screw rod is rotatably connected between the two vertical plates, the outer circular surface of the screw rod is in threaded connection with a connecting plate, one end of the screw rod penetrates to the outer side of the vertical plate, the top of the supporting plate is provided with a sliding channel, the top of the supporting plate is provided with a penetrating channel communicated with the sliding channel, the sliding channel is in sliding connection with a plurality of limit blocks, the connecting plate is in sliding fit with the penetrating channel and extends into the sliding channel to be fixedly connected with the limit block positioned at the leftmost end of the supporting plate; the limiting blocks are fixedly connected with connecting ropes, the top of each limiting block is fixedly connected with a lifting adjusting column, the top of each lifting adjusting column is clamped and matched with a supporting assembly, and the supporting assembly is located on the left of the supporting plate and is fixedly connected with a limiting assembly on the outer side of the supporting assembly.
As a preferred technical scheme of the utility model, the equal fixedly connected with guide block in stopper both sides, and be symmetrical about the stopper each other, spacing channel has all been opened to the inner wall of sliding channel both sides, guide block and spacing channel sliding fit.
As a preferred technical scheme of the utility model, the backup pad outside just is close to right-hand member department and runs through and is provided with spacing double-screw bolt, spacing double-screw bolt and backup pad threaded connection, spacing double-screw bolt one end runs through and is located backup pad right-hand member department one the stopper, and mutual sliding fit.
As a preferred technical scheme of the utility model, the supporting component includes the support column, outer disc and spacing subassembly fixed connection of support column, the first arc seat of support column top fixedly connected with, open the support column bottom has the draw-in groove, lift adjustment capital portion fixedly connected with and draw-in groove matched with joint post.
As a preferred technical solution of the present invention, the limiting component includes a connecting rod fixedly connected to the supporting column, one end of the connecting rod is fixedly connected to a sleeve ring, a sliding rod is slidably connected to the sleeve ring, an L-shaped connecting rod is fixedly connected to the top of the sliding rod, the bottom end of the L-shaped connecting rod is fixedly connected to a second arc seat matched with the first arc seat, and a baffle is fixedly connected to the second arc seat towards one side of the sliding rod; the bottom of the sliding rod is fixedly connected with a limiting ring, and a reset spring which is sleeved on the sliding rod in a sliding manner is fixedly connected between the limiting ring and the lantern ring.
As a preferred technical scheme of the utility model, the disc is opened outward to the slide bar has perpendicular groove, lantern ring inner wall fixedly connected with erect groove sliding fit's fixed strip.
As a preferred technical scheme of the utility model, first arc seat and the equal fixedly connected with slipmat of second arc seat inner wall.
As a preferred technical scheme of the utility model, the equal fixedly connected with supporting leg in riser bottom both sides, supporting leg one end fixed mounting has the universal wheel.
The utility model discloses following beneficial effect has:
1. the utility model discloses an adjust the lift adjustment post and make each first arc seat be in same horizontal position, on the baffle with target one end butt, and under reset spring's pulling force effect, it carries out the centre gripping with the target to drive the second arc seat and pushes down and fix, then it slides to rotate the screw rod and drive the connecting plate, it is taut to drive each stopper and slide the connection rope that makes between the adjacent stopper, make each first arc seat unfolded, carry out stable support everywhere to the target, make the target at the transfer process, target both ends and middle part position all obtain effectual support, and then avoid dead weight flagging, the bending deformation who leads to the target.
2. The utility model discloses a under reset spring's pulling force effect, drive second arc seat and push down and cooperate with first arc seat, carry out the centre gripping with the target and fix, prevent that the target from dropping from the travelling car easily, push down through adjusting second arc seat and the interval between the first arc seat moreover, can be applicable to and fix the target of equidimension not.
Of course, it is not necessary for any particular product to achieve all of the above-described advantages simultaneously.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments are briefly introduced below, it is obvious that the drawings in the description below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a target material transferring device for manufacturing a semiconductor chip according to the present invention.
Fig. 2 is a schematic structural view of fig. 1 from another view angle.
Fig. 3 is a schematic structural view of the support plate.
Fig. 4 is a schematic structural diagram of the combination of the limiting block, the lifting adjusting column, the guide block and the clamping column.
Fig. 5 is a schematic structural view of the support assembly.
Fig. 6 is a schematic structural diagram of a combination of the supporting component and the limiting component.
FIG. 7 is an enlarged view taken at A in FIG. 6;
fig. 8 is a schematic structural view of fig. 6 from another angle.
In the drawings, the reference numbers indicate the following list of parts:
1-supporting plate, 101-sliding channel, 102-penetrating channel, 103-limiting channel, 2-vertical plate, 3-screw rod, 4-connecting plate, 5-limiting block, 6-connecting rope, 7-lifting adjusting column, 8-supporting component, 801-supporting column, 802-first arc seat, 803-clamping groove, 804-, 9-limiting component, 901-connecting rod, 902-lantern ring, 903-sliding rod, 904-L-shaped connecting rod, 905-second arc seat, 906-baffle plate, 907-limiting ring, 908-reset spring, 909-vertical groove, 910-fixing strip, 10-guide block, 11-limiting stud, 12-clamping column, 13-anti-skid pad, 14-supporting leg and 15-universal wheel.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
The specific embodiment is as follows:
referring to fig. 1-8, the utility model relates to a target material transfer device for semiconductor chip manufacturing, including a support plate 1, both ends of the bottom of the support plate 1 are fixedly provided with vertical plates 2, a screw rod 3 is rotatably connected between the two vertical plates 2, the outer circular surface of the screw rod 3 is in threaded connection with a connecting plate 4, one end of the screw rod 3 runs through to the outer sides of the vertical plates 2, the top of the support plate 1 is provided with a sliding channel 101, the top of the support plate 1 is provided with a through channel 102 communicated with the sliding channel 101, the sliding channel 101 is in sliding connection with a plurality of stoppers 5, the connecting plate 4 is in sliding fit with the through channel 102, and extends into the sliding channel 101 and is fixedly connected with a stopper 5 positioned at the leftmost end of the support plate 1; a connecting rope 6 is fixedly connected between every two adjacent limiting blocks 5, the tops of the limiting blocks 5 are fixedly connected with lifting adjusting columns 7, studs are arranged on the lifting adjusting columns 7 and used for adjusting the lifting height of the lifting adjusting columns 7, the tops of the lifting adjusting columns 7 are clamped and matched with supporting components 8, and limiting components 9 are fixedly connected to the outer sides of the supporting components 8 located at the leftmost side of the supporting plate 1 and used for limiting and fixing the target material; drive connecting plate 4 through rotating screw rod 3 and slide for stopper 5 slides in sliding channel 101, drives the connection rope 6 between the adjacent stopper 5 and is taut, makes each supporting component 8 expanded.
Wherein, the equal fixedly connected with guide block 10 in stopper 5 both sides, and relative to stopper 5 symmetry each other, limit channel 103 has all been opened to the inner wall in slide channel 101 both sides, and guide block 10 and limit channel 103 sliding fit realize the stable slip of stopper 5 in slide channel 101.
Wherein, the outer side of the supporting plate 1 and the position close to the right end are provided with a limit stud 11 in a penetrating manner, the limit stud 11 is in threaded connection with the supporting plate 1, one end of the limit stud 11 is positioned at the rightmost end of the supporting plate 1 in a penetrating manner and is in sliding fit with one another, one of the limit blocks 5 is limited and fixed, and the expansion of each limit block 5 is convenient to realize.
Wherein, supporting component 8 includes support column 801, and outer disc and the spacing subassembly 9 fixed connection of support column 801, the first arc seat 802 of support column 801 top fixedly connected with, open support column 801 bottom has draw-in groove 803, and 7 top fixedly connected with of lift adjustment post and draw-in groove 803 matched with joint post 12.
The limiting assembly 9 comprises a connecting rod 901 fixedly connected with a supporting column 801, one end of the connecting rod 901 is fixedly connected with a sleeve ring 902, a sliding rod 903 is connected in the sleeve ring 902 in a sliding manner, the top of the sliding rod 903 is fixedly connected with an L-shaped connecting rod 904, the bottom end of the L-shaped connecting rod 904 is fixedly connected with a second arc-shaped seat 905 matched with the first arc-shaped seat 802, and one side, facing the sliding rod 903, of the second arc-shaped seat 905 is fixedly connected with a baffle 906; the bottom of the sliding rod 903 is fixedly connected with a limiting ring 907, a return spring 908 which is slidably sleeved on the sliding rod 903 is fixedly connected between the limiting ring 907 and the sleeve ring, and the second arc-shaped seat 905 is driven to be pressed downwards to be matched with the first arc-shaped seat 802 under the action of the pulling force of the return spring 908 to clamp and fix the target.
Wherein, the outer disc of the sliding rod 903 is provided with a vertical slot 909, and the inner wall of the collar 902 is fixedly connected with a fixing strip 910 which is in sliding fit with the vertical slot 909, so as to limit the collar 902 and prevent the collar from rotating.
The inner walls of the first arc-shaped seat 802 and the second arc-shaped seat 905 are fixedly connected with the anti-slip pads 13, so that damage to the surface of the target is avoided, and the fixing effect is improved.
Wherein, 2 bottom both sides of riser equal fixedly connected with supporting legs 14, 14 one end fixed mounting of supporting legs have universal wheel 15, realize the displacement of integrated device and remove.
One specific application of this embodiment is: during the use, make each first arc seat 802 be in same horizontal position through adjusting lift adjustment post 7, then with target one end butt to baffle 906 on, and under reset spring 908's pulling force effect, it carries out the centre gripping with the target to drive second arc seat 905 and pushes down and fix, then it slides to rotate screw rod 3 and drive connecting plate 4, it makes the connecting rope 6 between the adjacent stopper 5 taut to drive each stopper 5 and slide, make each first arc seat 802 unfolded, carry out stable support everywhere to the target, make the target at the transfer process, target both ends and middle part position all obtain effectual support, and then avoid the dead weight flagging, lead to the bending deformation of target.
In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise embodiments disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, thereby enabling others skilled in the art to best understand the invention and its practical application. The present invention is limited only by the claims and their full scope and equivalents.

Claims (8)

1. A target transfer device for manufacturing a semiconductor chip comprises a support plate (1), and is characterized in that:
the supporting plate is characterized in that vertical plates (2) are fixedly mounted at two ends of the bottom of the supporting plate (1), a screw rod (3) is rotatably connected between the two vertical plates (2), a connecting plate (4) is connected to the outer circular surface of the screw rod (3) in a threaded manner, one end of the screw rod (3) penetrates through the outer side of each vertical plate (2), a sliding channel (101) is formed in the top of the supporting plate (1), a penetrating channel (102) communicated with the sliding channel (101) is formed in the top of the supporting plate (1), a plurality of limiting blocks (5) are connected in the sliding channel (101), the connecting plate (4) is in sliding fit with the penetrating channel (102) and extends into the sliding channel (101) to be fixedly connected with the limiting block (5) located at the leftmost end of the supporting plate (1);
adjacent two fixedly connected with between stopper (5) is connected rope (6), stopper (5) top fixedly connected with lift adjustment post (7), lift adjustment post (7) top joint cooperation has supporting component (8), wherein is located backup pad (1) leftmost one supporting component (8) outside fixedly connected with is spacing subassembly (9).
2. The target material transfer device for manufacturing the semiconductor chip as claimed in claim 1, wherein the two sides of the limit block (5) are fixedly connected with guide blocks (10) and are symmetrical with respect to the limit block (5), the inner walls of the two sides of the sliding channel (101) are provided with limit channels (103), and the guide blocks (10) are in sliding fit with the limit channels (103).
3. The target material transferring device for manufacturing the semiconductor chip as recited in claim 1, wherein a limiting stud (11) is penetratingly disposed at a position near the right end of the outer side of the supporting plate (1), the limiting stud (11) is in threaded connection with the supporting plate (1), and one end of the limiting stud (11) is penetratingly disposed at a limiting block (5) at the rightmost end of the supporting plate (1) and is in sliding fit with the limiting block.
4. The target material transfer device for manufacturing the semiconductor chip as recited in claim 1, wherein the supporting assembly (8) comprises a supporting column (801), an outer circumferential surface of the supporting column (801) is fixedly connected with a limiting assembly (9), a first arc-shaped seat (802) is fixedly connected to a top of the supporting column (801), a clamping groove (803) is formed at a bottom of the supporting column (801), and a clamping column (12) matched with the clamping groove (803) is fixedly connected to a top of the lifting adjusting column (7).
5. The target material transferring device for manufacturing the semiconductor chip as recited in claim 4, wherein the limiting component (9) comprises a connecting rod (901) fixedly connected with the supporting column (801), one end of the connecting rod (901) is fixedly connected with a collar (902), a sliding rod (903) is slidably connected with the collar (902), the top of the sliding rod (903) is fixedly connected with an L-shaped connecting rod (904), the bottom end of the L-shaped connecting rod (904) is fixedly connected with a second arc-shaped seat (905) matched with the first arc-shaped seat (802), and one side of the second arc-shaped seat (905) facing the sliding rod (903) is fixedly connected with a baffle (906);
the bottom of the sliding rod (903) is fixedly connected with a limiting ring (907), and a return spring (908) which is sleeved on the sliding rod (903) in a sliding mode is fixedly connected between the limiting ring (907) and the lantern ring.
6. The target material transfer device for manufacturing the semiconductor chip as claimed in claim 5, wherein the outer circumferential surface of the sliding rod (903) is provided with a vertical groove (909), and the inner wall of the collar (902) is fixedly connected with a fixing strip (910) which is slidably matched with the vertical groove (909).
7. The target material transfer device for manufacturing semiconductor chips as defined in claim 5, wherein the first arc-shaped seat (802) and the second arc-shaped seat (905) are fixedly connected with anti-slip pads (13) on the inner walls thereof.
8. The target material transfer device for manufacturing the semiconductor chip is characterized in that supporting legs (14) are fixedly connected to two sides of the bottom of the vertical plate (2), and universal wheels (15) are fixedly mounted at one ends of the supporting legs (14).
CN202221846887.2U 2022-07-18 2022-07-18 Target transfer device for manufacturing semiconductor chip Active CN217945224U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221846887.2U CN217945224U (en) 2022-07-18 2022-07-18 Target transfer device for manufacturing semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221846887.2U CN217945224U (en) 2022-07-18 2022-07-18 Target transfer device for manufacturing semiconductor chip

Publications (1)

Publication Number Publication Date
CN217945224U true CN217945224U (en) 2022-12-02

Family

ID=84221677

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221846887.2U Active CN217945224U (en) 2022-07-18 2022-07-18 Target transfer device for manufacturing semiconductor chip

Country Status (1)

Country Link
CN (1) CN217945224U (en)

Similar Documents

Publication Publication Date Title
RU2736365C2 (en) Fixing device for lifting and moving objects
US20180057025A1 (en) Self-locking anti-slip rail braking device
CN203527478U (en) Single-arm electromagnetic chuck group manipulator
CN113857915B (en) Permanent magnetic chuck fixing mechanism for processing metal plate
CN217945224U (en) Target transfer device for manufacturing semiconductor chip
CN105014290B (en) Machine human L-type positioner and the quick connection locator of pallet and operational method thereof
CN211415052U (en) Mechanical nonstandard equipment processing debugging table
CN217867696U (en) Marine diesel engine cylinder body production line lifts by crane frock
CN217861253U (en) Novel three-axis robot
CN212639614U (en) Can protect orbital safety tongs of elevator
CN104551781B (en) A kind of locking device of frock clamp
CN107717521A (en) Upper top formula thrust clamping device
CN208226815U (en) Rotor assembly machine
CN102717350B (en) Novel U-type tube locking device
CN216682108U (en) Lifting platform for processing automobile seat
CN114518224B (en) Valve locking piece performance detection device
CN210932277U (en) Rescue stretcher convenient to transport from high place
CN215557093U (en) Material clamping device
CN209407962U (en) A kind of multi-purpose transfer material platform fixture
CN213867399U (en) Construction equipment for municipal overhead anti-collision wall
CN221853832U (en) Stabilizing device for goods elevator
CN213629516U (en) Lifting platform for semiconductor cleaning robot
CN214082830U (en) Laminating machine is used in processing of car light
CN210075730U (en) Electroplating clamping mechanism suitable for PCB
CN219670026U (en) Mechanical hydraulic device for automatically lifting and assembling and disassembling standard section of tower

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant