CN111365219B - Multifunctional vacuum pump test cover - Google Patents
Multifunctional vacuum pump test cover Download PDFInfo
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- CN111365219B CN111365219B CN201811600694.7A CN201811600694A CN111365219B CN 111365219 B CN111365219 B CN 111365219B CN 201811600694 A CN201811600694 A CN 201811600694A CN 111365219 B CN111365219 B CN 111365219B
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B51/00—Testing machines, pumps, or pumping installations
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- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
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Abstract
The invention relates to the field of vacuum pump testing, in particular to a multifunctional vacuum pump testing cover which comprises a shell, a water cooling pipe, a heating wire and a reflecting cover, wherein the water cooling pipe is arranged outside the shell, the reflecting cover and the heating wire are arranged inside the shell, one end of the shell is provided with an openable first sealing cover, and the other end of the shell is closed and is provided with a pump port to be tested; the shell is provided with an air inlet, a temperature measuring port, a pressure measuring port, a PIV observation port and a plurality of air pumping ports, wherein the air pumping ports comprise a main air pumping port connected with the main pump and a rough pumping port connected with the rough pumping pump. The invention integrates a series of functions of heating, cooling, air exhaust, air intake, pressure measurement, temperature measurement, PIV observation and the like, can enable the gas environment in the vacuum pump test cover to meet the requirement of the performance test of the vacuum pump, and simultaneously improves the stability and the accuracy of the test result.
Description
Technical Field
The invention relates to the field of vacuum pump testing, in particular to a multifunctional vacuum pump testing cover.
Background
In recent years, with the large-scale rise of emerging strategic industries such as semiconductor electronics, photovoltaics, flat panel display, semiconductor illumination, solar photovoltaics and the like and the industrial upgrade of traditional industries such as chemical industry, pharmacy, food packaging and the like, the vacuum pump is more and more required in various industries and the requirement on the vacuum pump is more and more strict, so that the performance test of the vacuum pump before leaving a factory is more and more important in order to ensure the product quality.
At present, most vacuum pump manufacturers need to carry out air exhaust performance indexes on vacuum pump products according to related technical standards, the air exhaust performance indexes comprise a plurality of indexes such as pumping speed, ultimate vacuum degree, motor power and noise, and a vacuum pump test cover used in the air exhaust performance test at present is simple in structure, difficult to guarantee in the aspects of accuracy and reliability of test results, relatively single in function and mostly only capable of testing gas at normal temperature.
Disclosure of Invention
The invention aims to provide a multifunctional vacuum pump test cover, which integrates a series of functions of heating, cooling, air exhaust, air inlet, pressure measurement, temperature measurement, particle image speed measurement observation and the like, can enable the gas environment in the vacuum pump test cover to meet the requirement of performance test of a vacuum pump to be carried out, and simultaneously ensures the stability and accuracy of test results.
The purpose of the invention is realized by the following technical scheme:
a multifunctional vacuum pump test cover comprises a shell, a water-cooling pipe, a heating wire and a reflecting cover, wherein the water-cooling pipe is arranged on the outer side of the shell, the reflecting cover and the heating wire are arranged inside the shell, one end of the shell is provided with an openable first sealing cover, and the other end of the shell is closed and is provided with a pump port to be tested; the shell is provided with an air inlet, a temperature measuring port, a pressure measuring port, a particle image speed measuring observation port and a plurality of air pumping ports, wherein the air pumping ports comprise a main air pumping port connected with the main pump and a rough air pumping port connected with the rough air pumping pump.
The air inlet is connected with an air inlet pipeline, the air inlet pipeline is arranged in the shell, the air outlet end of the air inlet pipeline is bent to enable the air outlet of the pipeline to be located on the central axis of the shell, and the air outlet of the pipeline faces the side opposite to the pump port to be tested.
The inner diameter of the shell is D, and the caliber of the air inlet pipeline is 0.1D.
A temperature thermocouple is arranged in the temperature measuring port, and a vacuum gauge is arranged in the pressure measuring port.
The pressure measuring port is arranged at a position which is 0.5D away from the closed end in the axial direction of the shell.
The particle image speed measurement observation port is arranged on the shell, the axial direction of the shell is viewed, the axial lines of the first particle image speed measurement observation port and the second particle image speed measurement observation port are 90 degrees, the first particle image speed measurement observation port is arranged on the upper side of the shell, and the second particle image speed measurement observation port and the air inlet are arranged on two sides of the shell relatively.
The heater strip includes central heater strip and outer heater strip, central heater strip sets up and is the heliciform along the shell axis, and outer heater strip is located on the shell inner wall and is located the bowl inboardly, outer heater strip is the squirrel cage form.
Ceramic rods with different lengths are arranged in the shell, wherein the central heating wire is fixed through a first ceramic rod arranged along the radial direction of the shell, and the outer heating wire and the reflecting cover are fixed on the inner wall of the shell through a second ceramic rod.
The utility model discloses a water pump, including shell, first sealed lid, the second sealed lid of shell, main extraction opening and thick extraction opening, the first sealed lid that can open is equipped with on shell one side, and the opposite side has set firmly the second sealed lid, all be equipped with the water-cooling pipe on shell and the first sealed lid and the sealed lid of second, main extraction opening and thick extraction opening all locate on the shell and the axis is located the coplanar, and along shell axial is seen, main extraction opening and thick extraction opening axis are 90 degrees.
The utility model discloses a pump, including shell, first sealed lid, the shell, the first sealed lid that can open is equipped with on one side of the shell, and the opposite side is equipped with the ring flange of taking main extraction opening, be equipped with on the shell with the different rough pumps the rough mouth that links to each other and side extraction opening, rough mouth and side extraction opening axis are in the coplanar, and along shell axial looks, rough mouth axis and side extraction opening axis are 90 degrees.
The invention has the advantages and positive effects that:
1. the invention integrates a series of functions of heating, cooling, air exhaust, air intake, pressure measurement, temperature measurement, particle image speed measurement observation and the like, can enable the gas environment in the vacuum pump test cover to meet the requirement of the performance test of the vacuum pump, and simultaneously ensures the stability and the accuracy of the test result.
2. The air pumping port on the test cover is divided into a rough pumping port and a main pumping port which are respectively connected with the rough pumping pump and the main pump, so that the gas parameter test under different pressure environments in the test cover can be realized. The pressure measuring port on the shell is arranged at a position which is 0.5D away from the closed end in the axial direction of the shell, and no air inlet or outlet source exists in the positive and negative 90-degree directions of the pressure measuring port, so that the accuracy of the measuring result of the vacuum meter is improved, and the actual gas pressure condition in the vacuum pump testing cover can be reflected more truly. The particle image velocimetry observation port is arranged on the shell, so that the visualization of the flow field in the vacuum pump test cover is realized, and the specific motion rule of the gas can be analyzed according to the displacement vector of the tracer particles.
3. The air inlet of the vacuum pump is connected with an air inlet pipeline, the air outlet end of the air inlet pipeline is bent to enable the air outlet of the pipeline to be positioned on the central axis of the shell, and the air outlet of the pipeline faces to the side opposite to the pump port to be tested, so that the condition of uneven pressure in the shell is avoided, a stable air inlet environment is provided for the inside of the test cover, and the influence of continuous air inlet on the test stability of the vacuum pump is reduced.
4. The heating wire is divided into the central heating wire and the outer heating wire, the gas in the vacuum cover is uniformly heated by heating in different areas, the outer heating wire is arranged in a squirrel cage shape, the central heating wire is arranged in a spiral shape, the heating area is increased, and the heating efficiency is improved.
Drawings
FIG. 1 is a schematic structural diagram according to a first embodiment of the present invention;
FIG. 2 is a cross-sectional view A-A of FIG. 1;
fig. 3 is a schematic structural diagram of a second embodiment of the present invention.
Wherein, 1 is a first sealing cover; 2 is an electrode port; 3 is a handle; 4 is a locking device; 5 is a hanging ring; 6 is a first particle image velocimetry observation port; 7 is a temperature measuring port; 8 is a safety valve port; 9 is an air inlet; 10 is a rough drawing port; 11 is a second sealing cover; 12 is a first pump port to be tested; 13 is a second pump port to be measured; 14 is a shell; 15 is a main drawing port; 16 is a reserved port; 17 is a relief port; 18 is a water-cooling pipe; 19 is a hinge; 20 is a sealing groove; 21 is a first ceramic rod; 22 is a second particle image velocimetry observation port; 23 is a reflector; 24 is an air inlet pipeline; 241 is a pipeline air outlet; 25 is an external heating wire; 26 is a pressure measuring port; 27 is a second ceramic rod; 28 is a central heating wire; 29 is a flange plate; and 30 is a side suction port.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1 to 3, the present invention includes a housing 14, a water-cooled tube 18, a heating wire and a reflection cover 23, the water-cooled tube 18 is disposed on the outer side of the housing 14, the water-cooled tube 18 is bent back and forth, and the water inlet end and the water outlet end of the water-cooled tube 18 are connected to a cooling mechanism for providing circulating cooling water, the cooling mechanism is a known technology in the art, a plurality of flange ports are disposed on the housing 14 for implementing various functions, the reflection cover 23 and the heating wire are disposed inside the housing 14, the reflection cover 23 is disposed on the inner wall of the housing 14, one end of the housing 14 is provided with an openable first sealing cover 1, and the other end is closed and.
As shown in fig. 1 to 3, the plurality of flange ports provided on the housing 14 include an air inlet 9, a temperature measuring port 7, a pressure measuring port 26, a particle image speed measurement observation port, an air release port 17, a safety valve port 8, a reserved port 16, and a plurality of air extraction ports, wherein different air extraction ports are respectively connected to different air extraction pumps.
As shown in fig. 2, the air inlet 9 is connected to an air inlet duct 24, the air inlet duct 24 is disposed in the housing 14, the air inlet duct 24 is L-shaped, and the air outlet end is bent to make the duct air outlet 241 located on the central axis of the housing 14, and the duct air outlet 241 faces the side opposite to the pump port to be measured, so as to avoid the situation of uneven pressure in the housing 14. The inner diameter D of the shell 14 is selected according to the national standard of the vacuum cover and the volume of the shell, and the caliber of the air inlet pipeline 24 is 0.1D.
As shown in fig. 1, a plurality of temperature measuring ports 7 are arranged on the housing 14, a temperature measuring thermocouple is installed in each temperature measuring port 7, and the temperature measuring ports 7 are arranged at equal intervals along the axial direction of the housing 14 and are uniformly distributed around the circumferential direction of the housing 14, so as to ensure the accuracy of temperature measurement of each part. The temperature thermocouples are well known in the art.
As shown in fig. 2 to 3, the pressure measuring port 26 is provided at a position 0.5D from the closed end in the axial direction of the housing 14, and there is no inlet or outlet gas source port around the pressure measuring port 26, and a vacuum gauge for measuring the pressure in the housing 14 is provided in the pressure measuring port 26, which is well known in the art.
The invention controls the temperature and regulates the pressure of the gas in the vacuum test cover according to the measured temperature and pressure, thereby measuring the performance parameters of the vacuum pump in the corresponding gas state.
As shown in fig. 1-2, two particle image velocimetry observing ports are arranged on the housing 14, and when viewed along the axial direction of the housing 14, the axes of the first particle image velocimetry observing port 6 and the second particle image velocimetry observing port 22 are 90 degrees, wherein as shown in fig. 1, the first particle image velocimetry observing port 6 is arranged on the upper side of the housing 14, and as shown in fig. 2, the second particle image velocimetry observing port 22 and the air inlet 9 are arranged on two sides of the housing 14 in a relatively separated manner. When a Particle Image Velocimetry (PIV) technology is used for researching the flow field in the shell 14, the two Particle Image Velocimetry observation ports are convenient for observing the movement rule of the gas flow field. The particle image speed measurement observation port is provided with high-temperature-resistant transparent glass, so that observation is facilitated, and a protection effect is also achieved.
The air release port 17 is provided with an air release valve, and the air release port 17 is arranged on one side facing the person, so that the operation of the operating personnel is facilitated. The safety valve is arranged on the safety valve port 8, so that the safety problem caused by overhigh gas pressure in the shell 14 is prevented. Both the purge valve and the relief valve are known in the art.
As shown in fig. 1 and 3, a reserve 16 is provided in the housing 14 to make it possible to supplement the subsequent functions.
As shown in fig. 2, in order to heat the gas in the outer shell 14 uniformly, the present invention adopts a heating manner by regions, wherein the heating wires are divided into a central heating wire 28 and an outer heating wire 25, the central heating wire 28 is arranged along the central axis of the outer shell 14 and is spiral, the outer heating wire 25 is arranged on the inner wall of the outer shell 14 and is arranged inside the reflection cover 23, and the outer heating wire 25 is in a shape of a mouse cage.
As shown in fig. 1, the electrode port 2 is arranged on the housing 14, a wire for supplying power to the heater strip enters and exits the housing 14 through the corresponding electrode port 2, so that the heater strip is heated by electricity, ceramic rods with different lengths are arranged in the housing 14 and used for fixing the heater strip, wherein the central heater strip 28 is fixed through a first ceramic rod 21 which is arranged along the radial direction of the housing 14, the outer heater strip 25 is fixed on the inner wall of the housing 14 through a second ceramic rod 27, meanwhile, the outer end of the second ceramic rod 27 passes through the reflector 23 and then is in threaded connection with the inner wall of the housing 14, and a nut is arranged on the second ceramic rod 27 on the inner side of the reflector 23 and used for fixing the reflector. The heating wires and the reflecting cover 23 can be designed into a split multi-section structure, so that the heating wires and the reflecting cover are convenient to disassemble and assemble during cleaning and maintenance.
As shown in fig. 1-2, an openable first sealing cover 1 is disposed at one end of the housing 14, the first sealing cover 1 is connected to the housing 14 through a hinge 19, a handle 3 is disposed on the first sealing cover 1 to facilitate opening of the first sealing cover 1, a lifting ring 5 is disposed on the first sealing cover 1 and the housing 14 to facilitate lifting of the device for convenience of installation, a sealing groove 20 with a sealing ring is disposed on the housing 14 to maintain good sealing performance and pressure maintaining performance, the sealing ring is pressed to achieve sealing when the first sealing cover 1 is closed, a locking device 4 is disposed on the housing 14 to lock and seal the first sealing cover 1 when the first sealing cover 1 is closed, the locking device 4 is a technique known in the art, in this embodiment, the locking device 4 includes two clamping blocks connected by bolts, after the first sealing cover 1 is closed, the edges of the first sealing cover 1 and the housing 14 are clamped by the two clamping blocks, and the bolt is screwed to realize clamping of the clamping block.
The shell 14 is provided with a plurality of air pumping ports, different air pumping ports are connected with different air pumps, the air pumping ports comprise a main air pumping port 15 and a rough air pumping port 10, and the position of the main air pumping port 15 is different according to different pump body structures.
The first embodiment is as follows:
as shown in FIGS. 1-2, the present embodiment provides an internal volume of 1m3A horizontal multifunctional vacuum pump test cover is provided, wherein one side of a shell 14 is provided with an openable first sealing cover 1, the other side is fixedly provided with a second sealing cover 11 with a first pump port 12 to be tested and a second pump port 13 to be tested, the first sealing cover 1 and the second sealing cover 11 are both spherical, and due to the vacuum special gas environment in the vacuum test cover, the welding mode of the second sealing cover 11 adopts an inner welding continuous welding mode, and outer welding intermittent welding is added at the position with high required strength to supplement the strength, in addition, in order to increase the water cooling area and improve the water cooling effect, the shell 14 and the first sealing cover 1 and the second sealing cover 11 are provided with water cooling pipes 18, the water cooling pipes 18 are required to avoid flange ports and are arranged to meet the cooling requirement, the second sealing cover 11 is provided with two flange ports of the first pump port 12 to be tested and the second pump port 13 to be tested, and a proper pump flange port to be tested is selected to be connected with a corresponding proper, the pipeline conductance is reasonably matched with the pumping speed of the pump to be tested, so that the influence of the measurement result of the pump to be tested caused by the existence of the pipeline conductance can be weakened, wherein the first pump port 12 to be tested is a flange port connected with the pump to be tested with a large pumping speed, and the second pump port 13 to be tested is a flange port connected with a medium-sized and small-sized pump to be tested.
In this embodiment, the internal diameter D of the housing 14 is chosen to be 1000mm according to the industry standard, and its height is chosen to meet an internal volume of 1m3And the inner diameter of an air inlet pipeline 24 connected with the air inlet 9 and arranged in the shell 14 is adjusted to be 100 mm.
In this embodiment, the plurality of pumping ports include a main pumping port 15 and a rough pumping port 10, wherein as shown in fig. 1, the main pumping port 15 is disposed at a lower side of the casing 14, the rough pumping port 10 is disposed at one side of the casing 14, axes of the main pumping port 15 and the rough pumping port 10 are located on the same plane, and an axis of the main pumping port 15 and an axis of the rough pumping port 10 are 90 degrees as viewed along an axial direction of the casing 14.
The main pumping hole 15 is connected with a main pump through a pipeline, the rough pumping hole 10 is connected with a rough pumping pump through a pipeline, and different pressure gas environments in the test cover can be realized. In this embodiment, when the required pressure is above 10pa, the roughing pump may be used to pump the interior of the casing 14, and when the required pressure is below 10pa, the main pump performs pumping operation, and at the same time, the roughing pump is used as a backing pump of the main pump to ensure that the backing pressure of the main pump is within an allowable range for normal start.
In this embodiment, the reflector 23 is made of 304 stainless steel.
Example two:
as shown in fig. 3, the present embodiment is different from the first embodiment in that: in the case of the vertical vacuum pump test chamber with an internal volume of 100L, the main pumping hole 15 must be formed at an end of the housing 14 away from the first sealing cover 1.
In this embodiment, the inner diameter D of the shell 14 is 400mm according to the industry standard, a flange 29 is welded to one end of the shell 14, which is far away from the first sealing cover 1, the main extraction opening 15 is formed in the middle of the flange 29, the water-cooling tube 18 is arranged on the shell 14 according to the requirement of water cooling capacity, and the water-cooling tube 18 is not required to be arranged on the first sealing cover 1.
In the present embodiment, the plurality of suction ports further includes a side suction port 30 in addition to the main suction port 15 and the rough suction port 10, as shown in fig. 3, axes of the rough suction port 10 and the side suction port 30 are in the same plane, and an axis of the rough suction port 10 and an axis of the side suction port 30 are at 90 degrees when viewed along an axial direction of the casing 14.
The main pumping port 15 is connected with a main pump, the rough pumping port 10 and the side pumping port 30 are respectively connected with rough pumping pumps with different pumping capacities, wherein the rough pumping port 10 is connected with a first rough pumping pump through a pipeline, and the side pumping port 30 is connected with a second rough pumping pump through a pipeline. When required pressure is more than 10pa, if there is the gas of great flow rate to get into in the test cover, can adopt the second rough pump to take out from side gas extraction opening 30 to the inside of shell 14, when required pressure is more than 10pa and get into the gas flow rate in the test cover not big, can adopt the first rough pump to take out from rough extraction opening 10 to the inside of shell 14, when required pressure is below 10pa, the main pump carries out the work of bleeding, select suitable rough pump as the backing pump of main pump according to the gas flow rate size simultaneously and guarantee that the backing pressure of main pump is in the allowed range of normal start-up.
The main extraction opening 15, the rough extraction opening 10 and the side extraction opening 30 ensure that the test cover has high extraction speed in each pressure range, so that the requirement of performing pump performance test on the vacuum pump test cover under the pressure for large flow of air inlet under various pressures is met.
In this embodiment, a temperature thermocouple with a sufficient length is connected to the temperature measuring port 7, so that temperature measurement at the center of the test hood can be realized.
Claims (10)
1. The utility model provides a multi-functional vacuum pump test cover which characterized in that: the device comprises a shell (14), a water-cooling pipe (18), a heating wire and a reflecting cover (23), wherein the water-cooling pipe (18) is arranged on the outer side of the shell (14), the reflecting cover (23) and the heating wire are arranged inside the shell (14), one end of the shell (14) is provided with a first sealing cover (1) which can be opened, and the other end of the shell (14) is closed and is provided with a pump port to be tested; the particle image speed measurement device is characterized in that the shell (14) is provided with an air inlet (9), a temperature measurement port (7), a pressure measurement port (26), a particle image speed measurement observation port and a plurality of air pumping ports, wherein the air pumping ports comprise a main air pumping port (15) connected with a main pump and a rough pumping port (10) connected with a rough pumping pump.
2. The multifunctional vacuum pump test hood of claim 1, wherein: the air inlet (9) is connected with an air inlet pipeline (24), the air inlet pipeline (24) is arranged in the shell (14), the air outlet end of the air inlet pipeline (24) is bent to enable the pipeline air outlet (241) to be located on the central axis of the shell (14), and the pipeline air outlet (241) faces the side opposite to the pump port to be measured.
3. The multifunctional vacuum pump test hood of claim 2, wherein: the inner diameter of the shell (14) is D, and the caliber of the air inlet pipeline (24) is 0.1D.
4. The multifunctional vacuum pump test hood of claim 1, wherein: a temperature thermocouple is arranged in the temperature measuring port (7), and a vacuum gauge is arranged in the pressure measuring port (26).
5. A multifunctional vacuum pump test casing according to claim 1 or 4, characterized in that: the pressure measuring port (26) is arranged at a position which is 0.5D away from the closed end in the axial direction of the shell (14).
6. The multifunctional vacuum pump test hood of claim 1, wherein: be equipped with two particle image on shell (14) and survey the mouth that tests the speed, and along shell (14) axial is seen, and first particle image is tested the speed and is surveyed mouth (6) and second particle image and is surveyed mouth (22) axis and be 90 degrees, and wherein first particle image is tested the speed and is surveyed mouth (6) and locate shell (14) upside, and second particle image is tested the speed and is surveyed mouth (22) and air inlet (9) and divide relatively and locate shell (14) both sides.
7. The multifunctional vacuum pump test hood of claim 1, wherein: the heater strip includes central heater strip (28) and outer heater strip (25), central heater strip (28) set up and are the heliciform along shell (14) axis, and outer heater strip (25) are located on shell (14) inner wall and are located bowl (23) inboardly, outer heater strip (25) are the squirrel cage form.
8. The multifunctional vacuum pump test hood of claim 7, wherein: ceramic rods with different lengths are arranged in the shell (14), wherein the central heating wire (28) is fixed through a first ceramic rod (21) arranged along the radial direction of the shell (14), and the outer heating wire (25) and the reflecting cover (23) are fixed on the inner wall of the shell (14) through a second ceramic rod (27).
9. The multifunctional vacuum pump test hood of claim 1, wherein: the air pump is characterized in that one side of the outer shell (14) is provided with a first sealing cover (1) which can be opened, the other side of the outer shell (14) is fixedly provided with a second sealing cover (11), the outer shell (14) and the first sealing cover (1) and the second sealing cover (11) are respectively provided with a water cooling pipe (18), the main air pumping hole (15) and the rough air pumping hole (10) are respectively arranged on the outer shell (14), the axes of the main air pumping hole and the rough air pumping hole (10) are located on the same plane, and the axes of the main air pumping hole (15) and the rough air pumping hole (10) are 90.
10. The multifunctional vacuum pump test hood of claim 1, wherein: the novel pump is characterized in that one side of the shell (14) is provided with a first sealing cover (1) which can be opened, the other side of the shell is provided with a flange plate (29) with a main pumping hole (15), the shell (14) is provided with a rough pumping hole (10) and a side pumping hole (30) which are connected with different rough pumping pumps, the axes of the rough pumping hole (10) and the side pumping hole (30) are in the same plane, and the axes of the rough pumping hole (10) and the side pumping hole (30) are 90% when the shell (14) is viewed axially.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811600694.7A CN111365219B (en) | 2018-12-26 | 2018-12-26 | Multifunctional vacuum pump test cover |
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|---|---|---|---|
| CN201811600694.7A CN111365219B (en) | 2018-12-26 | 2018-12-26 | Multifunctional vacuum pump test cover |
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| CN111365219A CN111365219A (en) | 2020-07-03 |
| CN111365219B true CN111365219B (en) | 2021-04-27 |
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| CN201811600694.7A Active CN111365219B (en) | 2018-12-26 | 2018-12-26 | Multifunctional vacuum pump test cover |
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| CN114151310A (en) * | 2021-11-24 | 2022-03-08 | 杭州佐帕斯工业有限公司 | Heating module for simulating air intake |
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| JP5108852B2 (en) * | 2009-10-01 | 2012-12-26 | 八千代工業株式会社 | Vacuum pump inspection method and vacuum pressure measuring device |
| CN202326157U (en) * | 2011-12-06 | 2012-07-11 | 阜新德尔汽车转向泵有限公司 | Vacuum testing table of automobile steering pump |
| CN105736349B (en) * | 2016-05-06 | 2018-06-19 | 山东伯仲真空设备股份有限公司 | Roots vacuum Pump Characteristic Test System and its test method |
| CN207864138U (en) * | 2018-01-01 | 2018-09-14 | 陇东学院 | A kind of small-sized skid-mounted high vacuum obtains and measuring device |
| CN108443135B (en) * | 2018-05-19 | 2019-09-24 | 江苏新克医疗器械有限公司 | A kind of vacuum pump integrated test system for performance and method |
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