CN217655417U

CN217655417U - Positioning mechanism

Info

Publication number: CN217655417U
Application number: CN202221246249.7U
Authority: CN
Inventors: 吕波; 胡超; 周沃坤
Original assignee: Zhuhai Cordy Electronic Technology Co ltd
Current assignee: Zhuhai Cordy Electronic Technology Co ltd
Priority date: 2022-05-20
Filing date: 2022-05-20
Publication date: 2022-10-25
Anticipated expiration: 2032-05-20

Abstract

The utility model discloses a positioning mechanism aims at providing a good, the positioning mechanism who is convenient for location and positioning accuracy height of commonality. The utility model discloses a thick positioning mechanism and smart positioning mechanism, thick positioning mechanism includes mount pad and first camera module, be provided with clamping jaw mechanism on the mount pad and with the rotatory platform that adsorbs of clamping jaw mechanism complex, rotatory adsorption platform can be followed the Z axle direction of mount pad removes, first camera module is located the top of rotatory adsorption platform, smart positioning mechanism includes vacuum adsorption platform, the accurate platform, the second camera module of counterpointing of XYR, the vacuum adsorption platform sets up on the accurate platform of counterpointing of XYR, second camera module is located the top of vacuum adsorption platform. The utility model discloses be applied to the technical field of lithography machine.

Description

Positioning mechanism

Technical Field

The utility model relates to a lithography machine's technical field, in particular to positioning mechanism.

Background

In the current market, the GPP chip is positioned by manually placing a wafer on a wafer bearing jig at a specific position and direction, and carrying out negative pressure fixation after visual calibration; and then placing a mask, aligning the mask and the crystal grains on the wafer under a microscope, and fixing the mask by negative pressure. However, the above positioning method has low efficiency, and the long-time operation under the mirror may affect the eyesight. Therefore, a positioning mechanism with good universality, convenient positioning and high positioning precision needs to be developed at present.

SUMMERY OF THE UTILITY MODEL

The utility model aims to solve the technical problem that overcome prior art not enough, provide a good, the location of being convenient for of commonality and positioning accuracy height positioning mechanism.

The utility model adopts the technical proposal that: the utility model discloses a thick positioning mechanism and smart positioning mechanism, thick positioning mechanism includes mount pad and first camera module, be provided with clamping jaw mechanism on the mount pad and with the rotatory platform that adsorbs of clamping jaw mechanism complex, rotatory adsorption platform can be followed the Z axle direction of mount pad removes, first camera module is located the top of rotatory adsorption platform, smart positioning mechanism includes vacuum adsorption platform, the accurate platform, the second camera module of counterpointing of XYR, the vacuum adsorption platform sets up on the accurate platform of counterpointing of XYR, second camera module is located the top of vacuum adsorption platform.

Further, gripper mechanism includes first slide rail, synchronous belt assembly and clamping jaw body, clamping jaw body sliding fit is in on the first slide rail, synchronous belt assembly drive the clamping jaw body is in open and shut on the first slide rail.

Further, rotatory absorption platform includes rotating electrical machines, vacuum generator and revolving stage, the rotating electrical machines drive the revolving stage is rotatory, be equipped with the gas circuit in the revolving stage, the gas circuit pass through the trachea with vacuum generator intercommunication.

Further, hold-in range subassembly includes step motor and hold-in range, step motor drives hold-in range transmission, the inboard of hold-in range is provided with first driving tooth, be provided with on the clamping jaw body with driving tooth complex second driving tooth.

Furthermore, thick positioning mechanism still includes the Z axle that sets up on the mount pad and removes the module, rotatory absorption platform passes through the Z axle removes the module for the mount pad removes, the Z axle removes the module and includes driving motor and lead screw, driving motor drive the lead screw transmission, the lead screw with rotatory absorption platform looks transmission.

Further, the clamping jaw body is a V-shaped profiling clamping jaw.

Further, the first camera module and the second camera module both comprise a CCD industrial camera.

The utility model has the advantages that:

compared with the prior art not enough, the utility model discloses a thick positioning mechanism reaches fine positioning mechanism carries out the high accuracy location to the wafer, has the wafer of deviation, arbitrary angle to divide two steps of adjustment to the exact position and waiting of angle to carve the bit state, and pass through first camera module reaches second camera module discerns the processing and need not the operation under the artifical mirror, and can be general to the wafer of 4 cun, 5 cun, 6 cun, makes the utility model has the advantages of the commonality is good, be convenient for location and positioning accuracy are high.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic perspective view of the coarse positioning mechanism;

FIG. 3 is a schematic plan view of the coarse positioning mechanism;

fig. 4 is a schematic plan view of another view of the coarse positioning mechanism.

The reference numbers are as follows:

1. a coarse positioning mechanism; 2. a fine positioning mechanism; 3. a mounting seat; 4. a vacuum adsorption stage; 5. a first camera module; 6. a jaw mechanism; 7. rotating the adsorption table; 8. XYR precision alignment platform; 9. a second camera module; 10. a first slide rail; 11. a timing belt assembly; 12. a jaw body; 13. a rotating electric machine; 15. a rotating table; 16. a stepping motor; 17. a synchronous belt; 18. a first drive tooth; 20. a Z-axis moving module; 21. a drive motor; 22. and a screw rod.

Detailed Description

As shown in fig. 1 to 4, in this embodiment, the utility model discloses a thick positioning mechanism 1 and smart positioning mechanism 2, thick positioning mechanism 1 includes mount pad 3 and first camera module 5, be provided with clamping jaw mechanism 6 on the mount pad 3 and with clamping jaw mechanism 6 complex rotary adsorption platform 7, rotary adsorption platform 7 can be followed the Z axle direction of mount pad 3 removes, first camera module 5 is located rotary adsorption platform 7's top, smart positioning mechanism 2 includes vacuum adsorption platform 4, the accurate counterpoint platform 8 of XYR, second camera module 9, vacuum adsorption platform 4 sets up on the accurate counterpoint platform 8 of XYR, second camera module 9 is located vacuum adsorption platform 4's top. The vacuum adsorption platform 4 is internally provided with a gas circuit, the gas circuit is correspondingly provided with an adsorption port on the upper end surface of the vacuum adsorption platform 4, and the gas circuit is communicated with external gas supply equipment through a gas pipe.

Compared with the defects of the prior art, in the utility model, during rough positioning, after the clamping jaw mechanism 6 clamps and centers the wafer placed on the rotary adsorption platform 7, the rotary adsorption platform 7 fixes the wafer through vacuum adsorption and takes a picture of the wafer through the first camera module 5, the original angle of the wafer is calculated by combining the reference point characteristics on the wafer, and further the rotary adsorption platform 7 drives the wafer to rotate, so that the wafer is adjusted to be near 0 degree of the original angle, and the rough positioning is completed; during accurate positioning, with the wafer material extremely on the vacuum adsorption platform 4, through second camera module 9 is shot and is carried out the image recognition back, drive after XYR accurate counterpoint platform 8 corrects the wafer to correct position, through vacuum adsorption platform 4 adsorbs fixedly to the wafer to accomplish accurate positioning, consequently, the utility model discloses a coarse positioning mechanism 1 reaches accurate positioning mechanism 2 carries out high accuracy location to the wafer, divides the wafer that central point has deviation, arbitrary angle to adjust to the waiting of correct position and angle and carves the bit state, and passes through first camera module 5 reaches second camera module 9 is discerned and is handled and need not the operation under the artificial mirror, and can be general to the wafer of 4 inches, 5 inches, 6 inches, makes the utility model has the advantages of the commonality is good, be convenient for location and positioning accuracy is high.

In some embodiments, the jaw mechanism 6 includes a first slide rail 10, a timing belt assembly 11, and a jaw body 12, the jaw body 12 is slidably fitted on the first slide rail 10, and the timing belt assembly 11 drives the jaw body 12 to open and close on the first slide rail 10. The jaw bodies 12 are synchronously clamped and centered by the driving of the synchronous belt assembly 11.

In some embodiments, the rotary adsorption table 7 includes a rotary motor 13, a vacuum generator, and a rotary table 15, the rotary motor 13 drives the rotary table 15 to rotate, and the rotary table 15 has a gas path therein, and the gas path is communicated with the vacuum generator through a gas pipe.

In some embodiments, the synchronous belt assembly 11 includes a stepping motor 16 and a synchronous belt 17, the stepping motor 16 drives the synchronous belt 17 to drive, a first driving tooth 18 is disposed on an inner side of the synchronous belt 17, and a second driving tooth matched with the driving tooth is disposed on the jaw body 12. In the transmission of the timing belt 17, the jaw body 12 is clamped and centered by the transmission of the first transmission teeth 18 and the second transmission teeth.

In some embodiments, the coarse positioning mechanism 1 further includes a Z-axis moving module 20 disposed on the mounting base 3, the rotary adsorption table 7 moves relative to the mounting base 3 through the Z-axis moving module 20, the Z-axis moving module 20 includes a driving motor 21 and a lead screw 22, the driving motor 21 drives the lead screw 22 to transmit, and the lead screw 22 transmits with the rotary adsorption table 7. When the rotary adsorption table is used, the driving motor 21 drives the screw rod 22 to transmit, so that the screw rod 22 drives the rotary adsorption table 7 to move up and down along the Z axis.

In certain embodiments, the jaw body 12 is a V-shaped contoured jaw.

In some embodiments, the first camera module 5 and the second camera module 9 both comprise CCD industrial cameras. Specifically, the first camera module 5 includes one CCD industrial camera, and the second camera module 9 includes two CCD industrial cameras.

While the embodiments of the present invention have been described in terms of practical embodiments, they are not intended to limit the scope of the invention, and modifications of the embodiments and combinations with other embodiments will be apparent to those skilled in the art in light of the present description.

Claims

1. A positioning mechanism is characterized in that: it includes thick positioning mechanism (1) and smart positioning mechanism (2), thick positioning mechanism (1) includes mount pad (3) and first camera module (5), be provided with clamping jaw mechanism (6) on mount pad (3) and with clamping jaw mechanism (6) complex rotatory adsorption platform (7), rotatory adsorption platform (7) can be followed the Z axle direction of mount pad (3) removes, first camera module (5) are located the top of rotatory adsorption platform (7), smart positioning mechanism (2) include vacuum adsorption platform (4), the accurate counterpoint platform of XYR (8), second camera module (9), vacuum adsorption platform (4) set up on the accurate counterpoint platform of XYR (8), second camera module (9) are located the top of vacuum adsorption platform (4).

2. A positioning mechanism as set forth in claim 1, wherein: clamping jaw mechanism (6) include first slide rail (10), hold-in range subassembly (11) and clamping jaw body (12), clamping jaw body (12) sliding fit is in on first slide rail (10), hold-in range subassembly (11) drive clamping jaw body (12) are in open and shut on first slide rail (10).

3. A positioning mechanism as set forth in claim 1, wherein: rotatory adsorption platform (7) include rotating electrical machines (13), vacuum generator and revolving stage (15), rotating electrical machines (13) drive revolving stage (15) are rotatory, be equipped with the gas circuit in revolving stage (15), the gas circuit pass through the trachea with vacuum generator intercommunication.

4. A positioning mechanism as set forth in claim 2, wherein: hold-in range subassembly (11) are including step motor (16) and hold-in range (17), step motor (16) drive hold-in range (17) transmission, the inboard of hold-in range (17) is provided with first driving tooth (18), be provided with on clamping jaw body (12) with driving tooth complex second driving tooth.

5. A positioning mechanism as set forth in claim 1, wherein: coarse positioning mechanism (1) is still including setting up Z axle removal module (20) on mount pad (3), rotatory absorption platform (7) are passed through Z axle removal module (20) for mount pad (3) remove, Z axle removal module (20) include driving motor (21) and lead screw (22), driving motor (21) drive lead screw (22) transmission, lead screw (22) with rotatory absorption platform (7) are driven mutually.

6. A positioning mechanism as set forth in claim 2, wherein: the clamping jaw body (12) is a V-shaped profiling clamping jaw.

7. A positioning mechanism as set forth in claim 1, wherein: the first camera module (5) and the second camera module (9) both comprise CCD industrial cameras.