CN217859553U - RFID multi-chip synchronous welding composite motion suction welding arm - Google Patents

Abstract

The utility model discloses a compound motion of RFID multi-chip synchro welding inhales arm of welding, divide linear electric motor to main motion axle, multiunit X to active cell and multiunit Y including X, multiunit X sets gradually to the active cell on the X is to the main motion axle, and every group X all follows X is to the main motion axle and is the X to the motion, multiunit Y divide linear electric motor one-to-one with multiunit X links to each other to the active cell, and every group Y divides the epaxial fixed set of chip of linear electric motor to inhale the bonding tool respectively, the chip inhales the bonding tool and adopts voice coil motor or the rotatory bonding tool that inhales of R axle, X is to the active cell drive corresponding Y to divide linear electric motor to do the X to the motion, and then drives corresponding chip and inhales the bonding tool and do the X to the motion in step; the high-precision synchronous rapid welding of the RFID multi-chip to the multi-antenna welding area can be completed, and the welding efficiency and speed can be greatly improved.

Description

RFID multi-chip synchronous welding composite motion suction welding arm

Technical Field

The utility model belongs to the technical field of the microelectronic packaging, relate to RFID chip and RFID aluminium etching winding antenna (aluminium etc. antenna in roll packing, hereinafter for short) carry out flip-chip bonding, concretely relates to arm is inhaled in synchronous welded compound motion of RFID multicore piece.

Background

Conventional smart tag chip bonding equipment generally employs flip-chip bonding to directly bond a chip having a bump pad to an antenna aluminum pad using an ACP (anisotropic conductive paste). The whole RFID welding equipment generally comprises a working station, wherein an aluminum etching package antenna is conveyed to a dispensing position, and anisotropic conductive Adhesive (ACP) with certain viscosity is dripped (covered) on each welding area of the RFID antenna to be welded. The chip is sucked up from a large wafer (wafer) by a chip overturning head (FLIP), and after 180-degree overturning, the chip is sucked from the FLIP head by a chip sucking welding head, then the chip is moved to be transmitted above an RFID antenna welding point in a long distance (300-400 mm), and then the chip sucking welding head is aligned with the antenna welding point to move downwards and is accurately placed at the antenna welding position. And after the chip is accurately placed at the RFID antenna welding position, the RFID antenna welded with the chip is conveyed to the hot-press welding position. And finally, the RFID antenna welded with the chip is transmitted to a hot-pressing work station and is completed after the hot-pressing head is pressed and welded. When the chip-on-RFID antenna is transported to a hot-pressing station and cured for a period of time (typically a few seconds) at an appropriate temperature and pressure, the curing and bonding of the chip to the antenna is completed. The upper and lower hot pressing heads are both constant at the temperature required for curing. And the upper hot pressing head presses the chip downwards until ACP epoxy resin between the RFID chip projection welding point and the antenna welding point is completely cured. And the last procedure is to carry out electrical property test on the RFID chip after the RFID chip is welded and solidified.

Referring to fig. 1a, up to now, a RFID chip and antenna welding apparatus generally employs a set of welding arms (hereinafter referred to as "welding heads") 1 'to suck an RFID chip 11' from a chip flipping head (flip head) on a large wafer. The RFID chip is very small, typically 0.3 to 1.3mm. And the RFID chip, is basically 2 gold bump pads 12'. And then, under the positioning of the vision system, the welding head for sucking the chip moves to the welding point position 13' of the RFID antenna for pressure welding.

The method is a flip chip welding method which is widely adopted at present and is commonly used for welding the RFID chip and the antenna.

Referring to fig. 1b, although there are many existing devices for improving the bonding speed, the RFID flip chip bonding technology is improved, such as using two bonding arms on a large wafer, or using 2 sets of bonding arms 2' for 2 large wafers. The technology of the double welding arms for increasing the welding speed is also essentially one-to-one welding of the RFID chip to the antenna from the flip head to the welding point of the RFID antenna. This conventional approach not only adds cost and complexity to the device. Meanwhile, the width of the RFID multi-row antenna needing to weld the chip is very wide, the distance from the antenna to the far end of the wafer disc sometimes reaches 400mm or more, and the efficiency of frequent long-distance motion welding is still not high. And these methods result in complex equipment, high cost and low efficiency.

SUMMERY OF THE UTILITY MODEL

The utility model aims at overcoming prior art's defect, providing a compound motion of synchronous welding of RFID multicore piece inhales and welds arm, inhale the multiunit chip that welds the arm through compound motion and inhale the bonding tool and carry out the synchronous motion regulation, can accomplish the RFID multicore piece and carry out the synchronous fast weld of high accuracy to the antenna weld zone, can realize separating one row of antenna welding or separating multirow antenna welding or cross arrangement antenna welding, can improve welding efficiency and speed by a wide margin.

One technical scheme for achieving the purpose is as follows: a composite motion suction welding arm for synchronous welding of multiple RFID chips comprises an X-direction main movement shaft, multiple groups of X-direction rotors and multiple groups of Y-direction division linear motors, wherein the multiple groups of X-direction rotors are sequentially arranged on the X-direction main movement shaft, each group of X-direction rotors move in the X direction along the X-direction main movement shaft, the multiple groups of Y-direction division linear motors are connected with the multiple groups of X-direction rotors in a one-to-one correspondence manner, a group of chip suction welding heads are respectively fixed on the shaft of each group of Y-direction division linear motors, and the chip suction welding heads adopt voice coil motors or R-axis rotary suction welding heads; the X-direction rotor drives the corresponding Y-direction linear dividing motor to move in the X direction, and further drives the corresponding chip suction welding head to synchronously move in the X direction; the Y-direction linear dividing motor drives the corresponding chip suction welding head to do Y-direction micro-correction movement; and each group of chip suction welding heads is used for sucking, releasing, welding the RFID chips and driving the RFID chips to do rotation angle correction motion.

According to the composite motion suction welding arm for synchronously welding the RFID multi-chip, each group of Y-direction linear dividing motors are arranged on the corresponding X-direction rotor through the mounting base.

The composite motion suction welding arm for synchronously welding the RFID multi-chip is characterized in that the number of the X-direction rotors and the number of the Y-direction dividing linear motors are respectively five, and the five groups of the Y-direction dividing linear motors are connected with the five groups of the X-direction rotors in a one-to-one correspondence manner; the number of the chip suction welding heads is five, and the five groups of chip suction welding heads are correspondingly arranged on the shafts of the five groups of Y-direction linear motors one by one.

The composite motion suction welding arm for synchronously welding the RFID multi-chips is characterized in that the distance between every two adjacent groups of chip suction welding heads is equal to the integral multiple of the distance of the antenna arrangement.

Adopt the utility model discloses a compound movement of synchronous welding of RFID multicore piece inhales the technical scheme that welds the arm, and the multiunit that inhales the arm through compound movement contains the chip and inhales the chip of bonding tool and inhale the bonding tool and carry out synchronous regulation, can accomplish the RFID multicore piece and carry out the synchronous fast weld of high accuracy to the antenna weld zone, can realize separating one row of antenna welding or separating multirow antenna welding or cross arrangement antenna welding, can improve welding efficiency and speed by a wide margin.

Drawings

FIG. 1a is a schematic diagram of a chip suction welding arm for flip chip bonding of an RFID chip and an antenna in the prior art;

FIG. 1b is a schematic view of prior art RFID chip bonding with an increased number of bonds per hour;

FIG. 2 is a structural diagram of a combined motion suction welding arm for RFID multi-chip synchronous welding of the present invention;

FIG. 3a is a schematic diagram of step S1 of the synchronous welding method of the composite motion suction welding arm for RFID multi-chip synchronous welding of the present invention;

fig. 3b is a schematic diagram of step S2 of the synchronous welding method of the combined motion suction welding arm for RFID multi-chip synchronous welding according to the present invention;

FIG. 4 is a schematic view of multi-head synchronous welding of a single-row RFID etching aluminum antenna by using the composite motion suction welding arm of the present invention;

FIG. 5 is a schematic view of a synchronous welding process using the combined motion suction welding arm of the present invention to separate a row of antenna welding points;

figure 6 is adopting the utility model discloses a compound motion is inhaled and is welded the arm and separate the synchronous welding sketch map of multirow antenna welding point.

Detailed Description

In order to make the technical solution of the present invention better understood by those skilled in the art, the following detailed description is provided with reference to the accompanying drawings:

please refer to fig. 2, the utility model provides an embodiment, a compound motion of RFID multicore piece synchronous welding inhales arm of welding, including X to main motion axle 1, multiunit X to active cell and multiunit Y to dividing linear electric motor, multiunit X sets gradually on X to main motion axle 1 to the active cell, and every group X all is X to the motion along X to main motion axle 1 to the active cell, multiunit Y links to each other with multiunit X to the active cell to dividing linear electric motor one-to-one, every group Y is to the epaxial fixed a set of chip of dividing linear electric motor respectively and inhale the bonding tool, the chip is inhaled the bonding tool and is adopted voice coil motor or the rotatory bonding tool that inhales of R axle.

In this embodiment, the number of the X-directional movers is five, and the X-directional movers X1, X-directional movers X2, X-directional movers X3, X-directional movers X4, and X-directional movers X5 are provided. The X-direction movers X1, X-direction movers X2, X-direction movers X3, X-direction movers X4 and X-direction movers X5 are sequentially arranged along the axial direction of the X-direction main motion shaft 1, and each group of X-direction movers move along the axial direction (namely X-direction) of the X-direction main motion shaft 1. The number of the Y-direction linear motors is five, and the Y-direction linear motors are respectively a Y-direction linear motor 21, a Y-direction linear motor 22, a Y-direction linear motor 23, a Y-direction linear motor 24 and a Y-direction linear motor 25. Each group of Y-direction dividing linear motors are arranged on the corresponding X-direction rotor through a mounting seat, and five groups of Y-direction dividing linear motors 21-25 are correspondingly connected with five groups of X-direction rotors X1-X5 one by one. The chip suction welding head adopts voice coil motors, the number of the voice coil motors is five, and the five groups of voice coil motors are respectively a voice coil motor 31, a voice coil motor 32, a voice coil motor 33, a voice coil motor 34 and a voice coil motor 35. Five groups of voice coil motors 31 to 35 are provided on the shafts of the five groups of Y-direction split linear motors 21 to 25 in a one-to-one correspondence. When each X-direction rotor moves along the axial direction of the X-direction main motion shaft 1, the corresponding Y-direction sub linear motor is carried to move in the X direction, and then five groups of voice coil motors 31-35 are synchronously driven to move in the X direction. The Y-direction sub linear motor drives the corresponding voice coil motor to perform Y-direction fine correction motion, for example, the Y-direction sub linear motor 21 drives the voice coil motor 31 to perform fine correction motion along the Y1 direction; the Y-direction linear dividing motor 22 drives the voice coil motor 32 to do micro-correction motion along the Y2 direction; the Y-direction linear dividing motor 23 drives the voice coil motor 33 to do micro-correction motion along the Y3 direction; the Y-direction linear dividing motor 24 drives the voice coil motor 34 to do micro-correction motion along the Y4 direction; the Y-direction linear motor 25 drives the voice coil motor 35 to make a fine correction movement in the Y5 direction. Each group of voice coil motors is used for sucking, releasing, welding and driving the RFID chip to do rotation angle correction motion, for example, the voice coil motor 31 can drive the RFID chip sucked thereon to rotate along the theta 1 direction, and the voice coil motor 32 can drive the RFID chip sucked thereon to rotate along the theta 2 direction; the voice coil motor 33 may drive the RFID chip sucked thereon to rotate in the θ 3 direction, the voice coil motor 34 may drive the RFID chip sucked thereon to rotate in the θ 4 direction, and the voice coil motor 35 may drive the RFID chip sucked thereon to rotate in the θ 5 direction.

Referring to fig. 3a and 3b, a synchronous welding method of a compound motion suction welding arm for synchronous welding of RFID multiple chips includes the following steps:

s1, synchronously moving each X-direction rotor on an X-direction main motion shaft and a Y-direction linear dividing motor connected with the X-direction rotor to the position above a suction and release point of a chip overturning head 6 of a wafer disc 5 along the X-direction main motion shaft 1; when the chip overturning head 6 sucks the RFID chip 7 on the large wafer of the wafer disc 5, overturning the RFID chip 7 by 180 degrees, enabling the back surface of the RFID chip 7 to be upward and the projection welding point of the RFID chip 7 to be downward; then, five groups of voice coil motors 31-35 of the compound motion welding suction arm sequentially suck the RFID chips on the chip turnover head 6 from the front group of chip welding suction heads;

s2, each X-direction rotor on the X-direction main motion shaft 1 carries a corresponding Y-direction linear dividing motor and synchronously drives a corresponding voice coil motor which is absorbed with the RFID chip 7 to do X-direction motion, and under the control of a visual positioning system of the antenna welding position, respective X-direction motion, respective Y-direction deviation rectifying motion and rotary motion of each voice coil motor are synchronously performed in the process of reaching each corresponding antenna welding position; before the composite motion suction welding arm sucks the RFID chip from the chip overturning head to reach the RFID antenna welding position, under the support of a visual positioning system, the precise alignment of the projection welding point of each RFID chip 7 on the composite motion arm and the corresponding antenna welding point 8 is completed;

s3, after the RFID chip reaches the accurate antenna welding point position, the voice coil motor which holds the RFID chip starts to downwards align to the corresponding antenna welding point for pressure welding; five groups of voice coil motors 31-35 synchronously complete the rapid and accurate welding of the projection welding points of the 5 RFID chips at the corresponding positions and the antenna welding points 8 at the corresponding welding positions at one time. The chip RFID etched aluminum antenna after the welding is finished is continuously conveyed to the next work station for hot-pressing solidification. And finally, performing performance test through a test workstation.

The utility model discloses a compound motion of welding arm is inhaled in compound motion contains the delivery and respectively the overhead 5 groups voice coil motors's of holding the chip at the chip upset motion of holding, and long distance X from the chip upset head of big wafer to between each group's antenna welding point position is to motion and Y to the fine setting motion to and rotary motion and push down the welding motion. The compound motion not only greatly improves the speed of the RFID chip to the welding point of the antenna, but also ensures the accurate positioning of the projection welding point of the chip and the welding point of the antenna. And the voice coil motors of each group on the compound motion suction welding arm respectively perform synchronous distance adjustment motion and synchronous Y-direction correction motion on each group of antenna welding points while moving in the X direction of each RFID chip. Meanwhile, in order to adjust the welding error of the chip angle, each voice coil motor also respectively carries out synchronous rotation motion when carrying out X motion. And final bonding after reaching the precise antenna bonding location. The during operation, the utility model discloses a multiunit voice coil motor absorbs the chip in succession on the suction head of the chip upset head of big wafer respectively in proper order on the compound motion arm, then transports the corresponding antenna weld zone of multirow RFID of longer distance (big wafer distance + multirow RFID antenna width) simultaneously. And in the process that the welding heads of the voice coil motors which move on the combined motion welding suction arm in a grouping mode leave the chip turnover heads and move towards the RFID antenna welding points, under the control of visual motion software, a plurality of groups of voice coil motors synchronously and rapidly move to the welding positions of the antennas corresponding to one another, and simultaneously and accurately align the respective RFID antenna welding points. The utility model discloses a voice coil motor on the arm is welded in compound motion suction welding through X, Y, the compound synchronous motion of theta to for the welding of RFID chip reaches the synchronous welding of quick, accurate, reliable and stable many bonding tools.

The utility model discloses a main objective is to overcome multirow broad width winding RFID and erodees the defect that aluminium antenna long distance's chiplet high accuracy fixed-position welding is inefficient. The main content of the utility model relates to a high-speed synchronous welding of many bonding tools from chip upset head (flip head) to RFID antenna welding point.

The utility model discloses a concrete constitution of compound motion suction welding arm is on long distance X is to the active cell to 5X groups on the main motion axle 1, 5 short distance Y of group that are equipped with are to dividing linear electric motor. And a group of voice coil motors (VCM for short) are respectively fixed on each group of Y-direction linear motors. Each group of voice coil motors can respectively do independent Y-direction sub-motion while moving along the main motion shaft 1 of the X-direction linear motor through the Y-direction sub-linear motor. And each group of voice coil motors on the compound motion welding arm can simultaneously and independently do rotary motion, chip suction and discharge and welding motion. The combination of the hardware functions can complete the high-precision synchronous rapid welding of the RFID multi-chip to the antenna welding area under the control of the visual positioning program.

When multiple groups of voice coil motors respectively suck chips from the flip head, position errors in the rotating direction and the XY direction can be generated randomly. When the linear motor moves forwards in the X direction, each group of voice coil motors with the chips can simultaneously correct respective X and theta rotation errors and position correction in the Y direction, so that accurate welding positions of the X direction, the Y direction and the theta angle of each group of voice coil motors are kept before the linear motor reaches the welding positions of the RFID antennas. The voice coil motor is fixed on a Y linear motor used for fine adjustment, and the Y linear motor is fixed on a linear motor which can be used for long-distance conveying and can be positioned in an X-direction mover. Just so can solve and carry out position control in many voice coil motor X direction long distance motion to and Y and theta angle once motion simultaneously are adjusted and are targetting in place, the utility model discloses compound motion arm can realize that voice coil motor multicore piece transports synchronous accurate position control of in-process and multicore piece once welds.

Referring to fig. 4, the composite motion suction welding arm for synchronously welding RFID multi-chips of the present invention can simultaneously weld a single-row coiled antenna and a multi-row coiled aluminum etching antenna. The method is suitable for flip-chip welding of high-speed and high-precision RFID chips of multi-row etched RFID aluminum antennas, is also suitable for flip-chip welding of antenna arrays of single-row etched RFID aluminum antennas, can be used for synchronously, rapidly and accurately welding five groups of voice coil motors of a composite motion arm at one time for single-row aluminum etched RFID antennas, obtains packaging equipment (one suction welding head corresponds to one chip for welding) of one-to-one RFID chips and aluminum etched antennas, and greatly improves efficiency and speed.

The utility model discloses a compound motion of synchronous welding of RFID multicore piece is inhaled and is welded the arm in the flip-chip bonding of single row etching RFID aluminium antenna, and compound motion arm is when chooseing for use voice coil motor, except conventional motor performance factor, and the factor that mainly still considers is voice coil motor's thickness. The minimum thickness of the voice coil motor is 16mm at present, and the antenna spacing of the single-row etched RFID aluminum antenna is close to the minimum thickness of the voice coil motor. In the flip chip bonding of the single-row etched RFID aluminum antenna, since the arrangement pitch of the antenna welding points is small (usually about 20 mm), for different pitch arrangements of different RFID aluminum etched antennas, the distance between two adjacent sets of voice coil motors can be increased, and the welding can be performed at intervals of one row of antennas or at intervals of multiple rows of antennas. Separate the synchronous welding of one row or multirow antenna welding point, can arrange according to the RFID antenna and carry out rational design and arrangement with voice coil motor's thickness.

Referring to fig. 5 and 6, the combined motion suction welding arm for synchronous welding of RFID multiple chips of the present invention may also adopt a spaced-row antenna welding method of a multi-voice coil motor to realize synchronous welding of multiple chips. For example, in step S1, the thickness of the voice coil motors, the distance between every two adjacent X-direction movers, and the distance between every two adjacent Y-direction split linear motors are adjusted, so that the distance between every two adjacent voice coil motors can be adjusted to be equal to an integral multiple of the distance between every two adjacent antenna welding points, and the synchronous welding of the multiple RFID chips and the antenna welding points arranged in every other row or every other multiple rows or in a cross arrangement is realized.

Referring to fig. 5, by adjusting the thickness of the voice coil motors and the distance between every two adjacent sets of Y-direction dividing linear motors, the distance between every two adjacent sets of voice coil motors is further adjusted, so that the distance a between every two adjacent sets of voice coil motors is equal to 2 times of the distance b between the antenna welding points, and in the process of welding, the projection welding points of the plurality of RFID chips and the antenna welding points spaced by one row can be synchronously welded.

Referring to fig. 6, when the distance a between every two adjacent sets of voice coil motors is equal to multiple times of the distance b between the antenna welding points, in the welding process, the synchronous welding between the projection welding points of the multiple RFID chips and the antenna welding points spaced by multiple rows can be realized.

In the welding of the compound motion synchronous voice coil motor arranged by separating one row or a plurality of rows or cross arrangement of RFID antennae, the arrangement can be conveniently carried out according to the arrangement distance of the welding points of the RFID antennae and the thickness of the voice coil motor. According to the thickness of the voice coil motor and the arrangement distance of the antenna welding points of different single-row etched RFID aluminum antennas, the synchronous welding can also be carried out by adopting the arrangement distance of the antennas of every 2 rows or every 3 rows of RFID etched aluminum antennas. Until the single-row RFID etching aluminum antenna is completely welded.

Adopt the utility model discloses a compound motion of the synchronous welding of RFID multi-chip inhales when welding the synchronous welding that carries out single row RFID etching aluminum antenna of arm, can improve the quantity (UPH) of welding every hour of etching aluminum antenna RFID product by a wide margin. This is because the single-row RFID etched aluminum antenna shortens the distance that the chip is soldered from the chip Flip head (Flip head) to the single-row RFID etched aluminum antenna. The utility model discloses a compound motion is inhaled 5 groups of synchronous welded voice coil motor 31 ~ 34 on the welding arm and can be made 5 groups of RFID chips arrive RFID antenna welding position top fast in step. The welding method of the single-row RFID aluminum etching antenna is similar to the welding method of the multi-row RFID aluminum etching antenna, but the moving distance of the multi-voice coil motor of the composite moving arm is shorter, and the welding speed is higher.

In the composite motion suction welding arm for synchronously welding the RFID multi-chip, the voice coil motor can be replaced by an R-axis rotary suction welding head in the prior art, the same technical effect can be realized, and the chip suction welding head is mainly used for sucking, releasing, welding the RFID chip and driving the RFID chip to do rotation angle correction motion. The number of the X-direction rotors, the number of the Y-direction linear dividing motors and the number of the chip suction welding heads can be set according to actual requirements.

To sum up, the utility model discloses a compound motion of synchronous welding of RFID multicore piece is inhaled and is welded arm, the multiunit that inhales through compound motion and weld the arm contains the chip and inhale the chip of bonding tool and inhale the bonding tool and carry out synchronous regulation, can accomplish the RFID multicore piece and carry out the synchronous fast weld of high accuracy to the antenna weld zone, can realize separating one row of antenna welding or separating multirow antenna welding or cross arrangement antenna welding, can improve welding efficiency and speed by a wide margin.

It will be appreciated by those skilled in the art that the above embodiments are only for illustrating the present invention and are not to be used as limitations of the present invention, and that changes and modifications to the above described embodiments will fall within the scope of the claims of the present invention as long as they are within the spirit and scope of the present invention.

Claims (4)

1. A composite motion suction welding arm for synchronous welding of multiple RFID chips is characterized by comprising an X-direction main motion shaft, multiple groups of X-direction rotors and multiple groups of Y-direction division linear motors, wherein the multiple groups of X-direction rotors are sequentially arranged on the X-direction main motion shaft, each group of X-direction rotors move in the X direction along the X-direction main motion shaft, the multiple groups of Y-direction division linear motors are connected with the multiple groups of X-direction rotors in a one-to-one correspondence manner, a group of chip suction welding heads are respectively fixed on the shaft of each group of Y-direction division linear motors, and the chip suction welding heads adopt voice coil motors or R-axis rotary suction welding heads; the X-direction rotor drives the corresponding Y-direction linear dividing motor to move in the X direction, and further drives the corresponding chip suction welding head to synchronously move in the X direction; the Y-direction linear dividing motor drives the corresponding chip suction welding head to do Y-direction micro-correction movement; and each group of chip suction welding heads is used for sucking, releasing, welding the RFID chips and driving the RFID chips to do rotation angle correction motion.

2. The compound motion suction welding arm for RFID multi-chip synchronous welding according to claim 1, wherein each group of Y-direction linear motors is arranged on the corresponding X-direction rotor through a mounting seat.

3. The compound motion suction welding arm for RFID multi-chip synchronous welding according to claim 1, wherein the number of the X-direction rotors and the Y-direction branch linear motors is respectively five groups, and the five groups of the Y-direction branch linear motors are connected with the five groups of the X-direction rotors in a one-to-one correspondence manner; the number of the chip suction welding heads is five, and the five groups of chip suction welding heads are correspondingly arranged on the shafts of the five groups of Y-direction linear motors one by one.

4. The compound motion suction welding arm for synchronous welding of the RFID multi-chip as claimed in claim 1, wherein the distance between every two adjacent groups of chip suction welding heads is equal to integral multiple of the distance of the antenna array.

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