CN217787137U - Rotating device for atomic force microscope - Google Patents
Rotating device for atomic force microscope Download PDFInfo
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- CN217787137U CN217787137U CN202222076117.0U CN202222076117U CN217787137U CN 217787137 U CN217787137 U CN 217787137U CN 202222076117 U CN202222076117 U CN 202222076117U CN 217787137 U CN217787137 U CN 217787137U
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Abstract
The utility model discloses a rotary device for atomic force microscope, include: the device comprises a device outer frame, wherein a base is arranged in the device outer frame, the upper end of the base is rotationally connected with a carrying selection rotating platform, a carrying platform is fixedly arranged at the central position of the rotating platform, clamps are symmetrically and fixedly arranged on the rotating platform, and a suspended horizontal rotating mechanism is fixedly arranged at the lower end of the base; and the vertical rotating mechanism is rotatably connected with the device outer frame, a driving shaft of the vertical rotating mechanism is fixedly connected with the rotating table and the objective table, and the end part of the driving shaft is rotatably connected with the device outer frame. The utility model discloses a vertical rotary mechanism who sets up adjusts the inclination of objective table, makes the inclined plane rotation of sample become with the probe horizontal plane relatively perpendicular, and the complete formation of image of the sample appearance of being convenient for prevents simultaneously that the probe from being damaged because of unable lifting up.
Description
Technical Field
The utility model belongs to the technical field of atomic force microscope, more specifically say, the utility model relates to a rotary device for atomic force microscope.
Background
An Atomic Microscope (Atomic Force Microscope) is an analytical instrument for researching the surface structure of solid material including insulator, and its principle is that one end of a pair of micro-cantilever which is extremely sensitive to weak Force is fixed, and the micro-needle point at the other end is close to the sample, at this time it will interact with it, and the acting Force will make the micro-cantilever deform or change its motion state, and then the laser irradiated on the micro-cantilever is fed back to the feedback system by means of reflecting mirror and other components, then the sensor detects these changes, and the acting Force distribution information can be obtained by means of control system, so that the nano-resolution can be appeared on the display system to obtain the information of surface appearance structure information and surface roughness.
Because the probe moves in the z-axis direction with a certain range limitation, when the surface roughness of the tested sample is too large and the surface is uneven, the height difference of the surface topography of the sample is larger than the displacement range of the probe in the z-axis direction, so that the probe cannot completely contact the real surface of the sample when scanning the surface topography of the sample, and the instrument cannot feed back the real topography of the surface of the sample. And if the surface of the tested sample is not flat, the probe cannot completely contact the real surface of the sample when the height difference of the appearance is larger than the displacement measuring range of the probe in the z-axis direction, so that the real appearance of the surface of the sample cannot be fed back by an instrument. When scanning from a high place to a low place, the probe on the surface of the low place can not contact due to the limitation of displacement range, so that the real appearance at the position can not be fed back for imaging, and if scanning from the low place to the high place, the probe can not be completely lifted and damaged. The existing atomic force microscope rotating devices, such as the invention patent with the publication number CN112630472B and the invention patent with the publication number CN109917156B, respectively disclose "a high-precision sample rotating platform device based on an atomic force microscope" and "a rotating sample platform device based on an atomic force microscope", wherein the rotating devices in the two patents are both used for realizing the horizontal rotation of a sample, and cannot realize the adjustment of the inclination angle of the sample, so that the technical problem that a probe is damaged because the probe cannot be lifted completely cannot be solved.
SUMMERY OF THE UTILITY MODEL
An object of the present invention is to solve at least the above problems and/or disadvantages and to provide at least the advantages which will be described later.
To achieve these objects and other advantages in accordance with the purpose of the invention, there is provided a rotation device for an atomic force microscope, including: the device comprises a device outer frame, a base is arranged in the device outer frame, the upper end of the base is rotatably connected with a rotating platform, an object stage is fixedly arranged at the central position of the rotating platform, and clamps are symmetrically and fixedly arranged on the rotating platform;
and the vertical rotating mechanism is rotationally connected with the device outer frame, a driving shaft of the vertical rotating mechanism is fixedly connected with the rotating table and the objective table, and the end part of the driving shaft is rotationally connected with the device outer frame.
Preferably, wherein the vertical rotation mechanism comprises:
the rotating plate is fixedly provided with a vertical rotating motor, and a motor shaft of the vertical rotating motor is connected with the driving shaft through a coupler;
the device outer frame is provided with an annular hole, two ends of the driving shaft are movably arranged in the annular hole in a penetrating mode, and the middle of the driving shaft is fixedly connected with the objective table and the rotating table;
the device frame is provided with an annular groove, the annular groove is located below the annular hole, a sliding ring is rotatably arranged in the annular groove through a bearing, and the rotating plate is fixedly connected with the sliding ring.
Preferably, wherein the horizontal rotation mechanism comprises:
supporting seat, its upper end is through link and base fixed connection, install the horizontal rotation motor in the supporting seat, the motor shaft of horizontal rotation motor has the axis of rotation through the coupling joint, the axis of rotation rotates with the base to be connected, the tip and the revolving stage fixed connection of axis of rotation.
Preferably, the lower end of the upper end edge of the outer frame of the device is provided with an upper end annular chute, a tail plate is connected in the upper end annular chute in a sliding mode, and the tail plate is rotatably connected with the end portion of the driving shaft through a bearing.
Preferably, the drive shaft is fixedly connected to the rotary table by a flat key.
Preferably, the device outer frame is provided with a lower port for rotating the horizontal rotation mechanism, and a support is fixedly arranged at the lower end of the device outer frame.
The utility model discloses at least, include following beneficial effect: the utility model discloses a vertical rotary mechanism who sets up adjusts the inclination of objective table, makes the inclined plane rotation of sample become with the probe horizontal plane relatively perpendicular, and the complete formation of image of the sample appearance of being convenient for prevents simultaneously that the probe from being damaged because of unable lifting up. The purpose of setting up anchor clamps is fixed sample, and the object stage can not slide when revolving stage inclines and lead to the test failure. Horizontal rotating mechanism's setting is used for driving the horizontal rotation who adjusts objective table and revolving stage for realize carrying out multi-angle scanning to the sample on the revolving stage.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention.
Drawings
Fig. 1 is a schematic cross-sectional structural view of a rotating apparatus for an atomic force microscope according to the present invention;
fig. 2 is a schematic structural diagram of the upper part of a rotating device for an atomic force microscope.
Detailed Description
The present invention is further described in detail below with reference to the drawings so that those skilled in the art can implement the invention with reference to the description.
It will be understood that terms such as "having," "including," and "comprising," as used herein, do not preclude the presence or addition of one or more other elements or groups thereof.
It should be noted that in the description of the present invention, the terms indicating the orientation or the positional relationship are based on the orientation or the positional relationship shown in the drawings, and are only for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the indicated device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "sleeved/connected," "connected," and the like are to be construed broadly, such as "connected," which may be a fixed connection, a detachable connection, or an integral connection, a mechanical connection, an electrical connection, a direct connection, an indirect connection via an intermediate medium, or a connection between two elements, and those skilled in the art will understand the specific meaning of the terms in the present invention in a specific context.
Furthermore, in the present disclosure, unless explicitly stated or limited otherwise, a first feature may be "on" or "under" a second feature in direct contact with the first and second features, or in indirect contact with the first and second features through an intermediate. Also, a first feature "on," "above," and "over" a second feature may be directly on or obliquely above the second feature, or simply mean that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
As shown in fig. 1 and 2, the present invention provides a rotating device for an atomic force microscope, including: the device comprises a device outer frame 1, wherein a base 2 is arranged in the device outer frame, the upper end of the base 2 is rotatably connected with a rotating platform 3, an object stage 4 is fixedly arranged at the central position of the rotating platform 3, clamps 5 are symmetrically and fixedly arranged on the rotating platform 3, and a suspended horizontal rotating mechanism is fixedly arranged at the lower end of the base 2;
and the vertical rotating mechanism is rotatably connected with the device outer frame 1, a driving shaft 6 of the vertical rotating mechanism is fixedly connected with the rotating platform 3 and the objective table 4, and the end part of the driving shaft 6 is rotatably connected with the device outer frame 1.
The working principle is as follows: the utility model provides a rotary device for atomic force microscope when carrying out nondestructive test surface defect to the sample that awaits measuring, the testing procedure includes: the sample 30 to be measured is prepared, and the length and width of the sample to be measured are required to be less than 20mm × 20mm. Cleaning the sample to be tested requires that the surface of the sample to be tested is as clean as possible to avoid contaminating the needle tip during the testing process. The sample 30 to be measured is placed on the stage 4, and is held by the holder 5. And installing the probe, and primarily observing the surface appearance of the sample by using an optical lens. The laser is installed and the light path is adjusted to ensure that the laser is just at the position of the probe on the cantilever beam. And performing a needle inserting process to ensure that the probe is well contacted with the surface of the sample to be tested to meet the test requirement. The unevenness of the sample surface was preliminarily observed by pre-scanning. After the probe is withdrawn, the inclination angles of the rotating platform 3 and the object stage 4 are adjusted through the vertical rotating mechanism according to the unevenness degree of the surface of the sample so as to ensure that the inclined plane on the surface of the sample rotates to a horizontal plane which is relatively vertical to the probe. And re-inserting the needle to complete the scanning test process to obtain the real appearance of the surface of the sample. Therefore, the utility model discloses the vertical rotary mechanism who sets up drives objective table 4 and revolving stage 3 through drive shaft 6 and rotates to adjust objective table 4's inclination, make the inclined plane rotation of the sample that awaits measuring become with the probe horizontal plane relatively perpendicular, the complete formation of image of the sample appearance of being convenient for prevents simultaneously that the probe from being damaged because of can't lifting up. The purpose of setting up anchor clamps is in the fixed sample that awaits measuring, can not slide when objective table 4 and revolving stage 3 slope and lead to the test failure. Horizontal rotating mechanism's setting is used for driving the horizontal rotation who adjusts objective table 4 and revolving stage 3 for the realization carries out multi-angle scanning to the sample on objective table 4. The outer frame 1 is the outer structure of the whole rotating device and plays a role in protecting a sample to be tested, the objective table 4 and the rotating table 3. The base 2 serves as a carrier stage 4 and a stationary horizontal swivel mechanism. When the vertical rotating mechanism drives the object stage 4 and the rotating platform 3 to rotate, the horizontal rotating mechanism must rotate together, so that the horizontal rotating mechanism needs a certain movement space, and the horizontal rotating mechanism is suspended.
In the above technical solution, the vertical rotation mechanism includes:
the rotating plate 7 is fixedly provided with a vertical rotating motor 8, and a motor shaft of the vertical rotating motor 8 is connected with the driving shaft 6 through a coupler;
the device outer frame 1 is provided with an annular hole 101, two ends of the driving shaft 6 movably penetrate through the annular hole 101, and the middle part of the driving shaft 6 is fixedly connected with the objective table 4 and the rotating table 3;
the device outer frame 1 is provided with an annular groove 102, the annular groove 102 is positioned below the annular hole 101, a sliding ring 9 is rotatably arranged in the annular groove 102 through a bearing, and the rotating plate 7 is fixedly connected with the sliding ring 7. In the vertical rotating mechanism with the structure, when the horizontal rotating mechanism drives the objective table 4 and the rotating table 3 to rotate horizontally, the rotating plate 7 and the vertical rotating motor 8 rotate together with the objective table 4 and the rotating table 3; the annular groove 102 provides a mounting position of the bearing, and simultaneously, the annular groove is matched with the sliding ring 7 to support and bear the whole vertical rotating mechanism.
In the above technical solution, the horizontal rotation mechanism includes:
supporting seat 10, its upper end is through link 11 and base 2 fixed connection, install horizontal rotation motor 12 in 10 of supporting seat, horizontal rotation motor 12's motor shaft has axis of rotation 121 through the coupling joint, axis of rotation 121 rotates with base 2 to be connected, the tip and the revolving stage 3 fixed connection of axis of rotation 121. The supporting seat 10 is fixedly connected with the base 2, and the whole horizontal rotating mechanism is suspended and hoisted, so that a certain space is provided for the inclination of the horizontal rotating mechanism; the horizontal rotation mechanism drives the object stage 4 and the rotating platform 3 to horizontally rotate through the rotating shaft 121, so that the scanning horizontal position of the sample to be detected is adjusted.
In the above technical scheme, the lower end of the upper end edge of the device outer frame 1 is provided with an upper end annular chute 103, the upper end annular chute 103 is connected with a tail plate 13 in a sliding manner, and the tail plate 13 is rotatably connected with the end part of the driving shaft 6 through a bearing. When the vertical rotating mechanism rotates along with the object stage 4 and the rotating platform 3, the tail plate 13 synchronously rotates, and the arrangement of the tail plate 13 advances one to provide support for the vertical rotating mechanism.
In the above technical solution, the driving shaft 6 is fixed to the rotating table 3 by a flat key, and the fixing method is simple to mount and dismount and has an excellent fixing effect on the driving shaft 6.
In the above technical solution, the apparatus frame 1 is provided with a lower port 104 for rotating the horizontal rotation mechanism, and a support 105 is fixedly provided at the lower end of the apparatus frame 1.
The number of apparatuses and the scale of the process described here are intended to simplify the description of the present invention. Applications, modifications and variations of the present invention will be apparent to those skilled in the art.
While the embodiments of the invention have been described above, it is not intended to be limited to the details shown, particular embodiments, but rather to those skilled in the art, having the benefit of the teachings of the present invention, which is capable of numerous modifications and alternative forms, and will be readily apparent to those skilled in the art, and it is not intended to limit the invention to the details shown and described without departing from the general concepts defined by the appended claims and their equivalents.
Claims (6)
1. A rotation apparatus for an atomic force microscope, comprising: the device comprises a device outer frame, a base is arranged in the device outer frame, the upper end of the base is rotatably connected with a rotating platform, an object stage is fixedly arranged at the central position of the rotating platform, and clamps are symmetrically and fixedly arranged on the rotating platform;
and the vertical rotating mechanism is rotationally connected with the device outer frame, a driving shaft of the vertical rotating mechanism is fixedly connected with the rotating table and the objective table, and the end part of the driving shaft is rotationally connected with the device outer frame.
2. The rotation apparatus for an atomic force microscope according to claim 1, wherein the vertical rotation mechanism comprises:
the rotating plate is fixedly provided with a vertical rotating motor, and a motor shaft of the vertical rotating motor is connected with the driving shaft through a coupler;
the outer frame of the device is provided with an annular hole, two ends of the driving shaft movably penetrate through the annular hole, and the middle part of the driving shaft is fixedly connected with the objective table and the rotating table;
the device frame is provided with an annular groove, the annular groove is located below the annular hole, a sliding ring is rotatably arranged in the annular groove through a bearing, and the rotating plate is fixedly connected with the sliding ring.
3. The rotary device for an atomic force microscope according to claim 1, wherein the horizontal rotation mechanism comprises:
the supporting seat, its upper end is through link and base fixed connection, install the horizontal rotation motor in the supporting seat, the motor shaft of horizontal rotation motor has the axis of rotation through the coupling joint, the axis of rotation rotates with the base to be connected, the tip and the revolving stage fixed connection of axis of rotation.
4. The rotating apparatus according to claim 2, wherein the lower end of the upper edge of the outer frame has an upper annular sliding slot, and a tail plate is slidably connected to the upper annular sliding slot and rotatably connected to the end of the driving shaft via a bearing.
5. The rotating apparatus for an atomic force microscope according to claim 1, wherein the driving shaft is fixedly connected to the rotating table by a flat key.
6. The rotating apparatus for an atomic force microscope according to claim 1, wherein the apparatus housing is provided with a lower port for rotating the horizontal rotating mechanism, and a support is fixedly provided at a lower end of the apparatus housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222076117.0U CN217787137U (en) | 2022-08-09 | 2022-08-09 | Rotating device for atomic force microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222076117.0U CN217787137U (en) | 2022-08-09 | 2022-08-09 | Rotating device for atomic force microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217787137U true CN217787137U (en) | 2022-11-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222076117.0U Active CN217787137U (en) | 2022-08-09 | 2022-08-09 | Rotating device for atomic force microscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217787137U (en) |
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2022
- 2022-08-09 CN CN202222076117.0U patent/CN217787137U/en active Active
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