CN217676937U - Developer solution waste liquid cyclic utilization device - Google Patents
Developer solution waste liquid cyclic utilization device Download PDFInfo
- Publication number
- CN217676937U CN217676937U CN202221055128.4U CN202221055128U CN217676937U CN 217676937 U CN217676937 U CN 217676937U CN 202221055128 U CN202221055128 U CN 202221055128U CN 217676937 U CN217676937 U CN 217676937U
- Authority
- CN
- China
- Prior art keywords
- waste liquid
- bipolar membrane
- tank
- anolyte
- catholyte
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Water Treatment By Electricity Or Magnetism (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The utility model discloses a developer solution waste liquid recycling device, which aims to solve the problems that the developer solution waste liquid contains photoresist and uncompleted utilized tetraalkylammonium hydroxide (TAAH), a factory needs to spend a large amount of cost to carry out biodegradation treatment on the waste liquid, and the investment of the existing process equipment is large, and the device comprises a waste liquid storage tank for receiving and storing the developer solution; the bipolar membrane electrodialysis unit is used for carrying out cation migration recombination on the developing solution under the drive of an external electric field to obtain regenerated pure TAAH; a product tank for storing pure TAAH product; an anolyte tank for circularly supplying anolyte to the bipolar membrane electrodialysis unit; and the cathode liquid tank is used for circularly supplying cathode liquid to the bipolar membrane electrodialysis unit. The utility model discloses be particularly useful for the low-cost regeneration cyclic utilization of developer solution waste liquid, have higher social use value and application prospect.
Description
Technical Field
The utility model relates to a technical field is recycled to the developer solution, concretely relates to developer solution waste liquid cyclic utilization device.
Background
A method of forming a pattern on a wafer or glass substrate during semiconductor and flat panel display manufacturing: first, a photoresist is coated on a substrate or a metal or non-metal film layer formed on the substrate, and then the photoresist is exposed to ultraviolet light through a patterned mask. The difference in solubility between exposed and unexposed photoresists is exploited, developed with a developer solution and then etched to achieve the purpose of patterning.
The main component of the developer is tetraalkylammonium hydroxide (i.e., TAAH), and after development, the developer waste liquid contains photoresist and incompletely utilized TAAH, and the factory needs to perform biodegradation treatment on the waste liquid at a large cost.
The existing treatment methods of the development waste liquid need to firstly adopt acid for neutralization, then remove precipitated photoresist through filtration, obtain high-concentration tetramethylammonium salt through evaporation and concentration of filtrate, further obtain TAAH through an ionic membrane electrolysis method for the tetramethylammonium salt, and obtain new developing solution through concentration adjustment, so that the equipment investment is large. Therefore, a developer solution waste liquid recycling device is provided.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve or at least alleviate the problem that exists among the prior art.
The utility model provides a developer solution waste liquid cyclic utilization device, include:
a waste liquid storage tank for receiving and storing the developing waste liquid;
the bipolar membrane electrodialysis unit is used for carrying out cation migration recombination on the developing solution under the drive of an external electric field to obtain regenerated pure TAAH;
a product tank for storing a pure TAAH product;
an anolyte tank for circularly supplying anolyte to the bipolar membrane electrodialysis unit;
a cathode liquid tank for circularly supplying cathode liquid to the bipolar membrane electrodialysis unit;
the bipolar membrane electrodialysis unit is provided with a waste liquid inlet pipe connected with a waste liquid storage tank for supplying development waste liquid, a pure water inlet pipe connected with an external water source for supplying high-purity water, a product outlet pipe connected with a product storage tank for outputting a pure TAAH product, and a waste liquid outlet pipe connected with a drainage pipeline or a wastewater treatment system for outputting secondary waste liquid generated by development waste liquid treatment.
Optionally, the bipolar membrane electrodialysis unit comprises two compression plates arranged oppositely, and an anode plate and a cathode plate respectively located between the two compression plates, at least one electrodialysis compartment is arranged between the anode plate and the cathode plate, an anode chamber filled with anolyte is formed between the anode plate and the electrodialysis compartment, and a cathode chamber filled with catholyte is formed between the cathode plate and the electrodialysis compartment.
Optionally, the electrodialysis compartment comprises at least a first bipolar membrane, a cation exchange membrane and a second bipolar membrane which are arranged in sequence, and a partition board is arranged between each of the first bipolar membrane, the first cation exchange membrane and the second bipolar membrane and used for forming a certain gap between the adjacent membranes to form the compartment;
a raw material compartment filled with developing waste liquid is formed between the first bipolar membrane and the first cation exchange membrane;
and a product compartment filled with high-purity water is formed between the first cation exchange membrane and the second bipolar membrane.
Alternatively, the anolyte tank is configured to circulate an anolyte input into the anolyte chamber through an anolyte circulation tube, and the catholyte tank is configured to circulate a catholyte input into the catholyte chamber through a catholyte circulation tube.
Optionally, at least one second cation exchange membrane can be additionally arranged in each of the anode chamber and the cathode chamber.
Optionally, flow pumps for improving the liquid medicine delivery flow and flow speed are additionally arranged on the waste liquid inlet pipe, the pure water inlet pipe, the product outlet pipe, the waste liquid outlet pipe, the anolyte circulating pipe and the catholyte circulating pipe.
Optionally, a pressure gauge for detecting the pressure in the tube and a conductivity meter for detecting the content of the liquid component in the tube are additionally arranged on the waste liquid inlet tube, the pure water inlet tube, the product outlet tube, the waste liquid outlet tube, the anolyte circulating tube and the catholyte circulating tube.
Optionally, the bipolar membrane electrodialysis unit further comprises a direct current DC power supply for providing current voltage and controlling maximum current and maximum voltage.
Optionally, a liquid level meter for liquid level monitoring and a conductivity meter for monitoring the content of the liquid component in the tank are arranged on the waste liquid storage tank, the product storage tank, the anode liquid tank and the cathode liquid tank.
The utility model discloses mainly possess following beneficial effect:
1. the utility model discloses the compartment that the utilization adopted two rooms of two membranes is arranged, combines the characteristic of first cation exchange membrane to TAAH cationic selective permeability, separates impurity such as photoresist and alkyl ammonium hydroxide in the developer solution waste liquid under external power drive power, and adopts the compartment of two rooms of two membranes to arrange, saves the membrane cost, reduces resistance, and the energy consumption is low, has further reduced the input cost, realizes the low-cost regeneration cyclic utilization of developer solution.
2. The utility model discloses a bipolar membrane electrodialysis method need not to get rid of organic matters such as photoresist in advance through acid-base in, also need not electrolytic regeneration, can realize obtaining pure TAAH by developing the waste liquid regeneration by one step, and the process is simple, does not have extra discarded object to produce, and all recovery regeneration flows are the physics recovery operation under the ordinary temperature and pressure simultaneously, the green safety of operation process.
Drawings
The above features, technical features, advantages and modes of realization of a developer waste liquid recycling apparatus will be further described in the following description of preferred embodiments in a clearly understandable manner with reference to the accompanying drawings.
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural diagram of a bipolar membrane electrodialysis unit in the present invention;
fig. 3 is a schematic structural view of an electrodialysis compartment in example 1 of the present invention;
fig. 4 is a schematic structural view of an electrodialysis compartment in example 2 of the present invention.
In the figure: the device comprises a waste liquid storage tank 10, a bipolar membrane electrodialysis unit 20, a compression plate 201, an anode plate 202, a cathode plate 203, an electrodialysis compartment 204, a first bipolar membrane 2041, a first cation exchange membrane 2042, a second bipolar membrane 2043, a direct current DC power supply 205, a second cation exchange membrane 206, a product storage tank 30, an anode liquid tank 40, a cathode liquid tank 50, a waste liquid inlet pipe 601, a pure water inlet pipe 602, a product outlet pipe 603, a waste liquid outlet pipe 604, an anode liquid circulating pipe 605, a cathode liquid circulating pipe 606, an anode chamber a, a raw material compartment b1, a product compartment b2 and a cathode chamber c.
Detailed Description
The invention will be further described with reference to the following figures 1-4 and examples:
example 1
A developer waste liquid recycling device comprises: a waste liquid tank 10 for receiving and storing the developing waste liquid; a bipolar membrane electrodialysis unit 20 for carrying out cation migration recombination on the developing solution under the drive of an external electric field to obtain regenerated pure TAAH; a product tank 30 for storing pure TAAH product; an anolyte tank 40 for circularly supplying anolyte to the bipolar membrane electrodialysis unit 20; a catholyte tank 50 for circulating the catholyte to the bipolar membrane electrodialysis unit 20;
the bipolar membrane electrodialysis unit 20 is provided with a waste liquid inlet pipe 601 connected with the waste liquid storage tank 10 for supplying developing waste liquid, a pure water inlet pipe 602 connected with an external water source for supplying high-purity water, a product outlet pipe 603 connected with the product storage tank 30 for outputting a pure TAAH product, and a waste liquid outlet pipe 604 connected with a drainage pipeline or a waste water treatment system for outputting secondary waste liquid generated by developing waste liquid treatment;
in this embodiment, (not shown in the figure) the waste liquid storage tank 10, the product storage tank 30, the anode liquid tank 40 and the cathode liquid tank 50 are all provided with a liquid level meter for liquid level monitoring and a conductivity meter for monitoring the content of liquid components in the tanks;
in this embodiment, the development waste liquid enters the bipolar membrane electrodialysis unit 20 from the waste liquid storage tank 10 through the waste liquid inlet pipe 601, and cooperate with the supply of the pure water inlet pipe 602 to high-purity water, the development waste liquid in the bipolar membrane electrodialysis unit 20 carries out the migration recombination of the cations of the developing solution under the drive of the external electric field to obtain the regenerated pure TAAH and the secondary waste liquid, the pure TAAH enters the product storage tank 30 through the product outlet pipe 603, and can be reused for development, and the secondary waste liquid is discharged to the drainage pipeline through the waste liquid outlet pipe 604, the technological process is simple, no extra waste is produced, and simultaneously, all the recycling regeneration processes are the physical recycling operation under normal temperature and normal pressure, and the operation process is green and safe.
In this embodiment, as shown in fig. 2 to 3, the bipolar membrane electrodialysis unit 20 includes two compression plates 201 disposed oppositely, and an anode plate 202 and a cathode plate 203 respectively disposed between the two compression plates 201, in this embodiment, the compression plates 201 are made of insulating plastic, specifically, PVC material or PMMA material, the anode plate 202 is formed by coating titanium as a substrate, and is corrosion-resistant, long in service life, low in resistance, and good in conductivity; the cathode plate 203 may be a nickel electrode or a stainless steel electrode; at least one electrodialysis compartment 204 is provided between the anode plate 202 and the cathode plate 203;
an anode chamber a filled with anolyte is formed between the anode plate 202 and the electrodialysis compartment 204, and a cathode chamber c filled with catholyte is formed between the cathode plate 203 and the electrodialysis compartment 204; in this embodiment, the anolyte tank 40 circularly inputs anolyte into the anolyte chamber a through an anolyte circulation pipe 605, and the catholyte tank 50 circularly inputs catholyte into the catholyte chamber c through a catholyte circulation pipe 606;
a direct current DC power source 205 for supplying current and voltage and controlling the maximum current and voltage;
the electrodialysis compartment 204 at least comprises a first bipolar membrane 2041, a cation exchange membrane 2042 and a second bipolar membrane 2043 which are sequentially arranged, and partition plates are arranged among the first bipolar membrane 2041, the first cation exchange membrane 2042 and the second bipolar membrane 2043 and used for forming a certain gap among the adjacent membranes to form a compartment;
a raw material compartment b1 filled with development waste liquid is formed between the first bipolar membrane 2041 and the first cation exchange membrane 2042;
a product compartment b2 filled with high-purity water is formed between the first cation exchange membrane 2042 and the second bipolar membrane 2043;
in this embodiment, under the driving of the external electric field, TAAH cations in the development waste liquid in the raw material compartment b1 migrate into the product compartment b2 through the first cation exchange membrane 2042 and combine with hydroxide radicals generated by the second bipolar membrane 2043 to obtain a pure TAAH product, which can be reused for development;
organic matters such as photoresist in the development waste liquid are blocked by the first cation exchange membrane 2042 and still remain in the raw material compartment b1, anions such as hydroxyl, carbonate and the like in the development waste liquid are combined with hydrogen ions generated by the first bipolar membrane to obtain water or carbon dioxide, and meanwhile, generated secondary waste liquid is circularly discharged from the electrodialysis compartment 204, so that the regeneration and recycling of the developing solution are realized.
In this embodiment, (not shown in the figure) the waste liquid inlet pipe 601, the pure water inlet pipe 602, the product outlet pipe 603, the waste liquid outlet pipe 604, the anolyte circulating pipe 605 and the catholyte circulating pipe 606 are all provided with flow pumps for increasing the liquid medicine delivery flow rate and flow velocity.
In this embodiment, (not shown in the figure) a pressure gauge for detecting the pressure in the tube and a conductivity meter for detecting the content of liquid components in the tube are respectively installed on the waste liquid inlet tube 601, the pure water inlet tube 602, the product outlet tube 603, the waste liquid outlet tube 604, the anolyte circulating tube 605 and the catholyte circulating tube 606.
Example 2
The difference between this embodiment and embodiment 1 is that, as shown in fig. 4, at least one second cation exchange membrane 206 can be added in each of the anode chamber a and the cathode chamber c, and the addition of the second cation exchange membrane 206 can effectively reduce the migration of impurity anions such as hydroxyl and carbonate in the development waste liquid to the product side.
Other undescribed structures refer to example 1.
According to the developer solution waste liquid recycling device of the embodiment of the utility model, the utilization adopts the compartment arrangement of two chambers of two membranes, combines the characteristic of selective permeability of the first cation exchange membrane to TAAH cations, separates impurities such as photoresist and alkyl ammonium hydroxide in the developer solution waste liquid under the action of external electric driving force, and adopts the compartment arrangement of two chambers of two membranes, thereby saving the membrane cost, reducing the resistance, reducing the energy consumption, further reducing the investment cost and realizing the low-cost regeneration recycling of the developer solution;
and the bipolar membrane electrodialysis method is adopted, organic matters such as photoresist and the like do not need to be removed in advance through acid-base neutralization, electrolytic regeneration is also not needed, the pure TAAH can be obtained through the regeneration of the developing waste liquid in one step, the process is simple, no extra waste is generated, all the recycling and regenerating processes are physical recycling operation under normal temperature and normal pressure, and the operation process is green and safe.
In the description of the present invention, it should be noted that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Finally, it should be noted that: the above-mentioned embodiments are only specific embodiments of the present invention, and are not intended to limit the technical solutions of the present invention, and the protection scope of the present invention is not limited thereto, although the present invention is described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: those skilled in the art can still modify or easily conceive of changes in the technical solutions described in the foregoing embodiments or make equivalent substitutions for some technical features within the technical scope of the present disclosure; such modifications, changes or substitutions do not substantially depart from the spirit and scope of the embodiments of the present invention, and are intended to be included within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (9)
1. The utility model provides a developer liquid waste liquid cyclic utilization device which characterized in that includes:
a waste liquid tank (10) for receiving and storing the developing waste liquid;
a bipolar membrane electrodialysis unit (20) for carrying out cation migration recombination of the developing solution under the drive of an external electric field to obtain regenerated pure TAAH;
a product tank (30) for storing pure TAAH product;
an anolyte tank (40) for cyclically supplying an anolyte to the bipolar membrane electrodialysis unit (20);
a catholyte tank (50) for circulating catholyte to the bipolar membrane electrodialysis unit (20);
the bipolar membrane electrodialysis unit (20) is provided with a waste liquid inlet pipe (601) connected with a waste liquid storage tank (10) to supply developing waste liquid, a pure water inlet pipe (602) connected with an external water source to supply high-purity water, a product outlet pipe (603) connected with a product storage tank (30) to output a pure TAAH product, and a waste liquid outlet pipe (604) connected with a drainage pipeline or a waste water treatment system to output secondary waste liquid.
2. The developer waste liquid recycling apparatus according to claim 1, wherein: the bipolar membrane electrodialysis unit (20) comprises two compression plates (201) which are arranged oppositely, and an anode plate (202) and a cathode plate (203) which are respectively positioned between the two compression plates (201), wherein at least one electrodialysis compartment (204) is arranged between the anode plate (202) and the cathode plate (203), an anode chamber (a) filled with anolyte is formed between the anode plate (202) and the electrodialysis compartment (204), and a cathode chamber (c) filled with catholyte is formed between the cathode plate (203) and the electrodialysis compartment (204).
3. The developer waste liquid recycling apparatus according to claim 2, wherein: the electrodialysis compartment (204) at least comprises a first bipolar membrane (2041), a cation exchange membrane (2042) and a second bipolar membrane (2043) which are sequentially arranged, and partition plates are arranged among the first bipolar membrane (2041), the first cation exchange membrane (2042) and the second bipolar membrane (2043) and used for forming a certain gap between the adjacent membranes to form a compartment;
a raw material compartment (b 1) filled with developing waste liquid is formed between the first bipolar membrane (2041) and the first cation exchange membrane (2042);
a product compartment (b 2) filled with high-purity water is formed between the first cation exchange membrane (2042) and the second bipolar membrane (2043).
4. The developer waste liquid recycling apparatus according to claim 2, wherein: the anolyte tank (40) circularly inputs anolyte into the anolyte chamber (a) through an anolyte circulating pipe (605), and the catholyte tank (50) circularly inputs catholyte into the catholyte chamber (c) through a catholyte circulating pipe (606).
5. The developer waste liquid recycling apparatus according to claim 4, wherein: at least one second cation exchange membrane (206) can be additionally arranged in each of the anode chamber (a) and the cathode chamber (c).
6. The developer waste liquid recycling apparatus according to claim 4, wherein: and flow pumps for improving the conveying flow and flow speed of liquid medicine are additionally arranged on the waste liquid inlet pipe (601), the pure water inlet pipe (602), the product outlet pipe (603), the waste liquid outlet pipe (604), the anolyte circulating pipe (605) and the catholyte circulating pipe (606).
7. The developer waste liquid recycling apparatus according to claim 6, wherein: and a pressure gauge for detecting the pressure in the pipe and a conductivity meter for detecting the content of liquid components in the pipe are additionally arranged on the waste liquid inlet pipe (601), the pure water inlet pipe (602), the product outlet pipe (603), the waste liquid outlet pipe (604), the anolyte circulating pipe (605) and the catholyte circulating pipe (606).
8. The developer waste liquid recycling apparatus according to claim 2, wherein: the bipolar membrane electrodialysis unit (20) further comprises a direct current DC power supply (205) for providing current voltage and controlling maximum current and maximum voltage.
9. The developer waste liquid recycling apparatus according to claim 1, wherein: and a liquid level meter for liquid level monitoring and a conductivity meter for monitoring the content of liquid components in the tank are arranged on the waste liquid storage tank (10), the product storage tank (30), the anode liquid tank (40) and the cathode liquid tank (50).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221055128.4U CN217676937U (en) | 2022-05-07 | 2022-05-07 | Developer solution waste liquid cyclic utilization device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221055128.4U CN217676937U (en) | 2022-05-07 | 2022-05-07 | Developer solution waste liquid cyclic utilization device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217676937U true CN217676937U (en) | 2022-10-28 |
Family
ID=83736241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221055128.4U Active CN217676937U (en) | 2022-05-07 | 2022-05-07 | Developer solution waste liquid cyclic utilization device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217676937U (en) |
-
2022
- 2022-05-07 CN CN202221055128.4U patent/CN217676937U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202492580U (en) | Acid etching liquid recycling device of PCB (Printed Circuit Board) | |
| CN103882431A (en) | Zero emission recovery treatment method and system for corrosion waste acid in aluminum foil industry | |
| CN107012466A (en) | A kind of acidic etching liquid method for recycling and system | |
| KR100513182B1 (en) | Apparatus for refining alkali solution and method for the same | |
| CN102560499A (en) | Device for recycling printed circuit board acidic etching solution | |
| CN217676937U (en) | Developer solution waste liquid cyclic utilization device | |
| KR20130077164A (en) | Water treatment apparatus for fuel cell | |
| JP5844558B2 (en) | Recycling method for waste liquid containing tetraalkylammonium hydroxide | |
| JP5188454B2 (en) | Method for producing organic acid | |
| JP4377104B2 (en) | Desalination equipment | |
| JP4065386B2 (en) | Electrodialysis machine | |
| JP3966103B2 (en) | Operation method of electrodeionization equipment | |
| CN210656509U (en) | Automatic control system for operation and protection of electrodialysis system | |
| CN202390235U (en) | Folded-plate continuous flow type diaphragm electrolysis device | |
| CN217676938U (en) | Developer solution waste liquid recycling and regenerating device | |
| CN108217856A (en) | A kind of electro-chemical water processing system and its method for treating water | |
| CN203613055U (en) | Treatment device for wastewater with high salinity and chlorine | |
| CN115159636A (en) | Developing solution waste liquid recycling and regenerating device and method | |
| KR100698580B1 (en) | Device for circulation the electrode water for electrodeionization apparatus | |
| CN111233245A (en) | Fluorine wastewater desalination and concentration device and method | |
| CN216737904U (en) | High chlorine waste water electrochemistry dechlorination device | |
| RU141719U1 (en) | DEVICE FOR ELECTROFLOTOMEMBRANE CLEANING OF WASTE WATER FROM ORGANIC POLLUTANTS | |
| CN114656074B (en) | Coal chemical industry high-salinity wastewater treatment system and method based on multistage multi-section bipolar membrane | |
| CN216998016U (en) | Multistage bipolar membrane electrodialysis device of high salt waste water of coal chemical industry | |
| CN219637038U (en) | Electrochemical descaling system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |