CN217845910U

CN217845910U - Vacuum structure

Info

Publication number: CN217845910U
Application number: CN202222108071.6U
Authority: CN
Inventors: 贾建平; 周晖雨; 贾建顺
Original assignee: Suzhou Shanren Nano Technology Co ltd
Current assignee: Suzhou Shanren Nano Technology Co ltd
Priority date: 2022-08-11
Filing date: 2022-08-11
Publication date: 2022-11-18
Anticipated expiration: 2032-08-11

Abstract

The utility model discloses a vacuum structure, including vacuum assembly, vacuum assembly includes the vacuum pump, the top fixed mounting of vacuum pump has the differential inflation valve of electromagnetism pressure. The utility model discloses a top fixed mounting at the vacuum pump has the differential inflation valve of electromagnetism, can adopt the configuration of second grade pump through vacuum system, by the molecular pump, the vacuum flapper valve, first vacuum butterfly valve, second vacuum butterfly valve, compound vacuometer, differential inflation valve, constitute such as tee bend, the vacuum pipe adopts corrugated metal pipe to slow down vibrations with the hookup of pump, carry out the evacuation through vacuum system to the inside of furnace body after that, then utilize high-speed rotatory rotor to give the gas molecule momentum transmission through the molecular pump, after that provide the required air supply of thermochemical vapor deposition for the furnace body with reaction gas, promote the growth of rectangular sheet metal sample material, process such as phase transition, the staff of being convenient for carries out the bubble test work to rectangular sheet metal sample material.

Description

Vacuum structure

Technical Field

The utility model relates to a foaming test technical field specifically is a vacuum structure.

Background

Foaming test system, the online size and the appearance monitoring high temperature foaming experiment of mainly used rectangular sheet sample, the continuous annealing of tubulose sample and foaming experiment, need certain pressure just can make gas break through the filter membrane that has been moist, the pressure value that this point was flowed out from the membrane hole in a large number to gas is the bubble point of this membrane, the method of determining this pressure value is the bubble point method, and need use the vacuum structure to the in-process of carrying out the foaming test to rectangular sheet sample, current vacuum structure has many problems or defects:

traditional vacuum structure is in the in-service use, and inconvenient reaction gas provides the required air supply of thermochemistry vapor deposition for the furnace body in, influences the growth of rectangular sheet metal sample material, the phase change, and inconvenient realization is all-round in the high temperature foaming experimentation for rectangular sheet metal sample moreover, full period's observation and measurement function, influences the precision of rectangular sheet metal sample at the high temperature foaming experiment.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vacuum structure to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a vacuum structure, includes the vacuum subassembly, the vacuum subassembly includes the vacuum pump, the top fixed mounting of vacuum pump has the differential inflation valve of electromagnetism, the fixed bellows that is provided with in one side of the differential inflation valve of electromagnetism, the fixed tee bend vacuum connection that is provided with in one side of bellows, the equal fixed mounting in both ends of tee bend vacuum connection has first vacuum butterfly valve, the fixed furnace body that is provided with in one side of vacuum subassembly, the top of furnace body is run through and is installed vacuum water cooling assembly, vacuum water cooling assembly includes the electrode pole, the inside of electrode pole is run through and is provided with the water-cooled tube, gland nut has been cup jointed on the surface of electrode pole, gland nut's bottom is cup jointed and is installed the insulation board, one side fixed mounting of furnace body has the electric cabinet, the bottom fixed mounting of electric cabinet has the support frame.

Preferably, the bottom of the three-way vacuum joint is fixedly provided with a vacuum baffle valve, and one side of the vacuum baffle valve is fixedly provided with a molecular pump.

Preferably, the top of the molecular pump is fixedly provided with a vacuum connecting pipe, the top of the vacuum connecting pipe is fixedly provided with a second vacuum butterfly valve, the top of the second vacuum butterfly valve is fixedly provided with a transition cavity, and one end of the transition cavity is fixedly provided with a loop flange.

Preferably, a first insulating sleeve is fixedly arranged inside the insulating plate, a vacuum connecting cavity is fixedly arranged at the bottom of the insulating plate, and a second insulating sleeve is sleeved inside the vacuum connecting cavity.

Preferably, the inner container is fixedly arranged inside the furnace body, the furnace cover is movably arranged at the top of the inner container, the laser profile measuring instrument is fixedly arranged at the top of the furnace cover, the pressure sensor is fixedly arranged on one side of the laser profile measuring instrument, the automatic pressure release valve is fixedly arranged on one side of the pressure sensor, the gaskets are arranged on two sides of the inner container at equal intervals, and the water outlet valve is fixedly arranged on one side of the furnace body.

Preferably, a liquid crystal touch screen is fixedly mounted on the surface of the electric cabinet, and a cabinet air conditioner is fixedly mounted at the bottom of the liquid crystal touch screen.

Compared with the prior art, the beneficial effects of the utility model are that:

this vacuum structure, there is the differential inflation valve of electromagnetism through the top fixed mounting at the vacuum pump, can adopt the configuration of second grade pump through vacuum system, by the molecular pump, the vacuum flapper valve, first vacuum butterfly valve, the second vacuum butterfly valve, compound vacuometer, differential inflation valve, tee bend etc. are constituteed, the hookup of vacuum pipeline and pump adopts corrugated metal pipe to slow down vibrations, carry out the evacuation through vacuum system to the inside of furnace body after that, then utilize high-speed rotatory rotor to give the gas molecule momentum transmission through the molecular pump, make it obtain directional speed, thereby be compressed, driven to the gas vent, then provide the required air supply of thermal chemical vapor deposition for the furnace body with reaction gas, promote the growth of rectangular sheet metal sample material, process such as phase change, the staff of being convenient for carries out bubble test work to rectangular sheet metal sample material.

The vacuum structure comprises a laser profile measuring instrument fixedly arranged at the top of a furnace cover, and can utilize the laser profile measuring instrument to reflect laser to obtain the profile structure of a sample piece, thereby being capable of observing the deformation of the sample piece on line in real time and realizing remote control, image acquisition, data processing and other functions, then a water cooling system consists of a water inlet main pipeline, a water outlet main pipeline, a valve and each branch, cooling water enters from a water inlet main pipe and is sent to the furnace cover through each branch pipe, a furnace body, a furnace bottom and a water cooling electrode which need cooling water, then the cooling water is gathered to a water outlet main pipe and is discharged by opening a water outlet valve, then an automatic pressure relief valve is utilized to automatically charge and discharge gas, a closed-loop control system is formed by a pressure sensor, the atmosphere pressure in the furnace can be controlled, when the furnace pressure exceeds a set value, the automatic pressure relief valve is automatically opened to relieve pressure, and a set of all-dimensional and full-period observation and measurement functions of a strip sheet sample in a high-temperature foaming experiment process are realized.

The vacuum structure is characterized in that an electric cabinet is fixedly arranged on one side of a furnace body, when the device works, a cabinet air conditioner can be utilized to ensure that normal use of elements and instruments in the cabinet is not influenced due to overhigh ambient temperature, a control system takes a Kunlun state 10-inch touch screen and a Mitsubishi programmable controller as cores and is matched with an air switch, a contactor, a relay, an indicator light and other components, logical control of a mechanical mechanism of the furnace body is realized through signals of various sensors, real-time display and storage of temperature, vacuum degree and the like are realized, a temperature control system adopts a Chinese Taiwan silicon controlled rectifier SCR, a temperature control instrument adopts Xiamen space electricity, a multi-section temperature control program is provided, temperature rise, heat preservation and temperature reduction programs can be set, a PID control function is provided, automatic control of the temperature in the furnace is realized through matching with the silicon controlled rectifier and a thermocouple, the control precision is high, the fluctuation rate is low, and the accurate control of the temperature can be realized.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of a partial structure of the vacuum module of the present invention;

FIG. 3 is a schematic view of a partial structure of the vacuum water-cooling module of the present invention;

fig. 4 is the schematic view of the local structure of the electric cabinet of the present invention.

In the figure: 1. an electric cabinet; 101. a liquid crystal touch screen; 102. a cabinet air conditioner; 2. a furnace body; 201. a pressure sensor; 202. a laser profile measuring instrument; 203. a gasket; 204. an automatic pressure relief valve; 205. a furnace cover; 206. an inner container; 207. a water outlet valve; 3. a vacuum assembly; 301. a three-way vacuum connection; 302. a vacuum pump; 303. a first vacuum butterfly valve; 304. a bellows; 305. an electromagnetic differential pressure type inflation valve; 306. a loose flange; 307. a transition chamber; 308. a second vacuum butterfly valve; 309. vacuum pipe connection; 3010. a vacuum flapper valve; 3011. a molecular pump; 4. a support frame; 5. a vacuum water-cooling assembly; 501. a water-cooled tube; 502. an electrode rod; 503. an insulating plate; 504. a compression nut; 505. a first insulating sleeve; 506. connecting the vacuum cavity; 507. and a second insulating sleeve.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides an embodiment: a vacuum structure comprises a vacuum component 3, the vacuum component 3 comprises a vacuum pump 302, an electromagnetic pressure differential type inflation valve 305 is fixedly installed at the top of the vacuum pump 302, a corrugated pipe 304 is fixedly arranged on one side of the electromagnetic pressure differential type inflation valve 305, a three-way vacuum connector 301 is fixedly arranged on one side of the corrugated pipe 304, first vacuum butterfly valves 303 are fixedly installed at two ends of the three-way vacuum connector 301, a vacuum flapper valve 3010 is fixedly installed at the bottom of the three-way vacuum connector 301, a molecular pump 3011 is fixedly installed at one side of the vacuum flapper valve 3010, a vacuum connecting pipe 309 is fixedly arranged at the top of the molecular pump 3011, a second vacuum butterfly valve 308 is fixedly installed at the top of the vacuum connecting pipe 309, a transition cavity 307 is fixedly arranged at the top of the second vacuum butterfly valve 308, and a lap flange 306 is fixedly arranged at one end of the transition cavity 307, the electromagnetic differential pressure type inflation valve 305 is fixedly arranged at the top of the vacuum pump 302, the vacuum system can adopt a two-stage pump configuration, the vacuum system comprises a molecular pump 3011, a vacuum baffle valve 3010, a first vacuum butterfly valve 303, a second vacuum butterfly valve 308, a composite vacuum gauge, a differential pressure type inflation valve, a tee joint and the like, a vacuum pipeline is connected with the pump by adopting a metal corrugated pipe 304 to slow down vibration, then the vacuum system is used for vacuumizing the inside of the furnace body 2, then, the gas molecules are compressed and driven to the exhaust port by the molecular pump 3011 by transferring momentum to the gas molecules using the rotor rotating at high speed to obtain a directional speed, and then, providing a gas source required by thermal chemical vapor deposition for the furnace body 2 by using the reaction gas, promoting the processes of growth, phase change and the like of the strip thin plate sample material, and facilitating the bubble test work of a worker on the strip thin plate sample material, wherein the molecular pump 3011 is electrically connected with the electric cabinet 1 through a lead, and the model of the molecular pump 3011 can be FF160/620.

A furnace body 2 is fixedly arranged on one side of a vacuum component 3, an inner container 206 is fixedly arranged inside the furnace body 2, a furnace cover 205 is movably arranged on the top of the inner container 206, a laser contour measuring instrument 202 is fixedly arranged on the top of the furnace cover 205, a pressure sensor 201 is fixedly arranged on one side of the laser contour measuring instrument 202, an automatic pressure release valve 204 is fixedly arranged on one side of the pressure sensor 201, gaskets 203 are equidistantly arranged on two sides of the inner container 206, a water outlet valve 207 is fixedly arranged on one side of the furnace body 2, a vacuum water-cooling component 5 is penetratingly arranged on the top of the furnace body 2, the vacuum water-cooling component 5 comprises an electrode rod 502, a water-cooling pipe 501 is penetratingly arranged inside the electrode rod 502, a gland nut 504 is sleeved on the surface of the electrode rod 502, an insulating plate 503 is sleeved on the bottom of the gland nut 504, a first insulating sleeve 505 is fixedly arranged inside the insulating plate 503, and a vacuum cavity 506 is fixedly arranged on the bottom of the insulating plate 503, a second insulating sleeve 507 is sleeved inside the vacuum receiving cavity 506, a laser profile measuring instrument 202 is fixedly installed on the top of the furnace cover 205, laser can be reflected by the laser profile measuring instrument 202 to obtain the profile structure of a sample, so that the deformation of the sample can be observed on line in real time, and functions of remote control, image acquisition, data processing and the like can be realized, then, a water cooling system consists of a water inlet main pipe, a water outlet main pipe, valves and all branches, cooling water enters from a water inlet main pipe and then is sent to the places needing cooling water, such as the furnace cover 205, the furnace body 2, the furnace bottom and the water cooling electrode, through all branch pipes, then, the cooling water is collected to a water outlet main pipe and is discharged by opening a water outlet valve 207, then, automatic air charging and discharging are realized by utilizing an automatic pressure relief valve 204, a closed-loop control system is formed by a pressure sensor 201, the pressure of the atmosphere in the furnace can be controlled, when the furnace pressure exceeds a set value, the automatic pressure release valve 204 is automatically opened to release pressure, so that the observation and measurement functions of the strip sheet sample in all directions (covering the whole outer surface except the clamping part of the sample) and in all periods (temperature rise, heat preservation and temperature reduction) in the high-temperature foaming experiment process are realized;

the electric cabinet type furnace body temperature control device is characterized in that an electric cabinet 1 is fixedly mounted on one side of a furnace body 2, a liquid crystal touch screen 101 is fixedly mounted on the surface of the electric cabinet 1, a cabinet air conditioner 102 is fixedly mounted at the bottom of the liquid crystal touch screen 101, a support frame 4 is fixedly mounted at the bottom of the electric cabinet 1, and the electric cabinet 1 is fixedly mounted on one side of the furnace body 2.

The working principle is as follows: when in use, firstly, a vacuum system adopts a two-stage pump configuration and comprises a molecular pump 3011, a vacuum baffle valve 3010, a first vacuum butterfly valve 303, a second vacuum butterfly valve 308, a composite vacuum gauge, a pressure difference type inflation valve, a tee joint and the like, a vacuum pipeline is connected with the pump by adopting a metal corrugated pipe 304 to slow down vibration, then the vacuum system is used for vacuumizing the inside of a furnace body 2, then the molecular pump 3011 transmits momentum to gas molecules by utilizing a rotor rotating at high speed to ensure that the gas molecules obtain directional speed, so that the gas molecules are compressed and driven to an exhaust port, then reaction gas is used for providing a gas source required by thermal chemical vapor deposition in the furnace body 2 to promote the processes of growth, phase change and the like of strip sheet sample materials, so that workers can conveniently carry out bubble test work on the strip sheet sample materials, and secondly, laser is reflected by a laser profile measuring instrument 202 to obtain the profile structure of the sample pieces, so that the deformation of a sample piece can be observed on line in real time, and the functions of remote control, image acquisition, data processing and the like can be realized, then a water cooling system consists of a water inlet and outlet main pipeline, valves and branches, cooling water enters from a water inlet main pipe and is sent to the places needing cooling water, such as a furnace cover 205, a furnace body 2, a furnace bottom and a water cooling electrode through the branches, then the cooling water is collected to a water outlet main pipe and is discharged through opening a water outlet valve 207, then the automatic relief valve 204 is used for automatically inflating and deflating, a closed-loop control system is formed by the pressure sensor 201, the atmosphere pressure in the furnace can be controlled, when the furnace pressure exceeds a set value, the automatic relief valve 204 is automatically opened for pressure relief, and the observation and measurement functions of omnibearing (covering the whole outer surface except a sample clamping part) and whole period (temperature rise, heat preservation and temperature reduction) of a strip sheet sample in the high-temperature foaming experiment process are realized, finally, the cabinet air conditioner 102 ensures that normal use of elements and instruments in the cabinet is not influenced due to overhigh ambient temperature, the control system takes a Kunlun normal 10-inch touch screen and a Mitsubishi programmable controller as cores and is matched with components such as an air switch, a contactor, a relay, an indicator light and the like, logic control of a mechanical mechanism of the furnace body 2 is realized through signals of various sensors, real-time display and storage of temperature, vacuum degree and the like are realized, the temperature control system adopts Taiwan tai silicon controlled silicon SCR, the temperature control instrument adopts mansion gate space electricity, a multi-stage temperature control program is provided, temperature rise, heat preservation and temperature reduction programs can be set, a PID control function is provided, automatic control of the temperature in the furnace is realized through matching with the controlled silicon and a thermocouple, the control precision is high, the fluctuation rate is small, and accurate control of the temperature can be realized.

It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not intended to be construed as limiting the claim concerned.

Claims

1. A vacuum structure comprising a vacuum assembly (3), characterized in that: vacuum subassembly (3) are including vacuum pump (302), the top fixed mounting of vacuum pump (302) has the differential inflation valve of electromagnetism (305), one side of the differential inflation valve of electromagnetism (305) is fixed and is provided with bellows (304), one side of bellows (304) is fixed and is provided with tee bend vacuum connector (301), the both ends of tee bend vacuum connector (301) are fixed all to be installed and are had first vacuum butterfly valve (303), one side of vacuum subassembly (3) is fixed and is provided with furnace body (2), the top of furnace body (2) is run through and is installed vacuum water-cooling subassembly (5), vacuum water-cooling subassembly (5) are including electrode pole (502), the inside of electrode pole (502) is run through and is provided with water-cooled tube (501), gland nut (504) has been cup jointed on the surface of electrode pole (502), gland nut (504)'s bottom is cup jointed and is installed insulation board (503), one side fixed mounting of furnace body (2) has electric cabinet (1), the bottom fixed mounting of electric cabinet (1) has support frame (4).

2. A vacuum structure as claimed in claim 1, characterized in that: the bottom of the three-way vacuum joint (301) is fixedly provided with a vacuum baffle valve (3010), and one side of the vacuum baffle valve (3010) is fixedly provided with a molecular pump (3011).

3. A vacuum structure according to claim 2, characterized in that: the top of the molecular pump (3011) is fixedly provided with a vacuum connecting pipe (309), the top of the vacuum connecting pipe (309) is fixedly provided with a second vacuum butterfly valve (308), the top of the second vacuum butterfly valve (308) is fixedly provided with a transition cavity (307), and one end of the transition cavity (307) is fixedly provided with a loose flange (306).

4. A vacuum structure as claimed in claim 1, characterized in that: a first insulating sleeve (505) is fixedly arranged inside the insulating plate (503), a vacuum connecting cavity (506) is fixedly arranged at the bottom of the insulating plate (503), and a second insulating sleeve (507) is sleeved inside the vacuum connecting cavity (506).

5. A vacuum structure according to claim 1, characterized in that: the inside of furnace body (2) is fixed and is provided with inner bag (206), and the top movable mounting of inner bag (206) has bell (205), and the top fixed mounting of bell (205) has laser profile survey appearance (202), and one side fixed mounting of laser profile survey appearance (202) has pressure sensor (201), and one side fixed mounting of pressure sensor (201) has automatic relief valve (204), and the both sides equidistance of inner bag (206) is provided with gasket (203), one side fixed mounting of furnace body (2) has outlet valve (207).

6. A vacuum structure as claimed in claim 1, characterized in that: the surface of the electric cabinet (1) is fixedly provided with a liquid crystal touch screen (101), and the bottom of the liquid crystal touch screen (101) is fixedly provided with a cabinet air conditioner (102).