CN217719526U - Graphite boat is strengthened to boat piece - Google Patents
Graphite boat is strengthened to boat piece Download PDFInfo
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- CN217719526U CN217719526U CN202221498102.7U CN202221498102U CN217719526U CN 217719526 U CN217719526 U CN 217719526U CN 202221498102 U CN202221498102 U CN 202221498102U CN 217719526 U CN217719526 U CN 217719526U
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- boat
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- boat piece
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- graphite
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model discloses a graphite boat is strengthened to boat piece relates to PECVD coating film technical field. The utility model provides a graphite boat is strengthened to boat piece, includes a plurality of boat piece, a plurality of seted up the trompil on the boat piece, and be equipped with ceramic rod, a plurality of the boat piece is established ties through ceramic rod and is arranged, the boat piece left and right sides all is equipped with the connection piece, and is adjacent be equipped with the spacer block between two boat pieces, the spacer block is located connection piece department, and is located between two adjacent connection pieces, increases the strengthening rib through the bearing groove part at the boat piece, improves boat piece intensity toughness, avoids the bending deformation problem because of the boat piece overlength appears.
Description
Technical Field
The utility model relates to a PECVD coating film technical field specifically is a graphite boat is strengthened to boat piece.
Background
The graphite boat is a carrier used when a solar cell is subjected to PECVD (plasma enhanced chemical vapor deposition) film coating, and is formed by combining a plurality of graphite boat sheets, the conventional single boat sheet is of a hollow structure of a bearing groove, and the design is overlong, so that the boat sheet is easy to bend and deform, and a series of problems such as silicon wafer scratching, high frequency of the graphite boat and the like are caused.
SUMMERY OF THE UTILITY MODEL
The utility model provides a technical problem provide a graphite boat is strengthened to boat piece. The graphite boat is strengthened to boat piece increases the strengthening rib at bearing groove fretwork part, helps strengthening the intensity of boat piece, has solved the curved problem of boat piece overlength deformation that exists among the prior art.
In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a graphite boat is strengthened to boat piece, includes a plurality of boat piece, a plurality of seted up the trompil on the boat piece, and be equipped with ceramic pole, a plurality of the boat piece is established ties through ceramic pole and is arranged, the boat piece left and right sides all is equipped with the connection piece, and is adjacent be equipped with the spacer block between two boat pieces, the spacer block is located connection piece department, and is located between two adjacent connection pieces, every a plurality of bearing groove, a plurality of have all been seted up on the boat piece the bearing groove radially is linear array form along the boat piece and arranges, the bearing groove is the fretwork setting, and inner wall fixedly connected with strengthening rib, the card point has been seted up to the outer department of bearing groove on the boat piece.
Preferably, the reinforcing ribs are made of graphite.
Preferably, the shape of the reinforcing rib is an "X" shape, a "ii" shape, a "m" shape, a "=" shape, or a "cross" shape.
Preferably, the plurality of openings and the ceramic rods are arranged, the plurality of openings are evenly distributed on the boat close to the top and the bottom, and the openings on the same side are arranged in a linear array from left to right.
Preferably, the outer surface of the ceramic rod is provided with threads at two ends, and the threads are connected with nuts.
Compared with the prior art, the beneficial effects of the utility model are that: the strengthening rib is additionally arranged at the bearing groove part of the boat piece, so that the strength and toughness of the boat piece are improved, and the problem of bending deformation caused by overlong boat piece is avoided.
Drawings
FIG. 1 is a diagram of a graphite boat according to example 1 of the present invention;
FIG. 2 is a structural view of a boat sheet in accordance with embodiment 1 of the present invention;
FIG. 3 is a structural view of a boat sheet in accordance with embodiment 2 of the present invention;
FIG. 4 is a structural view of a boat sheet in accordance with embodiment 3 of the present invention;
FIG. 5 is a structural view of a boat sheet in accordance with an embodiment of the present invention;
FIG. 6 is a structural diagram of a boat sheet in accordance with embodiment 5 of the present invention.
Reference numbers in the figures: 1. boat sheets; 2. a bearing groove; 3. reinforcing ribs; 4. a ceramic rod; 5. connecting sheets; 6. sticking points; 7. and (5) spacer blocks.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Example 1: referring to fig. 1-2, the present invention provides a technical solution: the utility model provides a graphite boat is strengthened to boat piece, including a plurality of boat piece 1, the trompil has been seted up on a plurality of boat piece 1, and be equipped with ceramic rod 4, a plurality of boat piece 1 is through ceramic rod 4 series arrangement, trompil and ceramic rod 4 all are equipped with a plurality of, a plurality of trompil is equallyd divide and is close to top and bottom department on boat piece 1, and the trompil that is located the homonymy is linear array form range from a left side to the right side, make firm in connection stable, prevent that boat piece 1 is loose, ceramic rod 4 surface is close to both ends department and all seted up the screw thread, and threaded connection has the nut, the dismouting of border ceramic rod 4, in order to carry out the split and the combination of boat piece 1, boat piece 1 left and right sides all is equipped with connection piece 5, be equipped with spacer 7 between two adjacent connection piece 1, spacer 7 is located 5 departments, and be located between two adjacent connection pieces 5, a plurality of bearing groove 2 has all been seted up on every boat piece 1, a plurality of bearing groove 2 radially is linear array form range along boat piece 1, bearing groove 2 is the fretwork, bearing the setting up for the inboard wall fixedly connected with strengthening rib 3, the strengthening rib is located 6 boat piece outside and has been seted up.
Example 2: referring to fig. 3, the present embodiment is different from embodiment 1 in that the reinforcing rib 3 is disposed in a "ii" shape.
Example 3: referring to fig. 4, the difference between the present embodiment and embodiment 1 is that the reinforcing rib 3 is arranged in a "m" shape.
Example 4: referring to fig. 5, the difference between the present embodiment and embodiment 1 is that the reinforcing ribs 3 are arranged in a "=" shape.
Example 5: referring to fig. 6, the present embodiment is different from embodiment 1 in that the reinforcing ribs 3 are disposed in a cross shape.
The working principle is as follows: during the use, arrange a plurality of boat piece 1 together, can open with spacer 7 in connection piece 5 department to fix through ceramic pole 4 and nut and make up into the graphite boat, during the coating film, put the silicon chip in bearing groove 2, improve the intensity toughness of boat piece 1 through strengthening rib 3 in the bearing groove 2, avoid boat piece 1 to warp completely when using, avoid the fish tail silicon chip.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides a graphite boat is strengthened to boat piece, includes a plurality of boat piece (1), its characterized in that: a plurality of seted up the trompil on boat piece (1), and be equipped with ceramic rod (4), a plurality of boat piece (1) is through ceramic rod (4) series arrangement, the boat piece (1) left and right sides all is equipped with connection piece (5), and is adjacent be equipped with between two boat pieces (1) spacer block (7), spacer block (7) are located connection piece (5) department, and are located between two adjacent connection piece (5), every a plurality of bearing groove (2), a plurality of bear the weight of groove (2) and radially be linear array form along boat piece (1) and arrange, bearing groove (2) are the fretwork setting, and inner wall fixedly connected with strengthening rib (3), it has seted up stuck point (6) to lie in bearing groove (2) outside department on boat piece (1).
2. The boat of claim 1, wherein: the reinforcing ribs (3) are made of graphite.
3. The boat of claim 1, wherein: the shape of the reinforcing rib (3) adopts an X shape, a II shape, a Mi shape, a "=" shape or a cross shape.
4. The boat of claim 1, wherein: the opening holes and the ceramic rods (4) are respectively provided with a plurality of opening holes, the opening holes are uniformly distributed on the boat sheet (1) and are close to the top and the bottom, and the opening holes on the same side are arranged in a linear array form from left to right.
5. The boat of claim 1, wherein: the outer surface of the ceramic rod (4) is provided with threads close to the two ends, and the threads are connected with nuts.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202221498102.7U CN217719526U (en) | 2022-06-16 | 2022-06-16 | Graphite boat is strengthened to boat piece |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202221498102.7U CN217719526U (en) | 2022-06-16 | 2022-06-16 | Graphite boat is strengthened to boat piece |
Publications (1)
Publication Number | Publication Date |
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CN217719526U true CN217719526U (en) | 2022-11-01 |
Family
ID=83802431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202221498102.7U Active CN217719526U (en) | 2022-06-16 | 2022-06-16 | Graphite boat is strengthened to boat piece |
Country Status (1)
Country | Link |
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CN (1) | CN217719526U (en) |
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2022
- 2022-06-16 CN CN202221498102.7U patent/CN217719526U/en active Active
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Legal Events
Date | Code | Title | Description |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230529 Address after: 314117 East side of Building 2, No. 38 Yiqun Road, Yaozhuang Town, Jiashan County, Jiaxing City, Zhejiang Province Patentee after: Hongxun New Energy Material Technology (Zhejiang) Co.,Ltd. Address before: 314100 building 3, No. 38, Yiqun Road, Yaozhuang Town, Jiashan County, Jiaxing City, Zhejiang Province Patentee before: Hongjia new energy technology (Zhejiang) Co.,Ltd. |
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TR01 | Transfer of patent right |