CN217807340U - Carrying mechanism and vacuum coating machine - Google Patents

Abstract

The utility model discloses a transport mechanism and vacuum coating machine relates to vacuum coating machine technical field. The conveying mechanism is used for conveying a substrate and comprises a first conveying assembly and a second conveying assembly which are arranged oppositely, wherein at least one of the first conveying assembly and the second conveying assembly can drive the substrate to move so as to separate the substrate from the bearing piece; the first conveying assembly and the second conveying assembly can clamp two opposite sides of a substrate to convey the substrate, the substrate is provided with a thickness measuring datum plane, and an included angle between the thickness measuring datum plane and the conveying direction is smaller than a preset angle. The carrying mechanism occupies small space, and improves carrying efficiency. The vacuum coating machine with the carrying mechanism is used for carrying the substrate from the first chamber to the second chamber, the width of a carrying channel is greatly reduced, the occupied space is small, the preheating energy consumption is reduced, and the carrying efficiency is improved, so that the energy consumption of the vacuum coating machine is reduced, and the coating efficiency of the vacuum coating machine is improved.

Description

Carrying mechanism and vacuum coating machine

Technical Field

The utility model relates to a vacuum coating machine technical field especially relates to a transport mechanism and vacuum coating machine.

Background

Along with the increasingly rigorous film forming technical requirements and time restrictions in the field of vacuum coating, the design requirements on a substrate conveying mechanism are also higher and higher.

The batch of substrates needs to be preheated before the substrates are put into the furnace, and the requirements on the conveying time, the film forming efficiency, the cavity space and the like are also high. The design of carrying mechanism among the prior art, it is great to carry the passageway occupation space, has additionally increased the energy consumption that preheats, has influenced the carrying efficiency of batch base plate.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a remove mechanism and vacuum coating machine can reduce the occupation space who removes the passageway, and the base plate is concentrated the energy consumption of preheating in batches and is low, has improved the removal efficiency of removing of base plate in batches.

To achieve the purpose, the utility model adopts the following technical proposal:

a conveyance mechanism for conveying a substrate, the conveyance mechanism comprising:

the relative first subassembly and the second of carrying that sets up is carried the subassembly, in the first subassembly and the second of carrying the subassembly two, at least one can drive the base plate removes to make the base plate breaks away from and holds carrier, the first subassembly of carrying with the second is carried the subassembly and can be held the relative both sides of base plate, in order to carry the base plate, the base plate has the reference surface of measuring thickness, the reference surface of measuring thickness is less than predetermineeing the angle with carrying the contained angle of direction.

As an alternative of the conveying mechanism, the first conveying member and the second conveying member are provided on opposite sides in the vertical direction, respectively, the first conveying member is provided on the upper side, and the second conveying member is provided on the lower side.

As an alternative to the carrying mechanism, the first carrying assembly includes an upper clamp that is positioned in cooperation with an upper side of the substrate to position the substrate.

As an alternative of the carrying mechanism, one of the upper clamping piece and the upper side surface of the substrate is provided with a first positioning pin, the other one of the upper clamping piece and the upper side surface of the substrate is provided with a first positioning hole, and the first positioning pin is matched with the first positioning hole for positioning.

As an alternative of the conveying mechanism, the first conveying assembly further includes a first linear guide rail and a first driving member, a first slider is disposed at one end of the upper clamping member, the first slider is matched with the first linear guide rail, and the first driving member is used for driving the upper clamping member to move on the first linear guide rail.

As an alternative to the carrying mechanism, the second carrying assembly includes a lower clamp that cooperates with an underside of the substrate to position the substrate.

As an alternative of the carrying mechanism, one of the lower clamping member and the lower side surface of the substrate is provided with a second positioning pin, and the other is provided with a second positioning hole, and the second positioning pin is matched with the second positioning hole for positioning.

As an alternative of the conveying mechanism, the second conveying assembly further comprises a second linear guide rail and a second driving element, a second slider is arranged at one end of the lower clamping piece, the second slider is matched with the second linear guide rail, and the second driving element is used for driving the lower clamping piece to move on the second linear guide rail.

As an alternative of the conveying mechanism, the second conveying assembly further comprises a lifting assembly, the lifting assembly is arranged between the second slider and the lower clamping piece, and the lifting assembly is used for driving the lower clamping piece to lift.

As an alternative of the conveying mechanism, a guide assembly is further arranged between the second sliding block and the lower clamping piece, the guide assembly comprises a guide post and a guide sleeve, and the guide post is slidably arranged in the guide sleeve; the direction subassembly is provided with a plurality ofly, and is a plurality of the direction subassembly interval all is located the circumference of second slider.

A vacuum coating machine comprises a first chamber, a second chamber and the conveying mechanism in any scheme, wherein the conveying mechanism is used for conveying a substrate from the first chamber to the second chamber.

The utility model has the advantages that:

the utility model provides a remove transport mechanism removes the subassembly through relative first removal of setting and removes the subassembly with the second, with the relative both sides centre gripping of base plate, when removing the base plate, the base plate with its thickness direction through removing the transport passageway, has reduced greatly and has removed the width direction's that removes the passageway occupation space, has reached the minimizing that removes the passageway. At least one of the first conveying assembly and the second conveying assembly can drive the substrate to move, so that the substrate is separated from the bearing piece. After the substrate is transported, the first transporting assembly and the second transporting assembly can move back to continue transporting the next substrate. The carrying mechanism enables the substrate to be simply taken and placed, can realize rapid and stable carrying of the substrate, and improves the carrying efficiency of batch substrates.

The utility model provides a vacuum coating machine uses foretell transport mechanism for remove the base plate from first cavity and send to the second cavity, reduced greatly and sent the width of passageway, occupation space is little, has reduced the energy consumption of preheating, has improved simultaneously and has sent efficiency, thereby has reduced vacuum coating machine's energy consumption, has improved vacuum coating machine's coating film efficiency.

Drawings

Fig. 1 is a schematic structural diagram of a conveying mechanism between a first chamber and a second chamber of a vacuum coater provided by an embodiment of the present invention;

fig. 2 is a schematic structural view illustrating a connection between a first conveying assembly and a substrate according to an embodiment of the present invention;

fig. 3 is a schematic structural view illustrating a connection between the second conveying assembly and the substrate according to an embodiment of the present invention;

fig. 4 is a schematic structural view of the connection between the lifting assembly and the auxiliary sliding block and the lower clamping member provided by the embodiment of the present invention;

fig. 5 is a schematic diagram illustrating a state where the lower clamping member and the substrate are pre-positioned in the process of transporting the substrate by the first transporting assembly and the second transporting assembly provided by the embodiment of the present invention;

fig. 6 is a schematic view of a state where the second positioning pin is positioned in cooperation with the second positioning hole in the process of conveying the substrate by the first conveying assembly and the second conveying assembly provided by the embodiment of the present invention;

fig. 7 is a schematic diagram illustrating a state where a hanging groove of a substrate and a first hook are pre-separated in a process of transporting the substrate by the first transporting assembly and the second transporting assembly according to the embodiment of the present invention;

fig. 8 is a schematic diagram of a state that the first positioning pin and the first positioning hole are positioned in cooperation when the first hanging groove of the substrate is completely separated from the first hook in the process of transporting the substrate by the first transporting assembly and the second transporting assembly provided by the embodiment of the present invention.

In the figure:

100. a first chamber; 200. a second chamber; 300. a substrate;

101. a first hanger; 201. a second hanger; 301. hanging a groove; 302. avoiding the mouth; 303. a first positioning hole;

1011. a first hook; 2011. a second hook;

1. a first conveying assembly; 2. a second conveying assembly; 3. a guide assembly;

11. an upper clamping member; 12. a first linear guide rail; 13. a first driving member; 21. a lower clamping member; 22. a second linear guide rail; 23. an auxiliary linear guide rail; 24. a lifting assembly; 25. a second driving member; 26. a second slider; 27. an auxiliary slide block; 31. a guide post; 32. a guide sleeve;

111. a first locating pin; 211. a second positioning pin; 241. a vacuum motor; 242. a ball screw; 243. a first connecting member; 244. an inclined guide rail; 245. a third slider; 246. a second connecting member.

Detailed Description

Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Wherein the terms "first position" and "second position" are two different positions.

Unless expressly stated or limited otherwise, the terms "mounted," "connected," and "secured" are to be construed broadly and encompass, for example, both fixed and removable connections; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

Unless expressly stated or limited otherwise, the recitation of a first feature "on" or "under" a second feature may include the recitation of the first feature being in direct contact with the second feature, and may also include the recitation of the first feature being in contact with the second feature, but rather being in contact with the additional feature between them. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.

As shown in fig. 1, the present embodiment provides a vacuum coater including a first chamber 100, a second chamber 200, and a transfer mechanism for transferring a substrate 300 from the first chamber 100 to the second chamber 200.

Of course, the conveying mechanism provided in this embodiment can be used not only for conveying various coated or to-be-coated substrates, but also for conveying a combination including a substrate loading frame and a substrate, or a substrate loading frame for carrying a substrate.

The conveying mechanism is suitable for clamping substrates with various shapes, the shape of the substrate can be a plane shape, and can also be any curved surface shape with radian, and the conveying mechanism can be suitable for the substrate which meets the clamping condition of the conveying mechanism.

The vacuum coating machine comprises a feeding cavity, a coating cavity and a discharging cavity, wherein the feeding cavity is used for temporarily storing the substrate 300 to be coated, the substrate 300 to be coated is conveyed to the coating cavity through a conveying mechanism for coating, and the coated substrate 300 is conveyed to the discharging cavity through the conveying mechanism. The first chamber 100 and the second chamber 200 may be a loading chamber and a coating chamber, or may be a unloading chamber and a coating chamber, and the transfer mechanism is preferably disposed in the loading chamber and the unloading chamber. The substrate 300 to be coated needs to be heated before entering the coating chamber, and the substrate 300 is heated in the loading chamber.

Be provided with first stores pylon 101 in the first cavity 100, first stores pylon 101 rotatable setting is provided with a plurality of dishes that bear in first stores pylon 101's circumference, all is provided with two first couples 1011 on every bears the dish, is provided with two on the base plate 300 and hangs groove 301, and two are hung groove 301 and two first couples 1011 one-to-one cooperation to hang base plate 300 on bearing the dish. A plurality of substrates 300 can be hung on each first hanger 101. A second hanger 201 is arranged in the second chamber 200, the second hanger 201 is rotatably arranged, the structure of the second hanger 201 is the same as that of the first hanger 101, two second hooks 2011 are arranged on the bearing plate, and the two second hooks 2011 can be matched with the two hanging grooves 301 on the substrate 300 in a one-to-one correspondence manner so as to hang the substrate 300 on the second hanger 201.

When the first chamber 100 is a loading chamber, the second chamber 200 is a coating chamber. The substrate 300 can be heated concentratedly by storing a greater number of substrates 300 through the first rack 101. Be provided with between first cavity 100 and second cavity 200 and carry the passageway, if it is big to carry passageway occupation space, before getting into the coating chamber, when carrying out batch heating to the base plate 300 of material loading intracavity, because the space of carrying the passageway is great, heat loss can be faster during the heating to the energy consumption of preheating has been increased.

Of course, in other embodiments, the hanging groove 301 may be disposed on the carrier tray, and the first hook 1011 may be disposed on the substrate 300; or, the substrate 300 is fixed on the carrier tray by means of the engagement between the engaging groove and the engaging hook.

When the substrate 300 is transferred, one of the substrates 300 on the first rack 101 is rotated to the transfer position, and the substrate 300 is transferred to the second chamber 200 by the transfer mechanism and then suspended on the second rack 201. Then, the transfer mechanism returns to the first chamber 100, rotates the next substrate 300 to the transfer position by rotating the first rack 101, and starts to transfer the next substrate 300 until all the substrates 300 on the first rack 101 are transferred to the second chamber 200 and hung on the second rack 201.

The following transfer process may be performed: one of the substrates 300 on the first rack 101 is transferred to the second chamber 200 by the transfer mechanism and suspended from the second rack 201. Then, the next substrate 300 of the second rack 201 is rotated to the transfer position by rotating the second rack 201, and the substrate 300 is transferred to the first rack 101 in the first chamber 100 by the transfer mechanism.

The length of the substrate 300 is long, and in the prior art, in the process of moving across the cavity, the width of the conveying channel of the planar substrate is at least larger than that of the planar substrate. The carrying mechanism occupies a large space, additionally increases the energy consumption of preheating, and has low carrying efficiency.

As shown in fig. 1 to fig. 5, the present embodiment further provides a conveying mechanism, which is applied to the vacuum coating machine. The conveying mechanism comprises a first conveying assembly 1 and a second conveying assembly 2 which are arranged oppositely, at least one of the first conveying assembly 1 and the second conveying assembly 2 can drive the substrate 300 to move so that the substrate 300 is separated from the bearing piece, the first conveying assembly 1 and the second conveying assembly 2 can clamp two opposite sides of the substrate 300 so as to convey the substrate 300, the substrate 300 is provided with a reference surface for measuring the thickness, and the included angle between the reference surface for measuring the thickness and the conveying direction is smaller than a preset angle.

Taking a planar substrate as an example, the reference surface for measuring the thickness is any one of two opposite side surfaces in the thickness direction of the planar substrate. Taking a substrate in which one of the two opposite side surfaces in the thickness direction is a flat surface and the other side is a curved surface as an example, the reference surface for measuring the thickness is a flat surface of the two opposite side surfaces in the thickness direction. Taking a substrate with two opposite side surfaces in the thickness direction both being curved surfaces as an example, the reference surface for measuring the thickness is a plane where the outermost points of the two curved surfaces are located.

Optionally, the preset angle is between 0 ° and 45 °.

In this embodiment, the reference plane for measuring the thickness is parallel to the conveying direction, and the width of the conveying path can be minimized to minimize the occupied space.

In this embodiment, the carriers are carrier trays on the first hanger 101 and the second hanger 201. In some alternative embodiments, the carrier may further include a mechanism such as a turret connected to the carrier tray that may be used to position the substrate 300.

The substrate 300 is hung on the first hanger 101 in the first chamber 100, opposite sides of the substrate 300 are clamped by the first and second transfer units 1 and 2 disposed opposite to each other, so that the substrate 300 passes through the transfer passage in the thickness direction of the substrate 300 when being transferred from the first chamber 100 to the second chamber 200, and the substrate 300 is hung on the second hanger 201 of the second chamber 200. The substrate 300 passes through the carrying channel in the thickness direction, so that the occupied space of the carrying channel in the width direction is greatly reduced, the minimization of the carrying channel is achieved, the heat loss when the substrate 300 is heated is reduced, and the energy consumption of preheating is reduced. At least one of the first conveying assembly 1 and the second conveying assembly 2 can drive the substrate 300 to move, so that the substrate 300 is out of hook. After the transfer of one substrate 300 is completed, the first transfer unit 1 and the second transfer unit 2 can move to the first chamber 100 to continue the transfer of the next substrate 300. The conveying mechanism enables the picking and placing operation of the substrates 300 to be simple, can realize the quick and stable conveying of the substrates 300, and improves the conveying efficiency of the batch of substrates 300.

The conveying mechanism provided by this embodiment conveys the substrate 300 through the first conveying assembly 1 and the second conveying assembly 2, without turning over or other actions, the substrate 300 suspended on the first rack 101 can be separated from the carrier tray first, then the first conveying assembly 1 and the second conveying assembly 2 simultaneously clamp two opposite sides of the substrate 300 and synchronously move, the substrate 300 is translated into the second chamber 200, and the substrate 300 is suspended on the carrier tray of the second rack 201, the picking and placing operation of the substrate 300 is simple, and the conveying efficiency is improved. Meanwhile, when the substrate 300 passes through the conveying channel, the substrate 300 passes through the conveying channel in the thickness direction, and the occupied space of the conveying channel is reduced. The conveying mechanism not only can quickly and stably convey the substrate 300, but also can meet the conveying requirement in a small space, and reduces the energy consumption of the centralized heating of the substrate 300.

As an alternative of the conveying mechanism, the first conveying unit 1 and the second conveying unit 2 are provided on opposite sides in the vertical direction, respectively, with the first conveying unit 1 being provided on the upper side and the second conveying unit 2 being provided on the lower side.

First carrying subassembly 1 and second carrying subassembly 2 set up respectively in upside and downside, hang groove 301 along the vertical direction setting of upright base plate 300, still are provided with on the base plate 300 and dodge mouthful 302, dodge mouthful 302 and set up in the top or the below of hanging groove 301, and first couple 1011 gets into through dodging mouthful 302 and hangs groove 301. The base plate 300 moves so that the hanging groove 301 moves in a vertical direction, thereby disengaging the hanging groove 301 from the first hook 1011.

At least one of the first conveying assembly 1 and the second conveying assembly 2 rises to drive the substrate 300 to rise to the hanging groove 301 and be separated from the first hook 1011; or at least one of the hooks descends to drive the substrate 300 to descend to the hanging groove 301 to be separated from the first hook 1011. The first and second transfer units 1 and 2 clamp opposite sides of the substrate 300 and transfer the substrate 300 to the second chamber 200. Then, at least one of the first conveying assembly 1 and the second conveying assembly 2 descends to drive the substrate 300 to descend to the hanging groove 301 to be hung on the second hook 2011; or at least one of the hooks is raised to drive the substrate 300 to rise to the hanging groove 301 to be hung on the second hook 2011, so that the substrate 300 can be taken and placed.

In another optional embodiment of the present invention, the first conveying member 1 and the second conveying member 2 are disposed at the left and right sides, and the left and right sides of the substrate 300 are clamped to convey the substrate 300 from the first chamber 100 to the second chamber 200. The hanging groove 301 is provided in the horizontal direction of the standing base plate 300. One of the first conveying assembly 1 and the second conveying assembly 2 translates leftwards, continues translating to make the hanging groove 301 separate from the first hook 1011 after translating leftwards to abut against the right side of the substrate 300; or, one of the hooks is translated rightwards, and after being translated rightwards to abut against the left side of the substrate 300, the hook is continuously translated to separate the hanging groove 301 from the first hook 1011; alternatively, the first transfer unit 1 and the second transfer unit 2 move in the direction of approaching each other, one of which abuts against the left side of the substrate 300 and the other of which abuts against the right side of the substrate 300, and both of which grip the substrate 300 to move leftward or rightward until the hanging groove 301 is disengaged from the first hook 1011. The first hanger 101 is then rotated to prevent the first hook 1011 from interfering with the translation of the first handling assembly 1 and the second handling assembly 2. The substrate 300 is transferred to the second chamber 200 by the first and second transfer units 1 and 2 such that the hanging groove 301 of the substrate 300 is hooked to the second hook 2011.

As an alternative to the conveying mechanism, the first conveying assembly 1 includes an upper clamp 11, and the upper clamp 11 is positioned in cooperation with the upper side of the substrate 300 to position the substrate 300. Specifically, the upper clamping member 11 and the upper side surface of the substrate 300 are provided with a first positioning pin 111 on one and a first positioning hole 303 on the other, and the first positioning pin 111 and the first positioning hole 303 are matched for positioning. Through setting up first locating pin 111 and the cooperation location of first locating hole 303 for the stability of carrying in-process base plate 300 is better, avoids carrying in-process base plate 300 to shift the influence and hang it in second couple 2011 in second chamber 200.

Of course, in other embodiments, the upper clamping member 11 and the upper side of the substrate 300 may be positioned by other means such as a positioning block and a positioning groove.

As an alternative of the conveying mechanism, the first conveying assembly 1 further includes a first linear guide rail 12 and a first driving member 13, one end of the upper clamping member 11 is provided with a first slider, the first slider is matched with the first linear guide rail 12, and the first driving member 13 is used for driving the upper clamping member 11 to move on the first linear guide rail 12.

The first linear guide 12 may be fixedly disposed in the first chamber 100 above the first hanger 101. The first driving member 13 drives the upper clamping member 11 to move from the first chamber 100 to the second chamber 200, so as to cooperate with the second conveying assembly 2 to convey the substrate 300.

As an alternative to the conveying mechanism, the second conveying assembly 2 includes a lower clamp 21, and the lower clamp 21 is engaged with the lower side of the substrate 300 to position the substrate 300. Specifically, in both the lower clamping member 21 and the lower side surface of the substrate 300, one of them is provided with a second positioning pin 211, and the other is provided with a second positioning hole, and the second positioning pin 211 is positioned in cooperation with the second positioning hole.

Similarly, the lower clamping member 21 positions the substrate 300 by the second positioning pins 211 and the second positioning holes. The lengths of the upper clamping piece 11 and the lower clamping piece 21 are basically the same as that of the substrate 300, the first positioning pins 111 are arranged in a plurality along the length direction of the upper clamping piece 11, the second positioning pins 211 are arranged in a plurality along the length direction of the lower clamping piece 21, the upper side surface of the substrate 300 is provided with a plurality of first positioning holes 303, and the lower side surface of the substrate 300 is provided with a plurality of second positioning holes. The first positioning pins 111 are correspondingly matched with the first positioning holes 303, and the second positioning pins 211 are correspondingly matched with the second positioning holes, so as to accurately position the substrate 300.

The lower clamp 21 has positioning and supporting functions, and not only can position the substrate 300, but also can support the weight of the substrate 300, and is a main conveying component. The upper clamping member 11 has the functions of auxiliary positioning and auxiliary supporting, so as to prevent the stability of the substrate 300 during the transportation process from being influenced by the over-height of the substrate 300, and keep the substrate 300 in a stable state.

As an alternative of the conveying mechanism, the second conveying assembly 2 further comprises a second linear guide 22 and a second driving member 25, one end of the lower clamping member 21 is provided with a second slide block 26, the second slide block 26 is matched with the second linear guide 22, and the second driving member 25 is used for driving the lower clamping member 21 to move on the second linear guide 22.

The second linear guide 22 is fixedly disposed in the first chamber 100 and disposed below the first hanger 101. The second driving member 25 drives the lower clamping member 21 to move from the first chamber 100 to the second chamber 200, so as to cooperate with the first conveying assembly 2 to convey the substrate 300.

The first driving piece 13 and the second driving piece 25 are both driving motors, the vacuum coating machine further comprises a control unit, the first driving piece 13 and the second driving piece 25 are both electrically connected with the control unit, and the control unit controls the first driving piece 13 and the second driving piece 25 to be driven simultaneously so as to ensure the synchronism of the movement of the upper clamping piece 11 and the lower clamping piece 21 in the conveying process.

In the present embodiment, the extending direction of the first linear guide 12 and the second linear guide 22 is parallel to the conveying direction. Of course, in other embodiments, the first linear guide 12 and the second linear guide 22 may be disposed at a predetermined angle with respect to the conveying direction.

As an alternative of the conveying mechanism, the second conveying assembly 2 further comprises a lifting assembly 24, the lifting assembly 24 is disposed between the second slider 26 and the lower clamping member 21, and the lifting assembly 24 is used for driving the lower clamping member 21 to lift.

As shown in fig. 5 to 8, in the present embodiment, the hanging groove 301 on the substrate 300 is disposed along the vertical direction of the upright substrate 300, and the avoiding opening 302 is disposed below the hanging groove 301. By arranging the lifting assembly 24 between the second slider 26 and the lower clamping member 21, when the substrate 300 is taken off from the first hook 1011, the lifting assembly 24 drives the lower clamping member 21 to ascend to abut against the lower side surface of the substrate 300, the second positioning pin 211 is inserted into the second positioning hole to position the substrate 300, then the lifting assembly 24 continues to drive the lower clamping member 21 to ascend, so that the substrate 300 continues to ascend, the first hook 1011 gradually disengages from the hanging groove 301, and the avoidance port 302 below moves out. Meanwhile, the first positioning hole 303 on the upper side of the substrate 300 is matched with the first positioning pin 111 on the upper clamping member 11, so that the substrate 300 is supported and positioned by the upper clamping member 11 while being separated from the first hook 1011, and the stability of the substrate 300 is ensured.

Of course, in other embodiments, the lifting assembly 24 may also be disposed between the first slider and the upper clamp 11; or, the lifting assemblies 24 are respectively arranged between the first slider and the upper clamping member 11 and between the second slider 26 and the lower clamping member 21, the two lifting assemblies 24 simultaneously drive the upper clamping member 11 and the lower clamping member 21 to move towards the mutually approaching direction, and simultaneously the clamping substrate 300 moves upwards, so that the hanging groove 301 is separated from the first hook 1011.

Optionally, since the lifting assembly 24 needs to be arranged to drive the lower clamping member 21 to lift, the second conveying assembly 2 further includes an auxiliary linear guide rail 23 and an auxiliary slider 27, the auxiliary linear guide rail 23 is arranged on one side of the second linear guide rail 22, the auxiliary slider 27 is matched with the auxiliary linear guide rail 23, the second slider 26 is connected with the auxiliary slider 27 through a third connecting member, the auxiliary slider 27 is connected with the lower clamping member 21, the second driving member 25 drives the second slider 26 to move, and the second slider 26 drives the auxiliary slider 27 to move, so as to drive the lower clamping member 21 to move. The lifting assembly 24 is arranged between the auxiliary sliding block 27 and the lower clamping piece 21, the height of the auxiliary linear guide rail 23 is lower than that of the second linear guide rail 22, and the auxiliary linear guide rail 23 and the auxiliary sliding block 27 are arranged, so that the space layout is reasonably utilized, and sufficient lifting space is provided for the lifting assembly 24 to drive the lower clamping piece 21 to lift.

As an alternative of the conveying mechanism, a guide assembly 3 is further arranged between the second slide block 26 and the lower clamping piece 21, the guide assembly 3 comprises a guide post 31 and a guide sleeve 32, and the guide post 31 is slidably arranged in the guide sleeve 32; the guide assembly 3 is provided with a plurality of, and the circumference of second slider 26 is all located at a plurality of guide assembly 3 intervals. Through setting up guide post 31 and uide bushing 32 cooperation, stability when can guarantee clamping piece 21 under the lifting unit 24 lifting, restriction lifting unit 24 can only drive clamping piece 21 along vertical direction lift down.

In the present embodiment, the guide assembly 3 is disposed between the auxiliary slider 27 and the lower clamp 21. The auxiliary sliding block 27 is rectangular, four guide assemblies 3 are arranged on the rectangular auxiliary sliding block 27, and the four guide assemblies 3 are distributed at four corners of the rectangular auxiliary sliding block 27, so that the driving stability of the lifting assembly 24 is ensured.

As an alternative to the carrying mechanism, the lifting assembly 24 includes a vacuum motor 241, a ball screw 242, and an inclined guide rail 244, the vacuum motor 241 drives the ball screw 242 to rotate, and the ball screw 242 is drivingly connected to a screw nut to convert the rotational motion of the ball screw 242 into linear motion of the screw nut. The lead screw nut is connected with the inclined plate through a first connecting piece 243, an inclined guide rail 244 is arranged on the back of the inclined plate, a second connecting piece 246 is arranged at the bottom of the lower clamping piece 21, a third sliding block 245 is arranged at one end, far away from the lower clamping piece 21, of the second connecting piece 246, and the third sliding block 245 is matched with the inclined guide rail 244. The screw nut drives the inclined plate to move along the horizontal direction, and the third sliding block 245 can only lift along the vertical direction under the limitation of the guide assembly 3. Referring to fig. 4, when the screw nut moves left to drive the inclined plate to move left, the third sliding block 245 is forced to descend along the inclined rail 244, i.e. the lower clamping member 21 is driven to descend by the second connecting member 246, so that the base plate 300 descends. When the screw nut moves to the right to drive the inclined plate to move to the right, the third slider 245 is forced to ascend along the inclined rail 244 from the low position to the high position, i.e. the lower clamping member 21 is ascended through the second connecting member 246, thereby driving the base plate 300 to ascend. The guide assembly 3 can not only limit the lower clamping member 21 to move in the horizontal direction under the driving of the third sliding block 245, but also bear the torsion borne by the lower clamping member 21, thereby avoiding the damage caused by the overlarge torsion borne by the lower clamping member 21.

Of course, in other embodiments, the lifting assembly 24 may be configured as a linear drive structure such as an electric push rod or a hydraulic rod.

The vacuum coating machine that this embodiment provided uses foretell mechanism of sending for carry base plate 300 to second chamber 200 from first chamber 100, reduced the width of carrying the passageway greatly, occupation space is little, has reduced the heat loss of heating base plate 300, has reduced the energy consumption of preheating, has improved simultaneously and has sent efficiency, thereby has reduced vacuum coating machine's energy consumption, has improved vacuum coating machine's coating film efficiency.

The above description is only for the purpose of illustrating the preferred embodiments of the present invention, and it is to be understood that the present invention is not limited to the above embodiments, but may be modified within the scope of the present invention.

Claims (11)

1. A conveying mechanism for conveying a substrate (300), characterized by comprising:

the substrate conveying device comprises a first conveying assembly (1) and a second conveying assembly (2) which are arranged oppositely, wherein at least one of the first conveying assembly (1) and the second conveying assembly (2) can drive the substrate (300) to move so that the substrate (300) is separated from a carrier; the first conveying assembly (1) and the second conveying assembly (2) can clamp two opposite sides of the substrate (300) to convey the substrate (300), the substrate (300) is provided with a reference surface for measuring thickness, and an included angle between the reference surface for measuring thickness and a conveying direction is smaller than a preset angle.

2. The conveying mechanism according to claim 1, wherein the first conveying member (1) and the second conveying member (2) are respectively provided on opposite sides in a vertical direction, the first conveying member (1) is provided on an upper side, and the second conveying member (2) is provided on a lower side.

3. A handling mechanism according to claim 2, characterized in that the first handling assembly (1) comprises an upper clamp (11), which upper clamp (11) is positioned in cooperation with the upper side of the substrate (300) for positioning the substrate (300).

4. The conveying mechanism according to claim 3, wherein one of the upper clamping piece (11) and the upper side surface of the substrate (300) is provided with a first positioning pin (111), the other one is provided with a first positioning hole (303), and the first positioning pin (111) and the first positioning hole (303) are matched and positioned.

5. A handling mechanism according to claim 3, characterized in that the first handling assembly (1) further comprises a first linear guide (12) and a first driving member (13), wherein a first slider is arranged at one end of the upper clamp (11), the first slider is engaged with the first linear guide (12), and the first driving member (13) is used for driving the upper clamp (11) to move on the first linear guide (12).

6. A handling mechanism according to claim 2, characterized in that the second handling assembly (2) comprises a lower clamp (21), which lower clamp (21) cooperates with the underside of the base plate (300) for positioning the base plate (300).

7. The conveying mechanism according to claim 6, wherein a second positioning pin (211) is provided on one of the lower clamping member (21) and the lower side surface of the substrate (300), and a second positioning hole is provided on the other, and the second positioning pin (211) is positioned in cooperation with the second positioning hole.

8. The handling mechanism according to claim 6, characterized in that the second handling assembly (2) further comprises a second linear guide (22) and a second driving member (25), wherein a second slider (26) is provided at one end of the lower clamp (21), the second slider (26) is engaged with the second linear guide (22), and the second driving member (25) is used for driving the lower clamp (21) to move on the second linear guide (22).

9. The conveying mechanism according to claim 8, wherein the second conveying assembly (2) further comprises a lifting assembly (24), the lifting assembly (24) is arranged between the second slider (26) and the lower clamping member (21), and the lifting assembly (24) is used for driving the lower clamping member (21) to lift.

10. The conveying mechanism according to claim 9, characterized in that a guide assembly (3) is further arranged between the second slide block (26) and the lower clamping piece (21), the guide assembly (3) comprises a guide post (31) and a guide sleeve (32), and the guide post (31) is slidably arranged in the guide sleeve (32); the guide assembly (3) is provided with a plurality of guide assemblies (3), and the guide assemblies (3) are arranged in the circumferential direction of the second sliding block (26) at intervals.

11. Vacuum coater characterized in that it comprises a first chamber (100), a second chamber (200) and a transfer mechanism according to any of claims 1-10 for transferring said substrate (300) from said first chamber (100) to said second chamber (200).

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