CN117660922A - Vapor deposition furnace for silicon carbide coating production - Google Patents
Vapor deposition furnace for silicon carbide coating production Download PDFInfo
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- CN117660922A CN117660922A CN202311611876.5A CN202311611876A CN117660922A CN 117660922 A CN117660922 A CN 117660922A CN 202311611876 A CN202311611876 A CN 202311611876A CN 117660922 A CN117660922 A CN 117660922A
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- 239000011248 coating agent Substances 0.000 title claims abstract description 27
- 238000000576 coating method Methods 0.000 title claims abstract description 27
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 23
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 21
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000000463 material Substances 0.000 claims abstract description 57
- 238000002347 injection Methods 0.000 claims description 18
- 239000007924 injection Substances 0.000 claims description 18
- 239000002994 raw material Substances 0.000 abstract description 49
- 238000006243 chemical reaction Methods 0.000 abstract description 8
- 238000003491 array Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002679 ablation Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Abstract
The application relates to the technical field of vapor deposition furnaces, and discloses a vapor deposition furnace for producing a silicon carbide coating, which is used for solving the problems that the coating is uneven, and the contact dead angle occurs between a base part and a material rack due to different contents of reaction raw materials contacted with two sides of the base part. The connecting hole and the vent are formed in the fixed rod, the rotary joint and the driving device are arranged on the furnace body, the rotary joint is connected with the air inlet branch pipe, the material rack is provided with the sliding groove and the connecting square hole, the supporting table, the sliding block and the elastic piece are arranged in the sliding groove, the supporting columns are movably arranged on the sliding block, different connecting square holes are sequentially formed in the sliding block through gas raw materials, different supporting columns are driven to clamp the base piece and rotate, the contact position of the base piece is changed, and contact dead angles are avoided; through having seted up fumarole and jet-propelled branch hole at the lateral wall of spout, remove through the sliding block, make gaseous raw materials evenly spout to the base member both sides through jet-propelled branch hole, avoid the base member both sides to contact the gaseous raw materials of different contents and lead to the uneven phenomenon of coating to appear.
Description
Technical Field
The application relates to the technical field of vapor deposition furnaces, in particular to a vapor deposition furnace for producing a silicon carbide coating.
Background
Silicon carbide has excellent physicochemical properties such as high melting point, high hardness, corrosion resistance, oxidation resistance and the like, and therefore has a wide application prospect in the fields of aerospace, weapon equipment and the like, but silicon carbide cannot be used as a structural material, so a method of coating a vapor deposition furnace is generally adopted to utilize the wear resistance and ablation resistance of the silicon carbide. The vapor deposition furnace is a core part of vacuum coating equipment and CVD equipment for processing workpieces, and is divided into a horizontal deposition furnace, a vertical deposition furnace and the like according to different structural forms of the furnace.
The vertical vapor deposition furnace generally adopts a structural form of upper-end air inlet, lower-end air outlet and peripheral side heating, when the base piece is subjected to coating operation, the content of reaction raw materials in gas contacted with the base piece at the air inlet side is relatively high, the content of reaction raw materials contacted with the air outlet side is relatively low, and the phenomenon of uneven plating thickness at two sides of the base piece can occur; in addition, when the base piece is coated, the base piece is generally placed on the material rack, so that the base piece and the material rack are in certain contact, the contact part of the base piece and the material rack is difficult to contact with reaction raw materials, dead angles which cannot be coated are formed on the base piece, and certain defects are formed on the coating on the base piece.
Disclosure of Invention
The application provides a carborundum is vapor deposition stove for coating production possesses the base member both sides and can both contact sufficient reaction raw materials, prevents that the base member from appearing contacting the dead angle's advantage for the difference of reaction raw material content that solves the contact of base member both sides leads to the coating uneven, the base member and work or material rest appear contacting the dead angle's problem.
In order to achieve the above purpose, the present application adopts the following technical scheme: the utility model provides a carborundum coating production is with vapor deposition stove, includes base, furnace body and work or material rest, the furnace body includes the outlet duct, be equipped with on the base: the four fixing rods are fixedly arranged on the upper end face of the base in an annular array manner, a communication hole is formed in the center of each fixing rod, and a plurality of air vents are formed in the side wall of each communication hole in an axial equidistant mode; the material rest is provided with: the four fixed hole annular arrays are arranged on the end surfaces of the material racks, and the material racks are movably sleeved on the fixed rods through the fixed holes; the furnace body is provided with: the rotary joint, the driving device and the four air inlet branch pipes are fixedly arranged at the center of the top end of the furnace body; the driving device is fixedly arranged on one side of the top end of the furnace body and used for driving the inner ring of the rotary joint to rotate; the four air inlet branch pipe annular arrays are arranged on the outer ring of the rotary joint, one end of each air inlet branch pipe annular array is communicated with the outer ring of the rotary joint, and the other end of each air inlet branch pipe annular array is communicated with the upper end of the communication hole.
Further, the rotary joint can only be communicated with two opposite air inlet branch pipes, and when the inner ring of the rotary joint rotates, the communication between the rotary joint and the air inlet branch pipes is sequentially changed.
Further, the distance between two adjacent air vents is the same as the thickness of the material rack.
Further, still be equipped with on the work or material rest: the device comprises a plurality of groups of concentric sliding grooves, a communicating square hole, a supporting table, sliding blocks and elastic pieces, wherein the plurality of groups of concentric sliding grooves are arranged on a material rack, and each group of sliding grooves is four and is annularly and equidistantly arranged; the communicating square hole is arranged in the material rack and is used for communicating the fixed hole and the chute; the supporting table is fixedly arranged in the middle of the chute and is provided with a circulation hole communicated with the square hole and the inner ring of the supporting table; the sliding blocks are slidably arranged in sliding grooves at the upper end and the lower end of the supporting table, one end of each sliding block is an inclined surface, and the inclined surfaces face the fixing holes; one end of the elastic piece is fixedly connected with the other end of the sliding block, and the other end of the elastic piece is connected with the side wall of the sliding groove; the sliding block is provided with: the moving groove and the support column moving groove are equidistantly arranged in the sliding block, and the bottom end of the moving groove is communicated with the inner ring of the support table; the support column is slidably arranged in the moving groove and extends out of the moving groove and the fixing hole; four exhaust ports are formed in the annular array on the support ring of the material rack.
Further, the elastic member always generates elastic force.
Further, still offer on the brace table: the air injection holes and a plurality of air injection branch holes are formed in the inner walls of the sliding grooves on the two sides of the supporting table, and one end of each air injection hole is blocked by the sliding block when the operation is not performed; the air injection support holes are uniformly formed in the end faces of the two sides of the material rack and are communicated with the other ends of the air injection holes.
Further, the sliding block is provided with: the connecting rod is fixedly connected to the end face of the sliding block, and one end of the connecting rod penetrates through and extends out of the exhaust port; the pushing block is fixedly connected to one end of the connecting rod extending out of the exhaust port, and pushing teeth are movably arranged at the outer end of the pushing block; the furnace body is provided with: the device comprises a driving ring and an air outlet branch pipe, wherein the driving ring is movably arranged at the top end and the bottom end of the inner wall of a furnace body, the inner wall of the driving ring at the upper end is provided with matching teeth which are matched with pushing teeth of a pushing block, the outer wall of the driving ring at the upper end is provided with an anti-reversion structure matched with the furnace body, the outer ring of the driving ring at the lower side is provided with an annular exhaust ring, and the exhaust ring is communicated with an air outlet pipe; the two ends of the air outlet branch pipe are fixedly connected to the upper driving ring and the lower driving ring, a plurality of holes are formed in the air outlet branch pipe at equal intervals, and the air outlet branch pipe is communicated with the air outlet ring.
Further, when the pushing block rotates clockwise, pushing teeth of the pushing block extend out to push the driving ring to rotate; when the pushing block rotates anticlockwise, pushing teeth of the pushing block are extruded by matching teeth of the driving ring to retract.
The application has the following beneficial effects:
1. the utility model provides a pair of vapor deposition furnace for carborundum coating production, through being equipped with drive arrangement and rotary joint in the furnace body bottom, the inner circle of outlet duct drive rotary joint rotates, the rotary joint intercommunication has the air inlet branch pipe, the intercommunicating pore of air inlet branch pipe intercommunication dead lever, the lateral wall equidistance of dead lever has been seted up the air vent, the intercommunication square hole intercommunication of air vent and work or material rest, a plurality of groups spout have been seted up to the work or material rest annular, be equipped with annular brace table in the middle of the spout, the circulation hole has been seted up on the brace table, the circulation hole is used for switching on the inboard of intercommunication square hole and brace table, be equipped with elastic component and sliding block in the spout of brace table upper and lower both sides, the travelling groove has been seted up in the sliding block, the support column has been seted up in the travelling groove, the support column stretches out the work or material rest, during the operation, gaseous raw materials get into from the rotary joint, rotary joint can only communicate two air inlet branch pipes, the gas raw material enters the communication hole from two opposite air inlet branch pipes, then enters the communication square hole from the communication hole and the air vent, and enters the space between the upper sliding block and the lower sliding block through the communication hole, thereby pushing the support columns in the sliding blocks to slide in the moving groove, so that the support columns at two sides of the material frame clamp the base member, simultaneously, the pressure of the gas raw material in the communication square hole is increased, the gas raw material in the communication square hole pushes the sliding blocks to slide in the sliding groove, so that the support columns on the sliding blocks drive the base member to move, the contact positions of the support columns on the other two sliding blocks and the base member are changed, when the driving device drives the rotary joint to rotate, the gas raw material in the rotary joint enters the other two air inlet branch pipes, thus the operation is circulated, and the contact dead angles between the base member and the support columns of the material frame are avoided by sequentially changing the contact positions of the base member and the support columns of the material frame, thereby avoiding certain defects in the coating on the base member.
2. The utility model provides a pair of vapor deposition stove is used in carborundum coating production, through having seted up the fumarole at the lateral wall of spout, when not operation, the fumarole is plugged up by the sliding block, a plurality of jet-propelled holes have been seted up to the both sides of work or material rest, jet-propelled hole and fumarole intercommunication, when the operation, the gaseous raw materials that gets into the intercommunication square hole promotes the sliding block and removes, the sliding block removes to certain position, the sliding block can no longer produce the shutoff to the fumarole, gaseous raw materials in the intercommunication square hole gets into the fumarole through the spout and jet-propelled hole in, thereby make gaseous raw materials arrange to the base member both sides through jet-propelled hole, thereby make the gaseous raw materials content of base member both sides contact the same, avoid the different phenomenon that leads to the coating uneven of reaction raw materials content of base member both sides contact to appear.
3. The application provides a vapor deposition furnace is used in production of carborundum coating, through offer the gas vent at the edge of work or material rest, the sliding block terminal surface fixed mounting of top work or material rest has the connecting rod, the connecting rod stretches out the gas vent, fixedly connected with promotes the piece on the connecting rod of gas vent, the top and the bottom activity of base inner wall are equipped with the drive ring, fixedly between two drive rings be equipped with support with the branch pipe of giving vent to anger, a plurality of holes have been seted up on the branch pipe of giving vent to anger, the exhaust ring has been seted up to the drive ring outer lane of bottom, exhaust ring and outlet duct intercommunication, the branch pipe of giving vent to anger communicates with the exhaust ring, the drive ring inner wall at top is equipped with a plurality of anti-reversion structures, during operation, the gaseous raw materials that get into the intercommunication square hole promotes the sliding block and remove, the sliding block drives the connecting rod and promotes the piece and remove, the drive ring of pushing the upper end rotates, the drive ring of upper end is rotated, thereby change the branch pipe of giving vent to anger is in the position in the furnace body, gaseous raw materials in the furnace body can follow the hole of giving vent to anger the branch pipe, thereby even take out gaseous raw materials in the furnace body, avoid gaseous raw materials to come into contact with the phenomenon that appears near the outlet duct still.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description, serve to explain the principles of the disclosure.
The disclosure may be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings in which:
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic diagram of a cross-sectional structure of a furnace body according to the present invention;
FIG. 3 is a schematic view of the structure of the material rack and the fixing rod of the invention;
FIG. 4 is a cross-sectional view of a material rack and its connectors according to the present invention;
FIG. 5 is a cross-sectional view of a material rack of the present invention;
FIG. 6 is a cross-sectional view of the material rack and chute of the present invention;
FIG. 7 is a cross-sectional view of the material rack, slider and support bar of the present invention;
FIG. 8 is a schematic view of the connection structure of the rotary joint and the air inlet branch pipe of the present invention;
FIG. 9 is a schematic view of the structure of the furnace of the present invention.
In the figure: 1. a base; 101. a fixed rod; 102. a communication hole; 103. a vent; 2. a furnace body; 201. a driving device; 202. an air outlet pipe; 203. a rotary joint; 204. an air inlet pipe; 205. an air inlet branch pipe; 206. a drive ring; 207. an outlet branch pipe; 208. an exhaust ring; 3. a material rack; 301. a fixing hole; 302. a chute; 303. a support table; 304. a flow hole; 305. a gas injection hole; 306. jet branch holes; 307. an elastic member; 308. a sliding block; 309. a moving groove; 310. a support column; 311. an exhaust port; 312. a connecting rod; 313. a pushing block; 314. and communicating the square holes.
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art based on the embodiments herein without making any inventive effort, are intended to be within the scope of the present application.
Example 1
Referring to fig. 1, fig. 2, fig. 3 and fig. 8, a vapor deposition furnace for producing silicon carbide coating comprises a base 1, a furnace body 2 and a material frame 3, wherein four fixing rods 101 are fixedly arranged on an annular array of the upper end face of the base 1, a communication hole 102 is formed in the center of the fixing rods 101, a plurality of air inlets 103 are formed in the side wall of the communication hole 102 at equal intervals in the axial direction, four fixing holes 301 are formed in the annular array on the end face of the material frame 3, a plurality of material frames 3 are movably sleeved on the fixing rods 101 through the fixing holes 301, the furnace body 2 is fixedly arranged on the upper end face of the base 1 through a lifting device, the furnace body 2 is sleeved on the outer side of the material frame 3, an air outlet pipe 202 is fixedly arranged on one side of the bottom end of the furnace body 2, a rotary joint 203 is fixedly arranged at the center of the top end of the furnace body 2, a driving device 201 for driving the inner ring of the rotary joint 203 is fixedly arranged on one side of the top of the furnace body 2, one end of the inner ring of the rotary joint 203 is communicated with an air inlet pipe 204, the air inlet 204 can relatively rotate with the main body of the inner ring of the rotary joint 203, the annular array of the rotary joint 203 is communicated with four air inlet branch pipes 205, and the other ends of the air inlet branch 205 are communicated with the upper ends of the communication hole 102.
The rotary joint 203 can communicate only with the two opposite intake branch pipes 205, and the communication between the rotary joint 203 and the intake branch pipes 205 is sequentially changed when the inner ring of the rotary joint 203 rotates.
The distance between two adjacent vents 103 is the same as the thickness of the material rack 3, and each vent 103 is located in the middle of the material rack 3.
Referring to fig. 3-7, a plurality of concentric sets of sliding grooves 302 are formed on the material frame 3, each set of sliding grooves 302 is four and is arranged in an annular equidistant manner, the sliding grooves 302 penetrate through the material frame 3, the middle of each sliding groove 302 is wide and two ends are narrow, four communicating square holes 314 for communicating the fixing holes 301 with the sliding grooves 302 are formed in the material frame 3, an annular supporting table 303 is fixedly mounted in the middle of each sliding groove 302, a through hole 304 is formed in each supporting table 303, the through holes 304 are communicated with the communicating square holes 314 and inner rings of the supporting tables 303, sliding blocks 308 are slidably mounted in the sliding grooves 302 at the upper end and the lower end of each supporting table 303, one end of each sliding block 308 is an inclined surface, the inclined surface of each sliding block 308 faces the fixing hole 301, the other end of each sliding block 308 is fixedly connected with an elastic piece 307, the other end of each elastic piece 307 is connected to the side wall of each sliding groove 302, a plurality of moving grooves 309 are formed in each sliding block 308 in an equidistant manner, the bottom ends of the moving grooves 309 are communicated with the inner rings of the supporting tables 303, supporting columns 310 are slidably mounted in the moving grooves 309, the moving grooves 310 extend out of the moving grooves 309 and the fixing holes 301, four annular exhaust ports 311 are formed in the supporting rings of the material frame 3, and an array 311 is used for exhausting gas.
The elastic member 307 always generates elastic force to push the sliding block 308 to return.
The working principle of the first embodiment of the invention is as follows:
referring to fig. 1-3, before operation, the base member is placed on the support columns 310 of the material frames 3, a plurality of material frames 3 are sequentially sleeved on the fixing rods 101, and the furnace body 2 is sleeved on the outer sides of the material frames 3 through the lifting device.
Referring to fig. 1-8, during operation, gas raw materials are discharged into the gas inlet pipe 204, the gas raw materials enter into two opposite gas inlet branch pipes 205 and the communication holes 102 through the rotary joint 203, the gas raw materials entering into the communication holes 102 enter into two opposite communication square holes 314 through the gas inlet 103, and enter into the middle of the supporting table 303 through the communication holes 304, and the gas raw materials in the middle of the supporting table 303 enter into the moving groove 309 to push the supporting columns 310 to slide towards the outer side of the moving groove 309, so that part of the supporting columns 310 tightly clamps the base member, at the moment, the pressure of the gas raw materials in the communication square holes 314 is increased, so that the sliding block 308 is pushed to slide into the sliding groove 302, when the sliding block 308 moves, the supporting columns 310 on the sliding block 308 move at the same time, the clamped base member is driven to move, so that the contact position between the base member and the supporting columns 310 on the other two groups of sliding block 308 is changed, when the driving device 201 drives the inner ring of the rotary joint 203 to rotate, the gas inlet branch pipes 205 communicated with the rotary joint 203 are changed, at the moment, the communication holes 102 and the communication square holes 314 communicated with the other two gas inlet branch pipes 205 enter into the gas raw materials, so that the position of the other two gas raw materials is tightly clamped by the supporting columns 310, and the contact with the supporting columns 310 in turn, so that the contact with the base member 310 is prevented from contacting with the base member, and the base member 310, and the contact with the base member is changed, and the contact position of the base member is sequentially, and the base member is prevented from contacting with the base member 310.
Example two
The second embodiment is a further improvement on the first embodiment.
In contrast to the embodiment, referring to fig. 3-7, air injection holes 305 are formed in inner walls of the sliding grooves 302 on the upper and lower sides of the supporting table 303, and when not in operation, one end of the air injection holes 305 is blocked by the sliding blocks 308, a plurality of air injection supporting holes 306 are uniformly formed on end surfaces on both sides of the material rack 3, and the air injection supporting holes 306 are communicated with the air injection holes 305.
The working principle of the second embodiment of the invention is as follows:
referring to fig. 1-8, during operation, gas raw materials are discharged into the gas inlet pipe 204, the gas raw materials enter the two opposite gas inlet branch pipes 205 and the communication hole 102 through the rotary joint 203, the gas raw materials entering the communication hole 102 enter the two opposite communication square holes 314 through the gas vent 103, and enter the middle of the supporting table 303 through the gas vent hole 304, and the gas raw materials in the middle of the supporting table 303 enter the moving groove 309, so as to push the supporting column 310 to slide to the outer side of the moving groove 309, thereby enabling part of the supporting column 310 to tightly clamp the base member, at the moment, the pressure of the gas raw materials in the communication square holes 314 is increased, so that the sliding block 308 is pushed to slide into the sliding groove 302, when the sliding block 308 moves to a certain position, the sliding block 308 does not block the gas injection hole 305, the gas raw materials in the communication square holes 314 enter the gas injection hole 305 through the sliding groove 302, and the gas raw materials are discharged to the surfaces of the two sides of the base member through the gas injection branch holes 306 on the surface of the material frame 3, so that the content of the gas raw materials contacting the two sides of the base member is identical, and the phenomenon of uneven coating caused by the difference of the content of the reaction raw materials contacting the two sides of the base member is avoided.
Example III
Embodiment three is a further improvement on the basis of embodiment two.
Unlike the second embodiment, referring to fig. 2, 3, 4 and 9, a connecting rod 312 is fixedly connected to an end surface of the sliding block 308, the connecting rod 312 passes through and extends out of the air vent 311, one end of the connecting rod 312 extending out of the air vent 311 is fixedly connected to a pushing block 313, and pushing teeth are movably arranged at the outer end of the pushing block 313; the top and the bottom activity of furnace body 2 inner wall are equipped with drive ring 206, the cooperation tooth has been seted up to the drive ring 206 inner wall of upper end, cooperation tooth and the cooperation of the promotion tooth of pushing block 313 are used, be equipped with on the drive ring 206 outer wall of upper end with the anti-reverse structure of furnace body 2 cooperation use, for example ratchet and draw-in groove cooperation etc., fixedly connected with is used for supporting drive ring 206's branch pipe 207 of giving vent to anger between two drive rings 206, a plurality of holes have been seted up to the equidistance on the branch pipe 207 of giving vent to anger, annular exhaust ring 208 has been seted up to the drive ring 206 outer lane of downside, exhaust ring 208 and outlet duct 202 intercommunication, and exhaust ring 208 still communicates with branch pipe 207 of giving vent to anger.
When the pushing block 313 rotates clockwise, pushing teeth of the pushing block 313 extend to push the driving ring 206 to rotate; when the push block 313 rotates counterclockwise, the push teeth of the push block 313 are pressed by the mating teeth of the drive ring 206 to retract, e.g., the push teeth engage the spring.
The working principle of the third embodiment of the invention is as follows:
referring to fig. 1-9, in operation, gas raw materials are discharged into the gas inlet pipe 204, the gas raw materials enter into the two opposite gas inlet branch pipes 205 and the communication hole 102 through the rotary joint 203, the gas raw materials entering into the communication hole 102 enter into the two opposite communication square holes 314 through the gas inlet 103 and enter into the middle of the supporting table 303 through the gas inlet hole 304, and the gas raw materials in the middle of the supporting table 303 enter into the moving groove 309 to push the supporting column 310 to slide to the outer side of the moving groove 309, so that part of the supporting column 310 tightly clamps the base member, at the moment, the pressure of the gas raw materials in the communication square holes 314 is increased, so as to push the sliding block 308 to slide into the sliding groove 302, and when the sliding block 308 moves, the sliding block 308 drives the connecting rod 312 and the pushing block 313, so that the pushing teeth of the pushing block 313 push the matching teeth of the upper driving ring 206, the upper driving ring 206 drives the gas outlet branch pipes 207 and the lower driving ring 206 to rotate simultaneously, thereby changing the positions of the holes of the gas outlet branch pipes 207 in the furnace body 2, the gas raw materials in the furnace body 2 can be discharged from the holes of the gas outlet branch pipes 207, and the gas raw materials in the gas outlet pipe 202 are uniformly discharged from the holes 202, and the raw materials are prevented from being discharged from the nearby gas outlet pipe 202, and raw materials are discharged from raw materials.
Claims (8)
1. The utility model provides a carborundum coating production is with vapor deposition stove, includes base (1), furnace body (2) and work or material rest (3), furnace body (2) include outlet duct (202), its characterized in that: the base (1) is provided with:
the four fixing rods (101) are fixedly arranged on the upper end face of the base (1) in an annular array mode, a communication hole (102) is formed in the center of each fixing rod (101), and a plurality of air vents (103) are formed in the side wall of each communication hole (102) at equal intervals in the axial direction;
the material rack (3) is provided with:
the four fixing holes (301) are formed in the end face of the material racks (3) in an annular array mode, and the material racks (3) are movably sleeved on the fixing rods (101) through the fixing holes (301);
the furnace body (2) is provided with:
the rotary joint (203) is fixedly arranged at the center of the top end of the furnace body (2);
the driving device (201) is fixedly arranged on one side of the top end of the furnace body (2) and is used for driving the inner ring of the rotary joint (203) to rotate;
and the four air inlet branch pipes (205) are arranged on the outer ring of the rotary joint (203) in an annular array mode, one end of each air inlet branch pipe is communicated with the outer ring of the rotary joint (203), and the other end of each air inlet branch pipe is communicated with the upper end of the communication hole (102).
2. The vapor deposition furnace for producing silicon carbide coating according to claim 1, wherein the rotary joint (203) can only communicate with two opposite air inlet branch pipes (205), and the communication between the rotary joint (203) and the air inlet branch pipes (205) is sequentially changed when the inner ring of the rotary joint (203) rotates.
3. A vapor deposition furnace for producing silicon carbide coating according to claim 1, characterized in that the distance between two adjacent vents (103) is the same as the thickness of the material rack (3).
4. A vapor deposition furnace for producing silicon carbide coating according to claim 1, characterized in that the material rack (3) is further provided with:
a plurality of groups of concentric sliding grooves (302) are arranged on the material rack (3), and each group of sliding grooves (302) is four and is annularly and equidistantly arranged;
a communicating square hole (314) which is arranged in the material rack (3) and is used for communicating the fixed hole (301) and the chute (302);
the supporting table (303) is fixedly arranged in the middle of the chute (302), and is provided with a communication square hole (314) communicated with a circulation hole (304) of the inner ring of the supporting table (303);
the sliding blocks (308) are slidably arranged in sliding grooves (302) at the upper end and the lower end of the supporting table (303), one end of each sliding block is an inclined surface, and the inclined surfaces face to the fixing holes (301);
one end of the elastic piece (307) is fixedly connected with the other end of the sliding block (308), and the other end of the elastic piece is connected with the side wall of the sliding groove (302);
the sliding block (308) is provided with:
the movable grooves (309) are equidistantly formed in the sliding blocks (308), and the bottom ends of the movable grooves are communicated with the inner ring of the supporting table (303);
the support column (310) is slidably arranged in the moving groove (309) and extends out of the moving groove (309) and the fixing hole (301);
four exhaust ports (311) are formed in the annular array on the support ring of the material rack (3).
5. A vapor deposition furnace for producing a silicon carbide coating according to claim 4, wherein the elastic member (307) always generates elastic force.
6. The vapor deposition furnace for producing silicon carbide coating according to claim 4, wherein the support table (303) is further provided with:
the air injection holes (305) are formed in the inner walls of the sliding grooves (302) on the two sides of the supporting table (303), and when the operation is not performed, one end of each air injection hole (305) is blocked by the sliding block (308);
the air injection branch holes (306) are uniformly formed in the end faces of the two sides of the material rack (3) and are communicated with the other ends of the air injection holes (305).
7. The vapor deposition furnace for producing a silicon carbide coating according to claim 6, wherein the sliding block (308) is provided with:
the connecting rod (312) is fixedly connected to the end face of the sliding block (308), and one end of the connecting rod penetrates through and extends out of the air outlet (311);
the pushing block (313) is fixedly connected to one end of a connecting rod (312) extending out of the exhaust port (311), and pushing teeth are movably arranged at the outer end of the pushing block (313);
the furnace body (2) is provided with:
the driving ring (206) is movably arranged at the top end and the bottom end of the inner wall of the furnace body (2), the inner wall of the driving ring (206) at the upper end is provided with matching teeth which are matched with pushing teeth of the pushing block (313), the outer wall of the driving ring (206) at the upper end is provided with an anti-reversion structure matched with the furnace body (2), the outer ring of the driving ring (206) at the lower side is provided with an annular exhaust ring (208), and the exhaust ring (208) is communicated with the air outlet pipe (202);
the two ends of the air outlet branch pipe (207) are fixedly connected to the upper driving ring and the lower driving ring (206), a plurality of holes are formed in the air outlet branch pipe (207) at equal intervals, and the air outlet branch pipe (207) is communicated with the air outlet ring (208).
8. A vapor deposition furnace for producing silicon carbide coating according to claim 7, wherein when the pushing block (313) rotates clockwise, pushing teeth of the pushing block (313) extend to push the driving ring (206) to rotate; when the pushing block (313) rotates anticlockwise, pushing teeth of the pushing block (313) are extruded by matching teeth of the driving ring (206) to retract.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311611876.5A CN117660922A (en) | 2023-11-29 | 2023-11-29 | Vapor deposition furnace for silicon carbide coating production |
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