CN217726112U

CN217726112U - Annular ultrasonic transducer

Info

Publication number: CN217726112U
Application number: CN202122532253.1U
Authority: CN
Inventors: 柯晴青; 安潇翔
Original assignee: Sun Yat Sen University
Current assignee: Sun Yat Sen University
Priority date: 2021-10-20
Filing date: 2021-10-20
Publication date: 2022-11-04
Anticipated expiration: 2031-10-20

Abstract

The utility model relates to a transducer technical field discloses an annular ultrasonic transducer, the transducer includes: the matching layer, the piezoelectric layer and the back lining layer are sequentially arranged, the piezoelectric layer comprises a concentric annular electrode and a metal conductive electrode, the concentric annular electrode is arranged on one surface of the piezoelectric layer opposite to the matching layer, and the metal conductive electrode is arranged on the other surface of the piezoelectric layer opposite to the back lining layer. The utility model discloses a leadless ceramic that the acoustic impedance is low has simplified the electrode connection mode through concentric annular electrode structure as the piezoelectric layer, has avoided echo signal's interference.

Description

Annular ultrasonic transducer

Technical Field

The utility model relates to a transducer technical field especially relates to an annular ultrasonic transducer.

Background

At present, the ultrasonic transducer is widely applied and used in various industries such as transportation, medical treatment and the like, and most of the ultrasonic transducers are unit type ultrasonic transducers, but the ultrasonic transducers have the defects of low resolution and frame frequency, so that the array transducer can be adopted.

Compared with the condition that the imaging frame frequency of the single array element transducer is not high, the number of the array elements of the linear array transducer is large, and the manufacturing process is complex, all the array elements of the annular array transducer are symmetrically distributed, and a high-resolution focusing sound field can be generated on the central axis by using less array elements. However, the piezoelectric ceramic commonly used in the annular ultrasonic transducer is lead zirconate titanate, and the main component of the traditional piezoelectric ceramic, namely lead oxide, is a volatile toxic substance, so that the environmental pollution is caused, and the health of human bodies and other organisms is seriously harmed. Furthermore, array element separation on the piezoelectric layer usually uses a cutting method to form gaps between array elements, and such burrs on the cut gaps can cause interference to echo signals.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides an annular ultrasonic transducer adopts the unleaded pottery that the acoustic impedance is low as the piezoelectric layer, through concentric ring shaped electrode structure, has simplified the electrode connection mode, has avoided echo signal's interference to green.

The utility model provides an annular ultrasonic transducer, include:

the matching layer, the piezoelectric layer and the back lining layer are sequentially arranged, the piezoelectric layer comprises a concentric annular electrode and a metal conductive electrode, the concentric annular electrode is arranged on one surface of the piezoelectric layer opposite to the matching layer, and the metal conductive electrode is arranged on the other surface of the piezoelectric layer opposite to the back lining layer.

Further, the concentric ring electrodes comprise a circular electrode at the center and a plurality of ring electrodes arranged at intervals outwards and concentrically with the circular electrode.

Furthermore, the annular electrodes are all in an open ring shape, and the openings of the annular electrodes are alternately arranged from left to right along the circular electrode.

Further, the piezoelectric layer still includes the ceramic cylinder that the several is constituteed by KNNS piezoceramics, and each it is filled with epoxy between the ceramic cylinder.

Furthermore, a lead is arranged between the piezoelectric layer and the backing layer and is connected to the metal conductive electrode through metal silver adhesive.

Further, the backing layer is provided with a through hole, and the lead extends to the outside through the through hole in the backing layer.

The utility model provides an annular ultrasonic transducer, this transducer use KNNS piezoceramics as the piezoelectric layer main part to the pollution of lead oxide to the environment among the traditional piezoceramics has been reduced. The utility model discloses a ring electrode structure forms annular array element through sputtering ring electrode on the piezoelectric layer, uses less array element quantity to produce the focus sound field of high resolution on the central axis, need not in addition directly to cut between annular array element, has simplified the processing technology of annular array transducer, has avoided simultaneously because the burr on the gap that the cutting formed is to echo signal's interference.

Drawings

Fig. 1 is a schematic structural diagram of an annular ultrasonic transducer in an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a ring electrode in a piezoelectric layer according to an embodiment of the present invention;

fig. 3 is a schematic structural view of KNNS piezoelectric ceramic and epoxy in the piezoelectric layer according to an embodiment of the present invention;

fig. 4 is a schematic view of the structure of the backing layer in an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, an embodiment of the present invention provides an annular ultrasonic transducer, including: the piezoelectric matching device comprises a matching layer 1, a piezoelectric layer 2 and a backing layer 3 which are arranged in sequence, wherein the piezoelectric layer 2 comprises a concentric annular electrode 21 and a metal conductive electrode 22, the concentric annular electrode 21 is arranged on one surface of the piezoelectric layer 2 opposite to the matching layer 1, and the metal conductive electrode 22 is arranged on the other surface of the piezoelectric layer 2 opposite to the backing layer 3.

The utility model discloses a concrete structure of concentric ring electrode 21 is shown in fig. 2, and concentric ring electrode 21 is including the circular electrode 211 that is located the center and the several ring electrode 212 that uses circular electrode 211 as concentric outside interval arrangement, and a plurality of ring electrode 212 are arranged in the outside of circular electrode according to the distance order of its external diameter and circular electrode 211 centre of a circle, and are not contacted each other between two arbitrary electrodes. And the plurality of annular electrodes 212 are all in open ring shape, and the openings of the annular electrodes 212 are alternately arranged from left to right along the circular electrode 211. That is, the number of openings of the ring electrodes 212 arranged on both sides of the circular electrode 211 is the same, and the other ends of the openings of the plurality of ring electrodes 212 are extended outwardly in common with one end of the circular electrode 211 as a central axis to be connected to the outside. The concentric ring electrode 21 in this embodiment is formed by sputtering an 80nm gold electrode by a magnetron sputtering apparatus after covering the surface of the piezoelectric layer 2 with a mask.

The utility model discloses an annular electrode structure does not use traditional processing mode like the gap between the mode formation array element through laser cutting or chemical etching on a slice bold piezoelectric material, then fill modes such as insulating material of decoupling, but through covering the mask version on the piezoelectric layer, form annular electrode at piezoelectric layer surface sputtering gold electrode through the magnetron sputtering appearance, the processing technology of annular array transducer has not only been simplified to this kind of mode, and overcome traditional mode because the burr that leaves on the gap of cutting can produce the problem of interference to echo signal. It should be understood that this is only a preferred structure of the ring electrode in the present embodiment, and is not limited to this structure, and the structure of the concentric ring electrode and the sputtering mode can be flexibly set according to practical situations.

As shown in fig. 3, the piezoelectric layer 2 further includes a plurality of ceramic columns 24 made of KNNS piezoelectric ceramic, and epoxy resin 23 is filled between the ceramic columns 24. The KNNS piezoelectric ceramic is a 1-3 type composite piezoelectric material, has the advantages of low acoustic impedance, high sensitivity, good flexibility and the like, does not contain the cost of lead oxide in the traditional piezoelectric ceramic, and has good environmental harmony. And through the filling of epoxy 23, make a plurality of ceramic cylinders 24 constitute the piezoelectric array element, these piezoelectric array elements and concentric ring electrode constitute each array element and present the focus sound field of the symmetric high resolution of distribution. Above-mentioned structure can all be realized to multiple mode, has used the diamond sword to cut into a plurality of sizes for 80um by 80um 100um's ceramic cylinder with KNNS piezoceramics piece in this embodiment, and the interval between the ceramic cylinder is 50um, and the space between the ceramic cylinder is filled with epoxy.

As shown in fig. 1, a metal conductive electrode 22 is further disposed on a surface of the piezoelectric layer 2 opposite to the backing layer 3, wherein the metal conductive electrode 22 is formed by sputtering a layer of 80um gold electrode on the surface of the piezoelectric layer by using a magnetron sputtering apparatus in this embodiment, and a lead 5 is further disposed between the piezoelectric layer 2 and the backing layer 3, and the lead 5 is connected to the metal conductive electrode 22 through a metal silver paste, so that the metal conductive electrode 22 and the lead 5 jointly constitute a ground electrode. The structure is simple in connection relation and very simple in manufacturing process.

Since the conductive wire 5 is connected to the metal conductive electrode 22 of the piezoelectric layer 2, in order that the conductive wire 5 does not affect the connection relationship between the piezoelectric layer 2 and the backing layer 3, as shown in fig. 4, a through hole 4 is further provided in the middle of the backing layer 3, so that the conductive wire 5 can extend to the outside through the through hole 4, and the gap between the piezoelectric layer and the backing layer can be filled with epoxy resin. In this example, the conductive material E-solder3022 was used as the backing layer, and the insulating material epoxy was used as the matching layer. In fact, the above materials are only preferred materials for the backing layer and the matching layer in this embodiment, and other materials with good conductivity or insulation and good sealing performance can be applied to the present invention.

To sum up, the embodiment of the utility model provides a pair of annular ultrasonic transducer, the transducer uses KNNS piezoceramics to reduce the pollution of lead oxide to the environment in traditional pottery to sputter the mode that forms concentric ring electrode on the piezoelectric layer, simplified the electrode structure, can produce the focus sound field of high resolution on the central axis with less array element quantity, still simplified the electrode connection mode, convenient and other system integrations have reduced the manufacturing degree of difficulty of transducer simultaneously, and overcome the problem that burr in the array element cutting gap can cause the interference to echo signal in traditional transducer.

The above-mentioned embodiments only express several preferred embodiments of the present application, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the utility model. It should be noted that, for those skilled in the art, without departing from the technical principle of the present invention, several improvements and substitutions can be made, and these improvements and substitutions should also be regarded as the protection scope of the present application. Therefore, the protection scope of the present patent shall be subject to the protection scope of the claims.

Claims

1. An annular ultrasonic transducer, comprising:

the piezoelectric device comprises a matching layer, a piezoelectric layer and a backing layer which are sequentially arranged, wherein the piezoelectric layer comprises a concentric annular electrode and a metal conductive electrode, the concentric annular electrode is arranged on one surface of the piezoelectric layer opposite to the matching layer, the metal conductive electrode is arranged on the other surface of the piezoelectric layer opposite to the backing layer, and the concentric annular electrode comprises a circular electrode positioned in the center and a plurality of annular electrodes which are concentrically arranged outwards at intervals; the annular electrodes are all in an open ring shape, and the openings of the annular electrodes are alternately distributed along the circular electrodes outwards.

2. The annular ultrasonic transducer of claim 1, wherein said piezoelectric layer further comprises a plurality of ceramic posts of KNNS piezoelectric ceramic, each of said ceramic posts being filled with an epoxy resin.

3. The annular ultrasonic transducer of claim 1, wherein a lead is further disposed between the piezoelectric layer and the backing layer, and the lead is connected to the metal conductive electrode through a metal silver adhesive.

4. The annular ultrasonic transducer according to claim 3, wherein the backing layer is provided with a through hole, and the lead wire extends to the outside through the through hole in the backing layer.