CN217881831U - High-power adjustable microwave mode converter - Google Patents
High-power adjustable microwave mode converter Download PDFInfo
- Publication number
- CN217881831U CN217881831U CN202221971538.3U CN202221971538U CN217881831U CN 217881831 U CN217881831 U CN 217881831U CN 202221971538 U CN202221971538 U CN 202221971538U CN 217881831 U CN217881831 U CN 217881831U
- Authority
- CN
- China
- Prior art keywords
- rectangular waveguide
- waveguide
- conical body
- mode converter
- microwave mode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Abstract
The utility model discloses a high-power adjustable microwave mode converter, which comprises a rectangular waveguide, a three-pin base arranged on the rectangular waveguide, three pins arranged on the three-pin base and extending into the rectangular waveguide, and a microwave mode converter arranged on the rectangular waveguide; one end of the rectangular waveguide is provided with a waveguide flange for connecting with an output port of the microwave source, and the other end of the rectangular waveguide is a short circuit surface; the microwave mode converter is a copper conical body, a threaded hole is formed in the edge of the bottom of the conical body, the conical body is installed in the rectangular waveguide, the upper end of the conical body is installed at an opening of the upper end face of the rectangular waveguide, and the conical body is fixed through a bolt; the middle part of the conical body is provided with a through hole which is used for installing an inner conductor antenna, the extension end of the inner conductor antenna forms an antenna terminal, and a cooling water path and a gas channel are arranged inside the inner conductor antenna. The utility model provides a redundant, the too high problem of use cost of adjusting device among the prior art.
Description
Technical Field
The utility model relates to a microwave technology field, concretely relates to high-power adjustable microwave mode converter.
Background
In many industrial microwave applications, it is desirable to convert the microwave mode in a rectangular waveguide to that of a coaxial waveguide.
The working principle is as follows: microwave is input through a rectangular waveguide port, converted into a mode capable of working in a coaxial waveguide through a mode conversion structure with a specific shape, and finally emitted by an antenna at the bottom. The mode converter is mainly divided into an antenna type and a door button type.
The antenna-type mode converter needs to use a dielectric coaxial waveguide, utilizes a dielectric medium in the coaxial waveguide to fix the coaxial inner conductor antenna and the antenna, has high dielectric loss and small power capacity, and cannot be used in occasions with high power and required stress installation because the inner conductor antenna cannot be firmly installed and is in a suspended state and cannot be additionally provided with a cooling structure.
The mode converter of the door knob type needs to arrange a cylindrical or conical step in a rectangular waveguide for converting a microwave mode; the cylindrical or conical step is simultaneously used as an installation base of the coaxial waveguide inner conductor, and the coaxial inner conductor is structurally provided with a water cooling structure or a device condition, so that the coaxial inner conductor can be effectively cooled during high-power work to maintain a good working state.
In the prior art, the combination of an inner conductor antenna and a sliding short-circuit device is usually adopted, the effect is not satisfactory, a three-pin tuner is required to be independently arranged at the front stage to achieve a better conversion effect, the three pins and the sliding short-circuit device are required to be adjusted during working, and unnecessary difficulty is brought to non-microwave professional engineers.
The utility model discloses aim at solving the redundant, too high problem of use cost of adjusting device among the prior art.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a high-power adjustable microwave mode converter solves among the prior art redundant, the too high problem of use cost of adjusting device.
In order to solve the technical problem, the utility model discloses the technical scheme who adopts is:
a high-power adjustable microwave mode converter comprises a rectangular waveguide, a three-pin base arranged on the rectangular waveguide, three pins arranged on the three-pin base and extending into the rectangular waveguide, and a microwave mode converter arranged on the rectangular waveguide;
one end of the rectangular waveguide is provided with a waveguide flange for connecting with a microwave source output port, and the other end of the rectangular waveguide is a short circuit surface;
the method comprises the following specific steps: the waveguide flange is arranged on the end face of the rectangular waveguide adjacent to the three pins and used for being connected with a microwave source, and the end face of the waveguide adjacent to the conical body is a short circuit face;
the microwave mode converter is a copper conical body, a threaded hole is formed in the edge of the bottom of the conical body, the conical body is installed in the rectangular waveguide, the upper end of the conical body is installed at an opening of the upper end face of the rectangular waveguide, and the conical body is fixed through a bolt; the middle part of the conical body is provided with a through hole used for installing an inner conductor antenna, and an antenna terminal is formed at the extended end of the inner conductor antenna and is provided with a cooling water path and a gas channel.
The method specifically comprises the following steps: the through hole is used for mounting the coaxial inner conductor and an antenna terminal extending out of the coaxial waveguide section;
the three pins are fastened on the upper end face of the rectangular waveguide through a three-pin base by adopting bolt connection, the pin interval is 1/4 waveguide wavelength of working frequency, and the adjusting distance is 0-1/4 waveguide wavelength of the working frequency.
Wherein the rectangular waveguide has an aspect ratio of 2:1.
Further optimize, the inside cooling water circulation structure that is provided with of conical body, cooling water inlet and cooling water outlet all are located the rectangular waveguide up end outside.
The rectangular waveguide is formed by welding a copper waveguide or an aluminum waveguide.
Wherein, the cooling water circulation structure is a water-cooling cavity arranged inside the conical body, and the water-cooling cavity is communicated with the cooling water inlet and the cooling water outlet.
Further limiting, an upper flange is arranged at the position right opposite to the conical body below the rectangular waveguide, the flange is connected with an end face flange of the coaxial outer conductor, a microwave channel is formed between the coaxial outer conductor and the inner conductor antenna and is communicated with the inside of the rectangular waveguide, and a water-cooling interlayer is arranged on the outer side of the coaxial outer conductor.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model discloses an install three pins (three pin adapters) on rectangular waveguide through three pin bases, form integral type integrated structure, the cone that cooperates simultaneously to be conical structure forms toper door button structure, has simplified the combination of inner conductor antenna with sliding short circuiter among the prior art, has reduced the processing cost, has reduced redundant adjustment mechanism, is more friendly to non-professional in the engineering use, reduces use cost; meanwhile, the gas inlet mode of the inner conductor antenna (the mode of arranging a gas inlet channel in the coaxial inner conductor antenna) can be applied to special occasions needing gas reaction, such as the field of microwave plasma vapor deposition. The full water-cooling structure can work for a long time under a high-power working condition, and the problems of frequency thermal drift caused by temperature rise and electric loss increase caused by temperature rise are avoided.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some examples of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to these drawings without inventive efforts.
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a front view of fig. 1 of the present invention.
Fig. 3 is a left side view of fig. 1 according to the present invention.
Fig. 4 is a schematic view of the internal overall structure of the present invention.
Reference numerals:
1-rectangular waveguide, 2-three-pin base, 3-three pins, 4-microwave mode converter, 5-cooling water inlet, 6-cooling water outlet, 7-short circuit surface, 8-inner conductor antenna, 9-air inlet, 10-water cooling interlayer, 11-interlayer water inlet, 12-interlayer water outlet, 13-antenna terminal, 14-microwave channel, 15-waveguide flange and 16-upper flange.
Detailed Description
In the following, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the embodiments of the present invention. Accordingly, the drawings and description are to be regarded as illustrative in nature, and not as restrictive.
In the description of the embodiments of the present invention, it should be understood that the terms "length," "vertical," "horizontal," "top," "bottom," and the like are used in the orientation and positional relationship shown in the drawings for convenience in describing the embodiments of the present invention and for simplicity in description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be considered as limiting the embodiments of the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the embodiments of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly, e.g., as fixed or detachable connections or as an integral part; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the embodiments of the present invention can be understood by those skilled in the art according to specific situations.
In embodiments of the invention, unless expressly stated or limited otherwise, the recitation of a first feature "on" or "under" a second feature may include the recitation of the first and second features being in direct contact, and may also include the recitation of the first and second features not being in direct contact, but being in contact with another feature being in between. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly above and obliquely above the second feature, or simply meaning that the first feature is at a lesser level than the second feature.
The following disclosure provides many different embodiments or examples for implementing different configurations of embodiments of the invention. In order to simplify the disclosure of embodiments of the present invention, the components and arrangements of specific examples are described below. Of course, they are merely examples and are not intended to limit embodiments of the present invention. Moreover, embodiments of the present invention may repeat reference numerals and/or reference letters in the various examples for purposes of simplicity and clarity and do not in themselves dictate a relationship between the various embodiments and/or arrangements discussed.
Embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Example one
Referring to fig. 1-4, the present embodiment discloses a high-power tunable microwave mode converter, which includes a rectangular waveguide 1, a three-pin base 2 installed on the rectangular waveguide 1, three pins 3 installed on the three-pin base 2 and extending into the rectangular waveguide 1, and a microwave mode converter 4 installed on the rectangular waveguide 1;
wherein, one end of the rectangular waveguide 1 is provided with a waveguide flange 15 for connecting with an output port of the microwave source, and the other end is a short circuit surface 7;
the microwave mode converter 4 is a copper conical body, a threaded hole is formed in the edge of the bottom of the conical body, the conical body is installed in the rectangular waveguide 1, the upper end of the conical body is installed at an opening of the upper end face of the rectangular waveguide 1, and the conical body is fixed through a bolt; the middle part of the conical body is provided with a through hole which is used for installing an inner conductor antenna 8, the extension end of the inner conductor antenna 8 forms an antenna terminal 13, and a cooling water path and a gas channel are arranged inside the inner conductor antenna 8.
The three pins 3 are fastened on the upper end face of the rectangular waveguide 1 through the three-pin base 2 by adopting bolt connection, the spacing of the pins is about 1/4 of the wavelength of the waveguide of the working frequency, and the adjusting distance is about 0 to 1/4 of the wavelength of the waveguide of the working frequency.
In the specific implementation: the spacing of the pins is 1/4 of the waveguide wavelength of the working frequency, and the adjusting distance is 0 to 2/3 of the waveguide height of the working frequency.
In actual use: the inner conductor and the antenna are in a rod-shaped structure, and a through hole is formed in the inner conductor and the antenna, and forms an air channel.
During specific implementation, the three pins 3 are adjustable pins, specifically: a three pin adapter.
Further optimized, the rectangular waveguide 1 has an aspect ratio of 2:1.
Wherein, the inside cooling water circulation structure that is provided with of conical body, cooling water inlet 5 and cooling water outlet 6 all are located the rectangle waveguide 1 up end outside.
The rectangular waveguide 1 is formed by welding a copper waveguide or an aluminum waveguide.
Further limit, the cooling water circulation structure is a water cooling cavity arranged inside the conical body, and the water cooling cavity is communicated with a cooling water inlet 5 and a cooling water outlet 6.
An upper flange 16 is arranged at the position right opposite to the conical body below the rectangular waveguide 1, the upper flange 16 is connected with an end face flange of the outer conductor, a microwave channel 14 is formed between the coaxial outer conductor and the inner conductor antenna 8, the microwave channel 14 is communicated with the inside of the rectangular waveguide 1, and a water-cooling interlayer 10 is arranged on the outer side of the coaxial outer conductor.
In practical use, microwaves are generated by a microwave source, pass through a high-power isolator, enter the rectangular waveguide 1, reach the short-circuit surface 7, are reflected back, are converted into a mode required by coaxial waveguide transmission by the microwave mode converter 4, enter the coaxial waveguide, and are finally emitted by the antenna terminal 13; the upper end of the inner conductor antenna 8 is provided with an air inlet 9, and an air channel is formed inside the inner conductor antenna and can be used for introducing air; a water cooling cavity is arranged in the conical body structure, cooling water guarantees that frequency thermal drift cannot occur in long-time high-power application, meanwhile, a water cooling interlayer 10 is arranged on the outer wall of the coaxial waveguide, the cooling water enters through an interlayer water inlet 11, an interlayer water outlet 12 flows out, a water inlet flows in, and a water outlet flows out to complete circulation.
In actual use, the three pins are the three-pin adapter, and the structure of the three-pin adapter is not described in detail.
In order to facilitate a further understanding of the invention for those skilled in the art, the invention is further described below with reference to specific embodiments.
The utility model provides a high-power adjustable microwave mode converter 4, the basic structure of which comprises a rectangular waveguide 1, a three-pin base 2, three pins 3, a microwave mode converter 4, an inner conductor antenna 8 and an antenna terminal 13;
the rectangular waveguide 1 is formed by welding copper plates or aluminum plates in a splicing manner, the length-width ratio of the rectangular waveguide is 2:1, and the rectangular waveguide is different in size according to different application frequency bands; the port of the rectangular waveguide 1 is a rectangular welding flat flange, and specifically comprises the following steps: the waveguide flange 15 is matched with the standard according to the national standard and is used for being connected with a microwave source output port; the three-pin 3 is fastened to the center of the upper end face of the rectangular waveguide 1 through a three-pin base 2 by adopting bolt connection, the interval of the pins is 1/4 waveguide wavelength of working frequency, and the adjusting distance is 0-2/3 waveguide height;
the microwave mode converter 4 is made of oxygen-free copper and has a conical structure, namely: the bottom edge of the conical body is provided with a threaded hole, the conical body is assembled at an opening of the upper end surface of the waveguide from the inside of the rectangular waveguide 1, and the conical body is connected with the rectangular waveguide 1 through the threaded hole at the outer side by a bolt and fastened to the center of the wide side of the waveguide; a through hole is reserved in the center of the conical body and is used as an assembly channel of the inner conductor antenna 8;
a circulating water cooling structure is arranged in the conical body, and a cooling water inlet 5 and a cooling water outlet 6 are both positioned on the outer side of the upper end surface of the rectangular waveguide 1; the terminal of the rectangular waveguide 1 is a short circuit surface 7 which exists as a microwave reflection end surface, the inner conductor antenna 8 is inserted into the center of the conical body from the outer side of the rectangular waveguide 1, an air channel is formed in the hollow part of the inner conductor antenna 8, so that air can enter conveniently, and an air inlet 9 is formed in the top of the inner conductor antenna 8 and is positioned on the outer side of the upper end surface of the rectangular waveguide 1;
the antenna terminal 13 is an extension part of the inner conductor antenna 8 and has a function of transmitting microwaves; it should be noted that the terminal dimensions and shapes may be different for different applications.
The invention will be further described with reference to a specific embodiment:
in the application of MPCVD, firstly, a circulating water pump is started, cooling water enters from an inlet 5, flows through a water-cooling interlayer 10 from bottom to top in sequence, and then cooling water flows back to a water tower from an outlet to complete circulation;
then starting a vacuum pump, and forcibly pumping the pressure in a deposition chamber of the MPCVD to be lower than 1 Pa;
then starting a microwave power supply, wherein 5kw/2.45GHz microwaves are generated by a magnetron and enter a rectangular waveguide 1 through a high-power circulator, wherein the rectangular waveguide 1 (the length and width are 86mm and the height is 43 mm) is determined, the size of three pins 3 (the diameter is 16mm and each pin is 30mm apart) is determined, the distance from the third pin to the center of a conical body of the microwave mode converter 4 is 120mm, and the distance from the center of the conical body, namely the center of the inner conductor antenna 8 to the short-circuit surface 7 is 117mm;
further, the microwave reaches the short-circuit surface 7 to be reflected back and converged near the cone of the microwave mode converter 4 with the incident wave;
further, the incident wave and the reflected wave are jointly converted into the microwave of the TEM mode under the action of the cone of the microwave mode converter 4, and enter the coaxial waveguide end, i.e. the microwave channel 14;
particularly, when the microwave does not completely enter the coaxial waveguide, the microwave power reflected to the inlet of the rectangular waveguide 1 is zero by adjusting the depths of the three pins 3;
further, the microwave entering the coaxial waveguide is finally emitted into the MPCVD deposition chamber from the antenna terminal 13 to react with the reaction gas;
here, reaction gas gets into by the air inlet 9 of inner conductor antenna 8 upper end, the utility model discloses can accomplish the switching of microwave mode and gaseous process of letting in simultaneously, be fit for long-time high-power work occasion, especially MPCVD device's application.
While the preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the appended claims be interpreted as including the preferred embodiment and all such alterations and modifications as fall within the scope of the invention.
The above description is only exemplary of the present invention and should not be taken as limiting, and all changes, equivalents, and improvements made within the spirit and principles of the present invention should be understood as being included in the scope of the present invention.
Claims (7)
1. A high power tunable microwave mode converter, comprising: the microwave cavity comprises a rectangular waveguide, a three-pin base arranged on the rectangular waveguide, three pins arranged on the three-pin base and extending into the rectangular waveguide, and a microwave mode converter arranged on the rectangular waveguide;
one end of the rectangular waveguide is provided with a waveguide flange for connecting with a microwave source output port, and the other end of the rectangular waveguide is a short circuit surface;
the microwave mode converter is a copper conical body, a threaded hole is formed in the edge of the bottom of the conical body, the conical body is installed in the rectangular waveguide, the upper end of the conical body is installed at an opening of the upper end face of the rectangular waveguide, and the conical body is fixed through a bolt; the middle part of the conical body is provided with a through hole which is used for installing an inner conductor antenna, the extension end of the inner conductor antenna forms an antenna terminal, and a cooling water path and a gas channel are arranged inside the inner conductor antenna.
2. A high power tunable microwave mode converter according to claim 1, wherein: the three pins are fastened on the upper end face of the rectangular waveguide through a three-pin base by adopting bolt connection, the interval of the pins is 1/4 waveguide wavelength of working frequency, and the adjusting distance is 0 to 1/4 waveguide wavelength of the working frequency.
3. A high power tunable microwave mode converter according to claim 1, wherein: the rectangular waveguide has an aspect ratio of 2:1.
4. A high power tunable microwave mode converter according to claim 1, wherein: the inside cooling water circulation structure that is provided with of conical body, cooling water inlet and cooling water outlet all are located the rectangular waveguide up end outside.
5. A high power tunable microwave mode converter according to claim 1, wherein: the rectangular waveguide is formed by welding a copper waveguide or an aluminum waveguide.
6. The high power tunable microwave mode converter according to claim 4, wherein: the cooling water circulation structure is a water cooling cavity arranged inside the conical body, and the water cooling cavity is communicated with a cooling water inlet and a cooling water outlet.
7. A high power tunable microwave mode converter according to any of claims 1-6, characterized in that: an upper flange is arranged just below the rectangular waveguide and opposite to the conical body, the upper flange is connected with an end face flange of the coaxial outer conductor, a microwave channel is formed between the coaxial outer conductor and the inner conductor antenna and communicated with the inside of the rectangular waveguide, and a water-cooling interlayer is arranged on the outer side of the coaxial outer conductor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221971538.3U CN217881831U (en) | 2022-07-28 | 2022-07-28 | High-power adjustable microwave mode converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221971538.3U CN217881831U (en) | 2022-07-28 | 2022-07-28 | High-power adjustable microwave mode converter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217881831U true CN217881831U (en) | 2022-11-22 |
Family
ID=84055650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221971538.3U Active CN217881831U (en) | 2022-07-28 | 2022-07-28 | High-power adjustable microwave mode converter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217881831U (en) |
-
2022
- 2022-07-28 CN CN202221971538.3U patent/CN217881831U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9818580B2 (en) | Transmission line RF applicator for plasma chamber | |
| JP2922223B2 (en) | Microwave plasma generator | |
| CN110708853B (en) | Waveguide feed-in type microwave coupling plasma generating device | |
| CN108039541B (en) | Compact rectangle TE10Circular waveguide TM01Mode conversion device | |
| US8803639B2 (en) | Vacuum insulating chamber including waveguides separated by an air gap and including two planar reflectors for controlling radiation power from the air gap | |
| CN107591304B (en) | A kind of cold cathode compact amplifier | |
| US6917022B2 (en) | Continuous flow microwave heater | |
| EP3121519B1 (en) | Connection structure and input/output connection structure of semiconductor microwave generator for microwave oven, and microwave oven | |
| CN217881831U (en) | High-power adjustable microwave mode converter | |
| CN105491702B (en) | Antenna and micro-wave oven for microwave heating equipment | |
| CN209845424U (en) | High-power high-efficiency multipurpose microwave plasma torch | |
| JP2007157518A (en) | Microwave device | |
| CN113422178B (en) | Waveguide window | |
| JP2008182713A (en) | Microwave antenna and microwave plasma processing apparatus | |
| CN114243244A (en) | High-frequency high-power waveguide coaxial converter under low-pressure condition | |
| CN109698107B (en) | Surface wave plasma device | |
| CN112736392A (en) | Waveguide-coaxial line converter | |
| CN217719487U (en) | Magnetic coupling mode coaxial energy transmission device for coupled cavity traveling wave tube | |
| CN211404705U (en) | Waveguide power synthesis amplifier | |
| CN215421444U (en) | Heat dissipation bin for explosion-proof control cabinet | |
| CN219496650U (en) | TR assembly | |
| CN117254234B (en) | High-power waveguide conversion device, chip and power amplifier | |
| EP3893605A1 (en) | Transfer connector with improved operational reliability | |
| CN217385816U (en) | Special-shaped structure module for coaxial input waveguide output | |
| CN108682961B (en) | Circular waveguide leaky wave slot antenna based on TM01 mode |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |