CN209485993U - Confocal laser-scanning microscopy instrument reaction tank - Google Patents
Confocal laser-scanning microscopy instrument reaction tank Download PDFInfo
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- CN209485993U CN209485993U CN201920064346.6U CN201920064346U CN209485993U CN 209485993 U CN209485993 U CN 209485993U CN 201920064346 U CN201920064346 U CN 201920064346U CN 209485993 U CN209485993 U CN 209485993U
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Abstract
The utility model provides a kind of Confocal laser-scanning microscopy instrument reaction tank.The utility model includes: vacuum chamber and the sample stage that is placed in one, the vacuum chamber includes vacuum cavity shell and the cavity that the vacuum chamber enclosure interior opens up, the sample stage includes: low temperature disk and the heating device in low temperature disk, the vacuum chamber housing side opens up inflation/suction interface for adjusting environment in cavity, cooling water connector for cooling down for vacuum cavity shell, for being filled with the refrigerant pipe interface of refrigerant for sample stage and for the top surface for vacuum cavity shell described in the thermally conductive electric current of heating device/thermocouple feedthrough interface, bottom surface is equipped with the quartz window sheet for guaranteeing incidence and the transmission of laser.The utility model installation, disassembly are all relatively easy, and compare other bulky heating devices, and it is light to debug comparison, stability is more preferable, in the case where sample present position does not change, high temperature experiment and low temperature test can be carried out to sample, greatly simplify experimental procedure.
Description
Technical field
The utility model relates to the sample analysis field of ultrahigh vacuum equipment more particularly to a kind of Confocal laser-scanning microscopy instrument
Reaction tank.
Background technique
Raman spectrometer is mainly made of light source, dispersion system, reaction tank, reception and information processing system.Raman spectrum
Method obtains the information of molecular vibration or rotation aspect by the difference on the frequency of analysis scattering light and incident light.This method does not need pair
Sample is pre-processed or is prepared, easy to operate, and minute is short, high sensitivity, is the most direct side of research molecular structure
One of method.Confocal laser-scanning microscopy instrument sample stage mainly cooperates Confocal laser-scanning microscopy instrument to use, and can provide for sample very
Altitude is also or be special gas environment.Reaction tank can carry out sample subzero in the case where not changing sample position
130 DEG C of extremely 500 DEG C of temperature controls above freezing are handled.Sample is analyzed under vacuum conditions, is reduced the influence of heat transfer and convection current, is more held
The temperature of sample in easily accurate control reaction tank.
Structure of the existing Raman spectrometer in addition to reaction tank is mature on the whole and is commercialized, and reaction tank then needs basis
Different research directions carry out specific customization, and function relatively simpleization carries out different experiments and need special reaction tank, cause pole
Big inconvenience and waste economically.
Ideal reaction tank should match with Confocal laser-scanning microscopy instrument, can load bearing grain or pulverulent solids sample,
Fluid sample can be carried, variety classes gas can be imported, temperature control can be carried out on a large scale, can be also powered in situ to sample.This
Text describes the Confocal laser-scanning microscopy reaction tank of independent research, realizes technological break-through, meets above-mentioned all demands.
Utility model content
According to technical problem set forth above, and provide a kind of Confocal laser-scanning microscopy instrument reaction tank.The utility model can
To provide vacuum environment for sample, sample can also be allowed to be tested under the atmosphere of special gas.The most important spy of reaction tank
Point is can to carry out In Situ Heating or cooling to sample, and for high temperature up to 500 DEG C above freezing, low temperature can be to subzero 130 DEG C.And it is anti-
Fast speed, the temperature-control range for answering pond to heat up and cool down are larger, meet most of requirement of experiment.
To achieve the goals above, the technological means that the utility model uses is as follows:
A kind of Confocal laser-scanning microscopy instrument reaction tank, comprising: vacuum chamber and the sample stage being placed in one, the vacuum chamber packet
Include vacuum cavity shell and cavity that the vacuum chamber enclosure interior opens up,
The sample stage includes: low temperature disk and the heating device in low temperature disk, opens up refrigeration inside the low temperature disk
Agent cavity, the low temperature disk side wall also open up the refrigerant interface for being connected to the refrigerant cavity,
The vacuum chamber housing side is opened up for adjusting inflation/suction interface of environment in cavity, for being vacuum chamber
Shell cooling cooling water connector, the refrigerant pipe interface for being filled with refrigerant for sample stage and for for heating device it is thermally conductive
Electric current/thermocouple feedthrough interface, the vacuum chamber housing side be additionally provided be spirally connected thereon sample stage support, the sample
Platform is connected in the sample stage support by refrigerant line, and top surface, the bottom surface of the vacuum cavity shell are equipped with for protecting
Demonstrate,prove the quartz window sheet of incidence and the transmission of laser.
Further, the vacuum chamber case top opens up the opening of matching upper cover plate, and the upper cover plate is bolted in described
Vacuum cavity shell, the upper cover plate open up the opening of matching upper cover, and the upper cover is bolted in the upper cover plate, the quartz window of top surface
Piece is installed on the upper lid.
Further, the vacuum chamber housing bottom opens up the opening of matching lower cover, and the lower cover is bolted in the vacuum
Cavity shell, the quartz window sheet of bottom surface are installed on the lower lid.
Further, polytetrafluoro washer, the upper cover plate and vacuum are respectively mounted between the upper cover, lower cover and quartz window sheet
Ring washer is installed between cavity shell, ring washer is also installed between quartz window sheet and vacuum chamber.
Further, the low temperature disk side wall opens up the hole for accommodating heating ceramic conducting wire, and the heating device includes being set to
The heating ceramic of low temperature disk center and access, the leading-out wire of the connection heating ceramic, connect with two current feedthroughs, give and add
Sample stage is heated in thermal Ceramics power supply.
Further, the low temperature disk side wall also opens up the thermocouple access port for measuring low temperature disk temperature, thermocouple
A part probe into sample stage, the thermocouple is connected with thermocouple feedthrough.
Further, refrigerant inlet pipe passes through sample stage support and is connected with refrigerant access port, refrigerant outlet
Pipe is supported across the sample stage to be connected with refrigerant outlet, and refrigerant entry and exit Guan Jun is fastened by welding and sample stage, system
The end of cryogen entry and exit pipe is bolted in the sample stage support.
Further, cooling water pipe is bolted in the cooling water connector, and the cooling water connector is set to the vacuum chamber shell
Each corner of body, multiple cooling water pipes are the one of corners of connection, and other end connects the adjacent corner in the corner.
Further, inflatable interface and suction interface are symmetricly set on vacuum cavity shell two sides.
The utility model has the advantage that
1, vacuum chamber is small to the limitation of lab space between the upper and lower away from small；
2, sample is heated evenly, and the thermal efficiency is high；
3, sample diversification, sample stage can not only place solid sample, glassware can also be placed on sample stage, contain
The analysis to liquid substance can be achieved after tapping body.
4, thermocouple temperature measuring apparatus is installed under sample stage, the temperature of sample stage can be measured in real time, have to experimental implementation
There is directive significance, effectively avoids blindly operating, improve success of the test rate；
5, in the case where sample present position does not change, high temperature experiment and low temperature test can be carried out to sample,
Greatly simplify experimental procedure, avoid because sample transmitting due to caused by unnecessary loss, reduce experimental cost, extend equipment with
And the service life of other devices in sample environment.
6, installation, disassembly are all relatively easy, and compare other bulky heating devices, and it is light to debug comparison
Pine, stability are more preferable；
7, sample and sampling device are in the environment of one closed, either high-temperature region experiment or low-temperature space experiment
It is all to extraneous temperature insulation；
The utility model can be widely popularized in the sample analysis field of ultrahigh vacuum equipment based on the above reasons.
Detailed description of the invention
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is done simply to introduce, it should be apparent that, the accompanying drawings in the following description is
Some embodiments of the utility model, for those of ordinary skill in the art, in the premise of not making the creative labor property
Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the utility model Confocal laser-scanning microscopy instrument reaction tank.
Fig. 2 is the main view of Confocal laser-scanning microscopy instrument reaction tank.
Fig. 3 is the cross-sectional view of the main view of Confocal laser-scanning microscopy instrument reaction tank.
Fig. 4 is the A-A cross-sectional view of Fig. 2 Confocal laser-scanning microscopy instrument reaction tank main view.
In figure: 1, quartz window sheet；2, inflation/suction interface；3, liquid nitrogen pipe；4, electric current/thermocouple feedthrough；5, sample stage branch
Support；6, cooling water connector；7, heating ceramic；8, low temperature disk；9, sample stage；10, vacuum cavity shell；11, upper cover；12, upper cover
Plate；13, screw A；14, screw B；15, polytetrafluoro nut；16, screw C；17, polytetrafluoro washer；18, ring washer A；19, ring
Shape washer B；20, lower cover.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Based on the implementation in the utility model
Example, every other embodiment obtained by those of ordinary skill in the art without making creative efforts belong to
The range of the utility model protection.
As shown in Figures 1 to 3, the utility model provides a kind of Confocal laser-scanning microscopy instrument reaction tank, reaction tank mainly and
Raman spectrometer is used cooperatively, and measures the difference on the frequency (Raman shift) between incident light and inelastic scattering light, obtains molecule shake
Dynamic and rotation aspect information, the qualitative analysis for molecular structure.The reaction tank introduced herein can be with confocal light
Spectrometer matches, can load bearing grain or pulverulent solids sample, fluid sample can be carried, variety classes gas can be imported
Body can carry out temperature control on a large scale, can also be powered in situ to sample.Temperature-control range can realize subzero 130 DEG C to above freezing 500
It is DEG C adjustable.And fast speed, the temperature-control range of reaction tank heating and cooling are larger, meet most of requirement of experiment.
The utility model includes: vacuum chamber and the sample stage 9 that is placed in one, and the vacuum chamber includes 10 He of vacuum cavity shell
The cavity opened up inside the vacuum cavity shell 10,
The sample stage 9 includes: low temperature disk 8 and the heating device in low temperature disk 8, is opened up inside the low temperature disk 8
Refrigerant cavity, 8 side wall of low temperature disk also open up the refrigerant interface for being connected to the refrigerant cavity,
10 side of vacuum cavity shell is opened up for adjusting inflation/suction interface 2 of environment in cavity, for being vacuum
Cavity shell 10 cool down cooling water connector 6, the refrigerant pipe interface for being filled with refrigerant for sample stage 9 and for for heating fill
Thermally conductive electric current/thermocouple feedthrough interface 4 is set, 10 side of vacuum cavity shell is additionally provided with to be spirally connected thereon by screw 16
Sample stage support 5, the sample stage 9 is connected in sample stage support 5 by refrigerant line 3, and refrigerant line 3 is logical
It crosses polytetrafluoro nut 15 to be connected in sample stage support 5, top surface, the bottom surface of the vacuum cavity shell 10 are equipped with for guaranteeing to swash
The quartz window sheet 1 of incidence and the transmission of light.For the purpose of fast-refrigerating, as preferred embodiment, the application uses liquid
Nitrogen is as refrigerant, and as refrigerant pipe, two liquid nitrogen pipes are respectively used to import liquid nitrogen and exclude liquid nitrogen liquid nitrogen pipe.
Electric current/thermocouple feedthrough is arranged four, and two of them are used as the heater connected inside sample stage, and one is
One, anode is cathode；Other two is connected as thermocouple and uses, respectively anode and cathode.
Inflation/suction interface 2 of environment can keep the vacuum range of vacuum chamber 10 in the adjustment cavity, can also be to
Chamber interior is passed through special gas.
As shown in figure 4, opening up and matching at the top of the vacuum cavity shell 10 for the ease of the maintenance and disassembly of internal component
The opening of cover board 12, the upper cover plate 12 are bolted in the vacuum cavity shell 10 by screw 13, and the upper cover plate 12 opens up
Opening with upper cover 11, the upper cover 11 are bolted in the upper cover plate 12 by screw 14, and the quartz window sheet of top surface is installed on institute
It states in upper cover 11.10 bottom of vacuum cavity shell opens up the opening of matching lower cover 20, and the lower cover 20 is bolted in the vacuum
Cavity shell 10, the quartz window sheet 1 of bottom surface are installed on the lower cover 20.It is respectively mounted between upper cover 11, lower cover 20 and quartz window sheet 1
Polytetrafluoro washer 17 is equipped with ring washer 18, quartz window sheet 1 and vacuum chamber between the upper cover plate 12 and vacuum cavity shell 10
Between ring washer 19 is also installed.
8 side wall of low temperature disk opens up the hole for accommodating 7 conducting wire of heating ceramic, and the heating device includes being set to low temperature disk 8
The heating ceramic 7 at center and access, the leading-out wire of the connection heating ceramic 7, connect with two current feedthroughs, give heating pottery
Sample stage is heated in the power supply of porcelain 7.
8 side wall of low temperature disk also opens up the thermocouple access port for measuring 8 temperature of low temperature disk, a part of thermocouple
It probes into sample stage, the thermocouple is connected with thermocouple feedthrough.
Refrigerant inlet pipe passes through sample stage support 5 and is connected with refrigerant access port, and refrigerant outlet pipe passes through institute
It states sample stage support 5 to be connected with refrigerant outlet, refrigerant entry and exit Guan Jun is fastened by welding and sample stage 9, refrigerant
The end of entry and exit pipe is bolted in the sample stage support 5.
According to the operating characteristic of different experiments, and the purpose to cool down in high temperature experiment for vacuum cavity shell 10, design can
The cooling water pipe of disassembly, cooling water pipe are bolted in the cooling water connector 6, and the cooling water connector 6 is set to the vacuum chamber shell
Each corner of body 10, multiple cooling water pipes are the one of corners of connection, and other end connects the adjacent angle in the corner
Portion.It bypasses the position equipped with inflation/suction interface, electrode flange.
Inflatable interface and suction interface are symmetricly set on vacuum cavity shell two sides.Need to vacuumize chamber interior when
It waits, two interfaces is connected into vacuum pump together；When needing to import special gas to chamber interior, an interface connects gas
Pump, an interface run in air pump.
Raman spectrum is related to optical technology, needs the ratio done relatively thin sample stage to meet operating distance requirement；Sample
Glassware can be placed on platform, hold the analysis that can also realize after liquid to liquid substance.The material that the present apparatus uses is
Heat-resisting material, and metal sealing is used, keep its accessible vacuum degree higher, experiment interference is less.
The Preparatory work of experiment stage removes reaction tank upper cover 11, sample is placed at 9 center of sample stage, if sample can not contact
Air, dress sample stage can be completed in glove box.According to different requirement of experiment, corresponding pipeline is connected, dress sample is completed
Control unit is connected with electric current/thermocouple feedthrough 4, if doing Heating Experiment, recirculated water is connect with cooling water connector 6, is kept away
Exempt from the influence that reaction tank overheat causes other unfavorable factors.Vacuum environment if necessary, by inflation/suction interface 2 and mechanical pump
Connection carries out vacuumize process to vacuum chamber 10；If necessary to special gas is passed through in reaction tank, by inflation/suction interface
2 connect with special gas tank.When doing cooling experiment, liquid nitrogen pipe 3 is connect with liquid nitrogen container, thermocouple is connect with control unit, is held
Continue and be passed through liquid nitrogen into low temperature disk 8, sample stage 9 can be cooled down rapidly.Whether sample stage heat or cool down, sample
Product are under vacuum environment, can exclude the interference of other factors.And vacuum chamber 10 is made of stainless steel, good seal performance, is protected
Confirm that tests goes on smoothly.Reaction tank can be placed under the microscope of Raman spectrometer by everything in readiness, carry out Raman light
Spectrum analysis.
Finally, it should be noted that the above various embodiments is only to illustrate the technical solution of the utility model, rather than it is limited
System；Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should
Understand: it is still possible to modify the technical solutions described in the foregoing embodiments, or to some or all of
Technical characteristic is equivalently replaced；And these are modified or replaceed, it does not separate the essence of the corresponding technical solution, and this is practical new
The range of each embodiment technical solution of type.
Claims (9)
1. a kind of Confocal laser-scanning microscopy instrument reaction tank characterized by comprising vacuum chamber and the sample stage being placed in one, institute
Stating vacuum chamber includes vacuum cavity shell and the cavity that the vacuum chamber enclosure interior opens up,
The sample stage includes: low temperature disk and the heating device in low temperature disk, and refrigerant sky is opened up inside the low temperature disk
Chamber, the low temperature disk side wall also open up the refrigerant interface for being connected to the refrigerant cavity,
The vacuum chamber housing side is opened up for adjusting inflation/suction interface of environment in cavity, for being vacuum cavity shell
The cooling water connector of cooling, the refrigerant pipe interface for being filled with refrigerant for sample stage and for the electricity thermally conductive for heating device
Stream/thermocouple feedthrough interface, the vacuum chamber housing side are additionally provided with the sample stage support being spirally connected thereon, and the sample stage is logical
It crosses refrigerant line to be connected in the sample stage support, top surface, the bottom surface of the vacuum cavity shell are equipped with for guaranteeing to swash
The quartz window sheet of incidence and the transmission of light.
2. Confocal laser-scanning microscopy instrument reaction tank according to claim 1, which is characterized in that the vacuum chamber case top
The opening of matching upper cover plate is opened up, the upper cover plate is bolted in the vacuum cavity shell, and the upper cover plate opens up matching upper cover
Opening, the upper cover are bolted in the upper cover plate, and the quartz window sheet of top surface is installed on the upper lid.
3. Confocal laser-scanning microscopy instrument reaction tank according to claim 1, which is characterized in that the vacuum chamber housing bottom
The opening of matching lower cover is opened up, the lower cover is bolted in the vacuum cavity shell, and the quartz window sheet of bottom surface is installed on the lower cover
On.
4. Confocal laser-scanning microscopy instrument reaction tank according to claim 2 or 3, which is characterized in that upper cover, lower cover and quartz
It is respectively mounted polytetrafluoro washer between window, ring washer, quartz window sheet and vacuum are installed between upper cover plate and vacuum cavity shell
Ring washer is also installed between chamber.
5. Confocal laser-scanning microscopy instrument reaction tank according to claim 1, which is characterized in that the low temperature disk side wall opens up
The hole of heating ceramic conducting wire is accommodated, the heating device includes set on the heating ceramic of low temperature disk center and the connection heating pottery
The access of porcelain, leading-out wire are connect with two current feedthroughs, are heated to heating ceramic power supply to sample stage.
6. Confocal laser-scanning microscopy instrument reaction tank according to claim 1, which is characterized in that the low temperature disk side wall is also opened
If the thermocouple access port for measuring low temperature disk temperature, a part of thermocouple probe into sample stage, the thermocouple and heat
Galvanic couple feedthrough is connected.
7. Confocal laser-scanning microscopy instrument reaction tank according to claim 1, which is characterized in that refrigerant inlet pipe passes through institute
It states sample stage support to be connected with refrigerant access port, refrigerant outlet pipe passes through the sample stage and supports and refrigerant outlet phase
Even, refrigerant entry and exit Guan Jun is fastened by welding and sample stage, and the end of refrigerant entry and exit pipe is bolted in the sample
Platform support.
8. Confocal laser-scanning microscopy instrument reaction tank according to claim 1, which is characterized in that cooling water pipe is bolted in described
Cooling water connector, the cooling water connector are set to each corner of the vacuum cavity shell, and multiple cooling water pipes are a companies
One of corner is connect, other end connects the adjacent corner in the corner.
9. Confocal laser-scanning microscopy instrument reaction tank according to claim 1, which is characterized in that inflatable interface and suction interface
It is symmetricly set on vacuum cavity shell two sides.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920064346.6U CN209485993U (en) | 2019-01-15 | 2019-01-15 | Confocal laser-scanning microscopy instrument reaction tank |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920064346.6U CN209485993U (en) | 2019-01-15 | 2019-01-15 | Confocal laser-scanning microscopy instrument reaction tank |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109540870A (en) * | 2019-01-15 | 2019-03-29 | 大连齐维科技发展有限公司 | Confocal laser-scanning microscopy instrument reaction tank |
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- 2019-01-15 CN CN201920064346.6U patent/CN209485993U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109540870A (en) * | 2019-01-15 | 2019-03-29 | 大连齐维科技发展有限公司 | Confocal laser-scanning microscopy instrument reaction tank |
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