CN217677909U

CN217677909U - Transmission mechanism of vertical diffusion furnace

Info

Publication number: CN217677909U
Application number: CN202221288050.0U
Authority: CN
Inventors: 刘明利; 王佩佩; 周文智
Original assignee: Qingdao Saier Technology Co ltd
Current assignee: Qingdao Saier Technology Co ltd
Priority date: 2022-05-27
Filing date: 2022-05-27
Publication date: 2022-10-28
Anticipated expiration: 2032-05-27

Abstract

The utility model belongs to the technical field of vertical diffusion furnace, especially, vertical diffusion furnace drive mechanism, generally need the independent equipment to pour into vertical diffusion furnace into to current reaction gas, lead to energy consumption and the higher problem of cost, the scheme as follows is put forward now, it includes the furnace body, the outer wall of furnace body rotates and is connected with sealing door, the bottom fixedly connected with equipment box of furnace body, the inside fixedly connected with motor of equipment box, motor output shaft's top fixedly connected with has the vertical axis of hollow structure, the utility model discloses a set up first sprocket, chain, second sprocket, gas collection case, axis of rotation, lead screw, silk braid, rectangular plate, rubber buffer and outlet duct, make reaction gas get into in first rotary joint and the second rotary joint to get into in the furnace body through the venthole, thereby conveniently spread to the wafer surface to need not independent equipment and carry reaction gas, reduce energy consumption and cost.

Description

Transmission mechanism of vertical diffusion furnace

Technical Field

The utility model relates to a vertical diffusion furnace technical field especially relates to a vertical diffusion furnace drive mechanism.

Background

The diffusion furnace is of two types, namely a vertical diffusion furnace and a horizontal diffusion furnace, and is used for diffusion, oxidation, annealing, alloying, sintering and other processes in industries such as large-scale integrated circuits, discrete devices, power electronics, photoelectric devices, optical fibers and the like, and reaction gas is required to be introduced into a furnace body and diffused to the surface of a wafer placed in the vertical diffusion furnace, so that the surface of all wafers can be subjected to film growth simultaneously.

In the prior art, reaction gas generally needs to be injected into a vertical diffusion furnace by independent equipment, so that the energy consumption and the cost are high, and therefore, a transmission mechanism of the vertical diffusion furnace is provided for solving the problems.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that reaction gas generally needs independent equipment to be injected into a vertical diffusion furnace, which results in the defects of high energy consumption and cost, and providing a transmission mechanism of the vertical diffusion furnace.

In order to realize the purpose, the utility model adopts the following technical scheme:

the utility model provides a vertical diffusion furnace drive mechanism, includes the furnace body, the outer wall of furnace body rotates and is connected with sealing door, the bottom fixedly connected with equipment box of furnace body, the inside fixedly connected with motor of equipment box, the top fixedly connected with of motor output shaft has hollow structure's vertical axis, a plurality of ventholes have evenly been seted up to the outer wall of vertical axis, the fixed cover of outer wall of vertical axis is equipped with first rotary joint, first rotary joint is located the top of furnace body, the fixed cover of outer wall of vertical axis is equipped with the second rotary joint, the fixed cover of outer wall of motor output shaft is equipped with first sprocket, the outer wall meshing of first sprocket is connected with the chain, the outer wall of equipment box is equipped with drive mechanism.

Preferably, drive mechanism includes the second sprocket, the outer wall of chain is connected with the outer wall meshing of second sprocket, the elongated slot has been seted up to the outer wall of equipment box, the outer wall fixedly connected with axis of rotation of second sprocket, the outer wall fixedly connected with gas collection box of furnace body, the top fixedly connected with lead screw of axis of rotation, the outer wall threaded connection of lead screw has the silk braid, the outer wall fixedly connected with rectangular plate of silk braid, the outer wall of rectangular plate and the inner wall sliding connection of gas collection box, the outer wall fixedly connected with rubber buffer of rectangular plate, the outer wall fixed intercommunication of gas collection box has the intake pipe, the outer wall fixed intercommunication of gas collection box has two outlet ducts, and the one end of two outlet ducts respectively with the fixed intercommunication of first rotary joint, second rotary joint's outer wall, makes the silk braid remove through setting up the lead screw.

Preferably, the outer walls of the equipment box and the furnace body are both provided with round holes, and the inner walls of the round holes are rotatably connected with the outer wall of the motor output shaft.

Preferably, the outer wall of the furnace body is provided with a through hole, the inner wall of the through hole is rotatably connected with the outer wall of the vertical shaft, and the wafer placing plate is rotated by arranging the vertical shaft.

Preferably, the outer wall of the vertical shaft is uniformly and fixedly connected with a plurality of wafer placing plates, and the wafers are fixed in position by arranging the wafer placing plates.

Preferably, the outer wall of the gas collection box is provided with a sliding hole, and the inner wall of the sliding hole is rotatably connected with the outer wall of the rotating shaft.

Preferably, the outer walls of the air outlet pipe and the air inlet pipe are fixedly sleeved with one-way valves, the outer wall of the rotating shaft is fixedly sleeved with a bearing, and the outer ring of the bearing is fixedly connected with the outer wall of the air collecting box.

Compared with the prior art, the utility model has the advantages of:

this scheme makes reaction gas get into in first rotary joint and the second rotary joint through setting up first sprocket, chain, second sprocket, gas collection case, axis of rotation, lead screw, silk cover, rectangular plate, rubber buffer and outlet duct to get into in the furnace body through the venthole, thereby conveniently spread the wafer surface, and need not the independent equipment and carry reaction gas, reduce energy consumption and cost.

Drawings

Fig. 1 is a schematic perspective view of a transmission mechanism of a vertical diffusion furnace according to the present invention;

fig. 2 is a schematic sectional structure view of a transmission mechanism of a vertical diffusion furnace according to the present invention;

fig. 3 is an enlarged schematic structural diagram of a portion a in fig. 2 of a transmission mechanism of a vertical diffusion furnace according to the present invention.

In the figure: 1. a furnace body; 2. a sealing door; 3. an equipment box; 4. a vertical axis; 5. a motor; 6. an air outlet; 7. a first rotary joint; 8. a second rotary joint; 9. a wafer placing plate; 10. a first sprocket; 11. a chain; 12. a second sprocket; 13. a gas collection tank; 14. a rotating shaft; 15. a screw rod; 16. sleeving the silk; 17. a rectangular plate; 18. a rubber plug; 19. and an air outlet pipe.

Detailed Description

Shown by figure 1 and figure 2, relate to a vertical diffusion furnace drive mechanism, including furnace body 1, the outer wall of furnace body 1 rotates and is connected with sealing door 2, furnace body 1's bottom fixedly connected with equipment box 3, the round hole has all been seted up with the outer wall of furnace body 1 to equipment box 3, the inner wall of round hole rotates with the outer wall of motor 5 output shaft to be connected, equipment box 3's inside fixedly connected with motor 5, the top fixedly connected with of motor 5 output shaft has hollow structure's vertical axis 4, motor 5 operates to make vertical axis 4 rotate, make things convenient for the wafer to contact with reaction gas, the through-hole has been seted up to furnace body 1's outer wall, the inner wall of through-hole rotates with vertical axis 4's outer wall to be connected, a plurality of ventholes 6 have evenly been seted up to vertical axis 4's outer wall, vertical axis 4's outer wall fixed cover is equipped with first rotary joint 7, first rotary joint 7 is located furnace body 1's top, vertical axis 4's outer wall fixed joint 8, vertical axis 4's outer wall evenly fixedly connected with a plurality of wafers places board 9, the outer wall fixed cover is equipped with first sprocket 10, the outer wall meshing 11 of first sprocket 10, equipment box 3 is equipped with chain drive mechanism.

As shown in fig. 1, fig. 2 and fig. 3, the transmission mechanism includes a second sprocket 12, an outer wall of a chain 11 is engaged with an outer wall of the second sprocket 12, a first sprocket 10 rotates to rotate the chain 11, so that the second sprocket 12 drives a rotation shaft 14 to rotate, an outer wall of the equipment box 3 is provided with an elongated slot, an outer wall of the second sprocket 12 is fixedly connected with the rotation shaft 14, an outer wall of the furnace body 1 is fixedly connected with a gas collection box 13, an outer wall of the gas collection box 13 is provided with a sliding hole, an inner wall of the sliding hole is rotatably connected with an outer wall of the rotation shaft 14, a top of the rotation shaft 14 is fixedly connected with a lead screw 15, an outer wall of the lead screw 15 is in threaded connection with a wire sleeve 16, the wire sleeve 16 moves upwards as the lead screw 15 rotates, an outer wall of the wire sleeve 16 is fixedly connected with a rectangular plate 17, an outer wall of the rectangular plate 17 is slidably connected with an inner wall of the gas collection box 13, a one-way valve is fixedly sleeved on an outer wall of the gas outlet pipe 19 and an outer wall of the gas collection box 13, an outer wall of the rectangular plate 17 is fixedly connected with a rubber plug 18, two rotary intercommunicated joints 7 fixed on an outer wall of the gas collection box 13, and a second rotary intercommunicated joint fixed on an outer wall of the gas outlet pipe 13.

The working principle is as follows: when using, motor 5 rotates and makes vertical axis 4 rotate, vertical axis 4 rotates and makes the wafer place board 9 and rotate, motor 5 rotates simultaneously and makes first sprocket 10 rotate, first sprocket 10 rotates and makes chain 11 rotate, thereby make second sprocket 12 drive axis of rotation 14 and rotate, axis of rotation 14 rotates and makes lead screw 15 rotate, lead screw 15 rotates and makes 16 rebound of silk cover, 16 rebound of silk cover makes rectangular plate 17 and rubber buffer 18 remove, get into first rotary joint 7 and second rotary joint 8 through two outlet ducts 19 with the reaction gas in the gas collection box 13, and get into in the furnace body 1 through venthole 6, thereby conveniently diffuse to the wafer surface, and need not independent equipment and carry reaction gas, reduce energy consumption and cost.

The above descriptions are only preferred embodiments of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the scope of the present invention, and the technical solutions and the utility model concepts of the present invention are equivalent to, replaced or changed.

Claims

1. The utility model provides a vertical diffusion furnace drive mechanism, includes furnace body (1), its characterized in that, the outer wall of furnace body (1) rotates and is connected with sealing door (2), bottom fixedly connected with equipment box (3) of furnace body (1), inside fixedly connected with motor (5) of equipment box (3), the top fixedly connected with of motor (5) output shaft has hollow structure's vertical axis (4), a plurality of ventholes (6) have evenly been seted up to the outer wall of vertical axis (4), the fixed cover of outer wall of vertical axis (4) is equipped with first rotary joint (7), first rotary joint (7) are located the top of furnace body (1), the fixed cover of outer wall of vertical axis (4) is equipped with second rotary joint (8), the fixed cover of outer wall of motor (5) output shaft is equipped with first sprocket (10), the outer wall meshing of first sprocket (10) is connected with chain (11), the outer wall of equipment box (3) is equipped with drive mechanism.

2. The transmission mechanism of the vertical diffusion furnace according to claim 1, wherein the transmission mechanism comprises a second chain wheel (12), the outer wall of the chain (11) is meshed with the outer wall of the second chain wheel (12) to be connected, the outer wall of the equipment box (3) is provided with an elongated slot, the outer wall of the second chain wheel (12) is fixedly connected with a rotating shaft (14), the outer wall of the furnace body (1) is fixedly connected with a gas collecting box (13), the top of the rotating shaft (14) is fixedly connected with a lead screw (15), the outer wall of the lead screw (15) is in threaded connection with a screw sleeve (16), the outer wall of the screw sleeve (16) is fixedly connected with a rectangular plate (17), the outer wall of the rectangular plate (17) is in sliding connection with the inner wall of the gas collecting box (13), the outer wall of the rectangular plate (17) is fixedly connected with a rubber plug (18), the outer wall of the gas collecting box (13) is fixedly communicated with a gas inlet pipe, the outer wall of the gas collecting box (13) is fixedly communicated with two gas outlet pipes (19), and one end of the two gas outlet pipes (19) is respectively connected with the first rotary joint (7) and the outer wall of the second rotary joint (8).

3. The transmission mechanism of the vertical diffusion furnace according to claim 1, wherein the outer walls of the equipment box (3) and the furnace body (1) are provided with round holes, and the inner walls of the round holes are rotatably connected with the outer wall of the output shaft of the motor (5).

4. The transmission mechanism of the vertical diffusion furnace according to claim 1, wherein the outer wall of the furnace body (1) is provided with a through hole, and the inner wall of the through hole is rotatably connected with the outer wall of the vertical shaft (4).

5. The transmission mechanism of the vertical diffusion furnace as claimed in claim 1, wherein a plurality of wafer placing plates (9) are uniformly and fixedly connected to the outer wall of the vertical shaft (4).

6. The transmission mechanism of the vertical diffusion furnace as claimed in claim 2, wherein the outer wall of the gas collection box (13) is provided with a sliding hole, and the inner wall of the sliding hole is rotatably connected with the outer wall of the rotating shaft (14).

7. The transmission mechanism of the vertical diffusion furnace as claimed in claim 2, wherein the outer walls of the gas outlet pipe (19) and the gas inlet pipe are fixedly sleeved with one-way valves, the outer wall of the rotating shaft (14) is fixedly sleeved with a bearing, and the outer ring of the bearing is fixedly connected with the outer wall of the gas collecting box (13).