CN217738527U - Oil injection type pressure sensor - Google Patents
Oil injection type pressure sensor Download PDFInfo
- Publication number
- CN217738527U CN217738527U CN202221259914.6U CN202221259914U CN217738527U CN 217738527 U CN217738527 U CN 217738527U CN 202221259914 U CN202221259914 U CN 202221259914U CN 217738527 U CN217738527 U CN 217738527U
- Authority
- CN
- China
- Prior art keywords
- filling cavity
- pressure
- base
- kovar alloy
- filling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
The utility model discloses an oil injection type pressure sensor, belonging to the technical field of sensors and comprising a base, a pressure-sensitive isolation corrugated diaphragm, a pressure-sensitive chip, a kovar alloy base, a compensating plate and a kovar alloy guide needle; the base is sequentially provided with a first filling cavity, a second filling cavity and a third filling cavity along the axial direction, and pressure sensing media are filled in the first filling cavity and the second filling cavity; the pressure-sensing isolation corrugated diaphragm is arranged at the port of the first filling cavity; the kovar alloy base is arranged between the second filling cavity and the third filling cavity; the pressure sensing chip and the kovar alloy guide needle are arranged on the kovar alloy base and are connected through a lead; the compensation plate is used for temperature compensation. The problem of among the prior art because traditional oiling formula pressure sensor's temperature drift performance is poor, the time drift performance that leads to, long-term stability and power-on stability are relatively poor, can't be applicable to the measurement requirement in the small range scope is solved.
Description
Technical Field
The utility model belongs to the technical field of the sensor, a oiling formula pressure sensor is related to.
Background
Oiling formula pressure sensor passes through diaphragm, inside seal's silicon oil extrusion pressure sensing chip with pressure sensing chip package in the stainless steel cavity, and external pressure changes into the analog signal that can be by the perception, and foreign matter does not direct action simultaneously presses the pressure sensing chip, therefore this product can be applied to various occasions, including abominable corrosive medium environment.
A conventional oil-filled pressure sensor generally includes a metal housing, a fill fluid, a pressure-sensitive isolating corrugated diaphragm, a pressure chip, and a compensation plate, the pressure chip being mounted on a sintered base. The oil-filled pressure sensor product with the structure is often in a small-range, and due to poor temperature drift performance, time drift performance, long-term stability and power-on stability are poor, so that the oil-filled pressure sensor product cannot meet the measurement requirement in the small-range.
Therefore, an oil injection type pressure sensor with good stability and capable of reducing temperature drift is needed to meet the measurement requirement in a small range.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve among the prior art because traditional oiling formula pressure sensor's temperature floats the performance poor, the time that leads to floats performance, long-term stability and goes up electrical stability relatively poor, can't be applicable to the within range measurement requirement problem of small-scale range, provide a low temperature and float, high sensitivity, high accuracy, high stability, high reliable's high stable oiling pressure sensor to satisfy the measurement requirement of small-scale range.
In order to achieve the above purpose, the utility model adopts the following technical scheme to realize:
the utility model provides an oil injection type pressure sensor, which comprises a base, a pressure sensing isolation corrugated diaphragm, a pressure sensing chip, a kovar alloy base, a compensating plate and a kovar alloy guide needle; the base is sequentially provided with a first filling cavity, a second filling cavity and a third filling cavity along the axial direction, the first filling cavity is communicated with the second filling cavity through a pressure guide hole, and pressure sensing media are filled in the first filling cavity and the second filling cavity; the pressure-sensing isolation corrugated diaphragm is arranged at the port of the first filling cavity and covers the port of the first filling cavity; the kovar alloy base is arranged between the second filling cavity and the third filling cavity; the pressure sensing chip is arranged on the kovar alloy base; the kovar alloy guide needle penetrates through the third filling cavity to be inserted on the kovar alloy base and is connected with the pressure sensing chip through a lead; the compensation plate is arranged in the third filling cavity, sleeved on the kovar alloy guide needle and used for temperature compensation.
Preferably, the end of the base near the first fill cavity is provided with a locating ring for locating the pressure sensitive isolating bellows diaphragm.
Preferably, one end of the kovar alloy base, which is close to the second filling cavity, is provided with a ceramic filling body for protecting the pressure sensing chip.
Preferably, the kovar alloy base is provided with a filling hole.
Preferably, a sealing steel ball or a conical steel needle is arranged in the filling hole and used for sealing the filling hole.
Preferably, the pressure-sensitive medium is silicone oil or fluorine oil.
Preferably, the third filling cavity is filled with silica gel for protecting components in the third filling cavity.
Preferably, the kovar alloy base is further provided with an air vent, and the air vent is communicated with the atmosphere outside the sensor.
Preferably, the wire is a gold-plated wire.
Preferably, a first stress relief groove is formed in the base in the first filling cavity, a second stress relief groove is formed in the base in the third filling cavity, and a third stress relief groove is formed in the outer portion of the base; the first stress relief groove, the second stress relief groove and the third stress relief groove are used for reducing the influence of pressure on the base.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model provides an oiling formula pressure sensor through installing the pressure sensing chip on kovar alloy base to and the setting in first packing chamber, increased the pressure sensing stress area of pressure sensing isolation ripple diaphragm, make pressure sensing isolation ripple diaphragm can fully with external pressure sensing medium contact, play the effect that pressure balance, atress are even, and then improve the stability and the accuracy of sensor. Secondly, the first filling cavity and the second filling cavity are arranged in a penetrating and grading mode through the pressure guide holes, so that the oil filling cavity of the sensor is smaller than the traditional oil filling cavity, the filling amount of pressure sensing media filled into the total cavity is reduced, the temperature drift caused by cold and hot expansion of the pressure sensing media is further reduced, the principle that the thermal expansion coefficient of kovar alloy and a silicon piezoresistive substrate is close is utilized, the kovar alloy guide needle and the kovar alloy base are arranged, the stability and the low temperature drift performance of the oil filling type pressure sensor are further improved through simultaneous optimization on the structure and the materials, the low temperature drift, the high sensitivity, the high precision, the high stability and the high reliability of the oil filling type pressure sensor are further improved, the measurement requirement of a small range is met, and the applicability of the oil filling type pressure sensor is improved.
The setting of holding ring is used for keeping apart fixed and the location of ripple diaphragm to pressure sensing, has realized keeping apart the installation and fixed of ripple diaphragm on the base to pressure sensing, simple structure, easy operation.
The ceramic filling body can protect the pressure sensing chip from being damaged on the one hand, and on the other hand can occupy a certain space, so that the filling amount of the pressure sensing media is further reduced, the temperature drift caused by cold and hot expansion of the pressure sensing media is further reduced, and the stability and the accuracy of the sensor are improved.
Silica gel filled in the third filling cavity can provide insulation, dust prevention and protection effects for parts in the filling cavity, so that the service life of the oil injection type pressure sensor is prolonged, and the maintenance cost is reduced.
The stress release groove is arranged, so that the stress influence of external pressure on the base can be reduced to the maximum extent, and the service life of the base is prolonged.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and those skilled in the art can also obtain other related drawings based on the drawings without inventive efforts.
Fig. 1 is a sectional view of an oil injection type pressure sensor according to the present invention.
Fig. 2 is the structure diagram is disassembled to the oiling formula pressure sensor of the utility model (a is the holding ring structure diagram, b is the pressure sensing and keeps apart the ripple diaphragm structure diagram, c is the base structure diagram, d is the pottery obturator structure diagram, e is the pressure sensing chip structure diagram, f is the kovar base structure diagram).
The pressure-sensitive isolation corrugated diaphragm structure comprises, by weight, 1-a positioning ring, 2-a pressure-sensitive medium, 3-a wire, 4-a base, 5-a kovar alloy base, 6-a pressure-sensitive chip, 7-a pressure-sensitive isolation corrugated diaphragm, 8-a ceramic filling body, 9-a hole-sealing steel ball, 10-a compensation plate, 11-a pressure guide hole, 12-a kovar alloy guide pin, 13-a filling hole, 14-an air guide hole, 101-a first stress release groove, 102-a second stress release groove, 103-a third stress release groove, 104-a first filling cavity, 105-a second filling cavity and 106-a third filling cavity.
Detailed Description
To make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the attached drawings in the embodiments of the present invention are combined to clearly and completely describe the technical solution in the embodiments of the present invention, and obviously, the described embodiments are part of the embodiments of the present invention, rather than all embodiments. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without making creative efforts belong to the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the embodiments of the present invention, it should be noted that, if the terms "upper", "lower", "horizontal", "inner", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, or the orientation or position relationship that the product of the present invention is usually placed when in use, the description is only for convenience of description and simplification, but the indication or suggestion that the device or element to be referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be interpreted as limiting the present invention. Furthermore, the terms "first," "second," and the like are used solely to distinguish one from another, and are not to be construed as indicating or implying relative importance.
Furthermore, the term "horizontal", if present, does not mean that the component is required to be absolutely horizontal, but may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the embodiments of the present invention, it should be further noted that unless otherwise explicitly stated or limited, the terms "set", "mounted", "connected" and "connected" should be interpreted broadly, and may be, for example, a fixed connection, a detachable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.
The present invention will be described in further detail with reference to the accompanying drawings:
referring to fig. 1 and 2, the present invention provides an oil injection type pressure sensor, which includes a base 4, wherein the base 4 is a stainless steel base, and a first filling cavity 104, a second filling cavity 105 and a third filling cavity 106 are sequentially formed along an axial direction of the base 4; the end part of the first filling cavity 104 is fixedly connected with a pressure-sensing isolating corrugated diaphragm 7 through a positioning ring 1; the first filling cavity 104 is communicated with the second filling cavity 105 through the pressure guide hole 11, the first filling cavity 104 and the second filling cavity 105 are filled with a pressure sensing medium 2, and the pressure sensing medium 2 is insulating, high-reliability, high-stability and low-temperature liquid, such as non-conductive low-temperature coefficient medium such as silicone oil or fluorine oil; the second filling cavity 105 and the third filling cavity 106 are separated by a kovar alloy base 5; the kovar alloy base 5 is provided with a pressure sensing chip 6 and a ceramic filler 8, and the pressure sensing chip 6 and the ceramic filler 8 are positioned in a second filling cavity 105; a Kovar alloy lead needle 12 is further inserted on the Kovar alloy base 5, the Kovar alloy lead needle 12 is connected with the pressure sensing chip 6 through a lead 3, wherein the lead 3 is a gold-plated lead; the kovar alloy base 5 is also provided with a filling hole 13 and an air guide hole 14, the filling hole 13 is sealed by a hole sealing steel ball 9, and the air guide hole 14 is communicated with the atmosphere outside the sensor; the kovar alloy guide needle 12 in the third filling cavity 106 is further sleeved with a compensation plate 10 for temperature compensation, the compensation plate 10 is a thick film compensation plate and a compensation circuit board after temperature compensation of the sensor, and a PCB or thick film ceramic compensation plate is adopted for integrating a passive element, so that the temperature of the sensor can be subjected to migration compensation and an output zeroing effect is achieved; the third filling cavity 106 is filled with silica gel for insulation, dust prevention and internal part protection.
Preferably, a first stress relief groove 101 is arranged in the first filling cavity 104, and a second stress relief groove 102 is arranged in the second filling cavity 105; a third stress relief groove 103 is formed in the mounting position of the external sensor of the base 4; the first stress relief groove 101, the second stress relief groove 102 and the third stress relief groove 103 are arranged to reduce the stress influence of the external pressure on the base 4 to the maximum.
The specific installation process is as follows;
installing a pressure sensing chip 6 on the kovar alloy base 5, and installing a ceramic filler 8 on the kovar alloy base 5;
the leads of the pressure-sensitive chip 6 and the kovar alloy base 5 are coplanar, and the pressure-sensitive chip 6 and the kovar alloy lead needle 12 are connected through a lead 3 by using a gold wire bonding technology;
sealing the Kovar alloy base 5 provided with the pressure sensing chip 6 and the base 4 together by adopting a high-current sealing technology;
welding the pressure-sensitive isolating corrugated diaphragm 7 on the opening of the first filling cavity 104 by a highly reliable laser welding technique;
filling a pressure-sensitive medium 2 into the second filling cavity 105 and the first filling cavity 104 through the filling hole 13 on the kovar alloy base 5, so that the pressure-sensitive medium submerges the pressure-sensitive chip 6 and the ceramic filler 8 until the second filling cavity 105 is filled, and sealing the filling hole 13 through a rigid hole sealing steel ball 9 or a conical steel needle;
embedding the compensating plate 10 in the third filling cavity 106 and connecting the compensating plate with the kovar alloy base guide pin 12;
a silicone gel is filled in the third filling cavity 106 for protecting the compensation plate 10.
When the pressure-sensing isolation corrugated diaphragm 7 obtains the external pressure change, the received pressure change quantity is transmitted to the pressure-sensing chip 6 through the pressure-sensing media 2, the pressure-sensing chip 6 detects the pressure signal intensity, the pressure signal is converted into an electric signal, the electric signal is transmitted to the kovar alloy guide needle 12 of the kovar alloy base 5, and finally the pressure signal is output to realize the detection of the pressure.
To sum up, oiling formula pressure sensor, through fill the chamber with pressure sensing chip mounted position and to the setting of kovar alloy base and kovar alloy guide pin to traditional sensor, both reached and reduced the temperature drift that 2 cold thermal expansions of pressure sensing media arouse, improve the purpose of sensor stability and accuracy, simplified pressure sensor's structure again, reduced pressure sensor's cost, reduced the degree that pressure receives the sensor temperature to influence, make the ware satisfy the measurement requirement of small-scale range, improve the suitability.
The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. An oil injection type pressure sensor is characterized by comprising a base (4), a pressure sensing isolation corrugated diaphragm (7), a pressure sensing chip (6), a kovar alloy base (5), a compensating plate (10) and a kovar alloy guide pin (12); the base (4) is sequentially provided with a first filling cavity (104), a second filling cavity (105) and a third filling cavity (106) along the axial direction, the first filling cavity (104) is communicated with the second filling cavity (105) through a pressure guide hole (11), and pressure sensing media (2) are filled in the first filling cavity (104) and the second filling cavity (105); the pressure-sensitive isolation corrugated diaphragm (7) is arranged at the port of the first filling cavity (104) and covers the port of the first filling cavity (104); the kovar alloy base (5) is arranged between the second filling cavity (105) and the third filling cavity (106); the pressure sensing chip (6) is arranged on the kovar alloy base (5); the kovar alloy guide needle (12) penetrates through the third filling cavity (106) to be inserted on the kovar alloy base and is connected with the pressure sensing chip (6) through the lead (3); the compensation plate (10) is arranged in the third filling cavity (106) and sleeved on the kovar alloy guide needle (12) for temperature compensation.
2. The sensor according to claim 1, characterised in that the end of the base (4) close to the first filling chamber is provided with a positioning ring (1) for positioning a pressure-sensitive isolating bellows (7).
3. The oiling pressure sensor according to claim 1, characterized in that the kovar alloy base (5) is provided with a ceramic filler (8) at the end close to the second filling cavity (105) for protecting the pressure sensing chip (6).
4. The sensor according to claim 1, characterized in that the kovar base (5) is provided with a filling hole (13).
5. The oil injection type pressure sensor according to claim 4, wherein a sealing steel ball (9) or a conical steel needle is arranged in the filling hole (13) for sealing the filling hole (13).
6. The oiling pressure sensor according to claim 1, wherein the pressure-sensitive medium (2) is silicone oil or fluoro-oil.
7. The oiling pressure sensor according to claim 1, wherein the third fill cavity (106) is filled with silicone for protecting components inside the third fill cavity (106).
8. The oiling pressure sensor according to claim 1, wherein the kovar alloy base (5) is further provided with an air vent (14), and the air vent (14) is communicated with the atmosphere outside the sensor.
9. The oiling pressure sensor according to any of claims 1-8, wherein the wire (3) is a gold plated wire.
10. The sensor according to any one of claims 1 to 8, wherein a first stress relief groove (101) is provided in the base (4) in the first filling chamber (104), a second stress relief groove (102) is provided in the base (4) in the third filling chamber (106), and a third stress relief groove (103) is provided in the outer portion of the base (4); the first stress relief groove (101), the second stress relief groove (102) and the third stress relief groove (103) are used for reducing the influence of pressure on the base (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221259914.6U CN217738527U (en) | 2022-05-24 | 2022-05-24 | Oil injection type pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221259914.6U CN217738527U (en) | 2022-05-24 | 2022-05-24 | Oil injection type pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217738527U true CN217738527U (en) | 2022-11-04 |
Family
ID=83836534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221259914.6U Active CN217738527U (en) | 2022-05-24 | 2022-05-24 | Oil injection type pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217738527U (en) |
-
2022
- 2022-05-24 CN CN202221259914.6U patent/CN217738527U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7370536B2 (en) | Pressure sensor device and pressure sensor cell thereof | |
| CA2325903C (en) | Pressure sensor | |
| US6550337B1 (en) | Isolation technique for pressure sensing structure | |
| KR100968055B1 (en) | Pressure sensor module | |
| US6883380B2 (en) | Pressure sensor capsule | |
| US20050120798A1 (en) | Isolated pressure transducer | |
| CN109696268B (en) | Pressure sensor assembly | |
| US20050087020A1 (en) | Pressure sensor device and cell thereof | |
| WO2000045143A1 (en) | Media compatible packages for pressure sensing devices | |
| US6997059B2 (en) | Pressure sensor | |
| CN217738527U (en) | Oil injection type pressure sensor | |
| CN215893878U (en) | High-temperature-resistant oil-filled pressure detection device | |
| JPS6221031A (en) | Pressure sensor unit | |
| CN210689903U (en) | High-reliability pressure sensor | |
| CN113624368A (en) | High-temperature-resistant oil-filled SOI pressure sensor | |
| CN110749394A (en) | High-reliability pressure sensor | |
| CN215178314U (en) | Pressure sensor | |
| CN220932234U (en) | High temperature resistant force transducer | |
| CN216899394U (en) | Same-cavity oil-filled type double-chip pressure sensor | |
| CN215984997U (en) | Medium isolation type pressure sensor | |
| CN209878186U (en) | Pressure sensor packaging structure | |
| CN220104357U (en) | Pressure core | |
| CN113551826A (en) | Pressure sensor and preparation method thereof | |
| CN118225301A (en) | Immersion pressure sensor | |
| JPH03194432A (en) | Semiconductor pressure sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |