CN217691094U - Adjustable quartz boat - Google Patents
Adjustable quartz boat Download PDFInfo
- Publication number
- CN217691094U CN217691094U CN202220761073.2U CN202220761073U CN217691094U CN 217691094 U CN217691094 U CN 217691094U CN 202220761073 U CN202220761073 U CN 202220761073U CN 217691094 U CN217691094 U CN 217691094U
- Authority
- CN
- China
- Prior art keywords
- silicon wafer
- sliders
- mounting plates
- quartz boat
- bottom plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 239000010453 quartz Substances 0.000 title claims abstract description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 48
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 36
- 239000010703 silicon Substances 0.000 claims abstract description 36
- 235000012431 wafers Nutrition 0.000 description 22
- 230000033001 locomotion Effects 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses an adjustable quartz boat, which comprises a bottom plate, an adjusting mechanism and two mounting plates; the two mounting plates are respectively connected above the bottom plate, two silicon wafer bearing rods are arranged between the two mounting plates, strip-shaped guide holes are formed in the mounting plates, and two ends of each silicon wafer bearing rod respectively extend into the guide holes; the adjusting mechanism comprises a guide groove arranged at the top of the bottom plate and two sliding blocks arranged in the guide groove; two sliders bear excellent fixed connection with two silicon chips respectively, and rotatable the installing accommodate the lead screw in the guide way, accommodate the lead screw and run through two sliders, two sliders are equipped with respectively supply accommodate the lead screw run through, and with accommodate the lead screw threaded connection's screw hole, and the screw thread of the screw hole of two sliders revolves to opposite, accommodate the lead screw one end extend to the outside of bottom plate and be equipped with the rotating head. The utility model discloses an adjustable quartz boat can bear the weight of the interval between the stick to two silicon chips and adjust to the realization is to placing of different specification silicon chips.
Description
Technical Field
The utility model relates to an adjustable quartz boat.
Background
The quartz boat is also called quartz glass, and is mainly applied to electric light sources, semiconductors, optical technologies and other aspects. The quartz boat in the prior art is customized according to the size of a silicon wafer required to be borne, the customized quartz boat can only adapt to the silicon wafer of one specification, and when the specifications of the silicon wafers are different, the quartz boat needs to be replaced to bear the silicon wafer, so that the cost is increased.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an adjustable quartz boat, its is rational in infrastructure, through setting up adjustment mechanism, can bear the weight of the interval between the stick to two silicon chips and adjust to the realization is to placing of different specification silicon chips, and the commonality is stronger.
In order to achieve the purpose, the technical scheme of the utility model is to design an adjustable quartz boat, which comprises a bottom plate, an adjusting mechanism and two mounting plates;
the two mounting plates are respectively connected above the bottom plate, strip-shaped guide holes are respectively formed in the two mounting plates, two silicon wafer bearing rods which are parallel to each other are arranged between the two mounting plates, and two ends of each silicon wafer bearing rod respectively extend into the guide holes of the two mounting plates;
the adjusting mechanism comprises a guide groove arranged at the top of the bottom plate and two sliding blocks arranged in the guide groove; the two sliders are fixedly connected with the two silicon wafer bearing rods through connecting rods respectively, the adjusting screw rods are rotatably mounted in the guide grooves and penetrate through the two sliders, the two sliders are provided with threaded holes for the adjusting screw rods to penetrate through and are in threaded connection with the adjusting screw rods respectively, the thread directions of the threaded holes of the two sliders are opposite, and one ends of the adjusting screw rods extend to the outer side of the bottom plate and are provided with rotating heads.
Preferably, the length direction of the guide groove is perpendicular to the length direction of the silicon wafer bearing rod.
Preferably, the connecting rod is connected to the middle position of the silicon wafer bearing rod in the length direction.
Preferably, one end of the adjusting screw rod, which is far away from the rotating head, is rotatably connected with the groove wall of the guide groove through a bearing.
Preferably, the tops of the opposite inner sides of the two silicon wafer bearing rods are respectively provided with an inclined plane, the inclined planes are provided with a plurality of silicon wafer clamping grooves, and the plurality of silicon wafer clamping grooves are arranged along the length direction of the silicon wafer bearing rods.
Preferably, the mounting plate is fixedly connected with the bottom plate through a support column.
The utility model has the advantages and the beneficial effects that: the utility model provides an adjustable quartz boat, its is rational in infrastructure, through setting up adjustment mechanism, can bear the interval between the stick to two silicon chips and adjust to the realization is to placing of different specification silicon chips, and the commonality is stronger.
Drawings
Fig. 1 is a schematic diagram of the present invention.
Fig. 2 is a schematic view of the adjusting mechanism of the present invention.
FIG. 3 is a schematic view of a silicon wafer support bar according to the present invention.
Detailed Description
The following description will further describe embodiments of the present invention with reference to the accompanying drawings and examples. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
The utility model discloses the technical scheme who specifically implements is:
as shown in fig. 1, fig. 2 and fig. 3, an adjustable quartz boat comprises a bottom plate 1, an adjusting mechanism and two mounting plates 2;
the two mounting plates 2 are respectively connected above the bottom plate 1, strip-shaped guide holes 3 are respectively formed in the two mounting plates 2, two silicon wafer bearing rods 4 which are parallel to each other are arranged between the two mounting plates 2, and two ends of each silicon wafer bearing rod 4 respectively extend into the guide holes 3 of the two mounting plates 2;
the adjusting mechanism comprises a guide groove 5 arranged at the top of the bottom plate 1 and two sliding blocks 6 arranged in the guide groove 5; two sliders 6 bear 4 fixed connection through connecting rod 7 and two silicon chips respectively, rotatable accommodate the lead screw 8 of installing in the guide way 5, this accommodate the lead screw 8 runs through two sliders 6, two sliders 6 are equipped with respectively and supply accommodate the lead screw 8 run through, and with accommodate the lead screw 8 threaded connection's screw hole, and the screw thread of the screw hole of two sliders 6 revolves to opposite, accommodate the lead screw 7 one end extend to the outside of bottom plate 1 and be equipped with rotating head 9.
Further, the length direction of the guide groove 5 is perpendicular to the length direction of the silicon wafer bearing rod 4.
Further, the connecting bar 7 is connected to the middle position of the silicon wafer bearing bar 4 in the length direction.
Furthermore, one end of the adjusting screw rod 8, which is far away from the rotating head 9, is rotatably connected with the groove wall of the guide groove 5 through a bearing 10.
Furthermore, the tops of the opposite inner sides of the two silicon wafer bearing rods 4 are respectively provided with an inclined surface 11, the inclined surfaces 11 are provided with a plurality of silicon wafer clamping grooves 12, and the plurality of silicon wafer clamping grooves 12 are arranged along the length direction of the silicon wafer bearing rods 4.
Further, the mounting plate 2 is fixedly connected with the bottom plate 1 through a support column 13.
The utility model relates to an adjustable quartz boat when using, at first according to the size of the required silicon chip of placing, adjust two silicon chips and bear the interval between the stick 4, it is concrete, make accommodate the lead screw 8 rotate through rotating the rotating head 9, because two sliders 6 respectively with accommodate the lead screw 8 threaded connection, and the screw thread of the screw hole of two sliders 6 is to opposite soon, consequently, accommodate the lead screw 8 and rotate the back and will drive two sliders 6 along 5 motions in opposite directions of guide way or from each other, thereby drive two silicon chips respectively and bear the stick 4 and along 3 motions in opposite directions or from each other of guide hole by two sliders 6, realize bearing the interval adjustment between the stick 4 to two silicon chips, alright put into two silicon chips after the completion and bear between the corresponding silicon chip draw-in groove 12 of stick 4, accomplish bearing the weight of the silicon chip.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and embellishments can be made without departing from the technical principle of the present invention, and these improvements and embellishments should also be regarded as the protection scope of the present invention.
Claims (6)
1. An adjustable quartz boat is characterized by comprising a bottom plate, an adjusting mechanism and two mounting plates;
the two mounting plates are respectively connected above the bottom plate, strip-shaped guide holes are respectively formed in the two mounting plates, two silicon wafer bearing rods which are parallel to each other are arranged between the two mounting plates, and two ends of each silicon wafer bearing rod respectively extend into the guide holes of the two mounting plates;
the adjusting mechanism comprises a guide groove arranged at the top of the bottom plate and two sliding blocks arranged in the guide groove; the two sliders are fixedly connected with the two silicon wafer bearing rods through connecting rods respectively, the adjusting screw rods are rotatably mounted in the guide grooves and penetrate through the two sliders, the two sliders are provided with threaded holes for the adjusting screw rods to penetrate through and are in threaded connection with the adjusting screw rods respectively, the thread directions of the threaded holes of the two sliders are opposite, and one ends of the adjusting screw rods extend to the outer side of the bottom plate and are provided with rotating heads.
2. The adjustable quartz boat of claim 1, wherein the length direction of the guide slots is perpendicular to the length direction of the silicon wafer carrying rods.
3. The adjustable quartz boat of claim 2, wherein the connecting rod is connected to the silicon wafer carrying bar at a middle position in a length direction.
4. The adjustable quartz boat of claim 3, wherein the end of the lead screw away from the rotating head is rotatably connected with the groove wall of the guide groove through a bearing.
5. The adjustable quartz boat as claimed in claim 4, wherein the silicon wafer carrying rods are provided with a plurality of silicon wafer slots at the top thereof, and the silicon wafer slots are arranged along the length direction of the silicon wafer carrying rods.
6. The adjustable quartz boat of claim 5, wherein the mounting plate is fixedly connected to the base plate via support posts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220761073.2U CN217691094U (en) | 2022-04-04 | 2022-04-04 | Adjustable quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220761073.2U CN217691094U (en) | 2022-04-04 | 2022-04-04 | Adjustable quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217691094U true CN217691094U (en) | 2022-10-28 |
Family
ID=83732176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220761073.2U Expired - Fee Related CN217691094U (en) | 2022-04-04 | 2022-04-04 | Adjustable quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217691094U (en) |
-
2022
- 2022-04-04 CN CN202220761073.2U patent/CN217691094U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20221028 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |