CN217932409U

CN217932409U - Photoresist developing point testing equipment

Info

Publication number: CN217932409U
Application number: CN202221825552.2U
Authority: CN
Inventors: 罗启祥; 高梁
Original assignee: Shenzhen Bailihe New Material Development Co ltd
Current assignee: Shenzhen Bailihe New Material Development Co ltd
Priority date: 2022-07-14
Filing date: 2022-07-14
Publication date: 2022-11-29
Anticipated expiration: 2032-07-14

Abstract

The utility model relates to a circuit board production field just discloses a photoresist development point test equipment, including collecting the box, the top demountable installation who collects the box surface has the mounting bracket, and the surface of mounting bracket prolongs central symmetry demountable installation and has stabilizing bolt, and the middle part of mounting bracket inner wall prolongs central symmetry demountable installation and has connect the slide bar, and the link block has been cup jointed in the middle part activity of connecting the slide bar surface. In the above-mentioned scheme, testing arrangement collects box and filter screen through setting up, after accomplishing photoresist development point test, unnecessary developing solution can flow in the bottom of collecting the box inner wall along the filter screen this moment, when the process filter screen, the impurity that the filter screen can contain in with the developing solution filters, in order to guarantee to retrieve the quality of developing solution, because the film is placed at filter screen upper surface middle part, so the developing solution that sprays out can concentrate the collection in the bottom of collecting the box inner wall, thereby be convenient for carry out reutilization, reduce the loss to the developing solution.

Description

Photoresist developing point testing equipment

Technical Field

The utility model relates to a circuit board production technical field, more specifically say, the utility model relates to a photoresist development point test equipment.

Background

LDI is used in the exposure process in pcb processes, unlike conventional negative contact exposure methods, the photolithographic technique is a technique for printing a pattern having features on the surface of a substrate; photoresist is needed when LDI is used for imaging; in the production process, the position of the photoresist on the substrate can be tested by spraying a developing solution on the photoresist.

When the existing photoresist developing point testing device works and tests the photoresist at different positions, the labor capacity of workers can be increased, and the working efficiency of the device is further reduced; and when the sprayed developing solution is not recovered, the test cost is increased, thereby lowering the practicability of the device.

SUMMERY OF THE UTILITY MODEL

In order to overcome the above-mentioned defects of the prior art, the embodiment of the present invention provides a photoresist developing point testing apparatus to solve the problems existing in the prior art.

In order to solve the technical problem, the utility model provides a following technical scheme: the utility model provides a photoresist developing point test equipment, is including collecting the box, the top demountable installation who collects the box surface has the mounting bracket, the surface of mounting bracket prolongs central symmetry demountable installation and has stabilizing bolt, the middle part of mounting bracket inner wall prolongs central symmetry demountable installation and connects the slide bar, the middle part activity of connecting the slide bar surface has cup jointed the link block, the middle part demountable installation of link block lateral wall has the propelling movement pole, the last surface demountable installation of link block has infusion equipment, the lower surface of link block prolongs central symmetry fixed mounting and has the connecting rod, the bottom fixed mounting of connecting rod has communicating pipe, the lower surface equidistance of communicating pipe communicates side by side has a plurality of sprinkler heads, four spacing spouts have been seted up with the rectangular array to the top of collecting the box inner wall, the bottom demountable installation of spacing spout inner wall has the lifter, the middle part of collecting the box inner wall is passed through spacing spout joint has the filter screen, the surface of filter screen has four limiting plates with rectangular array fixed mounting.

As an alternative scheme of the utility model, the output of push rod with one side of mounting bracket inner wall is connected, the extension length of push rod is greater than the length of mounting bracket.

As an alternative scheme of the utility model, the surface of limiting plate with the inner wall looks adaptation of limiting chute, the degree of depth of limiting chute with the half of collecting the box degree of depth is the same, the lower surface of limiting plate with the input of lifter contacts.

As an optional scheme of the utility model, the length of communicating pipe is less than the width of filter screen, the examination film of awaiting measuring has been placed at the middle part of filter screen upper surface, the cross-sectional area of filter screen is less than collect the cross-sectional area of box.

As an optional scheme of the utility model, infusion equipment is including stabilizing mounting panel and centrifugal pump, the middle part fixed mounting of stabilizing the mounting panel upper surface has the centrifugal pump, the upper surface of stabilizing the mounting panel has four connecting bolt with rectangular array threaded connection, and connecting bolt's bottom is passed through stabilize the mounting panel and inlay the connection nut looks adaptation of installation with the link block upper surface.

As an optional scheme of the utility model, the input intercommunication of centrifugal pump has first transfer line, the bottom of first transfer line is linked together through link block and the middle part of communicating pipe upper surface.

As an optional scheme of the utility model, the output intercommunication of centrifugal pump has the second transfer line, the one end intercommunication of second transfer line has the liquid reserve tank, the inside packing of liquid reserve tank has the developer solution.

The utility model discloses an above-mentioned technical scheme's beneficial effect as follows:

in the scheme, the testing device is provided with the mounting frame, the connecting slide rod, the connecting slide block, the pushing rod and the infusion equipment, when developing solutions are required to be sprayed to different positions of the photoresist, the centrifugal pump and the pushing rod are started at the moment, the connecting slide block can be driven to move on the outer surface of the connecting slide rod by the pushing rod, the infusion equipment and the testing device are arranged at two ends of the connecting slide block, so that the connecting slide block can move to drive the infusion equipment and the testing device to move, when the connecting slide block moves, the centrifugal pump can convey the developing solutions stored in the liquid storage box to the inside of the communicating pipe through the second infusion pipe and the first infusion pipe, then the developing solutions are sprayed to the upper surface of the film through the spraying head, the photoresist on the film is tested, and the centrifugal pump and the pushing rod have the automatic working function, so that the time required by testing can be saved, and the working efficiency of the device is improved; in the above-mentioned scheme, testing arrangement collects box and filter screen through setting up, after accomplishing photoresist development point test, unnecessary developing solution can flow in the bottom of collecting the box inner wall along the filter screen this moment, when the filter screen, the impurity that the filter screen can contain in the developing solution filters to guarantee to retrieve the quality of developing solution, because the film is placed at filter screen upper surface middle part, so the developing solution that sprays out can concentrate the bottom of collecting the box inner wall, thereby be convenient for carry out reutilization, reduce the loss to the developing solution.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the assembly of the filter screen and the collecting box of the present invention;

fig. 3 is an assembly schematic view of the mounting frame and the communicating pipe of the present invention;

FIG. 4 is a schematic view of the assembly of the infusion apparatus and the communicating tube of the present invention;

fig. 5 is a schematic view of the structure of the infusion apparatus of the present invention.

[ reference numerals ]

1. A collection box; 2. a mounting frame; 3. a stabilizing bolt; 4. connecting a sliding rod; 5. connecting the sliding block; 6. a push rod; 7. an infusion device; 8. a connecting rod; 9. a communicating pipe; 10. a sprinkler head; 11. a limiting chute; 12. a lifting rod; 13. a filter screen; 14. a limiting plate; 71. stabilizing the mounting plate; 72. a centrifugal pump; 73. a first infusion tube; 74. a second infusion tube; 75. a liquid storage tank.

Detailed Description

To make the technical problems, technical solutions and advantages of the present invention clearer, the following description is made in conjunction with the accompanying drawings and specific embodiments.

Example 1:

referring to fig. 1-4, a photoresist developing point testing device comprises a collecting box 1, a mounting frame 2 is detachably mounted at the top end of the outer surface of the collecting box 1, stabilizing bolts 3 are detachably mounted on the outer surface of the mounting frame 2 along the central symmetry, connecting slide rods 4 are detachably mounted on the middle portion of the inner wall of the mounting frame 2 along the central symmetry, a connecting slider 5 is movably sleeved at the middle portion of the outer surface of the connecting slide rod 4, a push rod 6 is detachably mounted at the middle portion of the side wall of the connecting slider 5, a transfusion device 7 is detachably mounted on the upper surface of the connecting slider 5, connecting rods 8 are fixedly mounted on the lower surface of the connecting slider 5 along the central symmetry, communicating pipes 9 are fixedly mounted at the bottom end of the connecting rods 8, a plurality of spraying heads 10 are communicated side by side at equal intervals on the lower surface of the communicating pipes 9, four limiting chutes 11 are formed in a rectangular array at the top end of the inner wall of the collecting box 1, bottom demountable installation of 11 inner walls of spacing spout has lifter 12, the middle part of collecting 1 inner wall of box has filter screen 13 through 11 joints of spacing spout, filter screen 13's surface has four limiting plates 14 with rectangular array fixed mounting, push rod 6's output is connected with one side of 2 inner walls of mounting bracket, push rod 6's extension length is greater than mounting bracket 2's length, limiting plate 14's surface and 11's of spacing spout inner wall looks adaptation, the degree of depth of spacing spout 11 is the same with the half of collecting 1 degree of depth of box, limiting plate 14's lower surface contacts with lifter 12's input, the length of communicating pipe 9 is less than filter screen 13's width, the await measuring film has been placed at the middle part of filter screen 13 upper surface, filter screen 13's cross-sectional area is less than the cross-sectional area of collecting box 1.

The method has the beneficial effects that: the filter screen 13 is convenient to disassemble by arranging the limiting sliding grooves 11, the lifting rods 12 and the limiting plates 14, so that the phenomenon that the filter screen 13 is blocked is avoided, and the practicability of the device is enhanced.

Example 2:

referring to fig. 5, the infusion apparatus 7 includes a stabilizing mounting plate 71 and a centrifugal pump 72, the centrifugal pump 72 is fixedly mounted in the middle of the upper surface of the stabilizing mounting plate 71, the upper surface of the stabilizing mounting plate 71 is connected with four connecting bolts in a rectangular array thread, the bottom ends of the connecting bolts are matched with connecting nuts mounted on the upper surface of a connecting slider 5 in an embedded manner through the stabilizing mounting plate 71, an input end of the centrifugal pump 72 is communicated with a first infusion tube 73, the bottom end of the first infusion tube 73 is communicated with the middle of the upper surface of a communicating tube 9 through the connecting slider 5, an output end of the centrifugal pump 72 is communicated with a second infusion tube 74, one end of the second infusion tube 74 is communicated with a liquid storage tank 75, and the inside of the liquid storage tank 75 is filled with a developing solution.

The method has the following beneficial effects: the connecting bolt is arranged on the upper surface of the stabilizing mounting plate 71, the connecting nut is embedded and mounted on one side of the upper surface of the connecting sliding block 5, and the connecting bolt and the connecting nut are matched with each other, so that the effect that the infusion equipment 7 is detachable is achieved.

Wherein, the push rod 6 is of Toolmate type; the lifting rod 12 is a dragon flying brand and supports the type of a gas spring; the centrifugal pump 72 is of the Haochao brand, SGR-IRG type, and is electrically connected to an external power source via a plug.

The working principle is as follows:

when the testing device works, in order to improve the testing efficiency of the device, the mounting frame 2, the connecting slide rod 4, the connecting slide block 5, the pushing rod 6 and the infusion device 7 are arranged, when developing solutions are required to be sprayed to different positions of photoresist, the centrifugal pump 72 and the pushing rod 6 are started at the moment, the pushing rod 6 can drive the connecting slide block 5 to move on the outer surface of the connecting slide rod 4, the infusion device 7 and the testing device are arranged at two ends of the connecting slide block 5, the connecting slide block 5 can move to drive the infusion device 7 and the testing device to move, when the testing device moves, the centrifugal pump 72 can convey the developing solutions stored in the liquid storage box 75 to the inside of the communicating pipe 9 through the second infusion pipe 74 and the first infusion pipe 73, then the developing solutions are sprayed to the upper surface of a film through the spraying head 10, the photoresist on the film is tested, and the centrifugal pump 72 and the pushing rod 6 both have the automatic working function, so that the time required by testing can be saved, and the working efficiency of the device is improved.

Above-mentioned scheme, testing arrangement is in the during operation, in order to reduce test cost, so be provided with and collect box 1 and filter screen 13, after accomplishing the test to the photoresist developing point, unnecessary developing solution can flow in the bottom of collecting box 1 inner wall along filter screen 13 this moment, when through filter screen 13, filter screen 13 can filter the impurity that contains in the developing solution, in order to guarantee the quality of retrieving the developing solution, because the film is placed at filter screen 13 upper surface middle part, so the developing solution that sprays out can concentrate and collect the bottom at collecting box 1 inner wall, thereby be convenient for carry out reutilization, reduce the loss to the developing solution.

The points to be finally explained are: first, in the description of the present application, it should be noted that, unless otherwise specified and limited, the terms "mounted," "connected," "connecting," and "connecting" should be understood broadly, and may be a mechanical connection or an electrical connection, or a communication between two elements, and may be directly connected, and "upper," "lower," "left," and "right" are only used to indicate relative positional relationships, and when the absolute position of the object to be described is changed, the relative positional relationships may be changed;

secondly, the method comprises the following steps: in the drawings of the disclosed embodiments of the present invention, only the structures related to the disclosed embodiments are referred to, and other structures can refer to the common design, and under the condition of no conflict, the same embodiment and different embodiments of the present invention can be combined with each other;

and finally: the above description is only for the preferred embodiment of the present invention and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A photoresist developing point testing apparatus includes a collecting box (1) characterized in that, the top end of the outer surface of the collecting box (1) is detachably provided with a mounting frame (2), stabilizing bolts (3) are detachably mounted on the outer surface of the mounting rack (2) along the central symmetry, the middle part of the inner wall of the mounting rack (2) is symmetrically and detachably provided with connecting slide bars (4) along the center, the middle part of the outer surface of the connecting slide rod (4) is movably sleeved with a connecting slide block (5), the middle part of the side wall of the connecting slide block (5) is detachably provided with a push rod (6), the upper surface of the connecting slide block (5) is detachably provided with a transfusion device (7), the lower surface of the connecting slide block (5) is fixedly provided with connecting rods (8) along the central symmetry, a communicating pipe (9) is fixedly arranged at the bottom end of the connecting rod (8), the lower surface of the communicating pipe (9) is equidistantly communicated with a plurality of sprinkler heads (10) side by side, the top end of the inner wall of the collecting box (1) is provided with four limiting sliding chutes (11) in a rectangular array, the bottom end of the inner wall of the limiting chute (11) is detachably provided with a lifting rod (12), the middle part of the inner wall of the collecting box (1) is clamped with a filter screen (13) through the limiting chute (11), the outer surface of the filter screen (13) is fixedly provided with four limiting plates (14) in a rectangular array.

2. The photoresist developing point testing apparatus according to claim 1, wherein an output end of the push rod (6) is connected with one side of an inner wall of the mounting frame (2), and an extended length of the push rod (6) is greater than a length of the mounting frame (2).

3. The photoresist developing point testing apparatus according to claim 1, wherein the outer surface of the limiting plate (14) is adapted to the inner wall of the limiting chute (11), the depth of the limiting chute (11) is the same as one half of the depth of the collecting box (1), and the lower surface of the limiting plate (14) is in contact with the input end of the lifting rod (12).

4. The photoresist developing point testing apparatus according to claim 1, wherein the length of the communicating pipe (9) is smaller than the width of the filter screen (13), a negative film to be tested is placed in the middle of the upper surface of the filter screen (13), and the cross-sectional area of the filter screen (13) is smaller than that of the collecting box (1).

5. The photoresist developing point testing equipment according to claim 1, wherein the liquid conveying equipment (7) comprises a stabilizing mounting plate (71) and a centrifugal pump (72), the centrifugal pump (72) is fixedly mounted in the middle of the upper surface of the stabilizing mounting plate (71), the upper surface of the stabilizing mounting plate (71) is connected with four connecting bolts in a rectangular array in a threaded manner, and the bottom ends of the connecting bolts are matched with connecting nuts of surface mounting on the stabilizing mounting plate (71) and the connecting slide block (5).

6. The photoresist developing point testing equipment according to claim 5, wherein the input end of the centrifugal pump (72) is communicated with a first liquid conveying pipe (73), and the bottom end of the first liquid conveying pipe (73) is communicated with the middle part of the upper surface of the communicating pipe (9) through a connecting slide block (5).

7. The photoresist developing point testing apparatus according to claim 5, wherein an output end of the centrifugal pump (72) is communicated with a second liquid conveying pipe (74), one end of the second liquid conveying pipe (74) is communicated with a liquid storage tank (75), and the interior of the liquid storage tank (75) is filled with a developing solution.