CN217849218U - Linear motor and processing equipment with same - Google Patents

Abstract

The utility model discloses a linear electric motor and have its processing equipment, linear electric motor includes: the compensation module is positioned on one side of the primary module along the motion direction and is arranged at a distance from the primary module, and the length C of the primary module is in a first direct proportional relation with the polar distance tau of the secondary module; length W of the compensation module ₂ And the polar distance tau of the secondary module is in a second direct proportional relation. According to the utility model discloses a linear electric motor for secondary module is to the positioning force and secondary module that primary module produced to compensation mouldThe positioning forces generated by the blocks are mutually offset and can be adjusted by adjusting W ₂ The side end force generated by the secondary module to the compensation module is adjusted, so that the offset of the positioning force of the compensation module to the positioning force of the primary module is changed, and the thrust fluctuation of the linear motor is reduced or even eliminated.

Description

Linear motor and machining equipment with same

Technical Field

The utility model belongs to the technical field of the motor technique and specifically relates to a linear electric motor and have its processing equipment is related to.

Background

The linear motor has obvious pause and frustration under the condition of no power supply because of the longitudinal disconnection of the primary iron core and the existence of the secondary permanent magnet, and is called as positioning force. The positioning force causes speed fluctuations of the motor and even vibration and noise of the motor system.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least. Therefore, the utility model provides a linear electric motor, linear electric motor can reduce or even eliminate linear electric motor's thrust undulant, and the speed of restraining primary module is undulant, improves linear electric motor's thrust density.

The utility model discloses still lie in providing a processing equipment who has above-mentioned linear electric motor.

According to the utility model discloses a linear electric motor, include: the compensation module is positioned on one side of the primary module along the motion direction and is arranged at a distance from the primary module, and the length C of the primary module is in a first direct proportional relation with the polar distance tau of the secondary module; length W of the compensation module ₂ And the polar distance tau of the secondary module has a second direct proportional relation.

According to the utility model discloses a linear electric motor through set up the compensating module interval in the one side of primary module along the direction of motion, can make secondary module produce the limit end power of primary module and secondary module to the limit end power that compensating module produced and produce certain phase difference for at least some of two limit end powers can offset each other, and then make the positioning force that secondary module produced primary module and the positioning force that secondary module produced compensating module offset each other. While compensating for the length W of the module ₂ The pole distance tau from the secondary module 2 is set to beA direct proportional relationship, can be obtained by adjusting W ₂ The side end force generated by the secondary module to the compensation module is adjusted, and then the offset of the positioning force of the compensation module to the positioning force of the primary module is changed, so that the thrust fluctuation of the linear motor is flexibly reduced or even eliminated, the speed fluctuation of the primary module is inhibited, and the thrust density of the linear motor is improved.

According to some embodiments of the invention, the distance W between the primary module and the compensation module ₁ And the polar distance tau of the secondary module is in a third direct proportional relation.

In some embodiments, the air gap length between the compensation module and the secondary module is H, the air gap length between the primary module and the secondary module is δ, and H is not less than δ.

In some embodiments, the compensation module is formed with a plurality of teeth on a side facing the secondary module, the plurality of teeth being evenly spaced along the direction of movement of the primary module.

Further, in the plurality of convex teeth, the tooth widths of any two convex teeth are the same, and the tooth heights of any two convex teeth are the same.

In some embodiments, the compensation module has a number of teeth N _t And the number of tooth grooves N of the primary module _s In a fourth direct proportional relationship.

According to the utility model discloses a some embodiments, the compensation module is high magnetic conduction spare.

In some embodiments, the primary module includes a primary core, and the compensation module is made of the same material as the primary core.

According to some embodiments of the invention, the compensation module and the primary module are filled with a non-magnetic conductive member therebetween.

In some embodiments, the compensation module and the primary module are fixed by a connector, the connector being a piece of non-magnetically conductive material; or the compensation module and the primary module are fixed through encapsulation, and the encapsulation material is a non-magnetic material; or, linear electric motor still includes motor housing, primary module with secondary module locates motor housing's inboard, compensation module locates motor housing just is located motor housing's the outside.

According to some embodiments of the invention, the primary module comprises a primary core and a coil, the primary core having a plurality of tooth slots open towards the secondary module, the coil being wound in each tooth slot; the secondary module comprises a permanent magnet and a secondary yoke plate, and the permanent magnet is arranged on one side, facing to the primary module, of the secondary yoke plate.

According to the utility model discloses processing equipment of second aspect includes: a machine platform; the moving mechanism is movably arranged on the machine table; the main shaft module is movably arranged on the moving mechanism and is used for processing a workpiece; linear electric motor, linear electric motor be according to the utility model discloses an aspect linear electric motor, primary module locates moving mechanism, secondary module locates the board, secondary module is suitable for the drive primary module motion is in order to drive moving mechanism is relative the board removes.

According to the utility model discloses a processing equipment, because linear electric motor can reduce or eliminate thrust undulant, help promoting processing equipment's machining precision and processingquality.

Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.

Drawings

Fig. 1 is a schematic view of a linear motor according to an embodiment of the present invention;

fig. 2 is a schematic view of another angle of the primary module of the linear electric motor of fig. 1;

fig. 3 is a schematic view of an embodiment of a linear motor according to the present invention;

FIG. 4 is a waveform of a detent force of the linear motor shown in FIG. 3;

fig. 5 is a schematic view of another embodiment of a linear motor according to the present invention;

FIG. 6 is a schematic diagram of the compensation module of FIG. 5;

FIG. 7 is a positioning force waveform diagram of the linear motor shown in FIG. 5;

FIG. 8 is a graph comparing detent forces for the linear motors of the two embodiments shown in FIGS. 3 and 5;

fig. 9 is a schematic diagram of a primary core of a linear motor according to the present invention.

Reference numerals are as follows:

linear motor 100:

the primary module 1, the primary core 11, the slots 111, the coil 12,

the secondary module 2, the secondary yoke plate 21, the permanent magnet 22,

compensation module 3, convex tooth 31, connecting piece 4.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

A linear electric machine 100 according to an embodiment of the first aspect of the present invention is described below with reference to fig. 1 to 9.

As shown in fig. 1 and 3, a linear motor 100 according to an embodiment of the present invention includes: a primary module 1, a secondary module 2 and a compensation module 3.

Specifically, the primary module 1 and the secondary module 2 are arranged oppositely, the primary module 1 is suitable for moving in a straight line relative to the secondary module 2, the compensation module 3 is positioned on one side of the primary module 1 in the moving direction, the compensation module 3 is arranged at a distance from the primary module 1, meanwhile, the compensation module 3 is also arranged oppositely to the secondary module 2, the length C of the primary module 1 is in a first direct proportion relation with the polar distance τ of the secondary module 2, and specifically, the length C of the primary module 1 and the polar distance τ of the secondary module 2 satisfy: c = P τ, wherein P is a positive integer; length W of compensation module 3 ₂ With secondary modules 2The polar distance tau is in a second direct proportional relationship, in particular the length W of the compensation module 3 ₂ A polar distance tau from the secondary module

Wherein λ is a positive integer.

For example, as shown in fig. 3 and 9, the primary module 1 includes a primary core 11 and coils 12, wherein six slots 111 are formed on the primary core 11, and the coils 12 are uniformly distributed in each slot 111. The secondary module 2 comprises a permanent magnet 22 and a secondary yoke plate 21, the primary module 1 can move relative to the secondary module 2 along the length direction thereof, the pole pitch of the secondary module 2 is 8, namely the length C of the primary module 1 is integral multiple of 8, and the length W of the compensation module 3 ₂ Is an integer multiple of 4.

According to the utility model discloses linear electric motor 100, through setting up compensation module 3 interval in primary module 1 along one side of direction of motion, can make secondary module 2 produce the limit end power of primary module 1 and secondary module 2 produce certain phase difference to the limit end power that compensation module 3 produced for at least some of two limit end powers can offset each other, and then make secondary module 2 offset each other the location power that primary module 1 produced and the location power that secondary module 2 produced compensation module 3. While compensating for the length W of the module 3 ₂ The polar distance tau of the secondary module 2 is set in a proportional relation, and W can be adjusted ₂ The side end force generated by the secondary module 2 to the compensation module 3 is adjusted, so that the offset of the positioning force of the compensation module 3 to the positioning force of the primary module 1 is changed, the thrust fluctuation of the linear motor 100 is flexibly reduced or eliminated, the speed fluctuation of the primary module 1 is inhibited, and the thrust density of the linear motor 100 is improved.

According to some embodiments of the invention, the distance W between the primary module 1 and the compensation module 3 ₁ In a third directly proportional relationship with the pole pitch τ of the secondary module 2, in particular the spacing W between the primary module 1 and the compensation module 3 ₁ A polar distance tau from the secondary module 2

Wherein k isThe value of k may be 1, 2, 3, 5 or more, and the value of k may be reasonably selected according to experimental conditions or actual requirements. So, can guarantee to have certain interval between elementary module 1 and the compensation module 3, and through the size of adjusting this interval, can change the phase difference between the positioning force that secondary module 2 produced to elementary module 1 and the positioning force that secondary module 2 produced compensation module 3 to make first positioning force and second positioning force can offset each other, and then restrain the thrust and fluctuate.

In some embodiments, the air gap length between the compensation module 3 and the secondary module 2 is H, the air gap length between the primary module 1 and the secondary module 2 is δ, H and δ satisfy: h ≧ delta, that is, the length of the air gap between the compensation module 3 and the secondary module 2 is H, which can be equal to the length of the air gap between the primary module 1 and the secondary module 2, or delta, which can be greater than the length of the air gap between the primary module 1 and the secondary module 2. Therefore, on one hand, the size of the positioning force generated by the secondary module 2 on the compensation module 3 can be adjusted, on the other hand, the requirements on the machining precision and the assembling precision of the compensation module 3 are reduced, and the cost is reduced.

In some embodiments, the compensation module 3 is in a square block shape, for example, as shown in fig. 1, and the compensation module 3 may be formed in a rectangular shape, so that the structure of the compensation module 3 may be simplified, the processing and manufacturing may be facilitated, and the production cost may be reduced.

In some embodiments, referring to fig. 5 to 7, a plurality of convex teeth 31 are formed on a side of the compensation module 3 facing the secondary module 2, the plurality of convex teeth 31 may be uniformly distributed at intervals along the movement direction of the primary module 1, and since the positioning force may be analyzed as a cogging force and an edge end force, by providing a plurality of convex teeth on the compensation module 3, the secondary module 2 may generate not only the edge end force but also the cogging force on the compensation module 3, so that the cogging force generated by the compensation module 3 of the secondary module 2 may be cancelled by the cogging force generated by the secondary module 2 on the primary module 1, thereby further increasing the amount of cancellation of the positioning force of the compensation module 3 on the primary module 1, and further suppressing thrust fluctuation.

Furthermore, in the plurality of convex teeth 31, the tooth widths of any two convex teeth 31 are the same, and the tooth heights of any two convex teeth 31 are the same, so that the processing technology can be simplified, and the production and manufacturing cost can be reduced.

In some embodiments, the number of teeth 31 of the compensation module 3 is N _t The number of the tooth grooves of the primary module 1 is N _s Number N of teeth 31 of compensation module 3 _t Number of tooth grooves N with primary module 1 _s In a fourth direct proportional relationship, specifically, N _t And N _s Satisfies the following conditions:

for example, as shown in fig. 5, six slots 111 are formed on the primary module 1, that is, the number of slots of the primary module 1 is 6, and the number of the convex teeth 31 of the compensation module 3 is 3, that is, the number of the convex teeth 31 on the compensation module 3 is an integral multiple of 3, so that the above relation is satisfied, and referring to fig. 5, 7 and 8, compared with the case where the convex teeth 31 are not provided on the compensation module 3, the positioning force generated by the secondary module 2 on the compensation module 3 is greater, and the positioning force generated by the secondary module 2 on the primary module 1 can be more cancelled, so as to better suppress the thrust fluctuation of the linear motor 100.

According to some embodiments of the utility model, compensation module 3 is high magnetic conduction spare, for example, compensation module 3 can adopt Q235 to make to in the positioning force of 1 department of primary module is offset better to compensation module 3, and simultaneously, 3 sources of compensation module are extensive, and the cost is lower. It can be understood that the better the magnetic conductivity of the compensation module 3 is, so that the larger the positioning force generated by the secondary module 2 to the compensation module 3 is, the smaller the volume of the compensation module 3 is, which is more beneficial to reducing the overall occupied space of the linear motor 100.

In some embodiments, the primary module 1 may include the primary core 11, and the compensation module 3 and the primary core 11 are made of the same material, so that the material is more easily available and the manufacturing is simple.

According to the utility model discloses a some embodiments, it has the magnetic conduction piece not to fill between compensation module 3 and the primary module 1, so, both can be with the fixed compensation module 3 of magnetic conduction piece, can make again and keep a determining deviation between compensation module 3 and the primary module 1 to make the positioning force of secondary module 2 to primary module 1 production and the positioning force of secondary module 2 to compensation module 3 production produce certain phase difference.

According to some embodiments of the present invention, referring to fig. 1 and 2, the compensation module 3 and the primary module 1 are fixed by the connecting piece 4, for example, the connecting piece 4 may be formed as a connecting block, and the connecting piece 4 is a non-magnetic conductive material piece, so that the synchronous motion of the compensation module 3 and the primary module 1 can be ensured.

Or, the compensation module 3 and the secondary module 2 are connected through a potting process, and the material used for potting is a non-magnetic material. In this way, a synchronous movement of the compensation module 3 and the primary module 1 can be ensured.

Still alternatively, the linear motor 100 may further include: and a motor housing. Particularly, primary module 1 and secondary module 2 locate motor housing's inboard, and motor housing is located to compensation module 3 can be located motor housing's the outside, and primary module 1 and compensation module 3 all link to each other with motor housing, so, have simplified overall structure, and convenient assembling is high-efficient.

According to some embodiments of the present invention, the primary module 1 may include the primary core 11 and the coil 12, the primary core 11 has a plurality of tooth sockets 111 facing the secondary module 2, and the coil 12 is disposed in each tooth socket 111, for example, as shown in fig. 3 and 5, six tooth sockets 111 are disposed on the primary core 11, the six tooth sockets 111 are all facing the secondary module 2, and the coil 12 is disposed around the tooth sockets 111. The secondary module 2 may include a permanent magnet 22 and a secondary yoke plate 21, the permanent magnet 22 is disposed on a side of the secondary yoke plate 21 facing to the primary module 1, the permanent magnet 22 includes a plurality of permanent magnets, and the plurality of permanent magnets 22 are alternately arranged on the secondary yoke plate 21 along the movement of the primary module 1 in a manner that N and S poles are alternately arranged.

According to some embodiments of the present invention, the linear motor 100 may further include: base, the baffle, move the stroma and guide rail, wherein, secondary module 2 can locate the base, here, the base can be the partly of the board of processing equipment, the mover base can be the moving mechanism's of processing equipment partly, can be equipped with the guide rail on the base, the mover base is suitable for along the guide rail motion, primary module 1 can be located on the mover base, the baffle can be located on the base and is located the guide rail along length direction's both ends, thus, when primary module 1 is 2 along linear motion relative secondary module, primary module 1 can drive the stroma and slide along the guide rail, and the baffle can carry on spacingly to the mover base, in order to prevent that the detent derails, thereby promote the stability of linear electric motor 100 operation.

A linear motor 100 according to an embodiment of the present invention will be described with reference to fig. 1 to 9.

In the first embodiment, the first step is,

referring to fig. 3 and 4, the linear motor 100 of the present embodiment is a slot-pole linear motor 100, including: a primary module 1, a secondary module 2 and a compensation module 3.

The primary module 1 comprises a primary iron core 11 and a coil 12, six tooth slots 111 are formed on the primary iron core 11, the coil 12 is uniformly distributed in each tooth slot 111, the secondary module 2 comprises a secondary yoke plate 21 and a plurality of permanent magnets 22, the plurality of permanent magnets 22 are adhered to the secondary yoke plate 21, and the plurality of permanent magnets 22 are alternately arranged on the secondary yoke plate 21 along the movement mode of the primary module 1 according to the mode that N poles and S poles are alternately arranged so as to provide a main magnetic field.

One side of the primary iron core 11 along the movement direction is provided with a compensation module 3, the compensation module 3 is made of Q235, the compensation module 3 is of a cuboid structure, and the distance from the compensation module 3 to the end part of the primary iron core 11 is W ₁ ，

(where k is a positive integer), where τ is the pole pitch of the linear motor 100, so that the compensation module 3 has the same end force frequency as the linear motor 100, and is out of phase by 180 ° in electrical angle, and when k =1, the compensation module 3 is closest to the primary core 11. Length W of compensation module 3 ₂ Satisfy the requirements of

(where λ is a positive integer), when λ =1, the length W of the compensation module 3 is shown ₂ Shortest; the length H of the air gap of the compensation module 3 is more than or equal to delta.

Referring to fig. 4, for the positioning force oscillogram of the linear electric motor 100 and the compensation module 3 in embodiment 1 of the present invention, it can be found that the positioning force of the linear electric motor 100 is large when there is no compensation module 3. When the compensation module 3 of the present embodiment is provided, the side end force generated by the linear motor 100 can be offset by generating a positioning force having the same frequency as the side end force of the linear motor 100 and having a phase difference of 180 ° in electrical angle. The canceling of the detent force of the linear motor 100 of the present embodiment is shown in fig. 4.

In the second embodiment, the first embodiment of the method,

referring to fig. 5 and 6, the present embodiment has the same structure as the first embodiment, wherein the same reference numerals are used for the same components, and the differences are only that: in the first embodiment, the compensation module 3 is not provided with the convex teeth 31, but the compensation module 3 in the present embodiment is provided with a plurality of convex teeth 31, and the number of the convex teeth 31 of the compensation module 3 is N _t The number of tooth grooves of the primary module 1 is N _s The material of the compensation module 3 is the same as that of the primary core 11. When compensating for the length W of the module 3 ₂ A pole pitch tau from the linear motor 100

And the number of convex teeth 31 of the compensation module 3 is N _t The number of tooth grooves with the primary module 1 is N _s Satisfies the following conditions:

when λ is a positive integer, within one pole pitch τ, the 111 force cycles of the tooth slots of the compensation module 3 are equal to the 111 force cycles of the tooth slots of the linear motor 100, which are all nN _s In which n is such that nN _s the/2P is an integer of integers, preferably λ =1.

Referring to fig. 7 and 8, which are waveform diagrams of positioning forces of the linear motor 100 and the compensation module 3 in the present embodiment, similarly, the compensation module 3 generates a force having the same frequency as the side end force of the linear motor 100 and having a phase difference of 180 ° in electrical angle, so as to counteract the side end force generated by the linear motor 100, and because the compensation module 3 has a cogging effect, the compensation module can generate a cogging force having the same frequency as the cogging force of the linear motor 100, so as to counteract the cogging force 111 caused by the cogging effect of the linear motor 100. Therefore, the positioning force of the linear motor 100 of the present embodiment can be further reduced compared to the first embodiment, thereby effectively suppressing the thrust force fluctuation.

A processing apparatus according to an embodiment of the second aspect of the present invention is described below.

According to the utility model discloses processing equipment can be high-speed, the numerical control processing equipment of high accuracy such as PCB drilling machine, gong machine, board separator, drilling detection, of course, the utility model discloses be not limited to this, processing equipment also can be other equipment, no longer exhaustively here. The processing apparatus may include: a machine table, a moving mechanism, a spindle module and the linear motor 100 in the above embodiments.

The moving mechanism is movably arranged on the machine table, the spindle module is movably arranged on the moving mechanism, the spindle module is used for processing a workpiece, for example, the moving mechanism can be a beam, the moving mechanism can move on the machine table along the horizontal direction, the spindle module can move on the moving mechanism along the vertical direction and rotate around the axis of the spindle module, the primary module 1 of the linear motor 100 is arranged on the moving mechanism, and the secondary module 2 is arranged on the machine table, so that the secondary module 2 can drive the primary module 1 to move to drive the moving mechanism to move relative to the machine table.

According to the utility model discloses processing equipment, because linear electric motor 100 can reduce or eliminate thrust undulant, consequently can promote processing equipment's machining precision and processingquality.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrated; the connection can be mechanical connection, electrical connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Moreover, various embodiments or examples and features of various embodiments or examples described in this specification can be combined and combined by one skilled in the art without being mutually inconsistent.

While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (12)

1. A linear motor, comprising: a primary module, a secondary module and a compensation module, wherein the compensation module is positioned at one side of the primary module along the movement direction and is arranged at a distance from the primary module,

the length C of the primary module is in a first direct proportional relation with the polar distance tau of the secondary module;

length W of the compensation module ₂ And the polar distance tau of the secondary module is in a second direct proportional relation.

2. Linear motor according to claim 1, characterised in that the spacing W between the primary module and the compensation module ₁ And the polar distance tau of the secondary module has a third proportional relation.

3. The linear motor of claim 1, wherein the air gap length between the compensation module and the secondary module is H, the air gap length between the primary module and the secondary module is δ, and H is not less than δ.

4. A linear motor according to claim 1, wherein the compensation module is formed with a plurality of teeth on a side thereof facing the secondary module, the plurality of teeth being evenly spaced along the direction of movement of the primary module.

5. The linear motor of claim 4, wherein the teeth of any two of the plurality of teeth have the same width and the teeth of any two of the plurality of teeth have the same height.

6. A linear motor according to claim 4, characterised in that the number N of teeth of the compensation module _t And the number of tooth grooves N of the primary module _S Is shown asAnd fourthly, direct proportional relation.

7. A linear motor according to claim 1, the compensation module being a high magnetic permeability member.

8. The linear motor of claim 1, wherein the primary module includes a primary core, and the compensation module is made of the same material as the primary core.

9. The linear electric machine of claim 1, wherein a non-magnetic conductor is filled between the compensation module and the primary module.

10. A linear motor according to claim 1, the compensation module and the primary module being secured by a connector, the connector being a non-magnetically permeable piece of material; or the compensation module and the primary module are fixed through potting, and the potting material is a non-magnetic material; or, the linear motor further comprises a motor shell, the primary module and the secondary module are arranged on the inner side of the motor shell, and the compensation module is arranged on the motor shell and located on the outer side of the motor shell.

11. The linear motor of claim 1, wherein the primary module includes a primary core having a plurality of slots opened toward the secondary module, and a coil wound in each slot;

the secondary module comprises a permanent magnet and a secondary yoke plate, and the permanent magnet is arranged on one side, facing to the primary module, of the secondary yoke plate.

12. A processing apparatus, comprising:

a machine platform;

the moving mechanism is movably arranged on the machine table;

the main shaft module is movably arranged on the moving mechanism and is used for processing a workpiece;

the linear motor according to any one of claims 1 to 11, wherein the primary module is disposed on the moving mechanism, the secondary module is disposed on the machine table, and the secondary module is adapted to drive the primary module to move so as to drive the moving mechanism to move relative to the machine table.

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