CN217818613U - Line laser imaging system and 3D shooting equipment - Google Patents
Line laser imaging system and 3D shooting equipment Download PDFInfo
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- CN217818613U CN217818613U CN202221810697.5U CN202221810697U CN217818613U CN 217818613 U CN217818613 U CN 217818613U CN 202221810697 U CN202221810697 U CN 202221810697U CN 217818613 U CN217818613 U CN 217818613U
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Abstract
The application relates to the field of super lens application, in particular to a line laser imaging system and 3D shooting equipment. The imaging system includes: the laser generating device is used for emitting line laser to a measured object in a set object plane and irradiating the line laser on the measured object to form contour light; the super lens optical unit is used for receiving reflected light emitted by the line laser from the measured object and projecting imaging projection light for imaging the measured object; and the image sensor is used for receiving the imaging projection light from the superlens optical unit and converting the imaging projection light into an image signal, and the lens plane of the superlens optical unit is parallel to the imaging surface of the image sensor. The utility model discloses to the structure of different system parameter design super lens optical unit, to coming from the photomodulation of the different angles of measurand modulation, restrained the formation of image and warp.
Description
Technical Field
The application relates to the field of super lens application, in particular to a line laser imaging system and 3D shooting equipment.
Background
The line laser camera is a common device for acquiring the three-dimensional outline information of the measured object in the machine vision at present, and can replace human eyes to measure and judge by the line laser camera. The line laser camera is based on a laser triangulation method, laser emitted by a line laser emitter irradiates a measured target at a certain incident angle, the laser is reflected and scattered on the surface of the target, the reflected laser is converged by a lens group at another angle and then transmitted to an image, unit profile information of the measured target is acquired through algorithm design, but the line laser camera needs to acquire height information of a measured object and needs to have a large depth of field, so the line laser camera generally expands the depth of field range by using the Schlemm's law.
However, when an object is actually measured, the measured image is usually deviated from the actual object.
SUMMERY OF THE UTILITY MODEL
The application provides a line laser imaging system, through set up super lens optical unit in imaging system, measures the three-dimensional profile of testee.
A first aspect of embodiments of the present application provides a line laser imaging system, where the imaging system includes:
the laser generating device is used for emitting line laser to a measured object in a set object plane and irradiating the line laser on the measured object to form contour light;
the super lens optical unit is used for receiving reflected light emitted by the line laser from the measured object and projecting imaging projection light for imaging the measured object;
an image sensor for receiving the imaged projection light from the superlens optical unit and converting it into an image signal;
and, a lens plane of the superlens optical unit is parallel to an imaging plane of the image sensor.
Optionally, the superlens optical unit is configured to: the scaling of each part of the contour light on the imaging surface of the image sensor is the same.
Optionally, the line laser imaging system can continuously image the measured object which moves relatively, and the direction of the relative movement is perpendicular to the setting object plane.
Optionally, the incident angle of the line laser light to the superlens optical unit is determined by the following parameters:
the distance between the set object plane and the center of the imaging surface of the image sensor;
the width and height of a set measuring range in the set object plane; and
the distance between the measured object and the superlens optical unit.
Optionally, the setting object plane is perpendicular to an imaging plane of the image sensor.
Optionally, the laser generating device comprises:
an excitation source for emitting a laser beam;
a beam expanding superlens optical device for expanding the laser beam to generate the line laser,
the irradiation range of the line laser is determined by the width of the set measurement range in the set object plane.
Optionally, the image sensor is a CCD or CMOS.
A second aspect of the embodiments of the present application provides a 3D shooting device, including: the line laser imaging system; and the 3D image synthesis device is used for acquiring the 3D contour information of the measured object based on the image signal generated by the image sensor.
Optionally, the number of the line laser imaging systems is two or more, and the 3D image synthesizing apparatus acquires 3D contour information of the measured object based on the image signals generated by the two or more image sensors.
Optionally, the line lasers emitted by the laser emitting devices of the two or more line laser imaging systems are in the same setting object plane, and the irradiation angles are different from each other.
The technical scheme of the application has the advantages that:
the technical scheme that this application provided does not adopt the structure of the design line laser imaging system of schemer's law, through set up super lens optical unit in imaging system for the light of measurand modulation through super lens optical unit, on the image sensor of formation of image, avoided because of utilizing the image plane that the schemer's law leads to the rectangle to correspond trapezoidal object plane and the formation of image deformation that produces, when expanding the depth of field scope, it is more accurate to form an image.
Drawings
Fig. 1 is a schematic diagram of the internal structure and the operation principle of a conventional line laser camera, wherein the direction of an arrow is the direction of relative movement between an object to be measured and the camera;
fig. 2 is a schematic diagram of an internal system structure of a conventional line laser 3D camera applying schem's law, in which a straight line of a double-headed arrow represents a measurement range;
FIG. 3 is a schematic structural diagram of a line laser imaging system, wherein the straight line of the double-headed arrow represents the measurement range;
fig. 4 a is a schematic diagram of the internal system structure of a laser generating device using a collimation system and a beam expansion system;
b in FIG. 4 is a schematic diagram of the internal system architecture of a laser generating device employing beam expanding superlens optics;
a in fig. 5 is a schematic diagram of a nanofin;
b in fig. 5 is a schematic diagram of a nanocylinder;
a in fig. 6 is a schematic diagram in which the superstructure cells are regular hexagons;
b in fig. 6 is a schematic diagram of the superstructure unit being square;
FIG. 7 is a schematic plan view of an array arrangement of superlens nanostructures;
fig. 8 is a schematic diagram of the correspondence relationship between the setting object plane, the superlens optical unit, and the imaging plane.
Reference numerals:
1. a laser generating device;
11. an excitation source; 12. a collimating system; 13. a beam expanding system; 14. a beam expanding superlens optical device;
2. a superlens optical unit; 3. an image sensor;
4. a nanostructure;
41. a substrate; 42. a nanofin; 43. a nanocylinder; 44. a filler material;
5. setting an object plane; 6. an image plane.
Detailed Description
The present disclosure now will be described more fully hereinafter with reference to the accompanying drawings, in which embodiments are shown. This disclosure may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. Like numbers refer to like elements throughout. Also, in the drawings, the thickness, ratio and size of the components are exaggerated for clarity of illustration.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, "a," "an," "the," and "at least one" do not denote a limitation of quantity, but rather are intended to include both the singular and the plural, unless the context clearly dictates otherwise. For example, "a component" means the same as "at least one component" unless the context clearly dictates otherwise. "at least one of" should not be construed as limited to the quantity "one". "or" means "and/or". The term "and/or" includes any and all combinations of one or more of the associated listed items.
Unless otherwise defined, all terms used herein, including technical and scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms defined in commonly used dictionaries should be interpreted as having the same meaning as is in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The meaning of "comprising" or "comprises" indicates a property, a quantity, a step, an operation, a component, a part, or a combination thereof, but does not exclude other properties, quantities, steps, operations, components, parts, or combinations thereof.
As shown in fig. 1 and 2, a line laser camera is a measuring device commonly used in machine vision, and in order to meet the measurement requirement, the internal structure of the system needs to be set according to the schemer's law so as to expand the depth of field. However, in the actual measurement process, the measured image deviates from the actual measured object.
Based on the above problems, the inventor of the present application has found that, since the conventional line laser camera is configured with an internal structure based on the schemer's law, a laser beam emitted from a line laser forms a laser plane through modulation of a special lens, and forms a laser line when the laser beam is emitted to a measured object, and the laser line is diffused or reflected to a compound lens group, and then is converged and transmitted to an image sensor through the compound lens group. Because the laser plane, the plane where the lens group is located and the plane where the image sensor is located intersect in a straight line, and the plane where the laser plane and the image sensor are located is not perpendicular to the optical axis of the lens, the magnification ratios of all points on the laser plane are different, so that the object image on the laser plane is deformed after being transmitted to the image sensor, and the measurement result is inaccurate. The disadvantages of the existing solutions can be solved by arranging a superlens in the line laser camera, and therefore, the inventor proposes a line laser imaging system.
Referring to fig. 3 to 8, an embodiment of the present application provides a line laser imaging system, including: a laser generating device 1, a superlens optical unit 2, and an image sensor 3.
In the line laser imaging system, the X direction is defined as the direction of the line laser, the Y direction is defined as the direction of the relative movement between the object to be measured and the laser generator 1, and the Z direction is defined as the height direction.
When the imaging system is in operation, the laser generating device 1 may emit laser light toward the object to be measured. Because the laser emitted by the laser generating device 1 is modulated by the collimation system 12 and the beam expanding system 13 therein and then emitted, a laser plane is formed in the space, and when the laser is emitted to the object to be measured, linear laser is formed on the object to be measured, and finally, contour light is formed. Under the influence of the surface structure of the object to be measured, the laser light is diffused or reflected on the surface of the object to be measured and is emitted to the superlens optical unit 2 at different angles. The superlens optical unit 2 modulates the laser light incident thereto to generate imaging projection light, so that the laser light is transmitted to the image sensor 3 at a preset deflection angle. Due to the special arrangement of the superlens optical unit 2 structure and its positional relationship with the image sensor 3, the scaling of the respective portions of the contour light at the image sensor 3 is made the same.
The image sensor 3 receives the optical signal carrying the information of the object to be measured modulated by the superlens optical unit 2 and converts the optical signal into an image signal. When the laser generating device 1 and the object to be measured move relatively in a direction perpendicular to the laser plane, that is, in a direction perpendicular to the setting object plane 5, the laser generating device 1 continuously emits laser to the object to be measured, the laser forms a diffused and reflected optical signal through the object to be measured, the optical signal can emit to the superlens optical unit 2 and is captured by the image sensor 3 through the superlens optical unit 2, the image sensor 3 converts the continuously captured optical signal into an image signal carrying information of the object to be measured, and then the image signal is transmitted to a 3D image synthesizing device connected with the image sensor 3, so that three-dimensional contour information of the object to be measured is formed.
The superlens optical unit 2 and the image sensor 3 are disposed in this order downstream of the optical path of the object to be measured. As shown in fig. 3, the superlens optical unit 2 and the image sensor 3 may be disposed in parallel, such that a plane where the image sensor 3 is located, i.e., an image plane, is perpendicular to an optical axis of the superlens optical unit 2; the laser generating device 1 may be at the same horizontal position as the superlens optical unit 2, and is disposed at one side of the superlens optical unit 2, so that the axis of the laser generating device 1 is parallel to the optical axis, it should be understood that the condition that the axis is parallel to the optical axis, and the condition that the laser plane formed by the laser emitted by the laser generating device 1, that is, the set object plane, is parallel to the optical axis, where the positions of the laser generating devices corresponding to these two conditions are the same.
It should be understood that the position settings of the laser generator 1, the superlens optical unit 2 and the image sensor 3 are not limited to the above position relationship, and it is only necessary to ensure that the laser emitted by the laser generator 1 is diffused or reflected by the object to be measured, and then emitted to the superlens optical unit 2 and received by the image sensor 3, and the positions of the three may be set arbitrarily, for example, the laser generator 1 may be set such that the axis thereof forms an angle of about 45 degrees with the optical axis of the superlens optical unit 2, the modulation and propagation processes of the laser are similar to those described above, and are not described again, and according to the different position structures of the three, the structure of the superlens optical unit 2 is set correspondingly.
In an exemplary embodiment, the laser generating apparatus 1 is composed of an excitation source 11, a collimating system 12, and a beam expanding system 13.
Wherein, as shown in a in fig. 4, the excitation source 11 is a krypton arc lamp. A collimating system 12 is disposed in the optical path downstream of the krypton arc lamp, and a beam expanding system 13 is disposed in the optical path downstream of the collimating system 12. When the laser generator 1 works, the krypton arc lamp can emit a laser beam, the laser beam is emitted to the collimation system 12, the collimation system 12 collimates the transmitted laser beam and emits the collimated laser beam to the beam expanding system 13, and the beam expanding system 13 modulates the transmitted laser beam to generate linear laser.
The superlens optical unit 2 is a piece of superlens, and includes a substrate 41 and a superstructure unit provided on a surface of the substrate 41.
In order to ensure that the laser beams emitted to the superlens optical unit 2 at different angles can be deflected in a pre-designed direction, and the laser beams received by the image sensor 3 can be processed to accurately calculate the three-dimensional profile of the object to be measured, the material and structure of the superlens optical unit 2 need to be designed accordingly.
In the present embodiment, the structural design of the superlens optical unit 2 can be determined by the following parameters of the line laser imaging system based on the superlens, for example:
the distance between the laser plane, namely the set object plane 5, and the center of the imaging plane where the image sensor 3 is located; the measurement range to be reached by the system and the reference working distance; a field of view in the X direction; a laser wavelength; parameters of the image sensor 3, such as target surface size and pixel size, etc.
Wherein, the incident angle of the laser incident on the superlens optical unit 2 can be determined by setting the distance between the object plane 5 and the center of the imaging plane where the image sensor 3 is located, the measurement range to be reached by the system (i.e. the width and height of the measurement range set in the object plane 5), the reference working distance (the distance from the superlens optical unit 2 to the surface of the object to be measured) and the view field range in the X direction; determining the field of view of the superlens optical unit 2 in the YZ plane through the measurement range in the Z direction; according to the requirement of the visual field in the X direction, the visual field range which the superlens optical unit 2 needs to meet in the YZ plane can be determined; the laser wavelength determines the spectral characteristics of the superlens optical unit 2, in this embodiment, the operating wavelength of the superlens optical unit 2 is the wavelength of the laser emitted by the laser generator 1, and the wavelength of the laser may be 405nm; the parameters of the image sensor 3 determine the propagation state of the laser after passing through the superlens optical unit 2, so that the laser transmitted from the laser plane is perfectly focused and imaged on the imaging surface 6 which is not coaxial.
Specifically, the superlens optical unit 2 gives a spatial phase distribution of the incident light Φ (x, y), and the phase distribution Φ of the superstructure unit can be determined based on the above-described system parameters and the following equation:
wherein, theta i 、θ t And theta r Respectively, an incident angle, a refraction angle and a reflection angle, n, formed by the laser light modulated by the object to be measured and the superlens optical unit 2 i And n t Refractive indices of the medium in which the incident light and the refracted light are respectively present, phi r1 And phi t1 Respectively, the reflected and refracted light wave vectors are projected in a plane perpendicular to the plane of incidence.
As shown in fig. 7, by determining the structure of the superlens optical unit 2 through the above-described steps, the array arrangement of the superlens nanostructures 4 can be determined. As shown in a of fig. 6, the superstructure unit may be a regular hexagon, at least one nanostructure 4 being disposed at each vertex and center position of the regular hexagon.
The nano-structure 4 can be an all-dielectric structure, has high transmittance in a visible light band, and can directly adjust and control the phase, amplitude, polarization and other characteristics of light. The material of the nanostructures 4 is silicon nitride in this embodiment. Also, as shown in a of fig. 5, the nanostructure may be a nanofin 42, and may apply a geometric phase to incident light. Air can be filled between the nano structures 4, so that the stability of modulated light is ensured.
The image sensor 3 may be a CCD (charge coupled device) to improve the detection accuracy and detection efficiency of the system.
With the above arrangement, as shown in fig. 8, light rays within the field of view emitted from the object plane 5 are modulated by the superlens optical unit 2 and imaged on the imaging plane 6 that is not coaxial, that is, the plane where the image sensor 3 is located, and the formed image may not be deformed.
In one embodiment, as shown in fig. 4 b, the line laser generating device is composed of an excitation source 11 and a beam expanding superlens optical device 14, and the beam expanding superlens optical device 14 is disposed downstream of the excitation source 11 in the optical path. When the excitation source 11 emits a laser beam, the beam expanding superlens optical device 14 performs modulation processes such as collimation and beam expansion on the laser beam, and the modulated laser beam generates line laser which irradiates on a measured object to form contour light.
The irradiation range of the line laser light depends on the width of the set measurement range in the set object plane 5. It also determines the size of the measured object that the line laser imaging system can measure.
By using the beam expanding super lens optical device 14 to replace the collimating system 12 and the beam expanding system 13 in the existing laser generating device 1, the line laser is generated, the complexity of the laser generating device 1 is reduced, the volume of the laser generating device is reduced, and the volume of a line laser imaging system is reduced.
In one embodiment, as shown in b of fig. 6, the superstructure unit is a square, and at least one nanostructure is disposed at each vertex and center position of the square.
In one embodiment, the material of the nanostructures 4 is at least one of titanium oxide, fused silica, aluminum oxide, gallium nitride, gallium phosphide, amorphous silicon, crystalline silicon, and hydrogenated amorphous silicon.
In one embodiment, the nanostructures 4 may be nanocylinders 43, as shown in b in fig. 5.
In one embodiment, the filling material 44 which is transparent in the optical band and has the refractive index difference with the refractive index of the nano structure of more than or equal to 0.5 can be filled between the nano structures 4 to reduce the influence of the filling material 44 on the light modulation, so as to ensure the stability of the modulated light.
In one embodiment, the image sensor 3 may be a CMOS (Complementary Metal-Oxide-Semiconductor) sensor, which has a small volume, low cost, light weight, low power consumption, and easier control compared to a CCD (charge coupled device), so as to reduce the volume and weight of the imaging system and achieve better operation performance.
In a second aspect, an embodiment of the present application provides a 3D photographing apparatus, which includes the above line laser imaging system, and a 3D image synthesizing device, configured to acquire 3D contour information of a measured object based on an image signal generated by an image sensor.
Alternatively, the number of the line laser imaging systems in the device may be two or more, and the 3D image synthesizing device may acquire the 3D contour information of the measured object based on the image signals generated by the two or more image sensors.
In one embodiment, the line laser beams emitted by the laser emitting devices 1 of two or more line laser imaging systems may be in the same setting object plane 5, and the irradiation angles are different.
Specifically, one laser light generating device 1, two superlens optical units 2, and two corresponding image sensors 3 are provided. The two superlens optical units 2 and the two corresponding image sensors 3 are divided into two groups, and can be respectively arranged on two sides along the direction perpendicular to the axis of the laser generating device 1, and respectively modulate and process the laser diffused or reflected by the measured object at two positions, and finally, data processing is performed by combining two groups of results, so that the three-dimensional profile of the measured object is measured, and the influence on measurement caused by the inclination of the surface of the measured object and the dead zone is inhibited.
It should be noted that, when the equipment is installed, the equipment needs to be installed strictly according to the designed direction, including the position and distance of the equipment relative to the set object plane 5 and the imaging plane 6, and the pitch angle and the tilt angle of the equipment itself, so as to ensure that the scanned three-dimensional profile is not deformed.
The application provides a line laser imaging system and 3D shoot equipment, through setting up super lens optical unit, make the light of setting for the visual field within range of object plane transmission, behind super lens optical unit's modulation, the formation of image is on the imaging plane that is not coaxial, avoided because of utilizing the image plane that the schemer's law leads to the rectangle to correspond trapezoidal object plane and the formation of image deformation that takes place, the image of formation is more accurate, and, the uniformity of imaging accuracy in the full field of vision scope has been guaranteed. Set up the super lens optical device of expanding beam in laser generating device simultaneously, compare original collimation system and expand beam system, volume and weight are littleer to make line laser imaging system's volume and weight littleer, also make the volume and the weight reduction of equipment.
The above embodiments are only specific embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the present invention, and all should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A line laser imaging system, comprising:
the laser generating device is used for emitting line laser to a measured object in a set object plane and irradiating the line laser on the measured object to form contour light;
a superlens optical unit for receiving reflected light emitted from the measured object by the line laser and projecting imaging projection light for imaging the measured object;
an image sensor for receiving the imaging projection light from the superlens optical unit and converting it into an image signal;
and, the lens plane of the superlens optical unit is parallel to the imaging plane of the image sensor.
2. The line laser imaging system of claim 1, wherein the superlens optical unit is configured to:
the scaling of each part of the contour light on the imaging surface of the image sensor is the same.
3. The line laser imaging system according to claim 1 or 2, wherein the line laser imaging system is capable of continuously imaging the measured object in a relative movement, the direction of the relative movement being perpendicular to the setting object plane.
4. The line laser imaging system of claim 3, wherein the angle of incidence of the line laser light on the superlens optical unit is determined by:
the distance between the set object plane and the center of the imaging surface of the image sensor;
a width and a height of a set measurement range within the set object plane; and
the distance between the measured object and the superlens optical unit.
5. The line laser imaging system of claim 1 or 2, wherein the set object plane is perpendicular to an imaging plane of the image sensor.
6. The line laser imaging system of claim 1 or 2, wherein the laser generating device comprises:
an excitation source for emitting a laser beam;
a beam expanding superlens optical device for expanding the laser beam to generate the line laser,
the irradiation range of the line laser is determined by the width of the set measurement range in the set object plane.
7. The line laser imaging system of claim 1 or 2, wherein the image sensor is a CCD or CMOS.
8. A3D shooting device, characterized by comprising
The line laser imaging system of any one of claims 1 to 7; and
and the 3D image synthesis device is used for acquiring the 3D contour information of the measured object based on the image signal generated by the image sensor.
9. The 3D photographing apparatus according to claim 8, wherein the number of the line laser imaging systems is two or more, and the 3D image synthesizing device acquires 3D contour information of the object based on the image signals generated by the two or more image sensors.
10. The 3D photographing apparatus according to claim 9, wherein the line lasers emitted from the laser emitting devices of the two or more line laser imaging systems are in the same setting object plane and have different irradiation angles.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
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2022
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11988844B2 (en) | 2017-08-31 | 2024-05-21 | Metalenz, Inc. | Transmissive metasurface lens integration |
| US11978752B2 (en) | 2019-07-26 | 2024-05-07 | Metalenz, Inc. | Aperture-metasurface and hybrid refractive-metasurface imaging systems |
| US11927769B2 (en) | 2022-03-31 | 2024-03-12 | Metalenz, Inc. | Polarization sorting metasurface microlens array device |
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